• Proceedings of the KIEE Conference
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• 1997.07e
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• pp.1657-1659
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• 1997

Electron temperature and electron density were measured in a radio-frequency inductively coupled plasma (RFICP) using a probe measurements. Measurement was conducted in an argon discharge for pressures from 10 [mTorr] to 40 [mTorr] and input rf power from 100 [W] to 800 [W], Ar flow rate from 5 [sccm] to 30 [sccm], Spatial distribution electron temperature and electron density were measured for discharge with same aspect ratio (R/L=2). Electron temperature and electron density were discovered depending on both pressure and power, Ar flow rate. Electron density was increased with increasing input power and in creasing pressure, increasing Ar flow rate. Radial distribution of the electron density was peaked in the plasma center. Normal distribution of the electron density was peaked in the center between quartz plate and substrate. From these results, We found out the generation mechanism of Radio-Frequency Inductively Coupled Plasma.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 2004.05a
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• pp.308-312
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• 2004

In this paper, a silent discharge type ozonizer has been designed and fabricated for environment improvement. After that discharge and ozone generation characteristics in accordance with frequency of power supply and input voltage were investigated Consumed discharge un of silent discharge type ozonizer was calculated by computer program designed in "Sigma Hot 2000" program. The data needed for calculation was stored as ASCII file type from oscilloscope.

• Proceedings of the KIEE Conference
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• 2002.04a
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• pp.139-142
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• 2002

A resonant type voltage source and power device and a control method using Pulse Density Modulation(PDM) power control and Pulse Width Modulation(PWM) voltage control for Ozone Generator are described. For the stability of discharge in the generating tube, it is desirable that the peak apply voltage is constant. The PDM power control is employed for sustaining the voltage constant at any generating tube input power. Moreover, to avoid the influence of input AC voltage fluctuation etc., PWM voltage control with generating tube peak voltage feedback is used. Both functions were confirmed by the experiment with 6.5[kHz], 1.8[kW] inverter and generating tube. The effect of input synchronous PDM method for input current stabilizing is confirmed also.

• Proceedings of the KIEE Conference
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• 2003.07c
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• pp.1704-1706
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• 2003

Low-Pressure inductively coupled RF discharge sources have important industrial applications mainly because they can provide a high-density electrodeless plasma source with low ion energy and low power loss. In an inductive discharge, the RF power is coupled to the plasma by an electromagnetic interaction with the current flowing in a coil. In this paper, the experiments have been focussed on the electric characteristic and carried out using a single Langmuir probe. The internal electric characteristics of inductively coupled Ar RF discharge at 13.56 [MHz] have been measured over a wide range of power at gas pressure ranging from $1{\sim}70$ [mTorr].

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 1990.10a
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• pp.41-46
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• 1990

This paper shows the characteristics of sparkover discharge in flowing air ranging from O(Reynolds number, Re to 10.52$\times$104(Re). Also, we investigated changes of dis-charge pattern for constant input power by adjustment of the Re. The important results obtained from this paper are as followers. The maxinum sparkover voltage of flowing air are about 6.3[kV] higher than those of static air. The discharge pattern can be controlled by adjustment of the Re.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 1996.11a
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• pp.63-66
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• 1996

Electron temperature and electron density were measured in a radio-frequency(rf) inductively coupled plasma using probe measurements. Measurements were made in an argon discharge for pressures from 10 to 100mTorr and input rf power from 100 to 800W. Spatial distribution Electron temperature and electron density were measured for discharge with same aspect ratio. Electron temperature and Electron density were found to depend on both pressure and power. Electron density was creased with increasing pressure, but peaked in a 70mTorr discharge. Radial distribution of the electron density was peaked in the plasma fringes. These results were compared to a simple model of inductively coupled plasmas.

• KIEE International Transactions on Electrophysics and Applications
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• v.2C no.5
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• pp.253-257
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• 2002

A new Current-Controlled Driving Method that can drive AC PDPs with low voltage and high luminous efficiency for the sustaining period is presented. In this driving method, the voltage source is connected to a storage capacitor and the stored voltage is delivered to the panel through LC resonance. Thus, this driving method can drive the panel with a voltage source as low as about half of the voltage necessary in the conventional driving methods. The discharge current flowing into the AC PDP is limited in this method. Thus, the power consumption for the discharge is reduced and the discharge input power to output luminance efficiency is improved. Experimental results using this driving method showed that we could drive an AC PDP with a voltage source as low as 146V and that high luminous efficiency of 1.33 1m／W can be achieved.

• The Transactions of the Korean Institute of Electrical Engineers D
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• v.52 no.5
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• pp.226-226
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• 2003

When an excessive voltage is applied to the discharge gap in ozone generator, the discharge room temperature becomes higher. As is well own, the efficiency of the ozone generation is deteriorated by the excessively hot temperature because of the decomposition reaction. In this paper, the simple small capacity ozone generating controller has been introduced, which provides effective and stable silent discharge characteristics over wide range input power. The proposed power controller has two important advantages, which imply that the production rate of ozone can be controlled linearly according to the delivered power and the surplus energy is recovered to the source. The experimental results are given to verify the performance of the pre proposed controller.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.5
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• pp.226-230
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• 2003

When an excessive voltage is applied to the discharge gap in ozone generator, the discharge room temperature becomes higher. As is well own, the efficiency of the ozone generation is deteriorated by the excessively hot temperature because of the decomposition reaction. In this paper, the simple small capacity ozone generating controller has been introduced, which provides effective and stable silent discharge characteristics over wide range input power. The proposed power controller has two important advantages, which imply that the production rate of ozone can be controlled linearly according to the delivered power and the surplus energy is recovered to the source. The experimental results are given to verify the performance of the pre proposed controller.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.31A no.12
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• pp.64-70
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• 1994

In this paper, we inverstigated how a parricular internal inverter circuit, which is located far from the input protection in CMOS DRAM, can be easily damaged by external ESD stress, while the protection circuit remains intact. It is shown in a mega bit DRAM that the internal circuit can be safe from ESD by simply improving the input protection circuit. An inverter, which consists of a relatively small NMOSFET and a very large PMOSFET, is used to speed up DRAMs, and the small NMOSFET is vulnerable to ESD in case that the discharge current beyond the protection flows through the inverter to Vss or Vcc power lines on chip. This internal circuit damage can not be detected by only measuring input leakage currents, but by comparing the standby and on operating current before and after ESD stressing. It was esperimentally proven that the placement of parasitic bipolar transistor between input pad and power supply is very effective for ESD immunity.