• Tribology and Lubricants
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• v.39 no.5
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• pp.212-215
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• 2023

Diaphragm compressors play a crucial role in safely compressing large volumes of high-purity hydrogen gas without contamination or leakage, thereby ensuring quality and reliability. Diaphragm compressors use a thin, flat, triple-layered diaphragm plate that is subjected to repetitive piston pressure for compression. They are usually made of metallic materials such as stainless steel or Inconel owing to their high-pressure resistance. However, since they are consumable components, they fail due to fatigue from repetitive pressure and vibration stress. This study aims to evaluate the scratch characteristics of diaphragms in operational environments by conducting tests on three different samples: Inconel 718, AISI 301, and Teflon-coated AISI 301. The Inconel 718 sample underwent a polishing process, the AISI 301 sample used raw material, and the Teflon coating was applied to the AISI 301 substrate at a thickness of 50 ㎛. To assess the scratch resistance, reciprocating motion friction tests were performed using a tribometer, utilizing 220 and 2000 grit sandpapers as the counter materials. The results of the friction tests suggested that the Teflon-coated sample exhibited the lowest initial friction coefficient and consistently maintained the lowest average friction coefficient (0.13 and 0.11 with 220 and 2000 grit, respectively) throughout the test. Moreover, the Teflon-coated diaphragm showed minimal wear patterns, indicating superior scratch resistance than the Inconel 718 and AISI 301 samples. These findings suggest that Teflon coatings may offer an effective solution for enhancing scratch resistance in diaphragms, thereby improving compressor performance in high-pressure hydrogen applications.

• Proceedings of the KIEE Conference
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• 1993.11a
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• pp.188-191
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• 1993

Silicon flow sensor which can detect the magnitude and direction of two dimensional air flow was designed and fabricated by CMOS process and bulk micromachining technique. The flow sensor consists of three-layered dielectric diaphragm a heater at the center of the diaphragm and four thermopiles surrounding the heater at each side of diaphragm as sensing elements. This diaphragm structure contributes to improve the sensitivity due to excellent thermal isolation property of dielectric materials and its tiny thickness. The flow sensor has good axial symmetry to sense 2-D air flow with the optimized sensing position in the given structure. Measured sensitivity of our sensor is $18.7mV/(m/s)^{1/2}$.

• Tuberculosis and Respiratory Diseases
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• v.87 no.1
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• pp.80-90
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• 2024

Background: There are many methods of evaluating diaphragmatic function, including trans-diaphragmatic pressure measurements, which are considered the key rule of diagnosis. We studied the clinical usefulness of chest ultrasonography in evaluating stable chronic obstructive pulmonary disease (COPD) patients and those in exacerbation, focusing on diaphragmatic measurements and their correlation with spirometry and other clinical parameters. Methods: In a prospective case-control study, we enrolled 100 COPD patients divided into 40 stable COPD patients and 60 patients with exacerbation. The analysis included 20 age-matched controls. In addition to the clinical assessment of the study population, radiological evaluation included chest radiographs and chest computed tomography. Transthoracic ultrasonography (TUS) was performed for all included subjects. Results: Multiple A lines (more than 3) were more frequent in COPD exacerbation than in stable patients, as was the case for B-lines. TUS significantly showed high specificity, negative predictive value, positive predictive value, and accuracy in detecting pleural effusion, consolidation, pneumothorax, and lung mass. Diaphragmatic measurements were significantly lower among stable COPD subjects than healthy controls. Diaphragmatic thickness and excursion displayed a significant negative correlation with body mass index and the dyspnea scale, and a positive correlation with spirometry measures. Patients in Global Initiative for Chronic Obstructive Lung Disease (GOLD) group D showed lower diaphragmatic measurements (thickness and excursion). Conclusion: The TUS of COPD patients both in stable and exacerbated conditions and the assessment of diaphragm excursion and thickness by TUS in COPD patients and their correlations to disease-related factors proved informative and paved the way for the better management of COPD patients.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.31A no.5
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• pp.113-120
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• 1994

Silicon flow sensor that can detect the velocity and direction of air flow was designed and fabricated by integrated circuit process and bulk micromachining technique. The flow sensor consists of three-layered dielectric diaphragm, a heater at the center of the diaphragm, and four thermopiles surrounding the heater at each side of diaphragm as sensing elements. This diaphragm structure contributes to improve the sensitivity of the sensor due to excellent thermal isolation property of dielectric materials and their tiny thickness. The flow sensor has good axial symmetry to sense 2-D air flow with the optimized sensing position in the proposed structure. The sensor is fabricated using CMOS compatible process followed by the anisotropic etching of silicon in KOH and EDP solutions to form I$\mu$ m thick dielectric diaphragm as the last step. TCR(Temperature Coefficient of Resistance) of the heater of the fabricated sensors was measured to calculate the operating temperature of the heater and the output voltage of the sensor with respect to flow velocity was also measured. The TCR of the polysilicon heater resistor is 697ppm/K, and the operating temperature of the heater is 331$^{\circ}C$ when the applied voltage is 5V. Measured sensitivity of the sensor is 18.7mV/(m/s)$^{1/2}$ for the flow velocity of smaller than 10m/s.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.776-779
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• 2002

A bellows diaphragm design program for mechanical seal was developed in this study. This program was written in AutoLISP on the AutoCAD system with a personal computer. Basic design concept used in this program is composition of a convolution that is tangent to two lines and five circles from given design parameters(initial radius, inner and outer diameter, thickness, pitch, etc.). The effects of altering some design parameters on stress distribution of bellows were estimated using commercial FEM code, NISAII. As a result, the bellows diaphragm for mechanical seal was successfully designed by the program. The FEM result shows that stress is dependent on straight line length and bellows diameter with same span.

