• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1883-1886
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• 2005

In this paper, a decoupled dual servo (DDS) stage for ultra-precision scanning system with large working range is introduced. In general, dual servo systems consist of a fine stage for short range and a coarse stage for long range. The proposed DDS also consists of a $XY\theta$ fine stage for handling and carrying workpieces and one axis coarse stage. Its coarse stage consists of air bearing guide system and a coreless linear motor with force ripple. The fine has four voice coil motors(VCM) as its actuator. According to a VCM's nature, there are no mechanical connections between coils and magnetic circuits. Moreover, VCM doesn't have force ripples due to imperfections of commutation components of linear motor systems - currents and flux densities. However, due to the VCM's mechanical constraints the working range of the fine is about $25mm^2$. To break that hurdle, the coarse stage with linear motors is used to move the fine about 500mm. Because of the above reasons, the proposed DDS can achieve higher precision scanning than other stages with only one servo. With MATLAB's Sequential Quadratic Programming (SQP), the VCMs are optimally designed for the highest force under conditions and constraints such as thermal dissipations due to its coil, its size, and so on. And for their movements without any frictions, guide systems of the DDS are composed of air bearings. To get precisely their positions, a linear scale with 5nm resolution are used for the coarse stage's motion and three plane mirror laser interferometers with 5nm for the fine's $XY\theta$ motions. With them, on scanning the two stages have same trajectories. The control algorithm is named Parallel method. The embodied ultra-precision scanning system has sub 100nm following error and in-positioning stability.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.12
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• pp.163-170
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• 2002

The quality of a precision product, in general, relies on the accuracy and precision of its manufacturing and inspection process. In many cases, the level of precision in the manufacturing and inspection system is also dependent on the positioning capability of tool with respect to the work piece in the process. Recently the positioning accuracy level has reached to the level of submicron and long range of motion is required. For example, for 1 GDARM lithography, 20nm accuracy and 300mm stroke needs. This paper refers to the lithography stage especially to fine stage. In this study, for long stroke and high accuracy, the dual servo system is proposed. For the coarse actuator, LDM (Linear DC Motor) is used and for fine one VCM is used. In this study, we propose the new structure of VCM for the fine actuator. It is 3 axis precision positioning stage for an aligner system. After we perform the optimal design of the stage to obtain the maximum force, which is related to the acceleration of the stage to accomplish throughput of product. And we controlled this fine stage with TDC. So we obtained 50nm resolution. So later more works will be done to obtain better accuracy.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.778-782
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• 2003

This paper presents how it is effective to use many features for improving the speed and the accuracy of the visual servo systems. Some rank conditions which relate the image Jacobian and the control performance are derived. It is also proven that the accuracy is improved by increasing the number of features. Effectiveness of the redundant features is evaluated by the smallest singular value of the image Jacobian which is closely related to the accuracy with respect to the world coordinate system. Usefulness of the redundant features is verified by the real time experiments on a Dual-Arm Robot manipulator made in Samsung Electronic Co. Ltd.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.18 no.1
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• pp.50-58
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• 2009

For precise tracking control of a servo system with nonlinear friction, a robust friction compensation scheme is presented in this paper. The nonlinear friction is difficult to identify the friction parameters exactly through experiments. Friction parameters can be also varied according to contact conditions such as the variation of temperature and lubrication. Thus, in order to overcome these problems and obtain the desired position tracking performance, a robust adaptive back-stepping control scheme with a dual friction observer is developed. In addition, to estimate lumped friction uncertainty due to modeling errors, a DEKF recurrent neural network and adaptive reconstructed error estimator are also developed. The feasibility of the proposed control scheme is verified through the experiment fur a ball-screw system.

• Proceedings of the KIEE Conference
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• 1999.07b
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• pp.513-515
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• 1999

In this paper, Neuro-Fuzzy controller which has the characteristic of Fuzzy control and artificial Neural Network is designed A fuzzy rule to be applied is selected automatically by the allocated neurons. The neurons correspond to Fuzzy rules which are created by the expert. In order to adaptivity, the more precise modeling is implemented by error back propagation learning of adjusting the link-weight of fuzzy membership function in Neuro-fuzzy controller. The more classified fuzzy rule is used to include the property of Dual mode Method. To test the effectiveness of the algorithm designed above the experiment for DC servo motor with variable load as variable load plant is implementation.

