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Design and Control of Dual Servo Mechanism for High Precision Position Control  

최현석 (한양대학교 기계공학부 대학원)
송치우 (한양대학교 기계공학부 대학원)
한창수 (한양대학교 기계정보경영학부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.20, no.10, 2003 , pp. 22-30 More about this Journal
Keywords
Dual servo; VCM; Piezoceramic; Flexure Hinge; PQ method; Micro tensile tester;
Citations & Related Records
Times Cited By KSCI : 4  (Citation Analysis)
연도 인용수 순위
1 Pahk Heui Jae et al, 'Ultra precision positioning systems for servo motor-piezo actuator using the dual servo loop and digital filter implementation,' international Journal of Machine tools & Manufacture, Vol. 41, pp. 51-63, 2001   DOI   ScienceOn
2 Choi, H. S., Han, C. S., Lee, N. K., Na, K. H., Choi, T. H., 'D-evelopment of micro tensile tester for high functional material,' Trans. KSTP, Vol. 11, No. 7, pp. 561-568, Dec, 2002   과학기술학회마을
3 Higiyaji, Dagasima, 'Measuring and test technology in micro/nano technology,' Machine & Automation, pp. 14 - 22, 2003
4 Suh, Snag-Min, Chung, Chung Choo and Seung-Hi Lee, ' Discrete-Time LQG/LTR Dual-Stage Controller Disign in Magnetic Disk Drives,' IEEE Trans. On Magnetics, Vol. 37, No. 4, pp. 1891 - 1895,2001   DOI   ScienceOn
5 Stuart T. smith, 'Flexure, Elements of elastic mechanisms,' Gordon and Breach Science Publishers
6 Jang, S. M., et al, 'Design and extraction of control parameter of a moving coil type linear actuator for driving linear reciprocating motion control systems,' KIEE, 48B-5-3, pp. 241-248, 1999
7 S. Schroeck and W.C Messner, 'On Compensator Design for linear time-invariant dual-input/single-output systems.' Proc. American Control Conf., pp. 4122-4126, 1999
8 Katsuhiko Ogata, 'Modern control engineering, 4rd Edition,' Prentice Hall
9 T. Yi, 'Microscale Material Testing of Single Crystalline Sillicon,' A dissertation for the degree of doctor of philosophy, University of California, LA, 2000
10 Kim, D. M., et. al, 'Optimal design and control of xyθ fine stage in lithography system,' J of the KSPE, Vol. 19, No. 12, pp. 163-170, Dec, 2002   과학기술학회마을
11 Norbert C. Cheung et Al. 'Modeling and control of a High Speed, Long Travel, Dual Voice Coil Actuator,' IEEE Conf. On Power Electronics and Drive Systems, Vol. 1, pp. 270 - 274, 1997   DOI
12 Earle G. Cromer, Jr., 'Mask Aligners and steppers for precision microlithography,' Solid State Technology, pp. 23-27, April 1993
13 S. Greek and S. Johansson, 'Tensile Testing of Thin Film Microstructures,' Proc. SPIE, Vol. 3224, pp. 344-351, 1997   DOI
14 W.N. Sharpe Jr., 'An Interferometric Strain/Displacement Measurement System,' NASA Technical Memorandum 101638, August, 1989
15 H. Ogawa, K. Susuki, S. Kaneko, Y. Nakano, Y. Ishikawa and T. Kitahara, 'Measurement of Mechanical Properties of Microfabricated Thin Film,' Proc. IEEE Micro Electro Mechanical Systems Workshop, pp. 430 - 435, Nagoya, Januaty, 1997   DOI
16 Steven J. Schroeck, William C. Messner, ' On Compensator Design for Linear Time-Invariant Dual-Input Single-Output Systems,' IEEE Trans on Mechatronics, Vol. 6, No. 1, pp. 50 - 57, 2001   DOI   ScienceOn
17 Park, J. H. et. al., 'Mechanism Design of optical pickup actuator for fast access of optical disk driver,' J of the KSPE, Vol. 19, No. 12, pp. 109-119, Dec, 2002   과학기술학회마을