• Transactions on Electrical and Electronic Materials
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• v.14 no.1
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• pp.28-31
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• 2013

A volcano shaped gated Si-FEA (silicon field emitter array) was simply fabricated using sputtering as a gate electrode deposition and lift-off for the removal of the oxide mask, respectively. Due to the limited step coverage of well-controlled sputtering and the high aspect ratio in Si dry etch caused by high RF power, it was possible to obtain Si FEAs with a stable volcano shaped gate structure and to realize the restriction of gate leakage current in field emission characteristics. For 100 tip arrays and 625 tip arrays, gate leakage currents were restricted to less than 1% of the anode current in spite of the volcano-shaped gate structure. It was also possible to keep the emitters stable without any failure between the Si cathode and gate electrode in field emission for a long time.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.2
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• pp.60-69
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• 1998

Polysilicon surface mdoification tecnique is developed to reduce the sticking of microstructures fabricated by micromachining. Modified anti-sticking grain holes are simply formed by two-step dry eth without additional photolithography nor deposition of thin films. Both process-induced sticking and in-use sticking are successfully reduced more than two times by adopting grain holed polysilicon substrate. A sticking model for cantilever beam is derived. This model includes bending moment stems from stress gradient along the thickness directionof structural polysilicon. Because the surface tension of rinse liquid and the surface energy of the solids to be stuk tend to decrease in recently developed anti-sticking techniques, the effect of stress gradient will play an important role to analyze the sticking phenomena. Effect of the temperature during post-release rinse and dry is modelled and verified experimentally. Based on developed anti-sticking polysilicon structure and the sticking model, sticking of microstructure, fabricated by simple wet process including sacrificial layer etch and rinse with deionized water without special equimpment for post-release rinse and dry was alleviated more than 3.5 times.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.6
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• pp.1080-1086
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• 2007

The aim of this paper is to establish the optimum fabrication condition of specimens, using the Vapor Deposition Polymerization Method(VDPM), which is one of modesto prepare functional organic thin films using a dry process, and to develop a thin film type humidity sensor which has good humidity sensitive characteristics. The inner part of the film became denser and roughness of the film surface eased as curing temperature increased so that thickness of the film could be made uniform. This also shows the appropriate curing temperature was $250^{\circ}C$. The basic structure of the humidity sensor is a parallel capacitor which consists of three layers of Aluminum/Polyimide/Aluminum. The result of SEM and AFM measurement shows that the thickness of PI thin films decreased and the refraction increased as curing temperature increased, which indicates that a capacitance-type humidity sensor utilizing polyimide thin film is fabricated on a glass substrate. The characteristics of fabricated samples were measured under various conditions, and the samples had linear characteristics in the range of 20-80 %RH, independent of temperature change, and low hysteresis characteristic.

• Environmental Engineering Research
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• v.15 no.2
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• pp.111-115
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• 2010

To study the relationship between the concentrations of nitrogen in mountain streams, and anthropologic and natural factors, the water chemistry of the mountain streams in the entire Hyogo Prefecture, Japan, were investigated. A thousand mountain streams were investigated between 1998 and 2001. The concentrations of nitrate nitrogen ranged from 2.92 to 0.1 mg/L, with an arithmetic mean value of 0.45 mg/L. A number of streams showing more than 1.0 mg/L of nitrate nitrogen accounted for 8% of the mountain streams investigated. These results indicated that the concentrations of nitrate nitrogen in the mountain streams were low in the entire Hyogo Prefecture. In general, the mountain stream water in Hyogo Prefecture appears to not have been affected by wet and dry deposition originating from anthropologic sources in mountain streams and Japan. On the other hand, sites with more than 0.8 mg/L nitrate nitrogen were distributed over the entire Hyogo Prefecture, which were classified into five groups. Each group showed unique geographical, geological and anthropological characteristics. No common characteristic among five groups were discover. These results suggest that the cause of high concentrations of nitrogen in mountain streams is not from a uniform set of conditions.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.509-509
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• 2011

Superhydrophobic surfaces on alloyed steels were fabricated with a non-conventional method of plasma etching and subsequent water immersion procedure. High aspect ratio nanopatterns of nanoflake or nano-needle were created on the steels with various Cr content in its composition. With CF4 plasma treatment in radio-frequence chemical vapor deposition (r.-f. CVD) method, steel surfaces were etched and fluorinated by CF4 plasma, which induced the nanopattern evolution through the water immersion process. It was found that fluorine ion played a role as a catalyst to form nanopatterns in water elucidated with XPS and TEM analysis. The hierarchical patterns in micro- and nano scale leads to superhydrophobic properties on the surfaces by deposition of a hydrophobic coating with a-C:H:Si:O film deposited with a gas precursor of hexamethlydisiloxane (HMDSO) with its lower surface energy of 24.2 mN/m, similar to that of curticular wax covering lotus surfaces. Since this method is based on plasma dry etching & coating, precise patterning of surface texturing would be potential on steel or metal surfaces. Patterned hydrophobic steel surfaces were demonstrated by mimicking the Robinia pseudoacacia or acacia leaf, on which water was collected from the humid air using a patterned hydrophobicity on the steels. It is expected that this facile, non-toxic and fast technique would accelerate the large-scale production of superhydrophobic engineering materials with industrial applications.

