• 대한전기학회:학술대회논문집
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• 대한전기학회 2009년도 제40회 하계학술대회
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• pp.1256_1257
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• 2009

We have grown, for the first time to our knowledge, N-doped ZnO thin films on sapphire substrate by employing novel dielectric barrier discharge in pulsed laser deposition (DBD-PLD). DBD guarantees an effective way for massive in-situ generation of N-plasma under the conventional PLD process condition. Low-temperature photoluminescence spectra of the N-doped ZnO film provided near band-edge emission after thermal annealing process. The emission peak was resolved by Gaussian fitting to find a dominant acceptor-bound exciton peak ($A^0X$) that indicates the successful p-type doping of ZnO with N.

• Applied Science and Convergence Technology
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• 제26권4호
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• pp.74-78
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• 2017

The discharge characteristics of the radio frequency (RF) surface dielectric barrier discharge have been simulated for the investigation of the ratio of the ion transit time to the RF period. From one-dimensional particle-in-cell (PIC) simulation for a planar dielectric barrier discharge (DBD), it was observed that the high-frequency driving voltage confines the ions in the plasma because of a shorter RF period than the ion transit time. For two-dimensional surface dielectric barrier discharges, a fluid simulation is performed to investigate the characteristics of RF discharges from 1 MHz to 40 MHz. The ratio of the peak density to the average density decreases with the increasing frequency, and the spatiotemporal discharge patterns change abruptly with the change in the ratio of ion transit time to the RF period.

• 한국환경과학회지
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• 제15권5호
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• pp.479-484
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• 2006

Removal of elemental mercury $(Hg^0)$ with the reactive species produced from dielectric barrier discharge (DBD) was studied. We investigated the effect of operating parameters such as the applied voltage, residence time, initial concentration and co-existence of other pollutants. The removal of $(Hg^0)$ was significantly promoted by an increase in the applied voltage of the DBD reactor system. It is important to note that at the same input power, the removal efficiency of $(Hg^0)$ was much higher than that of NO gas. These results imply that if the DBD system is used as a NOx treatment facility, it is capable of removing $(Hg^0)$ simultaneously with NOx.

• 한국가시화정보학회지
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• 제17권1호
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• pp.53-59
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• 2019

Particle image velocimetry is performed in order to analyze flowfield induced by a dielectric barrier discharge plasma actuator. The velocity vector fields are obtained for the two different input voltage conditions; the voltage 3 and 5 kV at the frequency 10 kHz. The obtained flowfields show that the air is accelerated and its speed increase almost linearly over the covered electrode. The amount of momentum induced by the DBD plasma actuator is estimated from the obtained velocity fields, and the estimated values reasonably agree with the previous experiment.

• 한국환경과학회지
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• 제32권3호
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• pp.197-204
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• 2023

This study aims to inactivate Artemia sp. (Zooplankton) in ballast water through the dielectric barrier discharge (DBD) plasma process. The DBD plasma process has the advantage of enabling direct electric discharge in water and utilizing chemically active species generated by the plasma reaction. The experimental conditions for plasma reaction are as follows; high voltage of 9-22 kV, plasma reaction time of 15-600 s, and air flow rate of 0.5-5.5 L/min. The results showed that the optimal experimental conditions for Artemia sp inactivation were 16 kV, 60 s, 2.5 L/min, respectively. The concentrations of total residual oxidants and ozone generated by plasma reaction increased with an increase of in voltage and reaction time, and the concentration of generated air did not increase above a certain amount.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.263-263
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• 2011

본 연구에서는 DBD (Dielectric Barrier Discharge)방식의 상압 플라즈마를 이용하여 FPD (flat panel display) 공정에 사용되는 a-Si, Si3N4의 식각 공정 특성을 평가하였다. 사용된 DBD 반응기는 기존의 blank planar plate 형태의 Power가 인가되는 anode 부분과 Dielectric Barrier 사이 공간을 액상의 도전체로 채워 넣은 형태의 전극이 사용 하였으며, 인가 Power는 40kHz AC 최대인가 전압 15 kVp를 사용 하였다. 방전 가스는 N2, 반응가스로는 CDA (Clean Dry Air)와 NF3, 액상의 Etchant를 사용 하였으며 모든 공정은 In-line type으로 시편을 처리 하였다. NF3의 경우 30 mm/sec 이송속도 1회 처리 기준 a-Si 1300${\AA}$, Si3N4 1900${\AA}$의 식각 두께를 보였으며 a-Si : Si3N4 선택비는 N2, CDA의 조절을 통하여 최대 1:2에서 4:1 정도까지 변화가 가능하였다. 균일도는 G2 (370 mm${\times}$470 mm)의 경우 5.8 %의 균일도를 보이고 있다. 이외에도 NF3 공정의 경우 실제 TFT-LCD 공정 중 n+ channel (n+ a-Si:H)식각 공정에 적용하여 5.5 inch LCD panel feasibility를 확인 할 수 있었다. 액상 Etchant (HF수용액, NH4HF2)는 버블러를 사용하여 기화 시켜 플라즈마 소스를 통해 1차적으로 활성화 시키고 기존 DBD 반응기에 공급해 주는 형태로 평가를 진행하였다. 식각 특성은 30mm/sec 이송속도에서 a-Si $25{\AA}$ 정도로 가스 형태의 Etchant에 비해 매우 낮은 수준이나 Etching rate 향상을 위한 factor 파악 및 개선을 위한 연구를 진행 하였다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.2344-2347
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• 2007

