• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 1996.11a
• /
• pp.291-295
• /
• 1996

This paper discusses several design factors of a capacitance displacement sensor with a numerical method and several experiments and describes guide lines of the design of this type sensor. We introduce the charge density method for the analysis of this type sensor, which has feasible accuracy and efficiency. The analysis of this type sensor with the charge density method agrees with displacement sensitivity experiments of a circular plate capacitance sensor with the sensor amp based In the charge transfer principle.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
• /
• 2004.04a
• /
• pp.376-380
• /
• 2004

This paper is to develop an optical ruer displacement sensor for monitoring high speed spindle. Proper magnitude of optical power as well as amplification of output signal are necessary to improve sensitivity of the sensor. In this paper, to meet the need of improvement of the sensor resolution, we choose proper optical power and amplification level through speculating on optical power of a laser diode.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 1995.10a
• /
• pp.487-490
• /
• 1995

This paper discisses the effects geometric errors on the measurement of error motions of rotor with the cylindrical capacitive displacement sensor. Analytic model of the measuring process with this sensor is derived and this model shows that the effect of geometric errors of sensor is larger than that of rator on the measurement of error motions of rotor. The computer simulation shows effect of periodic errors in this sensor on the measuring orbit.

• Journal of Institute of Control, Robotics and Systems
• /
• v.6 no.8
• /
• pp.682-688
• /
• 2000

To improve the performance of a flexible robot arm one of the important things is the vibration displacement measurement of a flexible arm. Many types of sensors have been used to measure it, The most popular has been strain gauges which measures the deflection of the beam,. Photo sensors have also been for detecting beam displacement and accelerometers are often used to measure the beam vibration. But the vibration displacement can be obtained indirectly from these sensors. In this article a vision sensor is used as a displacement sensor to measure the vibration displacement of a flexible robot arm. Several schemes are proposed to reduce the image processing time and increase its accuracy. From the experimental results it is seen that the vision sensor can be an alternative sensor for measuring the vibration displacement and has a potential for on-line tip position control of flexible robot systems.

• Journal of the Korea institute for structural maintenance and inspection
• /
• v.10 no.4
• /
• pp.160-166
• /
• 2006

Optical Fiber Bragg Grating sensor has a good performance to measure microscopic displacement which can measure strain of lining concrete and cylindrical structure like high intensity containment building and it can present many advantages like a corrosion resistance from the durability point of view. Then it can measure plane geometrical displacement of cylindrical structures with two-way displacement FBG sensor module. According to the test result, measurement of FBG sensor is better performance than other electric sensor system and 2D-level measurement. As a test result, Resolution of the two-way displacement sensor module with FBG sensors are more 10 times than other LVDT or 2D surveying.

• Journal of the Semiconductor & Display Technology
• /
• v.6 no.1 s.18
• /
• pp.7-10
• /
• 2007

In an effort to reduce weaknesses of existing laser displacement sensor-based system, a sensing device for distance and balance of mask-substrate gap using touch-type displacement sensor was suggested. The device suggested in this study is expected to solve the problems of prices and reflections, by means of a touch-type sensor. LCD exposure equipment stage system including suggested sensing device was realized to assess the characteristics of sensing the balance and gap between mask and substrate. It was verified that a touch-type displacement sensor-based device to adjust the balance and distance of mask-substrate gap suggested in this study can be applicable to LCD expose equipment in practice.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
• /
• 2001.04a
• /
• pp.89-94
• /
• 2001

A cylindrical capacitance-type spindle displacement sensor was designed and tested in the hard turning as a way to develop a sensor that can estimate cutting forces without using a tool dynamometer. The displacement sensor was installed between the face of spindle cover and the chucking element, and measured pure radial motion of the spindle. Ceramic inserts and tool steel workpieceof 65 Rc were used during the hard turning tests. The signals from the sensor showed the same pattern of cutting force variations as those from the tool dynamometer. The research results showed that the developed sensor could be utilized as an effective and cheap on-line sensing device to estimate cutting forces.

• Journal of Sensor Science and Technology
• /
• v.14 no.4
• /
• pp.219-224
• /
• 2005

In this paper, a contact-type linear encoder-like capacitive displacement sensor (CLECDS) is proposed. It is based on the linear encoder capacitive displacement sensor that consists of two substrates with a series of conducting grating in identical size and it is used as a contact sensor of which the two substrates assembled faced to each other after coated with thin dielectric film. It was confirmed that the prototype of this sensor has resolution of about 126nm and measuring range of 20 mm in the test.

• Journal of Sensor Science and Technology
• /
• v.18 no.5
• /
• pp.393-401
• /
• 2009

This paper describes development of a new displacement sensor for intelligent suspension system in which the damping force has been controlled by MR fluid. Most of the current vehicle height sensors have been installed at external place of the damper and connected to that by mechanical linkages so far. The developed sensor has a new mechanism which detects movement of the sensor rod same as connecting rod in the suspension damper by using a GMR Sensor and converts it to the relative displacement from an initial position.

• Journal of Sensor Science and Technology
• /
• v.18 no.3
• /
• pp.197-201
• /
• 2009

This paper studies on the noncontact displacement sensor system to detect the displacement of the cylinder rod. For an inexpensive and a simple process, magnetic scales are printed on the cylinder rod, and magnetized by the specially designed magnetizer that has an yoke through the alternation of N and S pole. Noncontact displacement sensor system consists of cylinder with magnetic scales, Hall sensor, linear guide, controller and display. The system can detect the displacement of moving cylinder with 5 cm/sec in the case of 1 mm magnetic scale. It shows a possibility of position detection of hydraulic cylinder and air cylinder.