• Electrical & Electronic Materials
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• v.10 no.3
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• pp.217-225
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• 1997

In this study, the PVDF organic thin film was fabricated by the physical vapor deposition method to be dry-process. The distance of heat source and substrate was 5[cm] and the temperature of substrate was 30[.deg. C], when the pressure had reached 2.0 x 10$^{-5}$ [Torr], the temperature of heat source was reached to 285[.deg. C] to heat at 6-8[.deg. C/min] rate, the shutter was opened and deposition was started. TG-DTA(Thermogravimetric-Differential Thermal Analysis) spectrum of PVDF pellets showed that endothermic peak arose at 170[.deg. C] and exothermic peak at 524[.deg. C], but that of thin PVDF film showed that endothermic peak arose at 145[.deg. C] and exothermic peak at 443[.deg C]. The current density was increased linearly with increasing voltage but increased nonlinearly with higher electric field than 250[kV/cm] and activation energy was about 0.667[eV] at the temperature of 30-90[.deg. C].

• Journal of Korean Society for Atmospheric Environment
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• v.11 no.4
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• pp.351-359
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• 1995

In order to investigate geochemical behaviors of artificial radionuclide($^{137}$ Cs), the fallout deposition of arificial radioisotope($^{137}$ Cs) was measured from May to October in 1994 at the Korea Ocean Research & Development Institute(KORDI), Ansan, Kyunggido, Korea. And to study radioisotopic behavior and cumulative action in soil, soil samples were collected from Kwang-Leung Forest, Kyunggidom and artificial radioisotope ($^{137}$ Cs) and natural radioisotope($^{210}$ Pb) were identified. The amount of $^{137}$ Cs in atmosphere collected by wet deposition process in May was found to be 4.95 to 11.96mBq m$^{-2}$ whereas the amounts of $^{137}$ Cs by dry deposition process in May and October were found to be 4.0mBq g$^{-1}$ and 3.0mBq g$^{-1}$ , respectively. The amount of $^{137}$ Cs accumulated in soil was measured to be 311mBq cm$^{-2}$ , which contained 83% of the total inputs from atmospheric fallout (374 mBq cm$^{-2}$ ) since 1960s. In addition, the accumulation rate and the annual flux of $^{210}$ Pb into soils were 0.32cm yr$^{-1}$ and 34 mBq cm$^{-2}$ yr$^{-1}$ , respectively. Conclusively, it was found that arificial radioisotopes were mainly from the stratosphere and soil resupension of continental China through the troposphere.

• Journal of Environmental Science International
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• v.30 no.7
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• pp.507-517
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• 2021

In this study, the bathymetric data acquired from 2018 to 2020 and the precipitation and suspended sediment data were analyzed for changes in bathymetry owing to the discharge from the Nakdong River barrier and environmental factors, especially the torrential rain in 2020. Sediment erosion and deposition processes are repeated because of complex environmental factors such as discharge from the Nakdong River barrier and the influence of waves generated from the external sea. In the first half of the year after the dry season, bathymetric data showed relative erosion trends, whereas in the second half after the flood season, deposition trends were identified owing to the increase in sediment transport. However, the data from the second half of 2020 showed a large amount of erosion, resulting in tendencies different to those of erosion in the first half and deposition in the second half of the year. This result is judged to be influenced by the weather in the summer of 2020. The torrential rain in the summer of 2020 resulted in a higher force of erosion than that of deposition. In summary, the tendency for erosion is more significant than that of sedimentation, especially in the main channel area of the Nakdong River.

• Journal of Korean Society for Atmospheric Environment
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• v.25 no.2
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• pp.99-107
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• 2009

This paper reviews the current status of mercury research on exposure and contamination, mercury emissions, emission limits and control technologies, long-range transport and deposition research, and mercury management policy in Korea. According to a monitoring of the Ministry of Environment and the Ministry of Health and Welfare, blood mercury levels among Koreans are $5{\sim}8$ times higher than those of U.S. and Germany. The most dominant source of exposure to mercury is through dietary intake. Emissions of mercury from coal-fired power plants are estimated 8.93 ton/year in 2004. Emissions of mercury from other important sources, such as waste incineration, steel and cement manufacturing and non-ferrous metal smelting operations are to be further investigated. A study on long-range transport of mercury suggests that the dry deposition flux over the Yellow Sea was much greater than those for other oceans. As a whole, the amounts of wet depositions of nitrogen and sulfur were 1.9 and 1.5 times larger than the amounts of dry depositions in each species, respectively. Substantial influence from China caused by high emissions in East China and westerly wind was possibly suggested. However, the influence from nitrogen emission in Korea was also confirmed. Korean Government has already adopted stringent emission limits on mercury for incinerators and boilers in 2005. However, emission limits for coal-fired power plants and non-ferrous metal smelters are rather relaxed. As the above mentioned two sources can be two most important sources of mercury emissions, control strategy for those sources are to be considered.

• Geomechanics and Engineering
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• v.23 no.1
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• pp.85-92
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• 2020

This study adopted soil test and laboratory physical model experiments to simulate the tailings impoundment accumulation process according to the principle of similarity. Relying on the practical engineering, it analyzed the tailings deposition characteristics on dry beach surface during the damming process, as well as the variation rules of dam saturation line. Results suggested that, the tailings particles gradually became finer along the dry beach surface to inside the impoundment. The particle size suddenly changed at the junction between the deposited beach and the water surface, which displayed an obvious coarsening phenomenon. Besides, the deposited beach exhibited the vertical feature of coarse upward and fine downward on the whole. Additionally, in the physical model, the saturation line elevated with the increase in dam height, and its amplitude was relatively obvious within the range of 1.0-4.5 m away from the initial dam. Under flood condition, the saturation line height was higher than that under normal condition on the whole, with the maximum height difference of 4 cm. This study could provide an important theoretical basis for further studies on dam failure experiments and the evolution rules of leaked tailings flow.