• Applied Chemistry for Engineering
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• v.25 no.5
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• pp.531-537
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• 2014

A catalytic plasma reactor was employed for the oxidation of isopropyl alcohol (IPA) classified as a volatile organic compound (VOC). Copper oxide (Cu : 0.5% (w/w)) supported on a multichannel porous ceramic consisting of ${\alpha}-Al_2O_3$ was used as a catalyst, which was directly exposed to the plasma created in it. The effects of discharge voltage and reaction temperature on the concentrations of IPA and its byproducts were examined to understand the behavior of the catalytic plasma reactor. Without thermal insulation, the reactor temperature increased up to $120^{\circ}C$ at an applied voltage of 17 kV (discharge power : 28 W), and the IPA at a flow rate of $1L\;min^{-1}$ ($O_2$ : 10% (v/v); IPA : 1000 ppm) was completely removed. At temperatures below $120^{\circ}C$, however, besides the desirable product $CO_2$, several unwanted byproducts such as acetone, formaldehyde and CO were also formed from IPA. On the other hand, when the reactor was thermally insulated, the plasma discharge increased the temperature up to $265^{\circ}C$ under the same condition and most of IPA was oxidized to $CO_2$. Without loading CuO on the ceramic support, the plasma discharge in the thermally insulated reactor produced nearly equal amounts of $CO_2$ and CO. On comparison, with the catalyst alone (temperature : $265^{\circ}C$), more than 70% of the removed IPA was simply converted into another type of VOC (acetone), indicating that the catalyst assisted by the plasma is more effective in the oxidation of IPA than that of the catalyst-alone process.

• Journal of Industrial Technology
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• v.30 no.A
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• pp.127-132
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• 2010

We analyzed the effects of several process variables on the $SO_2$ removal and particle growth by the dielectric barrier discharge - photocatalysts hybrid process. In this process, $SO_2$ was converted into the ammonium sulfate ($(NH_4)_2SO_4$) particles. The size and crystallinity of ammonium sulfate particles were examined by using TEM and XRD analysis. The dielectric barrier discharge reactor consisted of two zones: the first is for plasma generation and the second is for ammonium sulfate particles formation and growth. The first zone of reactor was filled with glass beads as a dielectric material. To enhance $SO_2$ removal process, the $TiO_2$ photocatalysts were coated on glass beads by dip-coating method. As the voltage applied to the plasma reactor or the pulse frequency of applied voltage increases, the $SO_2$ removal efficiency increases. Also as the initial concentration of $SO_2$ decreases or as the residence time increases, the $SO_2$ removal efficiency increases. $(NH_4)_2SO_4$ particles continue to grow by particle coagulation and surface reaction, moving inside the reactor. Larger particles in site are produced according to the increase of residence time or $SO_2$ concentrations.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07b
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• pp.1115-1118
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• 2003

A great part of flint fuel is Hydrogen and carbon's combination. they should be generated steam and carbon gas when combine with oxygen for perfect combustion in the inside of engine, but the pollutive material especially NOx and Soot are exhausted, even though fuel is combine perfectly. In this paper the characteristics of exhaust material from diesel engine is investigated for the corona discharge-EGR hybrid plasma reactor, which combined corona discharge with EGR system. NOx is decreased in all load and applied voltage to plasma reactor. However Soot is increased as increasing EGR rate and it is decreased as increasing applied voltage.

• The Transactions of the Korean Institute of Electrical Engineers
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• v.43 no.5
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• pp.802-808
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• 1994

The purpose of this paper is to describe an application of plasma polymerized thin film as an electron beam resist. Plasma polymerized thin film was prepared using an interelectrode capacitively coupled gas-flow-type reactor, and chosen methylmethacrylate(MMA)and methylmethacrylate-tetrameth-yltin(MMA-TMT) as a monomer. This thin films were also delineated by the electron-beam apparatus with an acceleration voltage of 30kV and an expose dose ranging from 20 to 900$\mu$C/cmS02T. The delineated pattern in the resist was developed with the same reactor which is used for polymerization using an argon as etching gas. The growth rate and etching rate of the thin film is increased with increasing of discharge power. Thin films by plasma polymerization show polymerization rate of 30~45($\pm$3) A/min, and etching rate of 440($\pm$30) A/min during Ar plasma etching at discharge power of 100W. In apparently lower than that of conventional PMMA, but the plasma-etching rate of PP(MMA-TMT) was higher than that of PPMMA.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.95-95
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• 2010

An apparatus for generating flames and more particularly the microwave plasma burner for generating high-temperature large-volume plasma flame was presented. The plasma burner was composed of micvrowave transmission lines, a field applicator, discharge tube, coal and gas supply systems, and a reactor. The plasma burner is operated by injecting coal powders into a 2.45 GHz microwave plasma torch and by mixing the resultant gaseous hydrogen and carbon compounds with plasma-forming gas. We in this work used air, oxygen, steam, and their mixtures as a discharge gas or oxidant gas. The microwave plasma torch can instantaneously vaporize and decompose the hydrogen and carbon containing fuels. It was observed that the flame volume of the burner was more than 50 times that of the torch plasma. The preliminary experiments were carried out by measuring the temperature profiles of flames along the radial and axial directions. We also investigated the characteristics for coal combustion and gasification by analyzing the byproducts from the exit of reactor. As expected, various byproducts such as hydrogen, carbon monoxide, carbon dioxide, hydrogen sulfide, etc. were detected. It is expected that such burner cab be applied to coal gasification, hydrocarbon reforming, industrial boiler of power plants, etc.

