• 제목/요약/키워드: Doping layer

검색결과 478건 처리시간 0.035초

고주파 반응성 스퍼터링에 의한 p형 ZnSe/GaAs 박막성장 및 특성연구 (Growth of p-type ZnSe/GaAs epilayers by Rf reactive sputtering and Its characteristics)

  • 유평렬;정태수;신영진
    • 한국결정성장학회지
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    • 제9권1호
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    • pp.107-112
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    • 1999
  • 고주파 반응성 스퍼터링에 의하여 ZnSe/GaAs 박막을 성장하였다. 박막성장을 위한 본 시스템에서의 최적조건을 찾기 위하여 Ar 압력, sputter 입력전력, 기판온도, 기판과 target 간격의 변화 등을 시도하였다. 성장된 결정의 표면과 격면을 전자현미경으로 관찰했을 때 표면이 균일하게 성장되었으며 기판과 박막의 계면이 평활함을 알 수 있었다. DCRC 측정에 의해 격자 부정합에 의한 변형과 부정합률을 구했다. Photoluminescence 측정으로부터 질소를 주입하지않고 성장한 ZnSe/GaAs 시료는 bound exciton $I_2$세기가 $I_1$보다 우세하게 나타났고 bound exciton $I_2$은 깊은 받개준위인 $I_1\;^d$를 나타냄을 확인할 수 있었다. 성장 중에 질소를 주입한 ZnSe/GaAs 시료에서는 $I_1$ 봉우리가 $I_2$봉우리보다 세기가 매우 컸으며 반폭치값도 작게 나타났다. 이때 bound exciton $I_1$의 근원은 질소의 doping으로 인하여 방출되는 봉우리이며 p형 ZnSe/GaAs 박막으로 성장되었음을 확인하였다.

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The Effect of Transverse Magnetic field on Macrosegregation in vertical Bridgman Crystal Growth of Te doped InSb

  • Lee, Geun-Hee;Lee, Zin-Hyoung
    • 한국결정성장학회:학술대회논문집
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    • 한국결정성장학회 1996년도 The 9th KACG Technical Annual Meeting and the 3rd Korea-Japan EMGS (Electronic Materials Growth Symposium)
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    • pp.522-522
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    • 1996
  • An investigation of the effects of transverse magnetic field and Peltier effect on melt convection and macrosegregation in vertical Bridgman crystal grosth of Te doped InSb was been carried out by means of microstructure observation, Hall measurement, electrical resistivity measurement and X-ray analysis. Before the experiments, Interface stability, convective instability and suppression of convection by magnetic field were calculated theoretically. After doping 1018, 1019 cm-3 Te in InSb, the temperature of Bridgman furnace was set up at $650^{\circ}C$. The samples were grown in I.D. 11mm, 100mm high quartz tube. The velocity of growth was about 2${\mu}{\textrm}{m}$/sec. In order to obtain the suppression of convection by magnetic field in the middle of growth, 2-4KG magnetic field was set on the melt. For searching of the shape of solid-liquid interface and the actual velocity of crystal growth, let 2A current flow from solid to liquid for 1second every 50seconds repeatedly (Peltier effect). The grown InSb was polycrystal, and each grain was very sharp. There was no much difference between the sample with and without magnetic field at a point of view of microstructure. For the sample with Peltier effect, the Peltier marks(striation) were observed regularly as expected. Through these marks, it was found that the solid-liquid interface was flat and the actual growth velocity was about 1-2${\mu}{\textrm}{m}$/sec. On the ground of theoretical calculation, there is thermosolutal convection in the Te doped InSb melt without magnetic field in this growth condition. and if there is more than 1KG magnetic field, the convection is suppressed. Through this experiments, the effective distribution coefficients, koff, were 0.35 in the case of no magnetic field, and 0.45 when the magnetic field is 2KG, 0.7 at 4KG. It was found that the more magnetic field was applied, the more convection was suppressed. But there was some difference between the theoretical calculation and the experiment, the cause of the difference was thought due to the use of some approximated values in theoretical calculation. In addition to these results, the sample with Peltier effect showed unexpected result about the Te distribution in InSb. It looked like no convection and no macrosegregation. It was thought that the unexpected behavior was due to Peltier mark. that is, when the strong current flew the growing sample, the mark was formed by catching Te. As a result of the phenomena, the more Te containing thin layer was made. The layer ruled the Hall measurement. The values of resistivity and mobility of these samples were just a little than those of other reference. It was thought that the reason of this result was that these samples were due to polycrystal, that is, grain boundaries had an influence on this result.

