• Title/Summary/Keyword: Dielectric barrier discharge (DBD)

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Remote Plasma Etching of Photoresist Using Pin-To-Plate Dielectric Barrier Discharge

  • Park, Jae-Beom;Gyeong, Se-Jin;Yeom, Geun-Yeong
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2007.04a
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    • pp.82-83
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    • 2007
  • DBD type을 이용한 remote plasma에서 발생된 대기압 플라즈마를 이용하여, PR에 대한 식각 실험을 진행하였다. 과거 습식 화학적 공정에서 오던 기술적 제한의 극복과 진공 플라즈마 가지는 단점을 극복하기 위해 대기압 플라즈마를 이용한 건식 세정에 관한 연구를 진행하였고, 이 때 Gas는 $N_2/O_2$+$SF_6$ 의 조합으로 사용하였으며, 각 gas의 유량에 다른 remote 플라즈마의 전기적, 광학적 특성에 대해 관찰하였다.

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Removal of Volatile Organic Compounds Using a Plasma Assisted Biotrickling System (플라즈마를 결합한 바이오 트리클링 시스템에 의한 휘발성 유기물질의 제거)

  • Kim, Hak-Joon;Han, Bang-Woo;Kim, Yong-Jin
    • Journal of Korean Society for Atmospheric Environment
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    • v.23 no.6
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    • pp.727-733
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    • 2007
  • In this study, a newly developed biotrickling system, combined with a non-thermal plasma reactor, was investigated to effectively treat gaseous contaminants such as VOCs (Volatile Organic Compounds). Three kinds of non-thermal plasmas (NTPs) such as a rod type dielectric barrier discharge (DBD) plasma, a packed bead type DBD plasma and a gliding arc (GA) plasma, were tested and compared in terms of power consumption. The rod type DBD plasma was selected as one for integration with biotrickling system due to its relatively high VOC removal efficiency, low power consumption and low pressure drop. Toluene and xylene as representatives of VOCs were used as test gases. The experiment results showed that the efficiency of biotrickling system was especially very low at the high gas concentration and high flow rate and the removal efficiencies of VOCs were considerably enhanced in the biotrickling system, when the DBD plasma was worked in front of that even at the high gas concentration and high flow rate.

Enhancement of OH Radical Generation of Dielectric Barrier Discharge Plasma Gas Using Air-automizing Nozzle (이류체 노즐을 이용한 유전체장벽방전 플라즈마 가스의 OH 라디칼 생성 향상)

  • Park, Young-Seek
    • Journal of Environmental Science International
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    • v.27 no.8
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    • pp.621-629
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    • 2018
  • Many chemically active species such as ${\cdot}H$, ${\cdot}OH$, $O_3$, $H_2O_2$, hydrated $e^-$, as well as ultraviolet rays, are produced by Dielectric Barrier Discharge (DBD) plasma in water and are widely use to remove non-biodegradable materials and deactivate microorganisms. As the plasma gas containing chemically active species that is generated from the plasma reaction has a short lifetime and low solubility in water, increasing the dissolution rate of this gas is an important challenge. To this end, the plasma gas and water within reactor were mixed using the air-automizing nozzle, and then, water-gas mixture was injected into water. The dissolving effect of plasma gas was indirectly confirmed by measuring the RNO (N-Dimethyl-4-nitrosoaniline, indicator of the formation of OH radical) solution. The plasma system consisted of an oxygen generator, a high-voltage power supply, a plasma generator and a liquid-gas mixing reactor. Experiments were conducted to examine the effects of location of air-automizing nozzle, flow rate of plasma gas, water circulation rate, and high-voltage on RNO degradation. The experimental results showed that the RNO removal efficiency of the air-automizing nozzle is 29.8% higher than the conventional diffuser. The nozzle position from water surface was not considered to be a major factor in the design and operation of the plasma reactor. The plasma gas flow rate and water circulation rate with the highest RNO removal rate were 3.5 L/min and 1.5 L/min, respectively. The ratio of the plasma gas flow rate to the water circulation rate for obtaining an RNO removal rate of over 95% was 1.67 ~ 4.00.

