• Korean Journal of Optics and Photonics
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• v.2 no.3
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• pp.149-152
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• 1991

We report a new method of fabricating a Ti:LiNb03 waveguide with no out-diffusion by coating the waveguide with $SiO_2$ thin film. It was coated before diffusion process, and the $LiO_2$ out-diffusion was prevented in the diffusion process. We compare the near field patterns of the guided modes between the typical waveguide and the waveguide fabricated by new method proposed here.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1995.05a
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• pp.73-76
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• 1995

In this study, the slab waveguide was fabricated using potassium-nitride(KNO$_3$) or silver-nitride (AgNO$_3$) molten sources by ion-exchange process. The effective refractive indices of waveguide were measured by Prism-Coupling method. and The characteristics of waveguide(mode dispersion, effective diffusion depth. surface refractive index, diffusion coefficient, and refractive index profile etc,) were investigated by WKB method, In the case of potassium ion-exchange, the computer calculation showed that the refractive index profile of waveguide followed Gaussian function, the surface refractive index increased with ion-exchange time and the effective diffusion depth increased a little as ion-exchange time increased, while the surface refractive index of silver ion-exchanged waveguide decreased with ion-exchange time because of the ion depletion on the surface of waveguide, and the effective diffusion depth seriously with ion-exchange tim. Double ion-exchanged waveguide was fabricated by performing silver ion-exchange after potassium ion-exchange. Double ion-exchanged waveguide had a tight mode binding force since the surface refractive index was larger than single step ion-exchanged waveguide.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.5
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• pp.400-406
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• 1998

We investigated the preparation and guided-mode properties of $Ti:LiNbO_3$ waveguides which were fabricated by Ti in-diffusion. The diffusion method to reduce the Li out-diffusion was proposed. The optical guided-mode and propagation loss based on butt-coupling pigtailed with PMF-input were measured. How to improve the polishing grade of waveguide endfaces is newly proposed in this paper. To show the mode propagations, the BPM simulations of channel waveguide are described.

• Electrical & Electronic Materials
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• v.10 no.7
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• pp.682-691
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• 1997

We have investigated the guided optical properties of a Ti:LiNbO$_3$optical waveguide which was fabricated by Ti-diffusion in an air atmosphere and proposed an effective polishing method of waveguide endfaces. And the results of guided optical mode and fabrication condition were obtained as follows; \circled1 propagation loss : 0.53 dB/cm \circled2 mode size : horizontal/vertical=12.5${\mu}{\textrm}{m}$ \circled3 mode mismatch : 1.7 dB \circled4 diffusion temperature : 105$0^{\circ}C$, time : 8 hours \circled5 atmosphere : air

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.7
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• pp.557-564
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• 1998

A low loss x-cut $LiNbO_3$optical waveguide was fabricated by Yi in-diffusion, and the properties of guided-mode and the total insertion loss of the pigtailed waveguide with polarization maintaining fiber(PMF) were measured at optical wavelength 1550nm. for forming the waveguides, the parameters of diffusion, Ti thickness, waveguide line-width, length, diffusion temperature, time and atmosphere were set $1400{\AA}$, $8{\mu}m$, 3.3cm, $1050^{\circ}C$, 8 hours and wet bubbled oxygen, respectively. And then after the polishing and piatailing, it showed that the total insertion loss was -4.1dB for TM mode, -5.5dB for TE mode, and mode size, that is, the horizontal/ vertical size were $13.8{\mu}m/18{\mu}m$ for TM mode, $9.6{\mu}m/6.5{\mu}m$ for TE mode.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1997.11a
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• pp.73-76
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• 1997

A low loss x-cut LiNbO$_3$ optical waveguide was fabricated by Ti in-diffusion and the guided-mode properties and total insertion loss of pigtailing with polarization maintaining fiber(PMF) were investigated and measured at optical wavelength 15507. For formaing the waveguide, the parameters of diffusion Ti thickness, waveguide line-width, length, diffusion temperature, time and atmosphere were set 1400$\AA$, 8${\mu}{\textrm}{m}$, 3.3cm, 105$0^{\circ}C$, 8 hours and wet bubbled oxygen, respectively. and then After the polishing and pigtailing, it showed that total insertion loss was -4.1dB for TM mode, -5.5dB for TE mode, and mode size, that is, horizontal/vertical sizes were 13.87/18${\mu}{\textrm}{m}$ for TM mode, 9.61${\mu}{\textrm}{m}$/6.5${\mu}{\textrm}{m}$ for TE mode.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.7
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• pp.109-116
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• 1998