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V2O5 도핑한 페라이트 페이스트로 제조된 칩인덕터의 자기적 특성 (Magnetic Properties of Chip Inductors Prepared with V2O5-doped Ferrite Pastes)

  • 제해준
    • 한국자기학회지
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    • 제13권3호
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    • pp.109-114
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    • 2003
  • NiCuZn 페라이트에 $V_2O_{5}$를 0~0.5 wt% 첨가하여 페라이트 페이스트를 준비한 후,스크린 인쇄법으로 내부전극이 4.5회 회전된 임의의 크기(7.7$\times$4.5$\times$l.4 mm)의 칩인덕터를 제조하여, $V_2O_{5}$ 첨가량에 따른 미세구조 및 자기적 특성 변화를 분석하였다. $V_2O_{5}$첨가량이 증가할수록 액상소결이 발달하여 페라이트 입계에 내부전극 Ag의 확산과 Cu 석출 현상이 촉진되고, 이로 인하여 과대입자성장이 발달되었다. 이러한 현상은 칩인덕터의 자기적 특성에 큰 영향을 미쳐,900 $^{\circ}C$에서 소결된 $V_2O_{5}$ wt% 첨가시편의 주파수 10 MHz에서의 인덕턴스 값이 3.7$\mu$H로 0.3 wt% 첨가 시편의 4.2 $\mu$H보다 작게 나타났는데, 이는 Ag와 Cu의 석출량이 많아짐에 따라 잔류응력 발생이 심화되기 때문으로 생각된다 또한 $V_2O_{5}$ 0.5 wt% 첨가한 시편의 경우 소결온도가 증가함에 따라 품질계수 값이 감소하였는데, 이 결과도 페라이트 입계에서의 Ag나 Cu의 금속성분의 석출량 증가 및 과대입자성장에 의한 입자크기 증대로 인하여 전체 전기비저항이 감소되기 때문인 것으로 생각된다. 결론적으로 자기적 특성을 고려할 때 0.3 wt%가 적정 첨가량으로 나타났다.

Photoemission Electron Micro-spectroscopic Study of the Conductive Layer of a CVD Diamond (001)$2{\times}1$ Surface

  • Kono, S.;Saitou, T.;Kawata, H.;Goto, T.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.7-8
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    • 2010
  • The surface conductive layer (SCL) of chemical vapor deposition (CVD) diamonds has attracting much interest. However, neither photoemission electron microscopic (PEEM) nor micro-spectroscopic (PEEMS) information is available so far. Since SCL retains in an ultra-high vacuum (UHV) condition, PEEM or PEEMS study will give an insight of SCL, which is the subject of the present study. The sample was made on a Ib-type HTHP diamond (001) substrate by non-doping CVD growthin a DC-plasma deposition chamber. The SCL properties of the sample in air were; a few tens K/Sq. in sheet resistance, ${\sim}180\;cm^2/vs$ in Hall mobility, ${\sim}2{\times}10^{12}/cm^2$ in carrier concentration. The root-square-mean surface roughness (Rq) of the sample was ~0.2nm as checked by AFM. A $2{\times}1$ LEED pattern and a sheet resistance of several hundreds K/Sq. in UHV were checked in a UHV chamber with an in-situ resist-meter [1]. The sample was then installed in a commercial PEEM/S apparatus (Omicron FOCUS IS-PEEM) which was composed of electro-static-lens optics together with an electron energy-analyzer. The presence of SCL was regularly monitored by measuring resistance between two electrodes (colloidal graphite) pasted on the two ends of sample surface. Figure 1 shows two PEEM images of a same area of the sample; a) is excited with a Hg-lamp and b) with a Xe-lamp. The maximum photon energy of the Hg-lamp is ~4.9 eV which is smaller that the band gap energy ($E_G=5.5\;eV$) of diamond and the maximum photon energy of the Xe-lamp is ~6.2 eV which is larger than $E_G$. The image that appear with the Hg-lamp can be due to photo-excitation to unoccupied states of the hydrogen-terminated negative electron affinity (NEA) diamond surface [2]. Secondary electron energy distribution of the white background of Figs.1a) and b) indeed shows that the whole surface is NEA except a large black dot on the upper center. However, Figs.1a) and 1b) show several features that are qualitatively different from each other. Some of the differences are the followings: the two main dark lines A and B in Fig.1b) are not at all obvious and the white lines B and C in Fig.1b) appear to be dark lines in Fig.1a). A PEEMS analysis of secondary electron energy distribution showed that all of the features A-D have negative electron affinity with marginal differences among them. These differences can be attributed to differences in the details of energy band bending underneath the surface present in SCL [3].