Effect of Non-thermal Dielectric Barrier Discharge Plasma by Air Volume against Mycobacterium Tuberculosis (비열 유전체장벽방전 플라즈마 발생기의 풍량에 따른 결핵균 성장억제 효능)

  • Son, Eun-Soon;Kim, Yonghee;Paik, Namwon;Lee, Ilyong;Kim, Eunhwa;Park, Hae-Ryoung;Lee, Jongseok
    • Journal of Korean Society of Occupational and Environmental Hygiene
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    • v.29 no.3
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    • pp.414-419
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    • 2019
  • Objectives: The objective of this study was to evaluate the inhibitory effect of non-thermal dielectric barrier discharge (DBD) plasma by air volume against Mycobacterium tuberculosis (MTB). Methods: Plasma generators (TB-300, Shinyoung Airtec, Seongnam-si, Korea) were operated in a 2A type biosafety cabinet. The plasma generator was set to a wind flow rate of 14 ($80m^3/h$), 18 ($110m^3/h$), and 22 ($150m^3/h$), and exposure times were set to 0 hours, 3 hours, 6 hours, 9 hours, and 24 hours. Results: The inhibitory effects of plasma at air volume 14 with prolonged exposure time of three hours was 20%, 64% at six hours, 82.3% at nine hours, and 100% after 24 hours exposure. With air volume of 18, the inhibitory effects upon plasma exposure were 36% for three hours, and 100% from 24 hours. Greater air volume resulted in greater inhibition of tuberculosis bacterial growth. In particular, the maximum inhibitory effect (100%) was shown in air volume of 22 ($150m^3/h$) after three hours of plasma exposure. Conclusions: The results showed the correlating inhibitory effects of plasma on the growth of MTB in combination with increasing plasma exposure time and air volume.

Surface Modification of Polyurethane Film Using Atmospheric Pressure Plasma (대기압 플라스마에 의한 폴리우레탄 필름의 표면 개질)

  • Yang In-Young;Myung Sung-Woon;Choi Ho-Suk;Kim In-Ho
    • Polymer(Korea)
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    • v.29 no.6
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    • pp.581-587
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    • 2005
  • Commercial polyurethane film (PU) was modified with Ar plasma ionized in dielectric barrier discharge (DBD) plate-type reactor under atmospheric pressure. We measured the change of the contact angle and the surface fee energy with respect to the plasma treatment conditions such as treatment time, RF-power, and Ar gas flow rate. We also optimized the plasma treatment conditions to maximize the surface peroxide concentration. At the plasma treatment time of 70 sec, the power of 120 W and the Ar gas flow rate of 5 liter per minute (LPM), the best wettability and the highest surface fee energy were obtained. The 1,1 diphenyl-2-picrylhydrazyl (DPPH) method confirmed that the surface peroxide concentration was about 2.1 nmol/$\cm^{2}$ at 80 W, 30 sec, 6 LPM.

Attenuation Effects of Plasma on Ka-Band Wave Propagation in Various Gas and Pressure Environments

  • Lee, Joo Hwan;Kim, Joonsuk;Kim, Yuna;Kim, Sangin;Kim, Doo-Soo;Lee, Yongshik;Yook, Jong-Gwan
    • Journal of electromagnetic engineering and science
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    • v.18 no.1
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    • pp.63-69
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    • 2018
  • This work demonstrates attenuation effects of plasma on waves propagating in the 26.5-40 GHz range. The effect is investigated via experiments measuring the transmission between two Ka-band horn antennas set 30 cm apart. A dielectric-barrier-discharge (DBD) plasma generator with a size of $200mm{\times}100mm{\times}70mm$ and consisting of 20 layers of electrodes is placed between the two antennas. The DBD generator is placed in a $400mm{\times}300mm{\times}400mm$ acrylic chamber so that the experiments can be performed for plasma generated under various conditions of gas and pressure, for instance, in air, Ar, and He environments at 0.001, 0.05, and 1 atm of pressure. Attenuation is calculated by the difference in the transmission level, with and without plasma, which is generated with a bias voltage of 20 kV in the 0.1-1.4 kHz range. Results show that the attenuation varies from 0.05 dB/m to 9.0 dB/m depending on the environment. Noble gas environments show higher levels of attenuation than air, and He is lossier than Ar. In all gas environments, attenuation increases as pressure increases. Finally, electromagnetic models of plasmas generated in various conditions are provided.