In this work was produced and analyzed a z-cut Ti:LiNbO$_{3}$ optical waveguide which applies for various optical devices.A waveguide channel with a thickness 8 .mu.m and a length 66,000.mu.m and a mach-zehnder interferometer type waveguide were fabricated at a diffusion temperature 1050.deg. C for 6-8hours in a wet $O_{2}$ environment. The resulting Ti:LiNbO$_{3}$ optical waveguide was measured to have a Ti-strip thickness of 950.angs. and low loss. Surfaces and cross-sections of a fabricated waveguide were analysed. The mode pattern anaysis revealed that the waveguide showed a single mode at a 1550nm wavelength. The effective dimension of the waveguide was calculated by measuring a gaussian profile; Wx=10.95.mu. and Wy=9.14.mu.m. a propagation loss, of 0.50dB/cm for a TM mode and 0.45dB/cm for a TE mode, was low enough to be accepatable for optical devices.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.36D no.5
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• pp.69-79
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• 1999

In this paper, we proposed a diffuion model of Ti diffused lithium niobate optical waveguide for fabricating waveguides with high refractive index and compared with conventional one. The achivement of low optical insertion loss between waveguide interface and single mode fibers was discussed as a function of Ti thickness for $\lambda$=1.55$\mu\textrm{m}$ The proposed diffusion method exhibited higher refractive index waveguide than conventional one for $\lambda$=0.6328$\mu\textrm{m}$ We have achieved the total fiber-waveguide-fiber insertion loss as low as 0.5dB/cm in z-cut and 1$\pm$0.5dB/cm in x-cut for both TM and TE mode of Mach-Zehnder interferometric waveguide in the range of Ti thickness 1000-1400$\AA$ for $\lambda$=1.55$\mu\textrm{m}$ From these results, this diffusion model for making a low loss waveguide can be used for low-power-modulators and switches.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.05b
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• pp.111-118
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• 2002

A new lithium niobate optical modulator with a polymer buffer layer on Ni in-diffused optical waveguide is proposed for the fist time, successfully fabricated and examined at a wavelength of 1.3 mm. By determining the diffusion parameters of Ni in-diffused waveguide to achieve more desirable mode size which is well matched to the mode in the fiber, the detailed results on the achievement of high optical throughput are reported. In addition, the usefulness of polymer buffer layer which can be applicable to a buffer layer in Ni in-diffused waveguide devices is demonstrated. Several sets of channel waveguides fabricated on Z-cut lithium niobate by Ni in-diffusion were obtained and on which coplanar traveling-wave type electrodes with a polymer-employed buffer layer were developed by a conventional fabrication method for characterizing of electro-optical performances of the proposed device. The experimental results show that the measured half-wave voltage is of ~10 V and the total measured fiber-to-fiber insertion loss is of ~6.4 dB for a 40 mm long at a wavelength of =1.3 mm, respectively. From the experimental results, it is confirmed that the polymer-employed buffer layer in LiNbO3 optical modulator can be a substitute material instead of silicon oxide layer which is usually processed at a high temperature of over $300^{\circ}C$. Moreover, the fabrication tolerances by using polymer materials in LiNbO3 optical modulators are much less strict in comparison to the case of dielectric buffer layer.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.10
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• pp.903-910
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• 1998

Ti:LiNbO$_3$ optical waveguides have been fabricated by Ti-diffusion in wet oxygen atmosphere. The fabrication conditions of furnace temperature, diffusion time and bubbler temperature were 105$0^{\circ}C$, 8 hours and 9$0^{\circ}C$, respectively and Ti thickness was varied from 700$\AA$ to 1500$\AA$. In this paper, the nearfield patterns, mode sizes (hirizontal/vertical) and insertion loss of waveguides were discussed at wavelength 1550 nm ad function of Ti thickness. With the planar waveguide, the effective index change and diffusion depth were calculated at 632.8nm using the prism coupling method. From these results, the best Ti thickness in our conditions seems like to by 1200$\AA$~1300$\AA$.