• Steel and Composite Structures
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• v.10 no.3
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• pp.261-279
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• 2010

Generally, a box tube, which is used for an existing square CFT structure, is made by welding four plates. The manufacturing efficiency of this steel tube is poor, and it also needs special welding technology to weld its internal diaphragm and the through diaphragm. Therefore, an interior-anchor-type square steel tube was developed using the method of cold-forming thin plates to prevent welding of the stress concentration position, and to maximize the section efficiency. And, considering of the flow of beam flange load, the efficiency of erection and the weldability of the diaphragm to thin walled steel column, the external diaphragm connection was selected as the suitable type for the welded built-up square CFT column to beam connection. And, an analytical study and tests were conducted to evaluate the structural performance of the suggested connection details and to verify the suggested equations for the connection details. Through this study, the composite effect of the internal anchor to concrete, the resistance and stress distribution of the connections before and after the existing column is welded to the beam, the effective location of welding in connection were analyzed.

• Korean Journal of Optics and Photonics
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• v.12 no.6
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• pp.463-467
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• 2001

In this study, we developed a FFPI (fiber optic Fabry-Perot interferometer) pressure sensor using the Si diaphragm which measures pressure in vivo. The diaphragm and its supporting structure were etched in KOH solution and were fabricated with micromachining technology. For the configuration of the sensor, the length of the cavity of the Fabry-Perot etalon is 15 mm and one end of the etalon was bonded to a Si diaphragm with 507m thickness. When the area of the Si diaphragm was 2$\times$2 mm2 (cavity length 15 mm), it turns out that the pressure sensitivity was about 1.5 degree/kPa. The pressure sensor developed in this study showed that the phase change was linearly proportional to the increasing pressure in the range of 80 kPa.

• Steel and Composite Structures
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• v.37 no.6
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• pp.633-647
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• 2020

This paper aims to study the seismic performance of external diaphragm connection between SST (square steel tube) column and H-shaped beam through experimental and analytical study involving finite element (FE) method and theoretical analysis. In the experimental study, three external diaphragm connection specimens with weak panel zone were tested under axial pressure on the top of the column and antisymmetric cyclic loads at the beam end to investigate the seismic performance of the panel zone. The hysteretic behavior, failure mode, stiffness and ductility of the specimens were discussed. Key point to be explored was the influence of the thickness of the steel tube flange on the shear capacity of the specimens. In the analytical study, three simplified FE models were developed to simulate the seismic behavior of the specimens for further analysis on the influence of steel tube flange. Finally, four existing calculation formulas for the shear capacity of the external diaphragm connection were evaluated through comparisons with the results of experiments and FE analysis, and application suggestions were put forward.

• Journal of Korean Ophthalmic Optics Society
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• v.6 no.1
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• pp.13-29
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• 2001

A mathematical model was proposed to analyze the vibration of diaphragm, such as the contact lenses fitted on the eyes, being subjected to the external sinusoidal pressure. The model incorporates the differential equations and their numerical solution program, based on the wave equations. Turbo-C and graphic software, formulated to describe the dependence of the various parameters involved in the vibration. The model predicts the radial distribution of amplitude, frequency dependence of both average displacement amplitude and the power of diaphragm whose edge is being either simply supported or rigidly clamped in vibration. The effect of variables such as thickness, radius, damping coefficients on the vibration characteristics was illustrated by the computer simulation of the derived program. As the frequency of driving pressure increases above the certain value determined by the boundary conditions and parameters the wave shape or pattern changes from simple arc to belly or loops having double antinode. It seems that the effect of outer antinode progressively increases as the frequency increases. If this kind of phenomena occurs to the contact lens on the cornea in vivo, it may cause an abnormal correction power in the lenses or pull off the eye due the increased rise of outer part of the lens.

• Journal of the Korean Institute of Telematics and Electronics
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• v.26 no.11
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• pp.1686-1690
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• 1989

Using the anisotropic etching characteristics of N2H4-H2O solutions, Si diaphragm was fabricated for the integrated sensors. The optimal composition and temperature of the etching solution in (100) Si etching process was established to be 50mol% N2H4 in H2O at 105\ulcorner\ulcorner for both higher etch rate (=2.6\ulcorner/min) and better surface quality of etched (100) planes. Based on the above optimal etching condition, the electrochemical etch-stop technique was employed to form n-type Si diaphragm having a thickness of 20\ulcorner and the thickness of diapragm could exactly be controlled to 20\ulcorner\ulcorner.