• The Transactions of the Korean Institute of Electrical Engineers C
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• v.48 no.2
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• pp.153-160
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• 1999

Dual-stage servo system for super-high density HDD has the chances of being composed of the coarse actuator(VCM) for track-seeking control and the fine actuator(microactuator) for-following control in near future. This paper presents the concept design of dual-stage servo system and the track-following control using an electrostatic microactuator for super-high density HDD. The electrostatic microactuator is designed and fabricated by MEMS(micro-electro-mechanical system) process. Both the nonlinear plant(voltage/displacement-to-electrostatic force) and the linear plant(electrostatic force-to-displacement) of the microactuator are established. Inverse function of the nonlinear plant is employed for a feedforward nonlinear compensator design. And feedforward control effect of this compensator is shown by time-domain experiments. A track-following feedback controller is designed using the feedback nonlinear compensator which is derived from the feedforward nonlinear compensator. The track-following control experiment is done to show the control efficiency of the proposed control system. And, excellent track-following control performance(2.21kHz servo-bandwidth, 7.51dB gain margin, $50.98^{\circ}$phase margin) is achieved by the proposed control system.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.3 s.96
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• pp.154-163
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• 1999

In this paper, an ultra precision positioning system has been developed using dual servo loop control. For positioning system having long distance with ultra precision , the combination of global stage and micro stage was required. A servo motor based ball screw is used as a global stage and the piezo actuator as a micro stage. For the improvement of positional precision, the digital Chebyshev filter is implemented in the developed to dual servo system. Therefore, the positional repeatability has been achieved within ${\pm}$ 10 mm, and this technique can be applied to develop precision semiconductor equipments such as lithography steppers and probers.

• Journal of the Semiconductor & Display Technology
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• v.2 no.2
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• pp.31-37
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• 2003

This paper presents a measurement system of mechanical property using dual servo system. There are many kinds of method to measure material properties such as tensile test, indention and bending test. It is highly required to measure the properties of nano-sized material and structure. However, It is need more accurate measurement system, more stable and frequency response than conventional test. In this paper, we designed the dual servo system for a measuring instrument The dual servo system consisting of a coarse stage and a fine motion stage with VCM and PZT is proposed. Mechanical mechanism is designed with the leaf spring type of flexure hinge joint. Lead compensator is applied to this control system, and is designed by PQ method.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.875-878
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• 2005

This paper presents active control of aperture type near-field storage head. In order to achieve fast and accurate control, dual servo control algorithm is applied. Based on the big difference in time constant, we seperate two actuator and control independently. With the combination of fine and coarse actuator, gap is controlled within 100nm until the disk rotates upto 10 rpm speed. From the experimental results, the feasibility and performance of active gap control is proved.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.10
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• pp.22-30
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• 2003

• 제어로봇시스템학회:학술대회논문집
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• 1999.10a
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• pp.317-320
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• 1999

A robust end time optimal conかof strategy for dual-stage servo system is presented. The time optimal trajectory for a mass-damper system is determined and given os a reference input to the servo system. The feedback controller is constructed so that the fine stage tracks the coarse stage errors and robustly designed as the“perturbation compensated sliding mode control(PCSMC)”law, a combination of slid-ing mode controller(SMC) and perturbation observer(PO). In addition, a null motion controller which regulates the fine stage at its neutral position is designed based on the“dynamic consistency”So, the overall dual-stage servo system exhibits the robust and time-optimal performance. The inherent merit and performance of the dual-stage system will be shown.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1993.10a
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• pp.249-254
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• 1993

In order to respond to the increasing demands of ultraprecision positioning mechanism in the field of precision engineering, more accurate stages are needed whose positioning uncertainty should be in the unprecedented level of nanometers, while maintaining a long travek range. For this application, most conventional stage mechanisms are found not suitable, so the concept of dual servo, which uses two different servos, is one of the new design and control strategies being extensively investigated these days, This paper presents a fine motion mechanism as a part of research on the dual servo control. The stage is made of a single structure of elastic flexure, whose xy .theta. motions are induced in the form of elastic deformation activated by three piezoelectric actuators. Experimental results show that the translational and rotational motions of the stage can be controlled with resolutions of 5 nm and 0.1 arcsec, respectively.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.95-96
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• 2007

• Journal of the Korean Society for Precision Engineering
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• v.24 no.2 s.191
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• pp.86-94
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• 2007

In this paper, a dual stage servo mechanism has been developed for image tracking system to improve control performances such as small rise time, small overshoot, small settling time, small stabilization error etc. A secondary stage, a platform, actuated by a pair of electro-magnets is mounted on a conventional elevation gimbal. In this mechanism, the gimbal provides large range but slow motion and the platform provides small range but fast positioning. A sliding mode control is applied to the platform positioning to attain robust performances and stability in the presence of the disturbance related to dynamic coupling of the gimbal and the platform. Results from experiments illustrate that the suggested dual stage mechanism controlled by the sliding mode control is effective in improving responses and attenuating the disturbance response related with dynamic coupling.

• Proceedings of the KIEE Conference
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• 1991.11a
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• pp.175-178
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• 1991

The drive system of servo motor is requested to have robustness of disturbance and parameter variation. However, the dynamics of PMSM drive change significantly by forced disturbance and parameter variation. Moreover, the state error caused by them should be suppressed completely and rapidly. In this paper, the vector-control system of PMSM using dual adaptive control loop is investigated. In the proposed system, linear adaptive control loop rapidly recovers the state error caused by both disturbance and parameter variation. In the dual adaptive control loop, the inner loop reduces the system sensitivity of parameter variation and disturbance, and the outer loop suppresses the state error caused by them completely. The proposed servo system is verified through a computer simulations and experimental results.