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폴리설폰 중공사막 구조에 대한 조용매 γ-Butyrolactone 첨가 영향 (Effect of Addition of Cosolvent γ-Butyrolactone on Morphology of Polysulfone Hollow Fiber Membranes)

  • 윤석복;이용택
    • 공업화학
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    • 제25권3호
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    • pp.274-280
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    • 2014
  • 비용매 유도 상전이(nonsolvent induced phase separation, NIPS) 방법을 이용하여 PSf (polysulfone) 중공사 분리막을 제조하였다. PSf/DMAc (N,N-dimethylacetamide)로 이루어진 고분자 용액에 조용매로 GBL (${\gamma}$-butyrolactone)을 첨가하였으며, 물을 응고용액으로 이용하여 중공사 분리막을 제조하였다. 제조된 분리막은 전자주사현미경을 이용하여 그 구조를 분석하였으며 그 결과 GBL의 농도가 증가함에 따라 밀집 구조의 분리활성층과 스폰지 형상의 지지층으로 구성된 이중구조 형태의 비대칭 다공성의 구조를 나타내었다. 또한, 조용매 GBL은 고분자용액의 용해도 상수를 변화시켜 열역학적 상분리 촉진 역할을 할 수 있음을 알 수 있었다. 고분자용액 내의 조용매 GBL의 존재 유무와 GBL의 농도, 첨가제의 농도 그리고 내부응고제의 종류에 따라 중공사 분리막의 구조뿐만 아니라 순수투과도 및 분리특성에도 매우 큰 영향을 미치는 것을 확인하였다. 내부응고제로 EG보다 PEG를 사용하였을 경우 $0.05{\mu}m$ PSL (polystyrene latex) bead를 이용하여 배제 특성을 측정한 결과 5% 정도로 소폭 감소한 반면 순수투과플럭스는 최대 130배 이상 증가하는 효과를 나타내었다.

비정질구조의 ZTO 박막에서 커패시턴스와 이동도 분석 (Analysis of Capacitance and Mobility of ZTO with Amorphous Structure)

  • 오데레사
    • 한국산학기술학회논문지
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    • 제20권6호
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    • pp.14-18
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    • 2019
  • 반도체의 전도성은 주로 케리어에 의해서 결정된다. 전도성이 높아지려면 케리어의 수가 많고 에너지 내의 트랩 준위를 만들어서 케리어들이 낮은 에너지로도 금지대역을 넘어설수 있도록 하는 도핑기법을 주로 사용한다. 케리어들은 결정질 결합구조를 갖으며, 계면불일치에 의하여 전도성이 떨어지는 경향도 있지만 대체적으로 고농도 도핑은 이동도를 높이는 대표적인 방법에 속한다. 하지만 비정질 결합구조에서도 전도성이 높아지는 현상이 나타나며, 본 연구에서는 트래핑현상과는 다른 터널링 현상에 의한 공간전하제한 전류가 흐르면서 전도성이 향상되고 이동도가 높아지는 현상에 대하여 관찰하였다. 비정질구조에서는 케리어수가 낮고 저항이 높아지며, 커패시턴스의 on/off 특성이 향상되면서 이동도가 높아지는 것을 확인하였다. ZTO 박막은 150도에서 열처리한 경우 커패시턴스의 on/off 특성이 향상되었으며, 충전과 방전하는 실험에서는, 충전과 방전되는 형상에 있어서 시간차이가 있었으며, n형과 p형의 구분이 없었으며, 공핍층과 같은 비정질 결합구조를 보여주었다. 비정질 결합구조는 전위장벽으로 볼 수 있으며, 전위장벽은 공간전하제한전류가 흐르게 되는 원천이기도 하며, 터널링현상에 의한 전도현상이 나타나는 원인이 된다. 따라서 비정질구조에서 이동도가 증가하는 현상이 나타났으며, 케리어가 희박함에도 불구하고 전도성이 증가하는 것을 확인하였다.

