• 한국진공학회:학술대회논문집
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• 한국진공학회 2008년도 제35회 하계학술대회 초록집
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• pp.356-356
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• 2008

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.102-102
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• 2011

인공위성이 임무를 수행하는 우주환경은 지상 환경과 달리 고진공 및 극저온의 극한환경으로 지상에서는 제대로 작동하는 것으로 관찰되더라도 우주환경에서는 예상하지 못한 기능장애를 일으켜 위성의 성능에 치명적인 영향을 미치기도 한다. 이에 10-5 torr 이하의 고진공과 -180$^{\circ}C$ 이하의 극저온 환경을지상에서 모사하여 위성체의 안정성 및 신뢰성을 시험한다. 시험에는 열진공챔버라고 불리는 우주환경모사기가 사용이 되며, 기본적으로 챔버 내부 진공형성이 중요하다. 우주환경의 모사를 위해 먼저 저진공펌프로 10-2 Torr 의 저진공을 형성한 후 Turbo-molecular pump 및 Cryopump를 이용하여 10-5 Torr 이하의 고진공을 형성하게 된다. 본 논문에서는 기존 우주환경모사기에 부착된 oil type rotary pump 및 구형 turbo-molecular pump의 교체 과정을 기술한다. 특히, 저진공펌프의 경우는 챔버 내부로의 oil 역류로 인한 오염 문제를 방지하기 위하여 dry type의 펌프가 설치되었다.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2011년도 추계학술대회 논문집
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• pp.264-270
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• 2011

The goal of this study is a stability evaluation through eigenvalue and rotor dynamics analysis of the vacuum pump. The vacuum pump used is a roots type pump, one of the dry middle vacuum pumps, is necessary at the procedure to produce semiconductor and display. The eigenvalue evaluation is solved by numerical analysis through using Modal test and 2D 3D models. Both the experiment and the analysis result are similar, the analysis result using 2D is more oculate the 3D model comparing with test result. So rotor dynamic evaluation is performed through using 2D model. Rotor dynamic evaluation used the campbell diagram and root locus map which were acquired by complex eigenvalue analysis. And we checked minimum clearance of vacuum pump composition between two rotors through unbalance response analysis. Thus, vacuum pump, the target object of this study, was evaluated to be operated stably.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2008년도 제34회 동계학술대회 초록집
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• pp.265-265
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• 2008

• 한국진공학회지
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• 제8권3B호
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• pp.257-261
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• 1999

The claw pump, one of oil-less dry pumps developed to solve problems found in vacuum systems pumped by oil-sealed rotary pumps, has been widely used separately or as a part of compound structure with a roots pump. The claw pump has some merits such as a high pumping speed, a high compression ratio, and relatively little heat generation. The high compression ratio of the claw pump is compression ratio, and relatively little heat generation. The high compression ratio of the claw pump is based on efficient sweeping action of the special type rotor and an intrinsic self-valving mechanism. The contour of the rotor with claw-type blade is designed basically to make two rotors revolve smoothly without touching with each other, and related dimensions are determined by required pumping speed, compression ratio, power demand and diameter of the rotor axis. In this paper the procedure of designing the rotor of the claw pump is described and factors influencing the pump performance are analyzed.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2006년도 추계학술대회논문집
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• pp.523-530
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• 2006

A rotordynamic analysis was performed with a dry vacuum pump, which is a major equipment in modern semiconductor and LCD manufacturing processes. The system is composed of screw rotors, lobes picking air, helical gears, driving motor, and support rolling element hearings of rotors and motor. The driving motor-screw rotor system has a rated speed of 6,300rpm, and was modeled utilizing a rotordynamic FE method for analysis, which was verified through the results of its 3-D finite element model. As loadings on the bearings due to the gear action were significant in the system considered, each resultant bearing load was calculated determinately and indeterminately by considering the generalized forces of the gear action as veil as the rotor itself. Each resultant hearing loading was used in calculating each stiffness of rolling element bearings. Design goals are to achieve wide separation margins of critical speeds and favorable unbalance responses of the rotor in the operating range. Then, a complex rotordynamic analysis of the system was carried out to evaluate its forward synchronous critical speeds, whirl natural frequencies and mode shapes, and unbalance responses under various unbalance locations. Results show that the entire system is well designed in the operating range. In addition, the procedure of rotordynamic analysis for dry vacuum pump rotor-bearing system was proposed and established.

