• 제목/요약/키워드: Dispersive material

검색결과 335건 처리시간 0.032초

분산형 백색광 간섭계를 이용한 CMP 테스트 웨이퍼의 $SiO_2$ 두께 측정 (Oxide Thickness Measurement of CMP Test Wafer by Dispersive White-light Interferometry)

  • 박범영;김영진;정해도;김여식;유준호;강승우
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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    • pp.86-87
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    • 2007
  • The dispersive method of white-light interferometry is proper for in-line 3-D inspection of dielectric thin-film thickness to be used in the semiconductor and flat-panel display industry. This research is the measurement application of CMP patterned wafer. The results describe 3-D and 2-D profile of the step height during polishing time.

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방향 판별 분산간섭계의 최적 분산 조건 연구 (Optimal Dispersion Condition to Distinguish OPD Directions of Spectrally-Resolved Interferometry)

  • 윤영호;김대희;주기남
    • 한국정밀공학회지
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    • 제34권4호
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    • pp.259-264
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    • 2017
  • Spectrally resolved interferometry (SRI) is an attractive technique to measure absolute distances without any moving components. In the spectral interferogram obtained by a spectrometer, the optical path difference (OPD) can simply be extracted from the linear slope of the spectral phase. However, SRI has a fundamental measuring range limitation due to maximum and minimum measurable distances. In addition, SRI cannot distinguish the OPD direction because the spectral interferogram is in the form of a natural sinusoidal function. In this investigation, we describe a direction determining SRI and propose the optimal conditions for determining OPD direction. Spectral phase nonlinearity, caused by a dispersive material, effects OPD direction but deteriorates spectral interferogram visibility. In the experiment, various phase nonlinearities were measured by adjusting the dispersive material (BK7) thickness. We observed the interferogram visibility and the possibility of direction determination. Based on the experimental results, the optimal dispersion conditions are provided to distinguish OPD directions of SRI.

Guided Modes along Dispersive Double Negative (DNG) Metamaterial Columns

  • 김기영;태홍식;이정해
    • 한국전자파학회:학술대회논문집
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    • 한국전자파학회 2003년도 종합학술발표회 논문집 Vol.13 No.1
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    • pp.59-63
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    • 2003
  • Modal properties of guided waves along circular dispersive double negative (DNG) index metamaterial rod waveguides are numerically investigated. Identical forms of dispersive dielectric and magnetic material constants are used for simplicity. For degenerated azimuthally symmetric mode, a multimode region, a single mode region, a band gap region and a forbidden region are found which cannot be observed in the case of the conventional dielectric rod waveguide. As the normalized frequency goes down, discrete guided modes are continuously generated, which is a reverse property of conventional dielectric rod waveguide. Also, there are high-frequency cutoffs, which have been generally examined in dispersive circular geometries such as a plasma column or a plasma Goubau line. In the single mode region, both the low- and high-frequency cutoffs are existed where the propagation constants are continued between the guided oscillating and surface modes.

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Scanning Electron Microscopy and Energy Dispersive X-ray Spectroscopy Studies on Processed Tooth Graft Material by Vacuum-ultrasonic Acceleration

  • Lee, Eun-Young;Kim, Eun-Suk;Kim, Kyung-Won
    • Maxillofacial Plastic and Reconstructive Surgery
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    • 제36권3호
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    • pp.103-110
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    • 2014
  • Purpose: The current gold standard for clinical jawbone formation involves autogenous bone as a graft material. In addition, demineralized dentin can be an effective graft material. Although demineralized dentin readily induces heterotopic bone formation, conventional decalcification takes three to five days, so, immediate bone grafting after extraction is impossible. This study evaluated the effect of vacuum ultrasonic power on the demineralization and processing of autogenous tooth material and documented the clinical results of rapidly processed autogenous demineralized dentin (ADD) in an alveolar defects patient. Methods: The method involves the demineralization of extracted teeth with detached soft tissues and pulp in 0.6 N HCl for 90 minutes using a heat controlled vacuum-ultrasonic accelerator. The characteristics of processed teeth were evaluated by scanning electron microscopy (SEM), and energy dispersive X-ray spectroscopy (EDS). Bone grafting using ADD was performed for narrow ridges augmentation in the mandibular area. Results: The new processing method was completed within two hours regardless of form (powder or block). EDS and SEM uniformly demineralized autotooth biomaterial. After six months, bone remodeling was observed in augmented sites and histological examination showed that ADD particles were well united with new bone. No unusual complications were encountered. Conclusion: This study demonstrates the possibility of preparing autogenous tooth graft materials within two hours, allowing immediate one-day grafting after extraction.

비선형 분산 광 전송 매질에 있어서 인접 광 솔리톤간의 신뢰도 및 최대 전송거리 분석 (Reliability and maximum transmission length analysis between adjacent optical solitons in nonlinear dispersive transmission materials)

  • 변승우;김종규;송재원
    • E2M - 전기 전자와 첨단 소재
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    • 제9권3호
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    • pp.246-250
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    • 1996
  • In optical soliton transmission systems with nonlinear dispersive materials, which is utilized for ultra-long and high bit rate transmission, it is shown that the value of initial time difference between adjacent solitons is analyzed for optimum bit rate. The method is inducted by uncorrelation condition with minimum interaction forces in initial covariance coefficient between adjacent solitons. When the initial time difference is 6 times of soliton pulse width by the results, it is shown that the reliability is maintained with more than 90% within transmission length of soliton period. multiplied by 93.