Atmospheric-Pressure Plasma Treatment of Ethylene-Vinyl Acetate (EVA) to Enhance Adhesion Energy between EVA and Polyurethane (상압 플라즈마 표면처리에 따른 Ethylene-Vinyl Acetate (EVA)의 표면개질 및 Polyurethane과의 접착력 증진)

  • Kim, Jeong-Soon;Uhm, Han-S;Kim, Hyoung-Suk
    • Elastomers and Composites
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    • v.39 no.1
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    • pp.3-11
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    • 2004
  • Plasma treatment is frequently used to increase surface functionality and surface activity. It enables to improve various surface properties such as catalytic selectivity, printability, and interfacial adhesion between various materials. Surface or the ethylene-vinyl acetate (EVA) is exposed under an atmospheric pressure plasma torch (APPT), generated by dielectric barrier discharge (DBD), and the treated surfaces are systemically investigated. Argon, air, and oxygen are used as a processing gas. Properties of the treated EVA surfaces are investigated by the zeta-potential measurements and surface free energies. It is shown that the plasma treatment leads to a drastic increase of surface functional groups of EVA, as the increase of its adhesion energy ($G_{IC}$). Therefore, it is concluded that the APPT process is an effective means to improve adhesion of EVA and polyurethane (PU).

Synthesis of C2 Chemicals from Methane in a Dielectric Barrier Discharge (DBD) Plasma Bed (메탄으로부터 촉매와 유전체 장벽 방전 반응기를 활용한 C2 화합물의 합성)

  • Oh, Ji-Hwan;Jeon, Jong Hyun;Jeoung, Jaekwon;Ha, Kyoung-Su
    • Korean Chemical Engineering Research
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    • v.56 no.1
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    • pp.125-132
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    • 2018
  • The direct synthesis of $C_2$ chemical directly from methane was studied by employing catalysts with ordered mesopores in a dielectric barrier discharge plasma reactor. The reaction was carried out using MgO/OMA (ordered mesoporous alumina), $MgO/{\gamma}-Al_2O_3$ and $MgO/{\alpha}-Al_2O_3$ as catalysts. When MgO/OMA was applied, it showed excellent performance in the plasma reactor using pulse-type power supply and the selectivity of $C_2$ chemicals was measured as 67%. The effects of metal oxide type, textural property of support, alumina phase and power supply type on catalytic performance were investigated especially in terms of $C_2$ chemical formation. BET (Brunauer, Emmett, Teller), X-ray diffraction, transmission electron microscope and thermogravimetric analysis were used to investigate the characterization of the catalyst before and after the reaction.

A Study on the Ralstonia Solanacearum Inactivation using Improved Plasma Process (개선된 플라즈마 공정을 이용한 Ralstonia Solanacearum 불활성화에 관한 연구)

  • Kim, Dong-Seog;Park, Young-Seek
    • Journal of Environmental Science International
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    • v.23 no.3
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    • pp.369-378
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    • 2014
  • Effect of improvement of the dielectric barrier discharge (DBD) plasma system on the inactivation performance of bacteria were investigated. The improvement of plasma reactor was performed by combination with the basic plasma reactor and UV process or combination with the basic plasma reactor and circulation system which was equipped with gas-liquid mixer. Experimental results showed that tailing effect was appeared after the exponential decrease in basic plasma reactor. There was no enhancement effect on the Ralstonia Solanacearum inactivation with combination of basic plasma process and UV process. The application of gas-liquid mixing device on the basic plasma reactor reduced inactivation time and led to complete sterilization. The effect existence of gas-liquid mixing device, voltage, air flow rate (1 ~ 5 L/min), water circulation rate (2.8 ~ 9.4 L/min) in gas-liquid mixing plasma, plasma voltage and UV power of gas-liquid mixing plasma+UV process were evaluated. The optimum air flow rate, water circulation rate, voltage of gas-liquid mixing system were 3 L/min, 3.5 L/min and 60 V, respectively. There was no enhancement effect on the Ralstonia Solanacearum inactivation with combination of gas-liquid mixing plasma and UV process.

Deposition of Super Hydrophobic a-C:F Films by Dielectric Barrier Discharge at Atmospheric Pressure

  • Kim, Duk-Jae;Kim, Yoon-Kee;Han, Jeon-Geon
    • Journal of the Korean institute of surface engineering
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    • v.44 no.2
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    • pp.50-54
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    • 2011
  • Hydrophobic a-C:F film was coated on polycarbonate film with $CF_4$, $C_2F_6$ and HFC ($C_2F_4H_2$) gas in helium discharge generated by 5~100 kHz AC power supply at atmospheric pressure and room temperature. The highest water contact angle of the a-C:F film formed with $He/C_2F_6$ mixed gas is $155^{\circ}$. X-ray photoelectron spectrum showed that there was 40% of C-$CF_3$ bond at the surface of the super hydrophobic film. The contact angle and deposition rate were decreased with increasing substrate temperature. The contact angle was generally increased with the surface roughness of the film. The contact angle was high when the surface microstructure of the film was fine and sharp at the similar roughness and chemical composition of the surface.