• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
• /
• pp.372-375
• /
• 2003

MCA deflection control is a important technology for the development of MEMS applications. In this study, deflection analysis at the MLA/Si diaphragm was investigated by Finite Element Method. Analysis of Si diaphragm combined with MCA has been implemented into the ANSYS (Solid5 and Solid45). On the basis of this structure, deflection versus MCA number of layers has been modelled and MCA/Si contact area characteristics with different diaphragm conditions were analyzed. Consequently, it is expected that fabrication technology of MCA/Si diaphragm could be usefully applied for the fabrication process of high-performance piezoelectric MEMS devices.

• 대한기계학회논문집B
• /
• 제34권6호
• /
• pp.599-606
• /
• 2010

본 연구에서는 다양한 작동조건(인가전압, 주파수)에 대하여 박막의 두께와 챔버의 직경이 열공압형 마이크로펌프의 액추에이터 박막의 거동 특성에 미치는 영향을 실험적으로 파악하기 위해 다양한 박막 두께와 챔버직경의 액추에이터를 제작하였다. 액추에이터는 파이렉스 표면에 위치한 마이크로히터, 챔버, 그리고 박막으로 구성된다. 모든 인가전압에 대하여 주파수가 10 Hz 이하로 감소함에 따라 박막 중앙의 최대 변위는 박막의 두께와 챔버의 직경에 관계없이 크게 증가한다. 낮은 주파수 영역에서 챔버로 공급되는 열량이 증가함에 따라 박막 중앙의 변위는 박막의 두께가 얇을수록, 챔버의 직경이 작을수록 증가한다. 10 Hz 이상의 주파수 영역에서 박막 두께, 챔버 직경, 공급 열량과 같은 모든 설계 변수가 박막 중앙의 변위에 미치는 영향은 미미하다.

• 센서학회지
• /
• 제5권2호
• /
• pp.1-8
• /
• 1996

본 논문에서는 감도를 향상시키고 저압력 범위에서 다이어프램의 휨을 감소시킴으로서 선형성이 향상되도록 한 센터 보스(center boss) 다이어프램 구조를 갖는 압력센서를 설계 하였다. 설계한 센터보스형 압력센서의 최대 휨은 $0.125{\mu}m$, 최대 응력은 $2.24{\times}10^{7}\;Pa$, 최대 스트레인은 $132\;{\mu}strain$, 감도는 27.67 mV/V.psi로서 휨은 다이어프램 두께의 약 1/160, 정사각형 구조일때의 1/35로 감소하였고 감도는 정사각형 구조일때보다 19배정도 증가하였다.

• 대한전기학회논문지:전기물성ㆍ응용부문C
• /
• 제49권5호
• /
• pp.315-320
• /
• 2000

This paper presents the fabrication and test of a micropump with an electromagnetic actuator and a pair of aluminum flap valves. The actuator consists of a solenoid coil, a permanent magnet and an actuator diaphragm. The actuator diaphragm is fabricated by the spin coating of silicone rubber. The valve are passive ones and are fabricated by micromachining. The deflection of the fabricated actuator diaphragm is measured with a laser vibrometer. The deflection of the actuator diaphragm is proportional to the input current. The measured deflection of the fabricated diaphragm is $400 \mum$,/TEX> when the input is 118 mApp, and the cut-off frequency is 50 Hz. The maximum flow rate of the fabricated micropump with the electromagnetic actuator is about 5$0 \muell/min$ at 5 Hz when the input current and the duty ratio of the square was are 118 mApp and 50%, respectively.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2007년도 추계학술대회 논문집
• /
• pp.327-327
• /
• 2007

This paper reports the simulation results of piezoelectric microspeakers due to structural changes(diaphragm materials, corrugation width and electrode shapes). When we compared the dependence of diaphragm material properties, the microspeaker with LTO(Low Temperature Oxide) diaphragm shows higher deflection than that of silicon nitride diaphragm, even though the resonant frequencies are almost same in both cases. In case of circular-electrode microspeaker, the deflection of diaphragm is about $16\;{\mu}m$ at 20 V, and it decreases as the corrugation width is decreased. However, the deflection of diaphragm with the square-electrode reveals almost twice times higher value at the same applied voltage than the circular one, and it increases as the corrugation depths are decreased from $30\;{\mu}m\;to\;10\;{\mu}m$. The first resonant frequency of microspeakers present about 1.8 kHz in circular-electrode and 1.2 kHz in square-electrode, respectively.

