• 반도체디스플레이기술학회지
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• 제18권2호
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• pp.98-102
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• 2019

Direct plasma-enhanced atomic layer deposition (PEALD) are widely used for $SiO_2$ and SiON thin film process in current semiconductor industry. However, this exhibits poor step coverage for three-dimensional device structure due directionality of plasma species as well as plasma damage on the substrate. In this study, to overcome this issue, low temperature (< $300^{\circ}C$) $SiO_2$ and SiON thin film processes were studied using inductively coupled plasma (ICP) type remote PEALD with various reactant gases such as $O_2$, $H_2O$, $N_2$ and $NH_3$. It was confirmed that the interfacial properties such as fixed charge density and charge trapping behavior of thin films were considerably improved by hydrogen species in $H_2O$ and $NH_3$ plasma compared to the films grown with $O_2$ and $N_2$ plasma. Furthermore, the leakage current density of the thin films was suppressed for same reason.

• 한국통신학회논문지
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• 제19권10호
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• pp.1849-1860
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• 1994

본 논문은 비정질 회토류 천이 급속 박막내에서의 자벽 역학(Magnetic domain wall dynamics)을 란다우 리프쉬츠 길버트 (Landau Lifshitz Gilbert) 방정식을 이용한 수치적 해석을 수행하여 연구하였다. 박막을 이차원 정방형 격자($30\times30$)로 나누고, 각 격자 셀(Cell)에 쌍극자간 존재한다고 상정하여, 이들 쌍극자간의 상호 교환 작용과 자기 이방성, 외부 인가 자계, 그리고 감자계의 영향이 고려되었다. 단축 자기 이방성이 존재하고 역방향의 자화가 존재한다고 가정된 상태에서 자벽이 형성되는 시간과 자벽의 두께를 알아보았다. 또한 외부 자계의 인가에 따른 자벽 이동을 연구하였다. 시뮬레이션 결과, 감자계를 고려했을 때 자벽 형성 시간이 상당히 빨라졌고, 평균 자벽의 이동도(Mobility)는 약간 증가되었다.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2005년도 제24회 춘계학술대회논문집
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• pp.189-193
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• 2005

로켓엔진에서 선형 연소 안정한계에 미치는 유한화학반응의 열적 효과와 막냉각 효과를 조사하였다. 안정한계를 평가하기위해 3차원 연소실에서 유한화학반응을 채택한 반응 유동장 계산으로부터 구한 유동변수들을 사용하였다. 주요 유동변수들의 값은 유한화학반응 모델의 채택으로 인해 상당히 달라졌으며 결과적으로 안정한계도 수정되었다. 유한화학반응은 열적 관점에서 안정성 향상에 기여함을 알았다. 또한, 막냉각을 한 경우, 안정성 경향이 향상됨을 알 수 있었다.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2009년 춘계학술대회논문집
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• pp.363-367
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• 2009

Recently, the manufacturing of micro-cavity by means of laser surface texturing (LST) technique and low friction study by the LST have been in great progress. Most of current works have been dealing with the effect of cavity on friction and wear. The main objective of the present study was to investigate numerically two-dimensional lubrication characteristics of micro-dimple shapes fabricated on solid surfaces, and this study utilized the commercial CFD code (Fluent V.6.3). For the evaluation, preliminary simulation was conducted and numerical predictions were compared with the analytic solution obtained from the Reynolds's equation. Mainly, the present study investigated the influence of dimple depth, pattern shapes, and film thickness on lubrication characteristics related to the reduction of friction. It is found that the existence of micro-dimpled surface makes it possible to substantially reduce the friction forces exerted on the surfaces. In particular, substantial decrease in shear stresses was observed as the lubricant film thickness decreases. For instance, in the case of the film thickness of 0.01 mm, the estimated shear stress decreases up to about 40%. It indicates that the film thickness would be important factor in designing the micro-dimpled surfaces. Furthermore, it was observed that such a optimum dimple depth would be present because the dimple depth larger than the optimum value did no longer affect the reduction in shear stresses.

• International Journal of Fluid Machinery and Systems
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• 제3권2호
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• pp.150-159
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• 2010

Laidback fan shaped film-cooling hole is formulated numerically and optimized with the help of three-dimensional numerical analysis, surrogate methods, and the multi-objective evolutionary algorithm. As Pareto optimal front produces a set of optimal solutions, the trends of objective functions with design variables are predicted by hybrid multi-objective evolutionary algorithm. The problem is defined by four geometric design variables, the injection angle of the hole, the lateral expansion angle of the diffuser, the forward expansion angle of the hole, and the ratio of the length to the diameter of the hole, to maximize the film-cooling effectiveness compromising with the aerodynamic loss. The objective function values are numerically evaluated through Reynolds- averaged Navier-Stokes analysis at the designs that are selected through the Latin hypercube sampling method. Using these numerical simulation results, the Response Surface Approximation model are constructed for each objective function and a hybrid multi-objective evolutionary algorithm is applied to obtain the Pareto optimal front. The clustered points from Pareto optimal front were evaluated by flow analysis. These designs give enhanced objective function values in comparison with the experimental designs.