InAs 양자점 형성 방법이 양자점 적외선 소자 특성에 미치는 효과 (Effect of Growth Methods of InAs Quntum Dots on Infrared Photodetector Properties)

  • 서동범;황제환;오보람;노삼규;김준오;이상준;김의태
    • 한국재료학회지
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    • 제28권11호
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    • pp.659-662
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    • 2018
  • We report the properties of infrared photodetectors based on two kinds of quantum dots(QDs): i) 2.0 ML InAs QDs by the Stranski-Krastanov growth mode(SK QDs) and ii) sub-monolayer QDs by $4{\times}[0.3ML/1nm\;In_{0.15}Ga_{0.85}As]$ deposition(SML QDs). The QD infrared photodetector(QDIP) structure of $n^+-n^-(QDs)-n^+$ is epitaxially grown on GaAs (100) wafers using molecular-beam epitaxy. Both the bottom and top contact GaAs layers are Si doped at $2{\times}10^{18}/cm^3$. The QD layers are grown with Si doping of $2{\times}10^{17}/cm^3$ and capped by an $In_{0.15}Ga_{0.85}As$ layer at $495^{\circ}C$. The photoluminescence peak(1.24 eV) of the SML QDIP is blue-shifted with respect to that (1.04 eV) of SK QDIPs, suggesting that the electron ground state of SML QDIP is higher than that of the SK QDIP. As a result, the photoresponse regime(${\sim}9-14{\mu}m$) of the SML QDIP is longer than that (${\sim}6-12{\mu}m$) of the SK QDIP. The dark current of the SML QDIP is two orders of magnitude smaller value than that of the SK QDIP because of the inserted $Al_{0.08}Ga_{0.92}As$ layer.

Synthesis of barium-doped PVC/Bi2WO6 composites for X-ray radiation shielding

  • Gholamzadeh, Leila;Sharghi, Hamed;Aminian, Mohsen Khajeh
    • Nuclear Engineering and Technology
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    • 제54권1호
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    • pp.318-325
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    • 2022
  • In this study, composites containing undoped and barium-doped Bi2WO6:Ba2+were investigated for their shielding against diagnostic X-ray. At first, Bi2WO6 and barium-doped Bi2WO6 were synthesized with different weight percentages of barium oxide through a hydrothermal process. The as-synthesized nanostructures were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), energy-dispersive X-ray spectroscopy (EDS) and Raman spectroscopy (RS). After that, some shields were generated with undoped and barium-doped Bi2WO6:Ba2+ nanostructure particles incorporated into polyvinyl chloride (PVC) polymer with different thicknesses and 15% weight of the nanostructure. Finally, the prepared samples were exposed to an X-ray tube at 40, 80, and 120 kV voltages, 10 mAs and, 44.5 cm SID (i.e. the distance from the X-ray beam source to the specimen). Linear and mass attenuation coefficients were also calculated for different samples. The results indicated that, among the samples, the one with 7.5 mmol barium-doped Bi2WO6 had the most attenuation at the voltage of 40kV, and the attenuation coefficients would increase with an increase in the amount of barium. The samples with 15 and 17.5 mmol barium-doped Bi2WO6 had higher attenuation than the others at 80 and 120 kV. Moreover, the half-value layer (HVL), tenth-value layer (TVL) and 0.25 mm lead equivalent thickness were calculated for all the samples. The lowest HVL value was for the sample with 7.5 mmol barium-doped Bi2WO6. As the result clearly show, an increment in the barium-doping content leads to a decrease in both HVL and TVL. In every three voltages, 0.25 mm lead equivalent thickness of the barium-doped composites (7.5 mmol and 15 mmol) had less than the other composites. The lowest value of 0.25 mm lead equivalent thickness was 7.5 barium-doped in 40 kV voltage and 15 mmol barium-doped in 80 kV and 120 kV voltages. These results were obtained only for 15% weight of the nanostructure.

