Properties of Polymethyl methacrylate (PMMA) for Polymer Gate Dielectric Thin Films Prepared by Spin Coating (Spin coating 공정을 이용한 Polymethyl methacrylate (PMMA) 박막의 polymer gate dielectric layer로써의 특성평가)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2005.05b
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- pp.29-32
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- 2005