• Title/Summary/Keyword: Dry deposition

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Reverse Characteristics of Field Plate Edge Terminated SiC Schottky Diode with $SiO_2$ formed Various Methods (산화막 형성 방법에 따른 전계판 구조 탄화규소 쇼트키 다이오드의 역전압 특성)

  • Bahng, W.;Cheong, H.J.;Kim, N.K.;Kim, S.C.;Seo, K.S.;Kim, H.W.;Cheong, K.Y.;Kim, E.D.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.07a
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    • pp.409-412
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    • 2004
  • Edge termination technique is essential fer the fabrication of high volage devices. A proper edge termination technique is also needed in the fabrication of Silicon Carbide power devices for obtaining a stable high blocking voltage properties. Among the many techniques, the field plate formation is the easiest one that can utilize it for commercial usage. The growth of thick thermal oxide is difficult for SiC, however. In this paper, 6A grade SiC schottky barrier diodes(SBD) were fabricated with field plate edge termination. The oxides which is field plate were formed various methods such as dry oxidation, 10% $N_2O$ nitrided oxidation and PECVD deposition. The reverse characteristics of the SiC SBD with various oxide field plate were investigated.

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Fiber network with superhydrophilic Si-DLC coating

  • Kim, Seong-Jin;Mun, Myeong-Un;Lee, Gwang-Ryeol;Kim, Ho-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.363-363
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    • 2010
  • The high capillarity of a plastic fiber network having superhydrophilic Si-DLC coating is studied. Although the superhydrophilic surface maximize wetting ability on the flat surface, there remains a requirement for the more wettable surface for various applications such as air-filters or liquid-filters. In this research, the PET non-woven fabric surface was realized by superhydrophilic coating. PTE non-woven fabric network was chosen due to its micro-pore structure, cheap price, and productivity. Superhydrophobic fiber network was prepared with a coating of oxgyen plasma treated Si-DLC films using plasma-enhanced chemical vapor deposition (PECVD). We first fabricated superhydrophilic fabric structure by using a polyethylene terephthalate (PET) non-woven fabric (NWF) coated with a nanostructured films of the Si-incorporated diamond-like carbon (Si-DLC) followed by the plasma dry etching with oxygen. The Si-DLC with oxygen plasma etching becomes a superhydrophilic and the Si-DLC coating have several advantages of easy coating procedure at room temperature, strong mechanical performance, and long-lasting property in superhydrophilicity. It was found that the superhydrophobic fiber network shows better wicking ability through micro-pores and enables water to have much faster spreading speed than merely superhydrophilic surface. Here, capillarity on superhydrophilic fabric structure is investigated from the spreading pattern of water flowing on the vertical surface in a gravitational field. As water flows on vertical flat solid surface always fall down in gravitational direction (i.e. gravity dominant flow), while water flows on vertical superhydrophilic fabric surface showed the capillary dominant spreading.

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Fabrication of sub-micron sized organic field effect transistors

  • Park, Seong-Chan;Heo, Jeong-Hwan;Kim, Gyu-Tae;Ha, Jeong-Suk
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.84-84
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    • 2010
  • In this study, we report on the novel lithographic patterning method to fabricate organic-semiconductor devices based on photo and e-beam lithography with well-known silicon technology. The method is applied to fabricate pentacene-based organic field effect transistors. Owing to their solubility, sub-micron sized patterning of P3HT and PEDOT has been well established via micromolding in capillaries (MIMIC) and inkjet printing techniques. Since the thermally deposited pentacene cannot be dissolved in solvents, other approach was done to fabricate pentacene FETs with a very short channel length (~30nm), or in-plane orientation of pentacene molecules by using nanometer-scale periodic groove patterns as an alignment layer for high-performance pentacene devices. Here, we introduce the atomic layer deposition of $Al_2O_3$ film on pentacene as a passivation layer. $Al_2O_3$ passivation layer on OTFTs has some advantages in preventing the penetration of water and oxygen and obtaining the long-term stability of electrical properties. AZ5214 and ma N-2402 were used as a photo and e-beam resist, respectively. A few micrometer sized lithography patterns were transferred by wet and dry etching processes. Finally, we fabricated sub-micron sized pentacene FETs and measured their electrical characteristics.