• 한국유체기계학회 논문집
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• 제10권3호
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• pp.47-54
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• 2007

A rotordynamic analysis was performed with a dry vacuum pump, which is a major equipment in modem semiconductor and LCD manufacturing processes. The system is composed of screw rotors, lobes picking air, helical gears, driving motor, and support rolling element bearings of rotors and motor. The driving motor-screw rotor system has a rated speed of 6,300rpm, and was modeled utilizing a rotordynamic FE method for analysis, which was verified through the results of its 3-D finite element model. As loadings on the bearings due to the gear action were significant in the system considered, each resultant bearing load was calculated determinately and indeterminately by considering the generalized forces of the gear action as well as the rotor itself. Each resultant bearing loading was used in calculating each stiffness of rolling element bearings. Design goals are to achieve wide separation margins of critical speeds and favorable unbalance responses of the rotor in the operating range. Then, a complex rotordynamic analysis of the system was carried out to evaluate its forward synchronous critical speeds, whirl natural frequencies and mode shapes, and unbalance responses under various unbalance locations. Results show that the entire system is well designed in the operating range. In addition, the procedure of rotordynamic analysis for dry vacuum pump rotor-bearing system was proposed and established.

• 한국소음진동공학회논문집
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• 제17권10호
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• pp.967-975
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• 2007

A rotordynamic analysis was performed with a dry vacuum pump, which is a major equipment in modern semiconductor and LCD manufacturing processes. The system is composed of screw rotors, lobes picking air, helical gears, driving motor, and support rolling element bearings of rotors and motor. The driving motor-screw rotor system has a rated speed of 6,300 rpm, and was modeled utilizing a rotordynamic FE method for analysis, which was verified through 3-D FE analysis and experimental modal analysis. As loadings on the bearings due to the gear action were significant in the system considered, each resultant bearing load was calculated by considering the generalized forces of the gear action as well as the rotor itself. Each resultant bearing loading was used in calculating each stiffness of rolling element bearings. Design goals are to achieve wide separation margins of lateral and torsional critical speeds, and favorable unbalance responses of the rotor in the operating range. Then, a complex rotordynamic analysis of the system was carried out to evaluate its forward synchronous critical speeds, whirl natural frequencies and mode shapes, unbalance responses under various unbalance locations, and torsional interference diagram. Results show that the entire system is well designed in the operating range. In addition, the procedure of rotordynamic analysis for dry vacuum pump rotor-bearing system was proposed and established.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2006년도 춘계학술대회논문집
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• pp.1313-1316
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• 2006

Demands of high volume dry vacuum pumps on the domestic semiconductor and LCD industries are rapidly increasing as the size of wafers and LCD is increasing. This study introduces a new experimental setup for testing the reliability of vacuum pumps. The test system was designed to measure the acoustic pressure and mechanical vibration levels simultaneously. It is shown that the test system enables the analysis and evaluation of the performance of dry pumps under the different gas-load conditions. Detailed experimental result are shown to enable us to examine the characteristics and performance of dry pumps.

• 한국진공학회지
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• 제20권3호
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• pp.165-175
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• 2011

본 논문에서는 건식 진공펌프에서 측정한 다중 변수로 구성된 배치데이터의 통계적인 특성을 소개한다. 흡입구 및 배출구 압력과 부스터/드라이 펌프의 소비전류와 같은 상태변수의 변위분포는 2개나 3개의 특정적인 구간으로 나뉘는 특성이 있다. 이런 관측을 통해 발견한 통계학적 특성을 나타내기 위해 적응형 인자 모델(APM)을 사용하였다. APM 모델기반의 배치 데이터는 건식 진공펌프의 상태를 진단하는데 적절함을 증명하였고, 이전의 동적 시간 왜곡 알고리즘과 비교하였을 때 계산시간 및 필요 메모리 면에서 효율적임을 확인하였다.