• Journal of Advanced Marine Engineering and Technology
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• 제32권8호
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• pp.1178-1184
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• 2008

In this study, techniques of ion implantation were used in order to improve the characteristics of metal materials such as the oxidation and wear resistant. In particular it is necessary to develope their oxidation and wear resistant that could be used in severe environmental conditions. There are mainly two elementary technologies including ion implantation and/or thin film coating. Ion implantation method was performed for surface modification. As a result, it was found that some ion implantations methods such as Nb, high-temperature Nb ion implantation and Nb+C combined implantation are somewhat effective for improving the oxidation resistance of TiAl alloy. Furthermore, the fluorine PBII treatment is more effective for improving the oxidation resistance of the TiAl alloy with three-dimensional shapes. The implantation of boron ion into thin film of TiN was also effective for improving the properties of materials like high temperature wear resistance. TiCrN film was applied to the actual seal ring for steam turbines, and it was observed that its sliding property showed a successfully good performance.

• 설비공학논문집
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• 제18권8호
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• pp.678-685
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• 2006

Analysis of drying characteristics has been carried out with one-dimensional model in the dryer using the principle of the refraction of radiation. The dryer is composed of hot water tank, plastic film conveyer belt, drying material, etc. The model considers the con-duction and radiation within the plastic film and drying material. The film is semitransparent to radiation and the drying material is assumed to be semitransparent or opaque to radiation. The results show that the effect of radiative transfer on the drying rate is relatively large when the thickness of drying material is small and the water temperature is high. When the material is thin, the drying rate due to conduction is also enhanced and the drying time can considerably be reduced.

• 대한기계학회논문집
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• 제15권6호
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• pp.1975-1981
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• 1991

본 연구에서는 완전히 불균일한 격자계를 사용하여 프로파일링을 한 원통형로 울러의 프로파일링 시작점 부근에서의 압력분포 및 유막형상과 함께 무차원변수의 변 화에 따른 최소유막의 거동을 상세히 조사하고자 한다. 이 결과에서 실제 로울리 베 어링의 로울러 프로파일의 설계시에 적용할 수 있는 새로운 기준을 제시하고자 한다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2011년도 추계학술발표대회
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• pp.37.2-37.2
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• 2011

The growth of three-dimensional ZnO hybrid structures by metal-organic chemical vapor deposition was controlled through their growth pressure. Vertically aligned ZnO nanorods were grown on c-plane sapphire substrate at $600^{\circ}C$ and 400 Torr. ZnO film was then formed in-situ on the ZnO nanorods at $600^{\circ}C$ and 10 Torr. High-resolution X-ray diffraction and transmission electron microscopy measurements showed that the ZnO film on the nanorods/sapphire grew epitaxially, and that the ZnO film/nanorods hybrid structures had well-ordered wurtzite structures. The hybrid ZnO structure was shown to be about 5 ${\mu}m$ by field-emission scanning electron microscopy. The hybrid structure showed better crystalline quality than mono-layer film on sapphire substrate. Consequently, purpose of this work is developing high quality hybrid epi-growth technology using nano structure. These structures have potential applicability as nanobuilding blocks in nanodevices.

• Journal of Electrical Engineering and Technology
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• 제10권4호
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• pp.1720-1725
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• 2015

The performance of the AlGaN/GaN MSM-2DEG varactor with different dielectric films deposited by the E-beam deposition is investigated in detail. The capacitance swing and the capacitance ratio of the varactor without dielectric film as well as with, SiO₂, Gd₂O₃, and Si₃N₄ films, respectively, are determined by electrodes of varying areas. The maximum capacitance, the minimum capacitance and the capacitance ratios are proportional to the increasing of the electrode areas. The capacitance ratio determined by the maximum and the minimum capacitance is found to be 18.35 (with Si₃N₄ dielectric film) and 149.51 (without dielectric film), respectively. The transition voltages of the fabricated varactors are almost the same for a bias voltage of about ±5 V and leakage current can be lower three orders of magnitude while the varactors with dielectric films. The tunability of the capacitance ratio makes the AlGaN/GaN MSM-2DEG varactor with a dielectric film highly useful in multirange applications of a surge free preamplier.