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Growth of Pinus densiflora Seedlings in Artificially Acidified Soils (인위적인 토양 산성화가 소나무 묘목의 생장에 미치는 영향)

  • Lee, Choong-Hwa;Lee, Seung-Woo;Kim, Eun-Young;Kim, Young-Kul;Byun, Jae-Kyoung;Won, Heong-Gyu;Jin, Hyun-O
    • The Korean Journal of Ecology
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    • v.28 no.6
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    • pp.389-393
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    • 2005
  • This study was carried out to investigate the effects of soil acidification on the growth of 3-year-old Pinus densiflora seedlings grown for 21 weeks in brown forest soils acidified with $H_2SO_4$ solution. The concentrations of Al in the acidified soils were increased with increasing amount of $H^+$ added to the soil. The total dry weight of the seedlings was reduced by the addition of the $H_2SO_4$ solution. In addition, there was a strong positive correlation (r=0.97, p<0.01) between the dry weight of the seedlings and the molar (Ca+Mg+K)/Al ratio of the soil. The seedlings with the molar (Ca+Mg+K)/Al ratio of 1.0 resulted from approximately 50% growth reduction compared with the control value. The results suggest that the molar (Ca+Mg+K)/Al ratio of the soil may be a useful indicator for assessing the critical load of acid deposition.

Reducing the Test Time for Chemical/Mechanical Durability of Polymer Electrolyte Membrane Fuel Cells (고분자연료전지의 화학적/기계적 내구성 평가 시간 단축)

  • Sohyeong Oh;Donggeun Yoo;Kim Myeonghwan;Park Jiyong;Choi Yeongjin;Kwonpil Park
    • Korean Chemical Engineering Research
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    • v.61 no.4
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    • pp.517-522
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    • 2023
  • A chemical/mechanical durability test of polymer membrane evaluation method is used in which air and hydrogen are supplied to the proton exchange membrane fuel cell (PEMFC) and wet/dry is repeated in the open circuit voltage (OCV) state. In this protocol, when wet/dry is repeated, voltage increase/decrease is repeated, resulting in electrode degradation. When the membrane durability is excellent, the number of voltage changes increases and the evaluation is terminated due to electrode degradation, which may cause a problem that the original purpose of membrane durability evaluation cannot be performed. In this study, the same protocol as the department of energy (DOE) was used, but oxygen was used instead of air as the cathode gas, and the wet/dry time and flow rate were also increased to increase the chemical/mechanical degradation rate of the membrane, thereby shortening the durability evaluation time of the membrane to improve these problems. The durability test of the Nafion 211 membrane electrode assembly (MEA) was completed after 2,300 cycles by increasing the acceleration by 2.6 times using oxygen instead of air. This protocol also accelerated degradation of the membrane and accelerated degradation of the electrode catalyst, which also had the advantage of simultaneously evaluating the durability of the membrane and the electrode.

Effects of the Supplementation Period of Spent Composts of Selenium-Enriched Mushrooms on Plasma Glutathione Peroxidase Activity and Selenium Deposition in Finishing Hanwoo Steers (셀레늄강화 버섯폐배지의 급여기간이 비육후기 거세한우의 혈중 글루타치온 과산화효소 활성 및 조직내 셀레늄축적에 미치는 영향)

