• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.156.2-156.2
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• 2015

반도체 소자의 크기가 나노사이즈로 줄어들기 때문에, 건식식각의 중요성이 강조되고 있다. dual plasma source를 사용함으로써 plasma 밀도, 이온충돌에너지, 이온플럭스를 조절 가능하다. Low frequency로 이온에너지를 조절하고, high frequency로 이온플럭스를 일반적으로 조절한다. 본 연구는 inductively coupled plasma (ICP)와 capacitively coupled plasma (CCP)를 사용하는 dual plasma source이다. ICP는 AE RPS로 2.4 MHz를 사용하고, CCP는 AE RFX-600으로 13.56 MHz이다. single L-probe는 Hiden ESPion이고, quadrupole mass spectrometer (QMS)는 INFICON CPM-300이다. chuck에 CCP가 인가되고, ICP는 SUS mesh를 거쳐서 영향을 미친다. Gas는 Ar, Ar+CF4 두 조건에서 비료를 하였다. Single L-probe를 이용하여 플라즈마를 측정한 결과 CCP만 인가하였을 때, Te 2.05 eV, Ne 4.07E+10 #/cm3, Ni 5.82E+10 #/cm3의 결과를 얻을 수 있었다. ICP를 방전하고 mesh를 통해서 chuck으로 입사하는 이온을 측정한 결과 mesh에 의해 이온이 중성화되어 거의 입사하지 않음을 확인할 수 있었다. 최종적으로 이온의 영향이 상쇄되고, 라디칼의 영향이 증가하여 높은 etch rate와 선택비를 가지며, 등방성 식각의 영향이 커질 것으로 사료된다.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.20 no.2
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• pp.1-7
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• 2021

A computer simulation was performed to study the effectiveness of temperature on the type of laser heat source in the context of the heterogeneous welding of aluminum and copper materials. Three different types of heat sources were used in the computer simulation: 1) Single Beam Straight Scan, 2) Single Beam Wobble Scan, and 3) Dual Beam Straight Scan. Among these sources, dual beam straight scan was found to be the most effective from the viewpoint of heat source control. Because the difference between the melting temperatures of copper and aluminum is approximately 400℃, a clear separation of heating temperature was required, and the dual beam straight scan provided superior controllability in this regard. When using the dual beam, the temperature of the 90:10 split was considerably easier to control than that of the 50:50 split. The optimal offset was calculated to be 4 mm off to the copper side, where the melting temperature and thermal conductivity were higher. In this manner, computer simulation was effectively used for determining the optimal laser beam hear source control without performing an actual laser welding experiment.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.18 no.2
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• pp.445-451
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• 2014

Dual LED lantern, which is composed of two light sources in one lantern, can be utilized as an auxiliary light source when the main light source is in trouble. Nevertheless, there are no way to obtain status information of the system and control the light source if the current domestic standard protocol is applied, since the standards for dual LED lantern are not defined yet. Regarding to this problem, we suggested expanded lantern protocol for management system of dual LED lantern based on current domestic standard. Also, we confirmed the normal operation of dual LED lantern after implementing suggested protocol on the developed management system. Control system suggested and implemented in this study is tested not only its function of controlling and acquiring the operating status of dual LED lantern, but also its capability to utilize as a control system of currently used LED lanterns.

• Journal of the Korean Society for Geothermal and Hydrothermal Energy
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• v.3 no.1
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• pp.1-9
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• 2007

A steady-state simulation model for Dual-Source Heat Pump(DSHP) of 8RT was presented. A Dual-Source Heat Pump(DSHP) has been designed to make up for the conventional air source heat pumps. The performance evaluation has been conducted under internal standard test conditions such as ISO-13256-1 and KS C 9306. However, as test conditions such as entering water, indoor and outdoor air conditions could not be controlled to satisfy the standard test conditions in outdoor tests, a series of experiments have been conducted with the actual test conditions. Then, computer models for DSHP could be used for the standard condition have developed using EES program. The model was developed from basic thermodynamic principles and heat transfer relations. Most of the parameters were obtained with EES from the actual catalog data. The simulation results were in good agreement with the experiments.

• Proceedings of the KIEE Conference
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• 1988.11a
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• pp.385-387
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• 1988

Dual converter is being used as a four-quadrant source for the controlled rectifier. But the rectifier itself and circulating current between P and N-converter contribute to generate reactive power. The methodology of input power factor control of dual converter by means of circulating current control is presented in this paper.

