Effect of Oxygen Partial Pressure on the Structural, Optical and Electrical Properties of Sputter-deposited Vanadium Oxide Thin Films (스퍼터링으로 증착된 바나듐 산화막의 구조적, 광학적, 전기적 특성에 미치는 산소 분압의 효과)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.14 no.12
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- pp.1008-1015
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- 2001