• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.77-77
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• 2011

These days, a growing demand for memory device is filled up with the flash memory and the dynamic random access memory (DRAM). Although DRAM is a reasonable solution for current demand, the universal novel memory with high density, high speed and nonvolatility, needs to be developed. Among various new memories, the magnetic random access memory (MRAM) device is considered as one of good candidate memories because of excellent features including high density, high speed, low operating power and nonvolatility. The etching of MTJ stack which is composed of magnetic materials and insulator such as MgO is one of the vital process for MRAM. Recently, MgO has attracted great interest in the MTJ stack as tunneling barrier layer for its high tunneling magnetoresistance values. For the successful realization of high density MRAM, the etching process of MgO thin films should be investigated. Until now, there were some works devoted to the investigations on etch characteristics of MgO thin films. Initially, ion milling was applied to the etching of MgO thin films. However, ion milling has many disadvantages such as sidewall redeposition and etching damage. High density plasma etching containing the magnetically enhanced reactive ion etching and high density reactive ion etching have been employed for the improvement of etching process. In this work, inductively coupled plasma reactive ion etching (ICPRIE) system was adopted for the improvement of etching process using MgO thin films and etching gas mixes of $CH_4$/Ar and $CH_4$/$O_2$/Ar have been employed. The etch rates are measured by a surface profilometer and etch profiles are observed using field emission scanning emission microscopy (FESEM). The effects of gas concentration and etch parameters such as coil rf power, dc-bias voltage to substrate, and gas pressure on etch characteristics will be systematically explored.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.390-390
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• 2012

Information technology industries has grown rapidly and demanded alternative memories for the next generation. The most popular random access memory, dynamic random-access memory (DRAM), has many advantages as a memory, but it could not meet the demands from the current of developed industries. One of highlighted alternative memories is magnetic random-access memory (MRAM). It has many advantages like low power consumption, huge storage, high operating speed, and non-volatile properties. MRAM consists of magnetic-tunnel-junction (MTJ) stack which is a key part of it and has various magnetic thin films like CoFeB, FePt, IrMn, and so on. Each magnetic thin film is difficult to be etched without any damages and react with chemical species in plasma. For improving the etching process, a high density plasma etching process was employed. Moreover, the previous etching gases were highly corrosive and dangerous. Therefore, the safety etching gases are needed to be developed. In this research, the etch characteristics of CoFeB magnetic thin films were studied by using an inductively coupled plasma reactive ion etching in $CH_4/O_2/Ar$ gas mixes. TiN thin films were used as a hardmask on CoFeB thin films. The concentrations of $O_2$ in $CH_4/O_2/Ar$ gas mix were varied, and then, the rf coil power, gas pressure, and dc-bias voltage. The etch rates and the selectivity were obtained by a surface profiler and the etch profiles were observed by a field emission scanning electron microscopy. X-ray photoelectron spectroscopy was employed to reveal the etch mechanism.

• 대한공간정보학회지
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• 제18권2호
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• pp.87-92
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• 2010

인구의 증가는 하천 유역지역의 토지이용변화를 가속시켜왔으며, 토지이용변화에 대한 공간분포정보는 이들 지역에 대한 효과적인 관리와 계획에 중요한 자료가 되고 있다. 본 연구의 목적은 1989년, 1999년, 2002년도 IRS LISS III 영상자료를 이용하여 인도 서부에 위치한 Moyar유역지역의 1:50,000축척 토지이용변화도를 생성하는데 있다. 약 9가지의 토지이용분류자료는 3개년간의 영상자료를 시각적 판독방법에 의해 추출하였으며, 토지이용변화 검색은 관측시기 I(1989-1999)과 관측시기 II (1999-2002)에 대한 행렬분석방법에 의해 수행되었다. 본 연구를 통하여 기간 II가 기간 I보다 지속가능한 개발과 난개발을 방지하기 위한 실질적인 정보를 보여 주었다.