• Applied Chemistry for Engineering
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• v.22 no.3
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• pp.261-265
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• 2011

The sterilization effects of atmospheric pressure plasma with the mixture of argon and oxygen were analyzed. The plasma reactor with the shape of dielectric barrier discharge produced the uniform distribution of glow discharge and generated ozone gas effectively according to the various process parameters. The sterilization for E. coli was affected by power, oxygen ratio in the mixture gas, treatment time and distance between reactor and sample. The concentration of ozone was a major source for the sterilization of E. coli, which was enhanced by the increase of power and oxygen ratio. In this study, the effect of atmospheric pressure plasma treatment for the sterilization was confirmed and its result can deliver the atmospheric pressure plasma treatment as the novel sterilization method instead of conventional methods.

• Journal of Environmental Science International
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• v.21 no.4
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• pp.479-488
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• 2012

A Dielectric barrier discharge (DBD) plasma is shown in the present investigation to be effective of phenol degradation in the aqueous solutions in batch reactor with continuous air bubbling. Removal of phenol and effects of various parameters on the removal efficiency in the aqueous solution with high-voltage streamer discharge plasma are studied. The effect of 1st voltage (80 ~ 220 V), air flow rate (3 ~ 7 L/min), pH (3 ~ 11), electric conductivity of solution (4.16 ${\mu}S$/cm, deionized water) ~ 16.57 mS/cm (addition of NaCl 10 g/L) and initial phenol concentration (2.5 ~ 20.0 mg/L) were investigated. The observed results showed that phenol degradation was higher in the basic solution than that of the acidic. The optimum values on the 1st voltage and air flow rate for phenol degradation were 140 V and 6 L/min, respectively. It was considered that absorbance variation of $UV_{254}$ of phenol solution can be use as an indirect indicator of change of the non-biodegradable organic compounds within the treated phenol solution. Electric conductivity was not influenced the phenol degradation. To obtain the removal efficiency of phenol and COD of phenol over 97 % (initial phenol concentration, 10.0 mg/L), 80 min and 120 min were need, respectively. Phenol and COD degradation showed a pseudo-first order kinetics.

• Journal of the Korean Society of Safety
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• v.23 no.5
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• pp.54-60
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• 2008

The objective of this study is to obtain the optimal process condition and the maximum decomposition efficiency by measuring the decomposition efficiency, electricity consumption, and voltage in accordance with the change of the process variables such as the frequency, maintaining time period, concentration, electrode material, thickness of the electrode, the number of windings of the electrode, and added materials etc. of the harmful atmospheric contamination gases such as NO, $NO_2$, and $SO_2$ etc. with the plasma which is generated by the discharging of the specially designed and manufactured $TiO_2$ catalysis reactor and SPCP reactor. The decomposition efficiency of the NO, the standard samples, is obtained with the plasma which is being generated by the discharge of the combination effect of the $TiO_2$ catalysis reactor and SPCP reactor with the variation of those process variables such as the frequency of the high voltage generator($5{\sim}50kHz$), maintaining time of the harmful gases($1{\sim}10.5sec$), initial concentration($100{\sim}1,000ppm$), the material of the electrode(W, Cu, Al), the thickness of the electrode(1, 2, 3mm), the number of the windings of the electrode(7, 9, 11turns), basic gases($N_2$, $O_2$, air), and the simulated gas($CO_2$) and the resulting substances are analyzed by utilizing FT-IR & GC.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.31 no.1
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• pp.105-110
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• 2021

Objectives: The purpose of this study was to develop a new sterilization plasma device that would be proficient at sterilizing and removing pathogenic bacteria and viruses, and applicable to air purification systems. Methods: In order to understand the performance characteristics, the discharge characteristics of a packed bed DBD reactor and the ozone reduction characteristics of an ozone filter installed at the outlet of the reactor were investigated. Results: The novel packed-bed DBD reactor was proposed, and it was confirmed that the plasma discharge was uniformly and stably discharged throughout the entire layer, and sufficient ozone was generated for sterilization. The ozone filter was tested for three methods: adsorption, adsorption-decomposition, and catalytic decomposition. When the filter thickness was 30 mm, the ozone concentrations were 0.03 ppm, 0.01 ppm, and 0.21 ppm, respectively. The adsorption and adsorption-decomposition methods satisfied the EPA standard of less than 0.05ppm, but the catalytic decomposition method did not. Conclusions: It was confirmed that the adsorption-decomposition method has relatively excellent ozone filter performance and can provide the best ozone filter.

• Korean Chemical Engineering Research
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• v.60 no.3
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• pp.452-458
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• 2022

Three types of gas-liquid hybrid horizontal, vertical and needle-to-cylinder plasma reactors were fabricated. Through these reactors, a high-efficiency, eco-friendly cleaning concept that generates reactive active species generated in atmospheric plasma discharge and gas-liquid activation reaction of cleaning components through the potential difference within the electrode was presented. As a result of comparing the efficiency for cleaning performance, the needle-to-cylinder type reactor had the best characteristics. Through this study, it was confirmed that the gas-liquid hybrid atmospheric pressure plasma reactor has the potential to be applied to ultra-precision cleaning processes such as semiconductor processes.