• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.123.2-123.2
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• 2013

Etching endpoint detection with plasma impedance monitoring (PIM) is demonstrated for small area dielectric layers inductive coupled plasma etching. The endpoint is determined by the impedance harmonic signals variation from the I-V monitoring system. Measuring plasma impedance has been examined as a relatively simple method of detecting variations in plasma and surface conditions without contamination at low cost. Cluster analysis algorithm is modified and applied to real-time endpoint detection for sensitivity enhancement in this work. For verification, the detected endpoint by PIM and real-time cluster analysis is compared with widely used optical emission spectroscopy (OES) signals. The proposed technique shows clear improvement of sensitivity with significant noise reduction when it is compared with OES signals. This technique is expected to be applied to various plasma monitoring applications including fault detections as well as end point detection.

• Structural Engineering and Mechanics
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• 제49권2호
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• pp.183-202
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• 2014

A new method of multiple damage detection in beam like structures is introduced. The mode shapes of both healthy and damaged structures are used in damage detection process (DDP). Multiple Damage Localization Index Based on Mode Shapes (MDLIBMS) is presented as a criterion in detecting damaged elements. A finite element modeling of structures is used to calculate the mode shapes parameters. The main advantages of the proposed method are its simplicity, flexibility on the number of elements and so the accuracy of the damage(s) position(s), sensitivity to small damage extend, capability in prediction of required number of mode shapes and low sensitivity to noisy data. In fact, because of differential and comparative form of MDLIBMS, using noise polluted data doesn't have major effect on the results. This makes the proposed method a powerful one in damage detection according to measured mode shape data. Because of its flexibility, damage detection process in multi span bridge girders with non-prismatic sections can be done by this method. Numerical simulations used to demonstrate these advantages.

• Smart Structures and Systems
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• 제25권2호
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• pp.169-181
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• 2020

Sensor placement is a crucial aspect of bridge health monitoring (BHM) dedicated to accurately estimate and locate structural damages. In addressing this goal, a sensor placement framework based on the deflection influence line (DIL) analysis is here proposed, for the optimal design of damage detection-oriented BHM system. In order to improve damage detection accuracy, we explore the change of global stiffness matrix, damage coefficient matrix and DIL vector caused by structural damage, and thus develop a novel sensor placement framework based on the Fisher information matrix. Our approach seeks to determine the contribution of each sensing node to damage detection, and adopts a distance correction coefficient to eliminate the information redundancy among sensors. The proposed damage detection-oriented optimal sensor placement (OSP) method is verified by two examples: (1) a numerically simulated three-span continuous beam, and (2) the Pinghu bridge which has existing real damage conditions. These two examples verify the performance of the distance corrected damage sensitivity of influence line (DSIL) method in significantly higher contribution to damage detection and lower information redundancy, and demonstrate the proposed OSP framework can be potentially employed in BHM practices.

• 대한의용생체공학회:의공학회지
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• 제30권5호
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• pp.412-417
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• 2009

The purpose of this study was to assess the ability of this device during clinically important episodes of extravasation. The extravasation detection accessory (EDA) system was based of infrared ray with detection sensor, an amplifier, alarm device, receiver, cable and a computer based system. This study was a prospective, observational study in which the EDA system was used to monitor the automated mechanical injection of contrast media. Three hundred patients referred for contrast media enhanced body computed tomography studied in a prospective, observation study in which the EDA system was used to identify and interrupt any injection associated with clinically important extravasation. There were 8 true-positive cases, 276 true-negative cases, 15 false-positive cases and 1 false-negative cases. The EDA system had a sensitivity of 88.8% and a specificity of 94.8% for the detection of clinically important extravasation. The EDA system had good sensitivity for the detection of clinically important extravasation and the EDA system has the clinical potential for the early detection of extravasation of the contrast medium that is administered with power injectors.

• Smart Structures and Systems
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• 제20권2호
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• pp.207-217
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• 2017

Because of the inevitable uncertainties such as structural parameters, external excitations and measurement noises, the effects of uncertainties should be taken into consideration in structural damage detection. In this paper, two probabilistic structural damage detection approaches are proposed to account for the underlying uncertainties in structural parameters and external excitation. The first approach adopts the statistical moment-based structural damage detection (SMBDD) algorithm together with the sensitivity analysis of the damage vector to the uncertain parameters. The approach takes the advantage of the strength SMBDD, so it is robust to measurement noise. However, it requests the number of measured responses is not less than that of unknown structural parameters. To reduce the number of measurements requested by the SMBDD algorithm, another probabilistic structural damage detection approach is proposed. It is based on the integration of structural damage detection using temporal moments in each time segment of measured response time history with the sensitivity analysis of the damage vector to the uncertain parameters. In both approaches, probability distribution of damage vector is estimated from those of uncertain parameters based on stochastic finite element model updating and probabilistic propagation. By comparing the two probability distribution characteristics for the undamaged and damaged models, probability of damage existence and damage extent at structural element level can be detected. Some numerical examples are used to demonstrate the performances of the two proposed approaches, respectively.

