Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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z-cut $Ti;LiNbO_3$ Waveguide Optical Properties and lnsertion Loss As a Function of $Ti;LiNbO_3$thickness Fabricated by wet Oxygen Atmosphere

Wet Oxygen 분위기로 제작한 z-cut $Ti;LiNbO_3$도파로 광특성 및 두께에 따른 삽입손실

  • 김성구 (전자부품종합기술연구소 통신부품연구센터) ;
  • 윤형도 (전자부품종합기술연구소 통신부품연구센터) ;
  • 윤대원 (전자부품종합기술연구소 통신부품연구센터) ;
  • 박계춘 (목포대학교 공과대학 정보통신공학부) ;
  • 정해덕 (목포대학교 공과대학 정보통신공학부) ;
  • 이진 (목포대학교 공과대학 정보통신공학부)
  • Published : 1998.10.01
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Abstract

Ti:LiNbO$_3$ optical waveguides have been fabricated by Ti-diffusion in wet oxygen atmosphere. The fabrication conditions of furnace temperature, diffusion time and bubbler temperature were 105$0^{\circ}C$, 8 hours and 9$0^{\circ}C$, respectively and Ti thickness was varied from 700$\AA$ to 1500$\AA$. In this paper, the nearfield patterns, mode sizes (hirizontal/vertical) and insertion loss of waveguides were discussed at wavelength 1550 nm ad function of Ti thickness. With the planar waveguide, the effective index change and diffusion depth were calculated at 632.8nm using the prism coupling method. From these results, the best Ti thickness in our conditions seems like to by 1200$\AA$~1300$\AA$.

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References

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