• 마이크로전자및패키징학회지
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• 제15권2호
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• pp.63-67
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• 2008

전자산업의 소형화와 경량화 추세에 맞추어 최근 집적 칩(IC)이나 패키지를 적층시키는 삼차원 집적화(3D integration) 기술 개발은 차세대 핵심기술로 중요시되고 있다. 본 연구에서는 삼차원 집적화 공정 기술 중 하나인 초박막 실리콘 웨이퍼 연삭(grinding)공정이 웨이퍼 표면에 미치는 영향에 대해서 조사하였다. 실리콘 웨이퍼를 약 $30{\mu}m$과 $50{\mu}m$ 두께까지 연삭한 후, 미세연삭(fine grinding) 단계까지 처리된 시편을 건식 연마(dry polishing) 또는 습식 애칭(wet etching)으로 표면 처리된 시편들과 비교 분석하였다. 박막 웨이퍼 두께는 전계방시형 주사전자현미경과 적외선 분광기로 측정하였고, 표면 특성 분석을 위해선 표면주도(roughness), 표면손상(damage), 경도를 원자현미경, 투과정자현미경 그리고 나노인덴터(nano-indentor)를 이용하여 측정하였다. 표면 처리된 시편의 특성이 표면 처리되지 않은 시편보다 표면주도와 표면손상 등에서 현저히 우수함을 확인 할 수 있었으나, 경도의 경우 표면 처리의 유무에 관계없이 기존의 벌크(bulk)실리콘 웨이퍼와 오차범위 내에서 동일한 것으로 보였다.

• 대한기계학회논문집A
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• 제33권3호
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• pp.196-200
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• 2009

Lithium niobate ($LN:LiNbO_3$) is a compound of niobium, lithium and oxygen. The characteristics of LN are piezoelectricity, ferroelectricity and photoelectricity, and which is widely used in surface acoustic wave (SAW). To manufacture LN devices, the LN surface should be a smooth surface and defect-free because of optical property, but the LN material is processed difficult b traditional processes such as grinding and mechanical polishing (MP) because of its brittleness. To decrease defects, chemical mechanical polishing (CMP) was applied to the LN wafer. In this study, the suitable parameters such as down force and relative velocity, were investigated for the LN CMP process To improve roughness, the LN CMP was performed using the parameters that were the highest removal rate among process parameters. And, evaluation of optical property was performed by the optical reflectance.

• 한국세라믹학회지
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• 제36권7호
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• pp.711-717
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• 1999

Biaxial fracture behavior of alumina specimens with the diameter of 20mm and four kinds of thickness of 1.9, 2.3, 2.6 and 2.8mm was studied by the ball-on-3-ball test and the fracture results were analyzed by he analysis of variance (ANOCA), The strength measured with the down speed prescribed in ASTM showed that the measured strength was not dependent on the thickness of the specimens. Equivalent radius and crack-braching number were observed to increase lineraly with the thickness of the specimens. The jog direction was observed to study the effect of grinding direction on surface flaws. It is though that the surface finishing with #600 grit diamond wheel did not affect the surface flaws of the specimens.

• 한국정밀공학회지
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• 제30권3호
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• pp.324-330
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• 2013

This paper describes a novel method to surface large optics mirror with an extremely high hardness, which could replace the high cost of the repetitive off-line measurement steps and the large ultra-precision grinding machine with ultra-positioning control of 10 nm resolution. A lot of diamond pellet to be attached on the convex aluminum base consists of a grinding tool for the concave large mirror, and the tool was pressured down on the large mirror blank. The tool motion at an interval on the spiral path was controlled with each feed rate as the dwell time in the conventional computer-controlled polishing. The shape to be surfaced was measured directly by a touch probe on the machine without any separation of the mirror blank. Total 40 iterative steps of the surfacing and measurement could demonstrate the form error of RMS $7.8{\mu}m$, surface roughness of Ra $0.2{\mu}m$ for the mirror blank with diameter of 1 m and spherical radius of curvature of 5400 mm.

• Journal of Advanced Marine Engineering and Technology
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• 제31권6호
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• pp.753-760
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• 2007

For protection of the cylinder wall of the ball mill for grinding raw ore. the inner side of the cylinder is covered with rubber liner. The rubber is easily worn down because the rubber relatively soft compared with raw ore. So the rubber liner in the ball mill cylinder must be replaced almost every year and the cost for replacing rubber liner formidable. In this paper, for reducing or excluding the cost of replacing rubber liner the basalt liner is designed. The basalt materials are generally harder than raw ore and the basalt liner in the ball mill does not wear down and so it can be used almost permanently. The concave surfaces are made on the liner of the ball mill and the liner in the cylinder wall plays also the role of raising the steel balls mixed in the raw ore. The section profiles of the concave surface have an important effect on the performance of the ball mill. The deep concave grooves raise the steel balls to high levels and give the large potential energy to the steel balls impacting to the raw ore. But if the concave grooves are too deep. the steel balls raised too high by the concave grooves fly along the parabolic path and reach to the other side of cylinder wall and so the steel balls do not play the roles of grinding the raw ore. The forces acting to a steel ball in a concave groove of the cylinder liner are also analyzed in this paper. The formulas calculating the height and the impact point of the steel ball are introduced and presented. Based to these formulas, the optimum section profiles of the basalt liner are presented.