• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.11a
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• pp.372-375
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• 2003

MCA deflection control is a important technology for the development of MEMS applications. In this study, deflection analysis at the MLA/Si diaphragm was investigated by Finite Element Method. Analysis of Si diaphragm combined with MCA has been implemented into the ANSYS (Solid5 and Solid45). On the basis of this structure, deflection versus MCA number of layers has been modelled and MCA/Si contact area characteristics with different diaphragm conditions were analyzed. Consequently, it is expected that fabrication technology of MCA/Si diaphragm could be usefully applied for the fabrication process of high-performance piezoelectric MEMS devices.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.34 no.6
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• pp.599-606
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• 2010

In the present study, actuators with diaphragms of different thickness and chambers of different diameter are fabricated to examine experimentally how the behavior characteristics of the actuator diaphragm in a thermopneumatic micropump are affected by diaphragm thickness and chamber diameter under various operating conditions with different values of input voltage and frequency. The actuator comprises a microheater set on Pyrex glass, a chamber, and a diaphragm. For all values of the input energy, as the frequency decreases below 10 Hz, the maximum center deflection of the diaphragm greatly increases irrespective of diaphragm thickness and chamber diameter. At low frequencies, as the heat energy supplied to the chamber increases, the center of deflection of the diaphragm increases; the magnitude of deflection is high for thin diaphragms and for diaphragms whose chambers have small diameters. At frequencies higher than 10 Hz, all the design variables such as diaphragm thickness, chamber diameter, and the input energy have negligible effect on the center deflection of the diaphragm.

• Journal of Sensor Science and Technology
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• v.5 no.2
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• pp.1-8
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• 1996

In this paper, We have designed silicon pressure sensor with center-bossed diaphragm which improving sensitivity and linearity by reducing diaphragm deflection. Designed center-bossed pressure sensor showed maximum deflection of $0.125{\mu}m$, maximum stress of $2.24{\times}10^7 Pa$ and sensitivity of 27.67 mV/V.psii. As a result, diaphragm deflection was reduced to 1/160 that of diaphragm thickness and 1/35 that of square diaphragm. Also, sensitivity was increased 19 times compared to square diaphragm.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.5
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• pp.315-320
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• 2000

This paper presents the fabrication and test of a micropump with an electromagnetic actuator and a pair of aluminum flap valves. The actuator consists of a solenoid coil, a permanent magnet and an actuator diaphragm. The actuator diaphragm is fabricated by the spin coating of silicone rubber. The valve are passive ones and are fabricated by micromachining. The deflection of the fabricated actuator diaphragm is measured with a laser vibrometer. The deflection of the actuator diaphragm is proportional to the input current. The measured deflection of the fabricated diaphragm is $400 \mum$,/TEX> when the input is 118 mApp, and the cut-off frequency is 50 Hz. The maximum flow rate of the fabricated micropump with the electromagnetic actuator is about 5$0 \muell/min$ at 5 Hz when the input current and the duty ratio of the square was are 118 mApp and 50%, respectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.327-327
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• 2007

This paper reports the simulation results of piezoelectric microspeakers due to structural changes(diaphragm materials, corrugation width and electrode shapes). When we compared the dependence of diaphragm material properties, the microspeaker with LTO(Low Temperature Oxide) diaphragm shows higher deflection than that of silicon nitride diaphragm, even though the resonant frequencies are almost same in both cases. In case of circular-electrode microspeaker, the deflection of diaphragm is about $16\;{\mu}m$ at 20 V, and it decreases as the corrugation width is decreased. However, the deflection of diaphragm with the square-electrode reveals almost twice times higher value at the same applied voltage than the circular one, and it increases as the corrugation depths are decreased from $30\;{\mu}m\;to\;10\;{\mu}m$. The first resonant frequency of microspeakers present about 1.8 kHz in circular-electrode and 1.2 kHz in square-electrode, respectively.

