• Journal of the Institute of Convergence Signal Processing
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• v.8 no.3
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• pp.222-226
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• 2007

In this paper we composed the dual fuzzy rules using each region of specific points and $e-{\Delta}e$ phase plane In order to make dual fuzzy rule base. We composed the fuzzy control rules which can decrease rise time, delay time, maximum overshoot than basic fuzzy control rules. proposed method is alternately use at specific points of $e-{\Delta}e$ phase plane with two fuzzy control rules that is one control rule occruing the steady state error in transient region and another fuzzy control rule use to decrease the steady state error and rapidly converge at the convergence region. Also, two fuzzy control rules in the $e-{\Delta}e$ phase plane decide the change time according to response characteristics of plants. In order to confirm thef proposed algorithm. As the results of experiments through the hydraulic servo motor control system with a DSP processor, We verified that proposed dual fuzzy control rules get the good response compare with the basic fuzzy control rule.

• Journal of the Semiconductor & Display Technology
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• v.6 no.1 s.18
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• pp.31-36
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• 2007

Effect of coulomb friction and backlash on the single loop position control has been studied for the precision position control. We have showed the limit cycle on the single loop system which used a ball screw that had the backlash. Also, we have made an inner loop with a classical velocity and torque controller which was forcing the current of d axis to be zero by using a permanent-magnet synchronous motor and composed the outer loop with linear encoder for sensing a position of the loader. Also, we have used least squares fit(LSF) observer for reducing noise when we got velocity from position outputs. We have shown a good result by using the dual loop through simulation and experiment.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1883-1886
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• 2005

In this paper, a decoupled dual servo (DDS) stage for ultra-precision scanning system with large working range is introduced. In general, dual servo systems consist of a fine stage for short range and a coarse stage for long range. The proposed DDS also consists of a $XY\theta$ fine stage for handling and carrying workpieces and one axis coarse stage. Its coarse stage consists of air bearing guide system and a coreless linear motor with force ripple. The fine has four voice coil motors(VCM) as its actuator. According to a VCM's nature, there are no mechanical connections between coils and magnetic circuits. Moreover, VCM doesn't have force ripples due to imperfections of commutation components of linear motor systems - currents and flux densities. However, due to the VCM's mechanical constraints the working range of the fine is about $25mm^2$. To break that hurdle, the coarse stage with linear motors is used to move the fine about 500mm. Because of the above reasons, the proposed DDS can achieve higher precision scanning than other stages with only one servo. With MATLAB's Sequential Quadratic Programming (SQP), the VCMs are optimally designed for the highest force under conditions and constraints such as thermal dissipations due to its coil, its size, and so on. And for their movements without any frictions, guide systems of the DDS are composed of air bearings. To get precisely their positions, a linear scale with 5nm resolution are used for the coarse stage's motion and three plane mirror laser interferometers with 5nm for the fine's $XY\theta$ motions. With them, on scanning the two stages have same trajectories. The control algorithm is named Parallel method. The embodied ultra-precision scanning system has sub 100nm following error and in-positioning stability.

• Journal of Mechanical Science and Technology
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• v.20 no.11
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• pp.1834-1847
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• 2006

A robust minimum-time control (RMTC) strategy is addressed and it is extended to the dual-stage servo design. Rather than conventional switching type sub-optimal controls, it is a reference following control approach where the predetermined minimum-time trajectory (MTT) is tracked by the perturbation compensator based feedback controller. First, the minimum-time trajectory for a mass-damper system is derived. Then, the perturbation compensator to achieve robust tracking performance in spite of model uncertainty and external disturbance is suggested. The RMTC is also applied to the dual-stage positioner which consists of coarse actuator and fine one. To best utilize the actuation redundancy of the dual-stage mechanism, a null-motion controller to actively regulate the relative motion between the two stages is formulated. The performance of RMTC is validated through simulation and experiment.