  • 이성훈;박범영;여준모;김완영
    • Journal of Animal Science and Technology
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    • v.48 no.6
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    • pp.897-906
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    • 2006
  • This study was conducted to determine effects of different supplementation periods (2, 3 and 4 months) of spent composts of Se-enriched mushrooms (Se-SMC) on plasma glutathione peroxidase (GSH-Px) activity and selenium deposition of finishing Hanwoo steers for the optimal supplementing period determination in order to produce Se-fortified Hanwoo beef. In the present study, 30 Hanwoo steers were allotted to treatments in six groups of five steers per pen. Treatments were separated into control and Se-SMC for each supplementation period. Dietary selenium contents were 0.1 and 0.9 ppm for control and Se-SMC treatments, respectively. At the end of each supplementation period, steers by periods were slaughtered to collect hind leg and liver samples for their selenium analyses. Blood samples were taken to analyze whole blood Se concentration and plasma GSH-Px activity at the last day of each supplementation period. Dry matter intakes were unaffected by Se-SMC and supplementation periods. In addition, average daily gain was not different between control and Se-SMC treatments and among supplementation periods. There was no difference for total body weight gain between control and Se-SMC treatments within each supplementation period. The supplementation of Se-SMC significantly (P<0.001) increased whole blood Se concentration, but whole blood selenium concentration was not affected by the supplementation period. Furthermore, plasma GSH-Px activity showed similar trend as shown in the pattern of whole blood Se concentration, but no difference by supplementation periods was observed. Selenium contents in hind legs significantly (P<0.05) increased with increasing supplementation periods, and also they were significantly (P<0.001) higher for Se-SMC supplementation groups in comparison to controls. However, there was no difference for selenium contents of hind legs between three and four months supplementation. Selenium contents in livers tended to slightly increase with increasing supplementation periods with no significant difference, but they were significantly (P<0.01) higher for Se-SMC supplementation groups compared with controls within the same period. The results indicated that the optimal Se-SMC supplementation period for the selenium deposition in Hanwoo steers might be around two or three months when we considered selenium contents in hind legs and livers.

R&D Review on the Gap Fill of an Engineered Barrier for an HLW Repository (고준위폐기물처분장 공학적방벽의 갭채움재 기술현황)

  • Lee, Jae Owan;Choi, Young-Chul;Kim, Jin-Seop;Choi, Heui-Joo
    • Tunnel and Underground Space
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    • v.24 no.6
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    • pp.405-417
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    • 2014
  • In a high-level waste repository, the gap fill of the engineered barrier is an important component that influences the performance of the buffer and backfill. This paper reviewed the overseas status of R&D on the gap fill used engineered barriers, through which the concept of the gap fill, manufacturing techniques, pellet-molding characteristics, and emplacement techniques were summarized. The concept of a gap fill differs for each country depending on its disposal type and concept. Bentonite has been considered a major material of a gap fill, and clay as an inert filler. Gap fill was used in the form of pellets, granules, or a pellet-granule blend. Pellets are manufactured through one of the following techniques: static compaction, roller compression, or extrusion-cutting. Among these techniques, countries have focused on developing advanced technologies of roller compression and extrusion-cutting techniques for industrial pellet production. The dry density and integrity of the pellet are sensitive to water content, constituent material, manufacturing technique, and pellet size, and are less sensitive to the pressure applied during the manufacturing. For the emplacement of the gap fill, pouring, pouring and tamping, and pouring with vibration techniques were used in the buffer gap of the vertical deposition hole; blowing through the use of shotcrete technology and auger placement and compaction techniques have been used in the gap of horizontal deposition hole and tunnel. However, these emplacement techniques are still technically at the beginning stage, and thus additional research and development are expected to be needed.

Estimation of Solid Sediments Load by Sewer and Land Surface for Maintenance of Combined Sewer Systems (합류식 관거 유지관리를 위한 하수 및 지표면 고형물 부하량 산정)

  • Lee Jae-Soo;Park Moo-Jong
    • Journal of Korea Water Resources Association
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    • v.39 no.6 s.167
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    • pp.533-544
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    • 2006
  • The deposition of solids in combined sewer systems results in a loss of flow capacity that may restrict flow and cause a local flooding and enhanced solids deposition. In order to solve these problems and proper pipe management, estimation of solid loads from sewer and surface in a drainage basin is needed but this task is very difficult and extremely expensive. In this study, generalized procedures for estimating sewer solid loads during dry weather in combined sewer systems and for estimating solid loads on surface in a drainage basin developed by the U. S. Environmental Protection Agency were applied and analyzed in Gunja drainage basin in Korea. As result, the estimated solid loads from sewer and surface are 205.8,759kg/yr and 1,321,993kg/yr respectively, and total solid loads is 1,527,752kg/yr. The estimated solid removal from street cleaning, dredging from pipe system and pumping house is 1,486,636kg/yr. Therefore, the applied methods show resonable results. More reliable estimation can be achieved if long-term measurements and adjustment of estimation equations are carried out, and this estimation methods can be used usefully for the management of combined sewer system with reduction of cost and effort.