• Journal of Power Electronics
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• v.9 no.1
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• pp.93-99
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• 2009

A new plasma display panel sustaining driver using single side sustaining technique with a dual resonant method is proposed in this paper. Since this circuit enables to keep device voltage stress same as the prior circuit, it can be a low cost circuit compared to a conventional driver. To integrate the sustaining function into one side with a single power source in the driver, a charge pump method is adopted to make negative sustaining voltage and to achieve dual resonant energy recovery on the sustaining modes.

• Proceedings of the KIPE Conference
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• 1997.07a
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• pp.314-317
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• 1997

The purpose of this study is developing a converter which is able to convert a 300[KW] power, and is a DC power supply output a 1500[V] DC voltage for inverter driving. The power converter is driven by two converter serisely and keep a high power factor of power source. This system is haven all the characteristic of voltage source converter by having a processing ability of regenerating power. The two converters controls a PWM modulation and output voltage using a only one 16 bit DSP processor.

• Journal of Sensor Science and Technology
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• v.26 no.4
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• pp.223-227
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• 2017

Conventional CMOS image sensors (CISs) have a trade-off relationship between dynamic range and sensitivity. In addition, their sensitivity is determined by the photodiode capacitance. In this paper, CISs that consist of dual-sensitivity photodiodes in a unit pixel are proposed for achieving wide dynamic ranges. In the proposed CIS, signal charges are generated in the dual photodiodes during integration, and these generated signal charges are accumulated in the floating-diffusion node. The signal charges generated in the high-sensitivity photodiodes are transferred to the input of the comparator through an additional source follower, and the signal voltages converted by the source follower are compared with a reference voltage in the comparator. The output voltage of the comparator determines which photodiode is selected. Therefore, the proposed CIS composed of dual-sensitivity photodiodes extends the dynamic range according to the intensity of light. A $94{\times}150$ pixel array image sensor was designed using a conventional $0.18{\mu}m$ CMOS process and its performance was simulated.

• Journal of the Institute of Electronics Engineers of Korea TC
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• v.48 no.8
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• pp.1-6
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• 2011

In this paper, another analytical approach for dual-hop amplify-and-forward(AF) relay systems is proposed over Rayleigh fading channels. Previous approaches derived the moment generating function(MGF) by using the cumulative distribution function(CDF) or probability density function(PDF) of the received signal-to-noise ratio(SNR) for source-relay-destination(S-R-D) link. Then, the average symbol error rate is expressed based on derived MGFs. In this paper, another new approach is proposed. It means that the MGF is directly derived by utilizing PDFs of both source-relay(S-R) and relay-destination(R-D) links. Additionary, the newly derived MGF is compared and analyzed with previous ones. Furthermore, simulation results are presented to validate the accuracy of proposed analytical expression. Based on this, it is confirmed that the proposed analytical approach can be a another solution for dual-hop AF relay systems.

• Journal of the Korean Society of Radiology
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• v.15 no.3
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• pp.273-279
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• 2021

Metal material inserted into the body have a large difference in density from human tissues or bones around the Metal during CT scans.. Therefore, the Metal material inserted into the body produces Artifact. Metal Artifact, which occurs around Metals, can degrade the quality of CT images, causing confusion when medical team diagnose lesions. Through this experiment, we confirm that the occurrence of Artifacts decrease by using Dual energy CT and MAR algorithm in Single source Dual energy CT. We also want to present basic data on clinical application methods by comparing and analyzing the characteristics of images obtained by each method. Using GE 750HD CT, artificial implants were scanned using general method and Dual energy. Then we apply the MAR algorithm to each image obtained. And all previously acquired images were compared and analyzed the characteristics of the examination, such as image quality evaluation and dose evaluation. Images with MAR algorithm and Dual Energy confirmed a decrease in Metal Artifact. Images with MAR algorithm have reduced Metal Artifact, but have the disadvantage of distorting the details of artificial joint implants. On the other hand images teseted with Dual Energy have the advantage of being able to implement details than those applied with MAR algorithms, it takes longer to reconstruct the image and the exposure dose was about four times higher than those applied with MAR algorithm. In order to locate Metals, such as the post-operative follow-up period, it is useful to apply MAR algorithm to obtain images. And it is more useful to examine with Dual Energy when micro lesion identification, such as cardiac examination, and surgical planning or when tests are performed in diagnostic way.