• 한국수소및신에너지학회논문집
• /
• 제20권4호
• /
• pp.274-282
• /
• 2009

Diaphragm compressor is widely used for hydrogen compression because it achieves high gas pressure without gas contamination. Diaphragm deflecting in the cavity with high pressure formed by an oil compression is the most important component in the compressor. Therefore, it is necessary to obtain deflection degree of diaphragm to predict the damage point of diaphragm. The objective of this study is to estimate the diaphragm's damage point through diaphragm deflection test by implementing with strain gauges attached on several radial points. Without gas compression, strain sum of each points varied as similarly as the variation of the pressure with respect to time. And while the motor speed was slower than 400rpm, the strain near the rim was larger than that of the center. When motor speed, however, was over 500rpm, strain became similar to that of the center and the rim. With gas compression, it was shown that the variation of the strain sum was delayed against that of the pressure and the strain near the rim was much higher than that of the center.

• 한국자동차공학회논문집
• /
• 제14권1호
• /
• pp.54-59
• /
• 2006

An analytical solution for deflection-load characteristics of a conical disk spring used especially in the automotive manual transmission clutch applications is proposed in order to take into account the effects of friction and large deformation. The conical disk spring, or the diaphragm spring, has a hinge support, an application point of release load at the tip of the fingers and an application point of clamp load near but inside the outer perimeter of the conical disk spring. The friction coefficient is assumed to be a constant regardless of the speed of deflection and the magnitude of loads. Comparison with experimental shows a good agreement with the analytical prediction. Also, the sensitivity of the clamp load due to variations in the geometrical parameters of the conical disk spring is calculated and discussed.

• 대한전기학회논문지:전기물성ㆍ응용부문C
• /
• 제52권10호
• /
• pp.487-491
• /
• 2003

The low-cost, simple structured micropump which is actuated by piezoelectric-discs, is fabricated with polydimethylsiloxane (PDMS) and the performances of the micropump, such as pump rate and backpressure, are characterized. The PDMS micropump with diffusers instead of passive check valves as a flow-rectifying element was fabricated. The deflection of glass diaphragm measured by atomic force microscope (AFM) is about 0.4$\mu\textrm{m}$ when applying a 150V square wave voltage at 300Hz across a 300${\mu}\ell$ thick piezoelectric disc. While the square wave driving voltage is applied to the piezoelectric disc of the actuator, the flow rate is measured by fluid displacement variation of the outlet tube. The flow rate of micropump increases with enhancing the applied voltage due to the increase of diaphragm deflection. The flow rate and the backpressure of the micropump with diffusers are about 32.9${\mu}\ell$/min and 173Pa respectively for the above mentioned deflection conditions.

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2007년도 춘계학술대회A
• /
• pp.1254-1258
• /
• 2007

Electro-active polymer (EAP), one of the smart materials, is a new alternative offering ultra-precise movements and bio-compatibility. We present the results of the design, fabrication, and performance evaluation of a fabricated diaphragm-type polymer actuator using segmented polyurethane(SPU). This paper illustrates the relationship between the elastic modulus and maximum deflection as a key property of the Maxwell stress effect and also presents the relationship between the dielectric constant and maximum deflection as a key property of the electrostriction effect, especially in polymer actuators using SPU. A diaphragm-type actuator was used to induce an equation of the vertically distributed load by using a fully clamped circular plate as the boundary condition. To verify the equation, the results were compared to the data measured from load cell. In the near future, a low-cost check valves and bio-robot can be applied by its actuators.

• 한국신재생에너지학회:학술대회논문집
• /
• 한국신재생에너지학회 2009년도 춘계학술대회 논문집
• /
• pp.787-790
• /
• 2009

There are several types of compressors which are appropriate for hydrogen gas station. Metal diaphragm type of hydrogen compressor is the one of them, a use in which satisfies the requirements of maintaining gas purity and producing high pressure over 700 bar. The objective of this study is to investigate an characteristics of compression as bulk modulus of oil varies. Three cases of bulk modulus ranging from $2{\times}10^9$, $4.52{\times}10^9$ and $7{\times}10^9$ were studied through FSI (Fluid Structure Interaction) analysis. Gas pressure, oil pressure and deflection degree of diaphragm were analysed during a certain period of compression process. Highest pressure and deflection were found in the condition of high bulk modulus of $7{\times}10^9$.