Characterization of GaN epitaxial layer grown on nano-patterned Si(111) substrate using Pt metal-mask (Pt 금속마스크를 이용하여 제작한 나노패턴 Si(111) 기판위에 성장한 GaN 박막 특성)

  • Kim, Jong-Ock;Lim, Kee-Young
    • Journal of the Microelectronics and Packaging Society
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    • v.21 no.3
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    • pp.67-71
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    • 2014
  • An attempt to grow high quality GaN on silicon substrate using metal organic chemical vapor deposition (MOCVD), herein GaN epitaxial layers were grown on various Si(111) substrates. Thin Platinum layer was deposited on Si(111) substrate using sputtering, followed by thermal annealing to form Pt nano-clusters which act as masking layer during dry-etched with inductively coupled plasma-reactive ion etching to generate nano-patterned Si(111) substrate. In addition, micro-patterned Si(111) substrate with circle shape was also fabricated by using conventional photo-lithography technique. GaN epitaxial layers were subsequently grown on micro-, nano-patterned and conventional Si (111) substrate under identical growth conditions for comparison. The GaN layer grown on nano-patterned Si (111) substrate shows the lowest crack density with mirror-like surface morphology. The FWHM values of XRD rocking curve measured from symmetry (002) and asymmetry (102) planes are 576 arcsec and 828 arcsec, respectively. To corroborate an enhancement of the growth quality, the FWHM value achieved from the photoluminescence spectra also shows the lowest value (46.5 meV) as compare to other grown samples.

The effect of immobilization of heparin and bone morphogenic protein-2 to bovine bone substitute on osteoblast-like cell's function

  • Huh, Jung-Bo;Kim, Sung-Eun;Song, Se-Kyung;Yun, Mi-Jung;Shim, Ji-Suk;Lee, Jeong-Yo;Shin, Sang-Wan
    • The Journal of Advanced Prosthodontics
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    • v.3 no.3
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    • pp.145-151
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    • 2011
  • PURPOSE. This study was performed to investigate the ability of recombinant human-bone morphogenic protein-2 immobilized on a heparin-grafted bone substrate to enhance the osteoblastic functions. MATERIALS AND METHODS. The Bio-$Oss^{(R)}$, not coated with any material, was used as a control group. In rhBMP-2-Bio-$Oss^{(R)}$ group, rhBMP-2 was coated with Bio-$Oss^{(R)}$ using only deep and dry methods (50 ng/mL, 24 h). In heparinized rhBMP-2-Bio-$Oss^{(R)}$ group, dopamine was anchored to the surface of Bio-$Oss^{(R)}$, and coated with heparin. rhBMP-2 was immobilized onto the heparinized- Bio-$Oss^{(R)}$ surface. The release kinetics of the rhBMP-2-Bio-$Oss^{(R)}$ and heparinized rhBMP-2-Bio-$Oss^{(R)}$ were analyzed using an enzyme-linked immunosorbent assay. The biological activities of the MG63 cells on the three groups were investigated via cytotoxicity assay, cell proliferation assay, alkaline phosphatase (ALP) measurement, and calcium deposition determination. Statistical comparisons were carried out by one-way ANOVA test. Differences were considered statistically significant at $^*$P<.05 and $^{**}$P<.001. RESULTS. The heparinized rhBMP-2-Bio-$Oss^{(R)}$ showed more sustained release compared to the rhBMP-2-Bio-$Oss^{(R)}$ over an extended time. In the measurement of the ALP activity, the heparinized group showed a significantly higher ALP activity when compared with the non-heparinized groups (P<.05). The MG63 cells cultivated in the group with rhBMP-2 showed increased calcium deposition, and the MG63 cells from the heparinized group increased more than those that were cultivated in the non-heparinized groups. CONCLUSION. Heparin increased the rhBMP-2 release amount and made sustained release possible, and heparinized Bio-$Oss^{(R)}$ with rhBMP-2 successfully improved the osteoblastic functions.