• 한국전기전자재료학회논문지
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• 제28권11호
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• pp.683-689
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• 2015

For the formation of $N^+$ doping, the antimony ions are mainly used for the fabrication of a BJT (bipolar junction transistor), CMOS (complementary metal oxide semiconductor), FET (field effect transistor) and BiCMOS (bipolar and complementary metal oxide semiconductor) process integration. Antimony is a heavy element and has relatively a low diffusion coefficient in silicon. Therefore, antimony is preferred as a candidate of ultra shallow junction for n type doping instead of arsenic implantation. Three-dimensional (3D) profiles of antimony are also compared one another from different tilt angles and incident energies under same dimensional conditions. The diffusion effect of antimony showed ORD (oxygen retarded diffusion) after thermal oxidation process. The interfacial effect of a $SiO_2/Si$ is influenced antimony diffusion and showed segregation effects during the oxidation process. The surface sputtering effect of antimony must be considered due to its heavy mass in the case of low energy and high dose conditions. The range of antimony implanted in amorphous and crystalline silicon are compared each other and its data and profiles also showed and explained after thermal annealing under inert $N_2$ gas and dry oxidation.

• 방사성폐기물학회지
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• 제3권2호
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• pp.85-93
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• 2005

Isotopes of alkali and alkaline earth metals (AM and AEM) are the main contributors to the heat load and the radiotoxicity of spent fuel (SF) . These components are separated from the SF and dissolved in a molten LiCl in an electrolytic reduction process. A mass transfer model is developed to describe the diffusion behavior of Cs, Sr, and Ba in the SF into the molten salt. The model is an analytical solution of Fick's second law of diffusion for a cylinder which is the shape of a cathode in the electrolytic reduction process. And the model is also applied to depict the concentration profile of the oxygen ion which is produced by the electrolysis of Li$_{2}$O. The regressed diffusion coefficients of the model correlating the experimentally measured data are evaluated to be greater in the order of Ba, Cs, and Sr for the metal ions and the diffusion of the oxygen ion is slower than the metal ions which implies that different mechanisms govern the diffusion of the metal ions and the oxygen ions in a molten LiCl.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.183-184
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• 2008

• 한국콘크리트학회:학술대회논문집
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• 한국콘크리트학회 2000년도 가을 학술발표회논문집(I)
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• pp.413-418
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• 2000

The test results on the deterioration process of concrete under single and combined action of chloride penetration have been obtained. Within the test period of 15 weeks, it is seen that the internally penetrated chloride ion contents are slightly less in the combined action of NaCI and $Na_2SO_4$ than the single action of NaCI. Also the theoretical prediction of chloride penetration based on measured diffusion coefficient agress well with the test data of single deterioration process but disagress with that of combined process. Therefore it should be needed that improved chloride diffusion model for the combined deterioration process.

• 열처리공학회지
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• 제31권2호
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• pp.49-55
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• 2018

A T-shape structure was manufactured by the superplastic forming and diffusion bonding process using two Ti-3Al-2.5V alloy tubes. A Ti-3Al-2.5V tube was prepared for the hydroforming in the superplastic condition until it reaches a surface area such as a roof welded in the hole of another Ti-3Al-2.5V tube. Afterward, the superplastic forming process and the diffusion bonding process were carried out simultaneously until the appropriate bonding along the interface area of two Ti-3Al-2.5V tubes was obtained. The bonding qualities were different at each location of the entire interface according to the applied process conditions such as strain, pressure, temperature, holding time, geometries, etc. The microstructures of bonding interface have been observed to understand the characteristics of the applied processes in this study.

• 한국산학기술학회논문지
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• 제5권4호
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• pp.331-335
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• 2004

본 논문에서는 반도체 공정 시뮬레이션을 위해 산화, 확산 및 이온 주입 공정을 모델링하고, 효율적인 실행과 상호 연관된 연속 공정의 시뮬레이션이 가능하도록 통합화된 환경을 구축하였다. 점성적 스트레스 모델을 이용한 산화 공정은 유속-압력 알고리즘과 경계요소법을 이용하여 안정된 해를 얻었으며, 선확산과 산화증배 현상이 포함된 확산 공정은 전진해법과 유한요소법을 이용하였다 또한 이온 주입 공정은 TRIM을 기본으로 다양한 공정 조건에 대한 모델이 추가된 몬테카를로 방법을 사용하였다. 편리한 사용자 입력 인터페이스와 그래픽적 출력을 제공하고, 윈도즈의 API함수를 이용하여 PC상에서 적은 메모리로도 빠른 결과를 얻을 수 있도록 하였으며, 객체 지향적인 모듈화로 타 시뮬레이터와의 호환성이 가능하도록 구성하였다.

• Korean Journal of Mathematics
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• 제20권1호
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• pp.47-60
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• 2012

We deal some analytic calculations for European option pricing by using the theory of elementary solution of generalized diffusion equation mainly.

• 대한수학회지
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• 제48권1호
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• pp.147-158
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• 2011

In this paper, we consider a multi-dimensional diffusion process in a self-similar random environment and prove a limit theorem for the shape of the full trajectory of the diffusion by using the localization phenomenon.

• EDISON SW 활용 경진대회 논문집
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• 제5회(2016년)
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• pp.344-346
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• 2016

본 논문에서는 3-stream model에 기반한 Dopant diffusion simulator를 사용하여 실리콘 기판 내부의 As이온의 확산을 시뮬레이션한 결과와 Dual-Pearson Analytic model에 기반하여 Ion implantation을 1-D doping simulation한 결과를 토대로 여러 공정 설계에서 diffusion simulator의 사용가능함을 확인하였다.

• 분석과학
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• 제8권2호
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• pp.205-213
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• 1995

알루미나에 흡착된 coronene이 tetra-phenylporpine에 의해 탈착되어 역확산되는 과정을 분광광도법을 이용하여 조사하였다. 액상에서 진행되는 흡착되는 물질과 탈착되는 물질의 역확산과정을, 교차하는 물질의 확산량이 같다는 가정 아래 Fritz 2 성분 흡착등온식을 적용한 역확산 모델로 모사하였다. Tetra-phenylporphine에 의해 탈착되는 과정에서 결정된 coronene 의 역확산계수는 ${\sim}10^{-15}m^2/sec$였으며, 흡착되는 과정에서 결정된 tetra-phenylporphine의 역확산계수는 ${\sim}10^{-11}m^2/sec$였다. 탈착되는 과정에서 결정된 coronenne의 역확산계수가 단일 성분의 흡착과정에서 결정된 확산계수에 비해 $10^5$배 정도로 적게 결정되는 이유는, 확산 교차에 의한 효과뿐 아니라 탈착과정에서 세공내 coronene의 농도 구배가 커진 데 기인하는 것으로 설명되었다.