• 한국시스템다이내믹스연구
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• 제16권3호
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• pp.5-29
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• 2015

The importance of the concept of safety culture has increased in the security of high-risk facility after Chernobyl accident in 1986. This paper elaborated the concept of safety culture and its main factors by Causal Loop Diagram. Due to the decline of safety culture, the occurrence of incidents and accidents require more and more corrective actions to the members of high-risk facilities and thereby increasing their workloads. Employees who must complete the task within the given time have to have time pressures and don't comply with the rules and procedures. Also, a schedule pressure is a big stress for employees, causing mistakes in precision work. In order to improve these problems, CLD of the safety culture in this paper suggests hiring more workers, re-allocation of given workloads and strengthen the learning, communication capabilities and safety leadership. In addition, the two real accident cases were analyzed to test the feasibility of the System Dynamic simulation model through the process of structuring the fault trees on the stationary black out accident in Kori unit 1 in South Korea and Kleen Energy power station explosion in US. The simulation results show that the various safety factors cause the serious accident combined with mechanical failure and safety culture will reduce the possibility of the accidents in these high-risk organizations. This simulation model can contribute to analyzing the impact of the organizational and human factors of safety culture and can provide the alternatives in high-risk facilities.

• 한국자동차공학회논문집
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• 제19권3호
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• pp.29-37
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• 2011

The modal characteristics of a compressor wheel of an automotive turbocharger have been investigated using an experimental method based on an acoustic frequency response function, p/f(${\omega}$), where p is sound pressure radiated from a structure, and f is impact force. First, a well-defined annular disc with narrow radial slots was examined to check whether the vibro-acoustic test could precisely determine natural quencies and vibration modes of structures showing that the vibro-acoustic test proposed in this paper was comparable to the conventional modal test with an accelerometer and the numerical analysis. The conventional method has been found to be inappropriate for compressor wheel because of additional mass due to the accelerometer and additional damping from the accelerometer cable alter the dynamic responses of the wheel blades. odal characteristics of the wheel have been defined using vibro-acoustic test and verified with the results from another conventional method using a laser vibrometer. Natural quencies and mode shapes of a turbocharger wheel, which can't be precisely obtained with onventional method, could be defined accurately without the additional effects from sensor and cable. Proposed method can be applied to small structures where conventional sensors and cables could generate troubles.

• 한국항공우주학회지
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• 제33권1호
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• pp.69-77
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• 2005

KSR-III 개발과정에서 배플을 장착하여 연소 불안정 현상을 해결한 바 있으나, 추력 및 냉각과 관련된 축방향 길이에 대한 최적화 과정을 거치지는 않았다. 이에 수동제어기구로서 사용되는 배플의 축방향 길이의 최적화 및 한계를 평가하기 위하여, 축방향 길이를 작동인자로 하여 연소 안정성 여분을 평가하였다. 외부 교란 발생 장치로서 2번의 기폭이 가능한 펄스건을 사용하였다. 외부 교란에 대한 연소실에서의 응답 특성을, 감쇠 시간과 진폭비와 같은 인자를 도입하여 정량화하였다. 설계점과 탈설계점에서 시험을 수행하였으며, 분사기의 충돌점으로 생각할 수 있는 화염 영역을 감싸지 못하는 경우에는 배플의 충분한 감쇠 능력을 보장할 수 없음을 확인하였다. 따라서 연소 안정성의 여분의 경계는 KSR-III에서의 작동조건 하에서 50 mm 정도의 배플인 것으로 판단되었다.

• 한국대기환경학회지
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• 제26권6호
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• pp.683-689
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• 2010

Reforming of methane with carbon dioxide has been carried out using a bipolar pulse driven elongated arc reactor operating at atmospheric pressure and non-equilibrium regime. This plasma reactor is driven by two kinds of power supply, characterized by different voltage-current characteristics under the same operating power and frequency. Varying the $CO_2/CH_4$ ratio and the discharge power, the conversion rate, yield, and reforming efficiency for the two power supplies are investigated in conjunction with the static and dynamic behaviors of voltage and current. It is found that not only the values of voltage and current but also their shapes give an influence on the reforming performances. Finally, a better electrical operation regime for the efficient plasma reforming is proposed based on the relationship between the voltage-current characteristics and the reforming performance.

