• 한국산학기술학회논문지
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• 제13권4호
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• pp.1453-1459
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• 2012

본 연구에서는 보이스코일 모터와 압전 구동기를 동일 축으로 배치함으로써 초정밀 위치결정뿐만 아니라 동특성을 개선할 수 있도록 하는 듀얼 스테이지를 다룬다. 듀얼 스테이지는 모델링이 엉성할 경우 오히려 나쁜 동특성을 보이는 단점이 있다. 이 논문은 본드그래프를 이용하여 듀얼 스테이지를 모델링하고 동적 상태방정식을 본드그래프에서 유도하였다. 또한 동특성을 향상시키기 위한 보상기의 설계 예시를 보이고 있으며, 시뮬레이션을 통해 검증하였다.

• 한국환경과학회지
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• 제23권4호
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• pp.737-742
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• 2014

This study aimed for evaluating the applicability of the two stage dual media filtration system in field water treatment plant. The field plant of two stage and dual media filtration system was operated for 2 months. Average iron concentrations of the settled water, existing filtered water and second stage filtered water was 0.041 mg/L, 0.007 mg/L and 0.005 mg/L, respectively. Removal efficiency of iron concentration in the second stage is appropriately 35% more than in existing filtered water. Also removal efficiency of residual chlorine in the dual media filtration system is relatively 42.3% more than in existing filtered water due to adsorption of activated carbon, but the removal of ammonia nitrogen by adsorption is insufficient. Average concentrations of THM and chloroform in the settled water are 0.033 mg/L, 0.026 mg/L, respectively and in existing filtered water are 0.023 mg/L and 0.023 mg/L. Average concentrations of THM and chloroform in the dual media filtration system are 0.008 mg/L and 0.013 mg/L. Therefore removal efficiency of THM concentration in second stage is more than 66.4% in existing filtrated water. Also removal efficiency of chloroform in the dual media filtration system is more than 50.0% in existing filtered water because of the adsorption of activated carbon. In this case backwashing period in dual stage system is 4~5 days, but in existing filtration system is 1~2 days.

• 한국정밀공학회지
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• 제23권2호
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• pp.43-50
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• 2006

Recently, with rapid development of semiconductor and flat panel display, the manufacturing equipments are required to have large travel range, high productivity, and high accuracy. In this paper, an ultra precision decoupled dual servo (DDS) system is proposed to meet these requirements. And a control scheme for the DDS is studied. The proposed DDS consists of a $XY{\Theta}$ fine stage for handling work-pieces precisely and a XY coarse stage for large travel range. The fine stage consists of four voice coil motors (VCM) and air bearing guides. The coarse stage consists of linear motors and air bearing guides. The DDS is mechanically decoupled between coarse stage and fine stage. Therefore, both stages must be controlled independently and the performance of the DDS is mainly determined by the fine stage. For high performance tracking, the controller of fine stage consists of time delay control (TDC) and perturbation observer while the controller of coarse stage is TDC alone. With these individual controllers, two kinds of dual-servo control strategies are suggested: master-slave type and parallel type. By simulations and experiments, the performances of two dual-servo control strategies are compared.

• Journal of Mechanical Science and Technology
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• 제20권11호
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• pp.1834-1847
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• 2006

A robust minimum-time control (RMTC) strategy is addressed and it is extended to the dual-stage servo design. Rather than conventional switching type sub-optimal controls, it is a reference following control approach where the predetermined minimum-time trajectory (MTT) is tracked by the perturbation compensator based feedback controller. First, the minimum-time trajectory for a mass-damper system is derived. Then, the perturbation compensator to achieve robust tracking performance in spite of model uncertainty and external disturbance is suggested. The RMTC is also applied to the dual-stage positioner which consists of coarse actuator and fine one. To best utilize the actuation redundancy of the dual-stage mechanism, a null-motion controller to actively regulate the relative motion between the two stages is formulated. The performance of RMTC is validated through simulation and experiment.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.437-441
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• 1995

In this paper, the ultra precision positioning system for servo motor and piezo actuator using dual servo loop control has been developed. For positioning system having long distance with ultra precision, the combination of global stage and micro stage is required. Servo moter and ball screw are used as a master stage and piezo acuator as a fine stage. By using this system, an positional precision witin .+-. 30nm has been achieved at dual servo loop control. When using micro stage, an positional precision within .+-. 10nm has been achieved. This result can be applied to develop semiconductor equipment such as wafer stepper.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1999년도 제14차 학술회의논문집
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• pp.317-320
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• 1999

A robust end time optimal conかof strategy for dual-stage servo system is presented. The time optimal trajectory for a mass-damper system is determined and given os a reference input to the servo system. The feedback controller is constructed so that the fine stage tracks the coarse stage errors and robustly designed as the“perturbation compensated sliding mode control(PCSMC)”law, a combination of slid-ing mode controller(SMC) and perturbation observer(PO). In addition, a null motion controller which regulates the fine stage at its neutral position is designed based on the“dynamic consistency”So, the overall dual-stage servo system exhibits the robust and time-optimal performance. The inherent merit and performance of the dual-stage system will be shown.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2000년도 제15차 학술회의논문집
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• pp.173-173
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• 2000

This paper discusses a observer based discrete-time controller design and presents a modified control structure for dual-stage hard disk drive systems using piezoelectric microactuator(MA). In plant modeling, dynamic coupling between VCM and MA is not considered. Each controller is organized independently and designed using pole placement. Simulation result shows that 4th-order controller achieves about 3kHz servo bandwidth and 0.22msec of 2% settling time.

• 한국정밀공학회지
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• 제16권3호통권96호
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• pp.154-163
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• 1999

In this paper, an ultra precision positioning system has been developed using dual servo loop control. For positioning system having long distance with ultra precision , the combination of global stage and micro stage was required. A servo motor based ball screw is used as a global stage and the piezo actuator as a micro stage. For the improvement of positional precision, the digital Chebyshev filter is implemented in the developed to dual servo system. Therefore, the positional repeatability has been achieved within ${\pm}$ 10 mm, and this technique can be applied to develop precision semiconductor equipments such as lithography steppers and probers.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.1309-1314
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• 2003

The high precision positioning mechanism is used in various industrial fields. It is used in semiconductor manufacturing line, test instrument, Bioengineering, and MEMS and so on. This paper presents a positioning mechanism with dual servo system. Dual servo system consists of a coarse stage and a fine motion stage. The course stage is driven by VCM and the actuator of fine stage is the PZT. The purposes of dual servo system are stability, higher bandwidth, and robustness. Lead compensator is applied to this control system, and is designed by PQ method. Designed compensator can improve property of positioning mechanism.

• 한국생산제조학회지
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• 제25권1호
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• pp.75-82
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• 2016

In this study, a cross-damped low vibration controller was developed to reduce vibration in ultra-precision dual stage driven by master/slave principle. In master-slave structure, the master stage leads the driving motion and the slave stage follows it so as to maintain a constant gap between two stages. In this structure, a small perturbation of master stage makes big oscillations in slave servoing stage, so a low damped master stage composed of voice coil motor makes a long vibration in settling area after driving motion profile. In this research, an effective feedback damping algorithm for increase the damping characteristics of the dual stage was developed. The designed velocity damping algorithm improves the system stability and reduces the settling time of the whole system. Simulation and experimental results show that the developed algorithm reduces settling time and improves the regulating performance.