To generate negative ion, a small dielectric barrier discharge (DBD) plasma reactor was used in this study and operated by high AC voltage. With increasing of voltage, we can get more negative ions. However unfortunately, if the input voltage is too high, it will also cause formation of ozone which is very harmful to human being health. So the work of finding out the best condition of Voltage and frequency was carried out firstly. After several times of measurement, operating at 20 kHz frequency is the best condition generating high ion concentration without ozone. For the purpose of finding out the best reactor structure, two types of surface dielectric barrier discharge (DBD) reactors were examined to produce negative oxygen ions at the conditions of 20 kHz frequency. The results indicated that the surface DBD reactor with several small tips showed better characteristics for generation of negative oxygen ions at the same condition.

• 대한기계학회논문집B
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• 제27권4호
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• pp.524-533
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• 2003

DBD(Dielectric Barrier Discharge) plasma in air is well established for the production of large quantities of ozone and is more recently being applied to aftertreatment processes for HAPs(Hazardous Air Pollutants). Aim of this work is to determine design and operating parameters of a hybrid air cleaning system. DBD and ESP(Electrostatic Precipitator) are used as nano particle charger and collector, respectively. Pelletized MnO$_2$ catalyst or activated carbon is used fer ozone decomposition or adsorption material. AC voltage of 7～10 KV(rms) and 60 Hz is used as DBD plasma source. DC - 8 KV is applied to the ESP for particle collection. The overall particle collection efficiency for the hybrid system is over 85 % under 0.64 m/s face velocity. Ozone decomposition efficiency with pelletized MnO$_2$ catalyst or activated carbon packed bed is over 90 % when the face velocity is under 0.4 m/s in dry air.

• 한국전자파학회논문지
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• 제24권3호
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• pp.324-330
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• 2013

본 논문은 대기압 환경에서 발생하는 유전체 장벽 방전(dielectric barrier discharge: DBD) 플라즈마의 전자파 산란 특성을 측정하였다. 본 논문에서는 기본적인 DBD 플라즈마 발생기 구조를 병렬로 연결하여 넓은 면적의 플라즈마 발생기를 제작하였고, 14 kV, 4 kHz의 고전압 발생장치를 이용해 플라즈마가 발생하는 것을 확인하였다. 두 개의 혼 안테나와 벡터 네트워크 분석기를 이용해 S-parameter의 비교를 통해 전자파 산란 특성을 측정하였다. 전방 산란의 경우 제작된 플라즈마 발생기의 구조적 특성으로 인해 안테나의 편파에 따라 다른 결과 값을 얻었다. 편파가 수평일 때 최대 2 dB의 산란파 감쇠 특성을 확인할 수 있었다. 또한, 편파가 수평일 경우, 플라즈마 발생기 뒤에 PEC를 설치한 후 후방 산란 특성을 측정하였다. 그 결과, 5 GHz에서 안테나 관찰 각도가 $40^{\circ}C$, $60^{\circ}C$일 때 최대 2 dB 산란파 감쇠 특성을 얻었다.

• 조명전기설비학회논문지
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• 제30권2호
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• pp.71-77
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• 2016

The dielectric barrier discharge (DBD) has low efficiency due to about 70% input power is consumed as thermal energy in the discharge space. However, because of the usage of DBD ozone generator is easier than other methods. The DBD ozone generator has been widely applied for high concentration ozone generation in the industrial application. But, the low-capacity compact DBD ozone generator is not applied so far. Therefore, the DBD ozone generator is necessary to improve ozone production efficiency and reduce the capacity. In this paper, the stainless steel pipe inner electrode was designed with hall type and screw type to improve the ozone production yield. The manufactured two inner electrodes were experimented with normal type for comparison of the discharge characteristics and the ozone generating characteristics. As the experimental results, the discharge current effective value of designed inner electrodes with hall type and screw type are higher than the normal type, due to unequal electric field is formed at the boundary. However, the difference of designed and original electrodes is less than 0.1mA that has no effect on the discharge characteristic. On the other hand, the screw type inner electrode increased higher than original model about 7 times when the flow rate of the oxygen source gas was increased from $0.6{\ell}/min$ to $1.0{\ell}/min$ The reason was assumed by the flow rate of the raw gas through the inner electrode was became fast that has a cooling effect. The designed hall type and screw type inner electrodes have shown good performances in ozone generation and ozone production that better than normal type in the same electrode surface area.