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http://dx.doi.org/10.3795/KSME-B.2010.34.6.599

Experimental Study of the Behavior Characteristics of Actuator Diaphragms in Thermopneumatic Micropumps  

Lee, Jong-Mun (Cooling Module Department, Technical Research Institute, Doowon Climate Control)
Kim, Young-Deuk (Department of Mechanical Engineering, Hanyang University)
Kim, Woo-Seung (Department of Mechanical Engineering, Hanyang University)
Publication Information
Transactions of the Korean Society of Mechanical Engineers B / v.34, no.6, 2010 , pp. 599-606 More about this Journal
Abstract
In the present study, actuators with diaphragms of different thickness and chambers of different diameter are fabricated to examine experimentally how the behavior characteristics of the actuator diaphragm in a thermopneumatic micropump are affected by diaphragm thickness and chamber diameter under various operating conditions with different values of input voltage and frequency. The actuator comprises a microheater set on Pyrex glass, a chamber, and a diaphragm. For all values of the input energy, as the frequency decreases below 10 Hz, the maximum center deflection of the diaphragm greatly increases irrespective of diaphragm thickness and chamber diameter. At low frequencies, as the heat energy supplied to the chamber increases, the center of deflection of the diaphragm increases; the magnitude of deflection is high for thin diaphragms and for diaphragms whose chambers have small diameters. At frequencies higher than 10 Hz, all the design variables such as diaphragm thickness, chamber diameter, and the input energy have negligible effect on the center deflection of the diaphragm.
Keywords
Thermopneumatic; Micropump; Actuator; Diaphragm Deflection; PDMS;
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