• 센서학회지
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• 제13권2호
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• pp.85-89
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• 2004

This paper represents the development of high sensitivity photo-sensor for the fluorescence detection in the integrated biological analysis system. The finger-type PIN photodiodes were fabricated as the photo-sensor, and had a high sensitivity ($I_{light}/I_{dark}$ = 8720). The interference filter consisted of $TiO_{2}$ and $SiO_{2}$ was directly deposited on the photodiodes. Deposited filter with 95.5% reflection under 532 nm and 98% transmission over 580 nm exceedingly decreased the magnitude of background signal in the detection. The PDMS micro-fluidic channels are bonded on the photodiode by $O_{2}$ plasma treatment. The detection current was proportional to two primary parameters (light intensity, concentration), and the on-chip detection system could detect fluorescence signals down to 100 nM concentration (LOD = Limit of detection of rhodamine).

• Structural Engineering and Mechanics
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• 제30권4호
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• pp.445-466
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• 2008

This paper presents a novel structural damage detection method with a new damage index based on the statistical moments of dynamic responses of a structure under a random excitation. After a brief introduction to statistical moment theory, the principle of the new method is put forward in terms of a single-degree-of-freedom (SDOF) system. The sensitivity of statistical moment to structural damage is discussed for various types of structural responses and different orders of statistical moment. The formulae for statistical moment-based damage detection are derived. The effect of measurement noise on damage detection is ascertained. The new damage index and the proposed statistical moment-based damage detection method are then extended to multi-degree-of-freedom (MDOF) systems with resort to the leastsquares method. As numerical studies, the proposed method is applied to both single and multi-story shear buildings. Numerical results show that the fourth-order statistical moment of story drifts is a more sensitive indicator to structural stiffness reduction than the natural frequencies, the second order moment of story drift, and the fourth-order moments of velocity and acceleration responses of the shear building. The fourth-order statistical moment of story drifts can be used to accurately identify both location and severity of structural stiffness reduction of the shear building. Furthermore, a significant advantage of the proposed damage detection method lies in that it is insensitive to measurement noise.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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• pp.1447-1450
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• 2006

The high speed and sensitivity array test system has been developed and utilized for massproduction of advanced LTPS displays including SOG and OLED. It realizes fast enough TACT enabling 100% inspection with better than 1fF sensitivity. The result of actual measurement shows its superior TACT and sensitivity, and also shows MURA detection of OLED panel.

• Structural Engineering and Mechanics
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• 제56권5호
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• pp.871-897
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• 2015

This paper presents a novel method based on sensitivity of structural response for identifying both the system parameters and input excitation force of a bridge. This method, referred to as "Adjoint Variable Method", is a sensitivity-based finite element model updating method. The computational cost of sensitivity analyses is the main concern associated with damage detection by these methods. The main advantage of proposed method is inclusion of an analytical method to augment the accuracy and speed of the solution. The reliable performance of the method to precisely indentify the location and intensity of all types of predetermined single, multiple and random damages over the whole domain of moving vehicle speed is shown. A comparison study is also carried out to demonstrate the relative effectiveness and upgraded performance of the proposed method in comparison to the similar ordinary sensitivity analysis methods. Moreover, various sources of error including the effects of noise and primary errors on the numerical stability of the proposed method are discussed.

• 대한수의학회지
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• 제23권1호
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• pp.123-128
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• 1983

This study was conducted to evaluate the modified drug sensitivity test for the shortening of detection time and clinical application. The results obtained were summarized as follows. 1. Inhibitory zone in 6 strains of Staphylococcus and Escherichia coli tested to sensitivity teat were reached at 100% between 2 and 6 hours. 2. The sensitivity test of Staphylococcus A, B and E. coli No. 2, No. 3 to antibacterial ointment drugs were strong positive(+++), but Staphylococcus A. A. and E. coli No. 1 were mild resistant(+). 3. The sensitivity test of Staphylococcus A. B and E. coli No. 2, No. 3 to antibacterial injection drugs in 6 hours after treatment were strong positive(+++), and Staphylococcus A. A. and E. coli No. 1 were moderate positive(++). 4. This modified method was detected 86% degree of sensitive between 7 to 12 hours after treatment. 5. We think this modified method was more practical compare to other methods.