• Proceedings of the KIEE Conference
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• 2001.07d
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• pp.2018-2020
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• 2001

In this study, a Neuro-Fuzzy Controller which has the characteristic of Fuzzy control and Artificial Neural Network is designed. A fuzzy rule to be applied is automatically selected by the allocated neurons. The neurons correspond to Fuzzy rules are created by an expert. To adapt the more precise modeling is implemented by error back propagation learning of adjusting the link-weight of fuzzy membership function in the Neuro-Fuzzy controller. The more classified fuzzy rule is used to include the property of dual mode method. In order to verify the effectiveness of an algorithm designed above, an operating characteristic of a AC servo motor is investigated.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.70.1-70
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• 2001

Recently, research of visual control is getting more essential in robotic application, and acquiring 3D informations from the 2D images is becoming more important with development of vision system. For this application, we propose the effective way of controlling stereo vision tracking system for target tracking and calculating distance between target and camera. In this paper we address improved controller using dual-loop visual servo which is more effective compared with using single-loop visual servo for stereo vision tracking system. The speed and the accuracy for realizing a real time tracking are important. However, the vision processing speed is too slow to track object in real time by using only vision feedback data. So we use another feedback data from controller parts which offer state feedback ...

• Journal of international Conference on Electrical Machines and Systems
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• v.2 no.2
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• pp.216-224
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• 2013

This paper describes dual inverter drive for a fractional-slot concentrated winding permanent magnet synchronous machine (PMSM). PMSMs are widely used in many applications from small servo motors to few megawatts generators thanks to its high efficiency and torque density. Especially, fractional-slot concentrated winding PMSM is very popular in the applications where wide operation range is required because it shows very wide constant power speed ratios. High speed operation, however, requires lots of negative daxis current for reducing back-EMF regardless of output torque. Field weakening current does not contribute to the torque generation in surface mounted PMSM case and causes inverter and copper loss. To reduce the losses from field weakening current, this paper proposes PMSM with split stator and parallel dual inverter drive. Proposed parallel dual inverter drive reduces back-EMF and enables efficient drive at high speed and light load situation. Control strategy of proposed dual inverter system is established through loss analysis and simulation. Proposed concept is verified with practical experiment.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.11 s.104
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• pp.1276-1286
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• 2005

In this paper, the dual stage interaction between the coarse actuator and the fine actuator of an optical disk drive is studied, and the new control method to enhance the track pull-in performance using fine actuator control is proposed. First, the dynamic analysis for the dual stage and the experiments to find the each actuator dynamics are performed. From the experiments, some physical parameters of the actuators were derived, then, some simulations are performed to find the interaction effect of the fine actuator during seek motion. Second, the center servo which suppresses the vibration of fine actuator during seek motion is designed and evaluated. And the fine actuator control to reduce the relative velocity between the target track and beam spot is proposed. From simulations, we show that fine actuator control which has same frequency and same phase of the disturbance is effective to reduce the relative velocity, and this result leads to track pull-in enhancement. Hence, the proposed control method is good approach to improve the track pull-in performance. Finally, the realization of the proposed method and some comments of it are briefly discussed.

• Journal of Institute of Control, Robotics and Systems
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• v.17 no.1
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• pp.31-37
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• 2011

Recently gantry-type robot with 3 axes rectangular coordinates have been studied in the many industrial production equipment and machinery fields. To acquire a good handling and motion performance of this robot, reducing the settling-time and securing the accurate-transfer positioning under high-speed conditions should be required. However when robot is moved in high-speed, the large inertia of robot can lead to serious vibration of robot's head. The time-delayed control characteristics of this robot can also lead to tracking error. In this research, the analysis of the effects of higher order positional-profile is carried out to assure high-speed performance and stiffness specifications. To remove the residual vibration caused by kinematic coupling effect of dual-servo gantry, we develop a dual-servo gantry of rotary type that moving frame of x-axis rotates about z-axis. In order to decrease the tracking error, the 3 type lead-filter through system identification was applied respectively. From the experimental results, it was shown that zero-order series leader-filter has the best performance about tracking error and settling time.