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LSV법을 이용한 전기화학적 메커니즘 연구 (A Study on the Electrochemical Mechanism using Liner Sweep Voltammetry (LSV) Method)

  • 이영균;한상준;서용진;이우선
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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    • pp.164-164
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    • 2008
  • 금속배선공정에서 높은 전도율과 재료의 값이 싸다는 이유로 최근 Cu를 사용하였으나, 디바이스의 구조적 특성을 유지하기 위해 높은 압력으로 인한 새로운 다공성 막(low-k)의 파괴와, 디싱과 에로젼 현상으로 인한 문제점이 발생하게 되었다. 이러한 문제점을 해결하고자, 본 논문에서는 Cu 표면에 Passivation layer를 형성 및 제거하는 개념으로 공정시 연마제를 사용하지 않으며, 낮은 압력조건에서 공정을 수행하기 위해, 전해질의 농도 변화에 따른 Liner sweep voltammetry 법을 사용하여 전압활성화에 의한 전기화학적 반응이 Cu전극에 어떤 영향을 미치는지 연구하였으며, 표면 조성을 알아보기 위하여 Energy Dispersive Spectroscopy (EDS) 분석을 하였고, Cu disk의 결정성과 배향성 관찰을 위해 X-Ray diffraction (XRD)로 금속 표면을 비교하여 실험 결과로 얻어진 데이터를 통하여 ECMP 공정에 적합한 전해액 선정과 농도를 선택하였다.

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LCD Colorfilter용(用) Millbase의 분산특성과 레올로지 거동 (The Rheological Behavior and Dispersion Properties of Millbase for LCD Colorfilters)

  • 나대엽;정일봉;남수용;유춘우;최용정
    • 한국전기전자재료학회논문지
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    • 제20권5호
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    • pp.450-455
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    • 2007
  • LCD color filters have been manufactured in a process called photolithography to date, but various printing methods have been studied currently in response to the trend of low-end LCD panels. Direct Printing Process is a suitable fabrication technique to develope pigment components whose dimensions are in nano. The success of this process depends on the systematic preparation of pigment millbase. Conventional millbase dispersions are constituted of the organic pigments, monomer, dispersant and solvents. An experimental study on the rheology of millbase dispersions is presented. Subsequently, this thesis attempts to find out the dispersive characteristics as well as the selection of pigments, monomers and dispersants in the part of millbase among the stages of manufacturing LCD color filters using the direct printing methods. The dispersive characteristics were shown through analytic devices such as PSA, Rheometer, etc.

카본블랙의 혼합메카니즘에 관한 연구 (Mixing Mechanism of Carbon Black)

  • 김진국
    • Elastomers and Composites
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    • 제26권4호
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    • pp.287-295
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    • 1991
  • The mixing process with carbon black is important in the rubber industries. However, it is difficult to characterize the mixing mechanism of the carbon black. The mixing mechanism(distributive mixing and dispersive mixing) was discribed in this paper. The effect of fill factor on the mixing of the carbon black was studied. The dispersive mixing ability increases with increasing fill factor. However, the distributive mixing ability decreases with increasing fill factor. The effect of the carbon black content on the rheological property of the material was studied in this paper. The viscosity of the material increases with increasing the carbon black content. However, the elasticity of the matarial decreases with the carbon black content.

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Propagation Speed of Torsional Waves in a Circular Rod with Harmonically Varying Material Properties

  • Kim, Jin-Oh
    • The Journal of the Acoustical Society of Korea
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    • 제19권1E호
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    • pp.43-47
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    • 2000
  • The paper describes a theoretical study on the speed of torsional elastic waves propagating in a circular rod whose material properties vary periodically as harmonic functions of the axial coordinate. An approximate solution for the phase speed has been obtained by using the perturbation technique for sinusoidal modulation of small amplitude. This solution shows that the wave speed in the nonuniform rod is dependent on the wave frequency as well as the periodic variation of the material properties. It implies that the torsional waves considered in this paper are dispersive even in the fundamental mode.

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Ultra-trace Arsenic Determination in Urine and Whole Blood Samples by Flow Injection-Hydride Generation Atomic Absorption Spectrometry after Preconcentration and Speciation Based on Dispersive Liquid-Liquid Microextraction

  • Shirkhanloo, Hamid;Rouhollahi, Ahmad;Mousavi, Hassan Zavvar
    • Bulletin of the Korean Chemical Society
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    • 제32권11호
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    • pp.3923-3927
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    • 2011
  • A noble method for pre-concentration and speciation of ultra trace As (III) and As (V) in urine and whole blood samples based on dispersive liquid-liquid microextraction (DLLME) has been developed. In this method, As (III) was complexed with ammonium pyrrolidine dithiocarbamate at pH = 4 and Then, As (III) was extracted into the ionic liquid (IL). Finally, As (III) was back-extracted from the IL with hydrochloric acid (HCl) and its concentration was determined by flow injection coupled with hydride generation atomic absorption spectrometry (FI-HGAAS). Total amount of arsenic was determined by reducing As (V) to As (III) with potassium iodide (KI) and ascorbic acid in HCl solution and then, As (V) was calculated by the subtracting the total arsenic and As (III) content. Under the optimum conditions, for 5-15 mL of blood and urine samples, the detection limit ($3{\sigma}$) and linear range were achieved 5 ng $L^{-1}$ and 0.02-10 ${\mu}g\;L^{-1}$, respectively. The method was applied successfully to the speciation and determination of As (III) and As (V) in biological samples of multiple sclerosis patients with suitable precision results (RSD < 5%). Validation of the methodology was performed by the standard reference material (CRM).