• Journal of Institute of Control, Robotics and Systems
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• v.11 no.6
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• pp.484-491
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• 2005

Using a disturbance observer is effective in enhancing the performance of dynamic system in presence of disturbances. Although various types of disturbance observers have been proposed to improve sensitivity of systems, there exist poor transient responses due to cross-couplings among disturbance observer loops. In this paper, dual disturbance observer (DOB) is proposed to reduce the effects of the cross-couplings. A different type of loop transfer function is proposed for external disturbance observer. While improving the sensitivity function by adding external DOB, it also provides improved complementary sensitivity function. The proposed dual DOB is applied to a commercial optical disk drive tracking system. It is shown that the dual DOB is an effective method in rejecting the effect of disturbance as well as improving the tracking performance.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1871-1874
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• 2005

The direct write FIB technology has several advantages over contemporary micro-machining technology, including better feature resolution with low lateral scattering and capability of maskless fabrication. Therefore, the application of FIB technology in micro fabrication has become increasingly popular. In recent model of FIB, however the feeding system has been a very coarse resolution of about a few ${\mu}m$. Our research is the development of nano stage of 200mm strokes and 10nm resolutions. Also, this stage should be effectively operating in ultra high vacuum of about $1x10^{-7}$ torr. This paper presents the discussion and results of CAE of the 2 axes stages. we have estimated the stable static and dynamic characteristics for dual servo system. Therefore the 2 axes stages developed and future work are introduced at the end of the paper.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.12
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• pp.163-170
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• 2002

The quality of a precision product, in general, relies on the accuracy and precision of its manufacturing and inspection process. In many cases, the level of precision in the manufacturing and inspection system is also dependent on the positioning capability of tool with respect to the work piece in the process. Recently the positioning accuracy level has reached to the level of submicron and long range of motion is required. For example, for 1 GDARM lithography, 20nm accuracy and 300mm stroke needs. This paper refers to the lithography stage especially to fine stage. In this study, for long stroke and high accuracy, the dual servo system is proposed. For the coarse actuator, LDM (Linear DC Motor) is used and for fine one VCM is used. In this study, we propose the new structure of VCM for the fine actuator. It is 3 axis precision positioning stage for an aligner system. After we perform the optimal design of the stage to obtain the maximum force, which is related to the acceleration of the stage to accomplish throughput of product. And we controlled this fine stage with TDC. So we obtained 50nm resolution. So later more works will be done to obtain better accuracy.

• Journal of the Semiconductor & Display Technology
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• v.3 no.2
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• pp.23-26
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• 2004

Thin film is one of the most general structures used in micro-electro-mechanical systems (MEMS). To measure the mechanical properties of SU-8 film, tensile testing was adopted which offers not only elastic modulus but also yield strength and plastic deformation by load-displacement curve. Tensile testing system was constructed with linear guided servo motor for actuation, load cell for force measurement and dual microscope for strain measurement.

• 제어로봇시스템학회:학술대회논문집
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• 2000.10a
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• pp.463-463
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• 2000

A dual-stage positioner for fast and fine robotic manipulations is presented. By adopting the merits of both coarse and fine actuator, a desirable system having the capacity of large workspace with high resolution of motion is enabled. We have constructed an ultra precision XY positioner with dual-stage mechanism where the PZT driven fine stage is mounted on the motor driven XY positioner and applied it to fine tracking controls and micro-tele operations as a slave manipulator. We describe essential merits of the compound actuation mechanism and some control strategies to successfully utilize it with proper servo system design. Through experimental results, the effectiveness of the coarse/fine manipulation by the dual-stage positioner will be shown.

• Proceedings of the KIEE Conference
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• 2004.11c
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• pp.738-740
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• 2004

The disturbance observer is effective in enhancing the performance of position control in high speed optical disk drive systems(ODDS). It is known that error based modified disturbance observer (EM-DOB) is more effective structure than general DOB. It has a simple structure and realization, but it loses robustness. We propose a dual modified disturbance observer(Dual mDOB). It consists of internal loop EM-DOB and external loop DOB. Those loops are designed for different objects. We see that the dual mDOB is an effective method for tracking performance.