• 대한정형도수물리치료학회지
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• 제11권1호
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• pp.65-73
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• 2005

Osteoarthritis has been considered a disease of the elderly because it is uncommon before the age of 40 years and is seen in approximately 80% of United States citizens older than 65 years. general population on kuri city in korea revealed that prevalence of knee osteoarthritis is 10.2%, increasing with age. High level of physical activity in men and age, post-menopause and obesity in women can be risk factor. Osteoarthritis is no evidence that a acquired process initiated much earlier in life through mechanical, metabolic, genetic, or other origins. A high tibial osteotomy alters static lower extremity alignment thereby decreasing medial compartment loading. As well, conservative treatment strategies, such as knee braces and valgus heel wedges, affect lover limb mechanics and attempt to reduce medial compartment loading. It was hypothesized that valgus heel wedges and modified orthoses would shift the center of pressure laterally on the foot during level walking, reducing the moment arm of the adduction moment in the frontal plane, thereby resulting in a decrease in the knee adduction moment. In the 1980s, the effect of wearing a laterally wedged insole on osteoarthritic patients with a varus deformity of the knee was firsted, and since then, kinematic and kinetic analyses concerning this condition have mainly focused on a static standing position. Since the early 1990s, the beneficial effect of wearing a laterally wedged insole to treat osteoarthritis of the knee has also been reported in dynamic conditions, but these studies did not answer the question of the kinematic and kinetic mechanisms that resulted in the reduced symptoms in patents with knee osteoarthritis. therefore, the effect of wearing laterally wedged insole has not been sufficiently studied.

• 천문학회지
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• 제37권4호
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• pp.151-157
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• 2004

It is investigated quantitative relations between the magnetic storm magnitude and the solar wind parameters such as the Interplanetary Magnetic Field (hereinafter, IMF) magnitude (B), the southward component of IMF (Bz), and the dynamic pressure during the main phase of the magnetic storm with focus on the role of the interplanetary shock (hereinafter, IPS) in order to build the space weather fore-casting model in the future capable to predict the occurrence of the magnetic storm and its magnitude quantitatively. Total 113 moderate and intense magnetic storms and 189 forward IPSs are selected for four years from 1998 to 2001. The results agree with the general consensus that solar wind parameter, especially, Bz component in the shocked gas region plays the most important role in generating storms (Tsurutani and Gonzales, 1997). However, we found that the correlations between the solar wind parameters and the magnetic storm magnitude are higher in case the storm happens after the IPS passing than in case the storm occurs without any IPS influence. The correlation coefficients of B and $BZ_(min)$ are specially over 0.8 while the magnetic storms are driven by IPSs. Even though recently a Dst prediction model based on the real time solar wind data (Temerin and Li, 2002) is made, our correlation test results would be supplementary in estimating the prediction error of such kind of model and in improving the model by using the different fitting parameters in cases associated with IPS or not associated with IPS rather than single fitting parameter in the current model.

• Structural Engineering and Mechanics
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• 제66권2호
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• pp.273-283
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• 2018

Currently, the dynamic amplification effect of suction is described using the wind vibration coefficient (WVC) of external loads. In other words, it is proposed that the fluctuating characteristics of suction are equivalent to external loads. This is, however, not generally valid. Meanwhile, the effects of the ventilation rate of louver on suction and its WV are considered. To systematically analyze the effects of the ventilation rate of louver on the multi-dimensional WVC of ultra-large cooling towers under suctions, the 210 m ultra-large cooling tower under construction was studied. First, simultaneous rigid pressure measurement wind tunnel tests were executed to obtain the time history of fluctuating wind loads on the external surface and the internal surface of the cooling tower at different ventilation rates (0%, 15%, 30%, and 100%). Based on that, the average values and distributions of fluctuating wind pressures on external and internal surfaces were obtained and compared with each other; a tower/pillar/circular foundation integrated simulation model was developed using the finite element method and complete transient time domain dynamics of external loads and four different suctions of this cooling tower were calculated. Moreover, 1D, 2D, and 3D distributions of WVCs under external loads and suctions at different ventilation rates were obtained and compared with each other. The WVCs of the cooling tower corresponding to four typical response targets (i.e., radial displacement, meridional force, Von Mises stress, and circumferential bending moment) were discussed. Value determination and 2D evaluation of the WVCs of external loads and suctions of this large cooling tower at different ventilation rates were proposed. This study provides references to precise prediction and value determination of WVC of ultra-large cooling towers.