• 한국기계가공학회지
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• 제9권2호
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• pp.26-32
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• 2010

This paper reports some experimental result in grinding and polishing of silicon cathodes used in semiconductor manufacturing process. Cup shape diamond core wheels were used in experiments and the radial and tangential grinding forces were measured with surface roughness. In polishing experiments, flat type and donut type wool polishing tools were tested. The experimental results indicate that the grinding forces are proportional to the material removal rates and the surface roughness are inversely proportional to the spindle speed. The surface roughness of polished Si decreases with polishing time and higher spindle speed.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.53-56
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• 1995

Electrolytic In-Process Dressing grinding technique which enables application of metal bond wheels with fine superabrasives in mirror surface grinding operations has developed. This paper provides charateristic evaluation of power supply supply that we developed and general charateristics of ELID grinding. The electric behaviors are compared each about two different electrode which has 1/4, 1/6 the area of entire wheel surface, and two different fluids which has 1:50, 1:30 the quantity of water was used to dillute grinding fluids. The results show that ELID grinding method is useful for mirror surface machining.

• 한국정밀공학회지
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• 제17권3호
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• pp.122-128
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• 2000

세라믹, 다이야몬드등과 같은 고경질재료에 대한 미소형상의 가공은 대단히 어렵고 일반적인 방법으로는 상당한 시간을 요구한다. 이러한 재료의 고능률 가공을 실현하기 위하여, 메탈본드 다이야몬드휠에 전해 인프로세스 드레싱(Electrolytic In-Process Dressing)을 적용한 연삭을 머시닝센타에서 시도하였다 본 연구에서, 메탈본드 다이야몬드휠은 전기방전에 의하여 고능률로 트루잉(truing)되었다. 알루미나 세라믹의 핀선단($\phi$50$\mu\textrm{m}$)과 로커웰 경도측정기의 다이야몬드 압입자(indenter)($\phi$40$\mu\textrm{m}$)를 ELID연삭에 의하여 창성하였다. 그 결과를 본 논문에서 보고한다.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2001년도 춘계학술대회 논문집
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• pp.213-216
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• 2001

A micro hole punching system was developed and micro holes of 100m in diameter were successfully made on brass sheets of loom in thickness. A micro punch made of tungsten carbide was designed to withstand the punch load, considering the buckling and the bending moment due to possible misalignment error. The punch was fabricated by the grinding process with diamond wheel. The die was designed considering the punch load and fabricated by micro electrodischarge machining process. In this system the stripper is designed to guide punch tip to minimize the possible misalignment. The punch was installed on a vertical stepper and the die was mounted on an X-Y translation unit. The precision motion controller controlled all motions of the micro hole punching system. In this study technical difficulties and solutions in the micro hole punching process were also discussed.

• 한국기계가공학회지
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• 제4권2호
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• pp.10-15
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• 2005

For the development of compensation machining program, ultra precision grinding used in ultra precision machine and corrective machining was studied. We explored a new rough grinding technique on optical material such as zerodur. The facility used is a polishing machine with a custom grinding module and a range of diamond resin bond wheel. Surface roughness and form accuracy are measured by surface measurement equipment(Form Talysurf series2). Our compensation machining program has complied with a target of producing surface roughness better than $0.05{\mu}m$ Ra and form accuracy of around $0.05{\mu}m$ Rt and has been unveiled as a work-hour model.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 춘계학술대회 논문집
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• pp.24-28
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• 1996

Mirror-like polishing system of hemisphericall high-speed precision bearing for digital VTR drum was developed. Mechamism of the polishing process was analyzed in the view point of polishing contact range and contact length between the tool and the workpiece surface. It was suggested that the two stage polishing process adoptiong the diamond grinding wheel and polishing tool instead of multistage lapping processes, which enables the mass production of the bearing by reduction of polishing time.

• 한국정밀공학회지
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• 제9권3호
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• pp.67-72
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• 1992

This paper presents the process of manufacturing technology of ceramics ferrule for opitcal fiber connector. Precision zirconia ceramic ferrules is widely for high performance and low cost single mode optical fiber connectors. To polish the hole of the zirconia ceramic ferrule, the wire lapping instrument is developed and the machining experiment is conducted. Through the centerless grinding using diamond wheel the surface roughness of zirconia ceramics ferrule is below the 1$\mu$m Rmax.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.848-851
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• 2003

In this paper, a separating system for used CRT recycling is presented. Depend on manufacturer CRTs has small differences in dimension for the same model, but the dimensions of the panel are nearly same. To simplifying configuration of the system, we developed CRT fixing pallets for every model of CRT. The height of cutting position for every model of CRT will be same. The cutting machine has two rotating arm and use metal-bond type diamond cutting wheel. Instead of water, two vortex tube type air-coolers are used for the cooling of cutter. Workers in recycling factory are generally old people. Therefore, control program should be easy to use and operate. Thus we developed GUI with very simple interface.

• Journal of Mechanical Science and Technology
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• 제16권5호
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• pp.633-638
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• 2002

An approach to enhance dimensional accuracy of the grinding process has been presented, and grinding of a glass material with a metal-bonded diamond wheel has been studied. In this study, a grinding tool is suspended flexibly and controlled by an electromagnetic actuator. During grinding, profile error of a ground surface is indirectly measured and fed back to a control system. A model of grinding error has been suggested on which the indirect measurement has been based. An optimal PID control is adopted and effectiveness of the in-process feedback control has been verified experimentally.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1992년도 춘계학술대회 논문집
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• pp.48-54
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• 1992

최근 미래지향적 고부가가치의 첨단 산업 전반에 걸친 세계 각국의 연구 개발 노력이 더 한층 가속되 어지면서 특히 항공, 우주, 신운송기기, 정보 통신기기, 메카높틱스, 전자산업, 메카트로닉스 등에 있어 보다 더 가혹한 조건과 분위기 하에서도 우수한 특성과 다양한 기능성 등을 유지할 수 있는 신소재로의 소재 대체화 요구가 높아지게 되어졌다. 국내 역시 최근 다양한 종류의 세라믹스를 생산 하고있긴 하나 이와 같은 기계적 특성치를 구하기 위한 시험편의가공 및 제작을 최적화 수행하지 못하는 관계로 인하여 동일한 소재를 갖고도 충분히 신뢰도있는 데이터들이나 높은 값의 데이터들을 제시하지 못하고 있는 실정이다. 따라서 본 연구에서는 굽힘 강도측정용 세라믹스 시험편을 최적 가공함으로써 기계적 특성치를 최대로발휘하 고자 한 바, 기 발표한 연삭 가공 조건 변화에 따른 최적화 가공 연구에 영향을 미칠 수 있는 것으로 보여지는 연삭 공구에 대한 "In-process dressign"을 최초로 도입하여 일반 연삭 가공을 실행해 봄으로써 그 효과를 명확히 규명하고자 하였으며, 이를 토대로 실제 부품화에 있어서나 Creep-feed grinding에 있어서도 적용할 수 있는 가에 대해서도 알아보고자 하였다.알아보고자 하였다.