• Transactions of the Korean hydrogen and new energy society
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• v.20 no.4
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• pp.274-282
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• 2009

Diaphragm compressor is widely used for hydrogen compression because it achieves high gas pressure without gas contamination. Diaphragm deflecting in the cavity with high pressure formed by an oil compression is the most important component in the compressor. Therefore, it is necessary to obtain deflection degree of diaphragm to predict the damage point of diaphragm. The objective of this study is to estimate the diaphragm's damage point through diaphragm deflection test by implementing with strain gauges attached on several radial points. Without gas compression, strain sum of each points varied as similarly as the variation of the pressure with respect to time. And while the motor speed was slower than 400rpm, the strain near the rim was larger than that of the center. When motor speed, however, was over 500rpm, strain became similar to that of the center and the rim. With gas compression, it was shown that the variation of the strain sum was delayed against that of the pressure and the strain near the rim was much higher than that of the center.

• Transactions of the Korean Society of Automotive Engineers
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• v.14 no.1
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• pp.54-59
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• 2006

An analytical solution for deflection-load characteristics of a conical disk spring used especially in the automotive manual transmission clutch applications is proposed in order to take into account the effects of friction and large deformation. The conical disk spring, or the diaphragm spring, has a hinge support, an application point of release load at the tip of the fingers and an application point of clamp load near but inside the outer perimeter of the conical disk spring. The friction coefficient is assumed to be a constant regardless of the speed of deflection and the magnitude of loads. Comparison with experimental shows a good agreement with the analytical prediction. Also, the sensitivity of the clamp load due to variations in the geometrical parameters of the conical disk spring is calculated and discussed.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.10
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• pp.487-491
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• 2003

The low-cost, simple structured micropump which is actuated by piezoelectric-discs, is fabricated with polydimethylsiloxane (PDMS) and the performances of the micropump, such as pump rate and backpressure, are characterized. The PDMS micropump with diffusers instead of passive check valves as a flow-rectifying element was fabricated. The deflection of glass diaphragm measured by atomic force microscope (AFM) is about 0.4$\mu\textrm{m}$ when applying a 150V square wave voltage at 300Hz across a 300${\mu}\ell$ thick piezoelectric disc. While the square wave driving voltage is applied to the piezoelectric disc of the actuator, the flow rate is measured by fluid displacement variation of the outlet tube. The flow rate of micropump increases with enhancing the applied voltage due to the increase of diaphragm deflection. The flow rate and the backpressure of the micropump with diffusers are about 32.9${\mu}\ell$/min and 173Pa respectively for the above mentioned deflection conditions.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.1254-1258
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• 2007

Electro-active polymer (EAP), one of the smart materials, is a new alternative offering ultra-precise movements and bio-compatibility. We present the results of the design, fabrication, and performance evaluation of a fabricated diaphragm-type polymer actuator using segmented polyurethane(SPU). This paper illustrates the relationship between the elastic modulus and maximum deflection as a key property of the Maxwell stress effect and also presents the relationship between the dielectric constant and maximum deflection as a key property of the electrostriction effect, especially in polymer actuators using SPU. A diaphragm-type actuator was used to induce an equation of the vertically distributed load by using a fully clamped circular plate as the boundary condition. To verify the equation, the results were compared to the data measured from load cell. In the near future, a low-cost check valves and bio-robot can be applied by its actuators.

• 한국신재생에너지학회:학술대회논문집
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• 2009.06a
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• pp.787-790
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• 2009

There are several types of compressors which are appropriate for hydrogen gas station. Metal diaphragm type of hydrogen compressor is the one of them, a use in which satisfies the requirements of maintaining gas purity and producing high pressure over 700 bar. The objective of this study is to investigate an characteristics of compression as bulk modulus of oil varies. Three cases of bulk modulus ranging from $2{\times}10^9$, $4.52{\times}10^9$ and $7{\times}10^9$ were studied through FSI (Fluid Structure Interaction) analysis. Gas pressure, oil pressure and deflection degree of diaphragm were analysed during a certain period of compression process. Highest pressure and deflection were found in the condition of high bulk modulus of $7{\times}10^9$.