SiC 단결정의 TSSG 공정을 위한 전이금속 특성 연구 (Study on the characteristics of transition metals for TSSG process of SiC single crystal)

  • 이승준;유용재;정성민;배시영;이원재;신윤지
    • 한국결정성장학회지
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    • 제32권2호
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    • pp.55-60
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    • 2022
  • 본 연구에서는 SiC 단결정의 TSSG 공정중 결정 품질을 저하시키지 않으면서도 의도하지 않은 질소 도핑(N-UID)을 쉽게 제어하기 위해 지금까지 Co 또는 Sc 전이금속을 첨가한 신규 용융조성을 제안한다. Co 또는 Sc의 특성을 파악하기 위해 Ar 분위기에서 1900℃ 온도에서 약 2시간 동안 열처리 실험을 수행했다. 용융조성은 Si-Ti 10 at% 또는 Si-Cr 30 at%를 비롯하여, 탄소 용해도에 효과적이라고 알려진 Co 또는 Sc을 각각 3 at% 첨가하였다. 열처리 후 도가니 단면을 가공하여 도가니-용융물 계면에서 발생한 Si-C 반응층을 관찰하고, 탄소황분석을 통해 조성에 따른 탄소 용해도를 간접적으로 분석하였다. 그 결과, Si-Sc 기반 용융조성이 TSSG 공정에 적합한 특성을 갖는 Si-C반응층을 형성하고 있었다. 또한 탄소황분석 결과에서도 Cr 다음으로 높은 탄소량이 갖는 것으로 분석되었다. Sc는 Cr에 비해 질소와의 반응성이 낮은 이점을 가지므로 TSSG 공정에 Si-Sc 용융조성을 적용하면, 본 연구에서 의도한 대로 SiC 단결정 성장속도와 질소 UID를 모두 제어할 수 있는 것으로 고려된다.

염료감응형 광전기화학 물분해 전지용 Tri-branched tri-anchoring organic dye 개발 (Tri-branched tri-anchoring organic dye for Visible light-responsive dye-sensitized photoelectrochemical water-splitting cells)

  • 박정현;김재홍;안광순
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2010년도 춘계학술대회 초록집
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    • pp.87-87
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    • 2010
  • Photoelectrochemical (PEC) systems are promising methods of producing H2 gas using solar energy in an aqueous solution. The photoelectrochemical properties of numerous metal oxides have been studied. Among them, the PEC systems based on TiO2 have been extensively studied. However, the drawback of a PEC system with TiO2 is that only ultraviolet (UV) light can be absorbed because of its large band gap (3.2 - 3.4 eV). Two approaches have been introduced in order to use PEC cells in the visible light region. The first method includes doping impurities, such as nitrogen, into TiO2, and this technique has been extensively studied in an attempt to narrow the band gap. In comparison, research on the second method, which includes visible light water splitting in molecular photosystems, has been slow. Mallouk et al. recently developed electrochemical water-splitting cells using the Ru(II) complex as the visible light photosensitizer. the dye-sensitized PEC cell consisted of a dye-sensitized TiO2 layer, a Pt counter electrode, and an aqueous solution between them. Under a visible light (< 3 eV) illumination, only the dye molecule absorbed the light and became excited because TiO2 had the wide band gap. The light absorption of the dye was followed by the transfer of an electron from the excited state (S*) of the dye to the conduction band (CB) of TiO2 and its subsequent transfer to the transparent conducting oxide (TCO). The electrons moved through the wire to the Pt, where the water reduction (or H2 evolution) occurred. The oxidized dye molecules caused the water oxidation because their HOMO level was below the H2O/O2 level. Organic dyes have been developed as metal-free alternatives to the Ru(II) complexes because of their tunable optical and electronic properties and low-cost manufacturing. Recently, organic dye molecules containing multi-branched, multi-anchoring groups have received a great deal of interest. In this work, tri-branched tri-anchoring organic dyes (Dye 2) were designed and applied to visible light water-splitting cells based on dye-sensitized TiO2 electrodes. Dye 2 had a molecular structure containing one donor (D) and three acceptor (A) groups, and each ended with an anchoring functionality. In comparison, mono-anchoring dyes (Dye 1) were also synthesized. The PEC response of the Dye 2-sensitized TiO2 film was much better than the Dye 1-sensitized or unsensitized TiO2 films.

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