• Journal of the Korean Ceramic Society
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• v.40 no.4
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• pp.385-392
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• 2003

Sol-gel preparation technique using a chemical reaction of metal alkoxides has been widely used for the fabrication of various materials including ceramics. However, its mechanism has been studied till now because a number of chemical ways are possible from various alkoxides and additives. In this study, the mechanism of hydrolysis, condensation, and polymerization of alkoxides were investigated from the fabrication of lead-zirconate-titanate (PbZr$\_$x/Ti$\_$l-x/O$_3$; PZT) thin film that is used as various micro-actuator, transducer, and sensor because of its high electro-mechanical coupling factors and thermal stability. Furthermore, the fabrication process and characteristics of self-patternable PZT film using photosensitive stabilizer were studied in order to resolve the problem of physical damage and properties degradation during dry etching for device fabrication. Using an optimum condition to prepare the self-patternable PZT film, more than 5000 ${\AA}$ thick self-patternable PZT film could be fabricated by three times coating. The PZT film showed 28.4 ${\mu}$c/cm$^2$ of remnant polarization (Pr) and 37.0 kV/cm of coercive field (E$\_$c/).

• Journal of the Korean Vacuum Society
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• v.8 no.4A
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• pp.490-495
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• 1999

In 0.18 $\mu \textrm m$ LOGIC device, the etch rate of NMOS polysilicons is different from that of PMOS polysilicons due to the state of polysilicon to manufacture gate line. To control the etch profile, we tested the ratio of $Cl_2$/HBr gas and the total chamber pressure, and also we reduced Back He pressure to get the vertical profile. In the case of manufacturing the gate photoresist line, we used Bottom Anti-Reflective Coating (BARC) to protect refrection of light. As a result we found that $CF_4O_2$ gas is good to etch BARC, because of high selectivity and good photoresist line profile after etching BARC. in the results of the characterization of plasma damage to the antenna effect of gate oxide, NO type thin film(growing gate oxide in 0, ambient followed by an NO anneal) is better than wet type thin film(growing gate oxide in $0_2+H_2$ ambient).

• Journal of Korean Medicine for Obesity Research
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• v.21 no.1
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• pp.32-41
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• 2021

Objectives: We aim to observe the relation of body mass index (BMI) and the indicators of oral health. Methods: 400 subjects participated in the study. The BMI values are calculated from the height and weight. For the tongue diagnosis, we used the tongue imaging device to analyze the color, tongue coating, and tooth marks. We measured the concentration of hydrogen sulfide (H₂S) and methyl mercaptan (CH₃SH) to evaluate the halitosis. The dry mouth was evaluated through the measurement of saliva secretion and with the questionnaire asking the frequency of dry mouth. Results: The BMI values were significantly higher in the group with light-white and blue-purple colored tongue, and significantly lower for lightly-coated tongue. However, the correlation of BMI and the amounts of saliva secretion was not significant as well as in the correlation of BMI and the concentration of H₂S, CH₃SH. In tongue diagnosis, the subjects who had blue-purple colored tongue also had significantly higher H₂S and CH₃SH, but tendency of lower saliva secretion. Conclusion: We obtain data showing that BMI value and the indicators of oral health including tongue diagnosis have meaningful correlation.