• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.711-714
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• 2004

Chemical mechanical polishing (CMP) has been widely accepted for the global planarization of multi-layer structures in semiconductor manufacturing. However, it still has various problems to the CMP equipment, in particular, among the CMP components, process variables are very important parameters in determining the removal rate and non-uniformity. Using a design of experiment (DOE) approach, this study was performed investigating the interaction between the various parameters such as turntable and head speed, down force and back pressure during CMP. Using statistical analysis techniques, a better understanding of the interaction behavior between the various parameters and the effect on removal rate, no-uniformity and ETC (edge to center) is achieved.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.11
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• pp.939-945
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• 2002

The rise throughput and the stability in the device fabrication can be obtained by applying chemical mechanical polishing (CMP) process in 0.18 $\mu\textrm{m}$ semiconductor device. However, it still has various problems due to the CMP equipment. Especially, among the CMP components, process variables are very important parameters in determining the removal rate and non-uniformity. In this paper, we studied the DOE (design of experiment) method in order to get the optimized CMP equipment variables. Various process parameters, such as table and head speed, slurry flow rate and down force, have investigated in the viewpoint of removal rate and non-uniformity. Through the above DOE results, we could set-up the optimal CMP process parameters.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.10a
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• pp.423-426
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• 2005

The injection molding process has applied to a variety of fields by a development of various plastic resins. Recently, this process has been extending to a field of parts of shoes. In this study, the injection mold of shank which is a one of the parts of shoes has been designed. The position of gate and the injection procedure have been optimized by a simulation using the CAE software and an analysis using the DOE. As a result, the improved injection mold of shank has been manufactured in a short time. Appling the CAE and the DOE at the process of the injection mold design eventually lead an increase in the productivity and the quality of parts.

• Applied Chemistry for Engineering
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• v.31 no.2
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• pp.138-146
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• 2020

Design of experiments (DOE) is a method that has been applied in the industry to improve value for many decades. This study provides an overview of 115 cases of statistical DOE applications in the field of chemical engineering. All cases were published in important scientific journals for the last ten years. The applied design type, the experiment size, the number of factors and levels affecting the response variable, and the area of application for the design were all analyzed. Obviously, the number of publications related with statistical DOE increased over time.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.8
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• pp.72-79
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• 2008

To meet demand of big capacity and high speed rotation for washing machine, more stress from bending and twisting are complexly loaded onto the shaft supporting the horizontal drum, causing problems in fracture strength and fatigue life. Shafting system is mainly divided into flange and shaft. Shaft and flange connected by inserting shaft serration into flange on the process of die casting. When the system is operating, the gap is formed between serration and flange. But, Serration has various design factors and the optimal values can't be easily determined. Using a design of experiment (DOE) based on the FEM (Finite Element Method), this study was performed investigating the interaction effect between the various design factors as well as the main effect of the each design factor under bending, twist and vibration and proposed optimum design using box-behnken method among response surface derived from regression equation of simulation-based DOE.

• Journal of Soil and Groundwater Environment
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• v.12 no.5
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• pp.73-85
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• 2007

In this study, the experiment of solid-phase microextraction (SPME) technique using GC/FID was conducted as a possible alternative to liquid-liquid extraction for the analysis of EGBE, DGBE, DBM and TGME in water, and also, an optimization condition of trace analysis for disel oxygenates including EGBE by the design of experiment (DOE) was described. Experiments used a fractional factorial design method followed by central composite design allowing optimization of a number of factors as well as statistical analysis of the results. The response surface analysis showed that the extraction efficiency could be represented by a second-order polynomial equation in which the salts concentration, extraction temperature, extraction time and sonication time are the major influences. Using DOE method, a new datadependent method was developed to improve the quantity of confidently analyzed disel oxygenates in water samples.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.22 no.1
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• pp.138-144
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• 2013

The automation technology for overlay welding is needed due to the occurrence of severe corrosion and abrasion on the surface of internal contact in different shape of fittings. In Korea, different shapes of fittings have been manufactured by using the imported equipment of overlay welding automation at some companies. Thus the research on the development of overlay welding automation system (in short, OWAS) for a large L-type tube is urgently needed. In this paper, the investigation is focused on the optimal design of a supporting base for the (currently developing) OWAS of large L-type tube. Specifically we assume that the base which supports the equipment during the process of overlay welding is loaded as self-weight in the direction of gravity through static analysis especially when it is rotated 180 degree on the OWAS. For optimal design of a supporting base for OWAS of large L-type tube, Solidworks(R) (for 3-dimensional modelling) and ANASYS Workbench(R) (for structural analysis) are incorporated so as to proceed an optimization routines based on Response Surface Method (RSM) and Design of Experiment (DOE). In more specific, DOE finds out major factors (or dimensions) of the supporting base by using MINITAB(R). Then the regression equations between design variables (the major factors of supporting base) and response variables (deformation, stress and safety factor for the supporting base), which will be resulted in by RSM, verify the major factors of DOE. In the next step, Central Composite Design (CCD) plans 20 simulations of ANASYS Workbench(R) and then figures out the optimal values of design variables which will be reflected on the manufacturing of supporting base. Finally welding experiment is conducted to figure out the influence of overlay welding quality in applying the optimized design values of supporting base to the actual OWAS.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.1
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• pp.24-29
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• 2005

Chemical mechanical polishing (CMP) has been widely accepted for the global planarization of multi-layer structures in semiconductor manufacturing. Copper has been the candidate metallization material for ultra-large scale integrated circuits (ULSIs), owing to its excellent electro-migration resistance and low electrical resistance. However, it still has various problems in copper CMP process. Thus, it is important to understand the effect of the process variables such as turntable speed, head speed, down force and back pressure are very important parameters that must be carefully formulated in order to achieve desired the removal rates and non-uniformity. Using a design of experiment (DOE) approach, this study was performed investigating the main effect of the variables and the interaction between the various parameters during CMP. A better understanding of the interaction behavior between the various parameters and the effect on removal rate, non-uniformity and ETC (edge to center) is achieved by using the statistical analysis techniques. In the experimental tests, the optimum parameters which were derived from the statistical analysis could be found for higher removal rate and lower non-uniformity through the above DOE results.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.31 no.5
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• pp.601-608
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• 2007

To meet demand of big capacity and high speed rotation for washing machine, more stress from bending and twisting are complexly loaded onto the shaft supporting the horizontal drum, causing problems in fracture strength and fatigue life. Shafting system is mainly divided into flange and shaft. Flange is located between the drum and shaft, transferring power from the shaft to drum, and acting as a supporter of the back of the drum. Because section of flange has various design factors according to configuration of flange, the optimum conditions can’t be easily determined. Using a design of experiment (DOE), this study was performed investigating the interaction effect between factors as well as the main effect of the each design factor under bending and twist and proposed optimum condition using center composition method among response surface derived from regression equation of simulation-based DOE.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2005.11a
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• pp.211-214
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• 2005

This research studied robust design of composite structure under combined loading of bending and torsion. DOE (Design of Experiment) technique was used to find important design factors. The results show that the beam height, beam width, layer thickness and stack angle of outer-layer are important design parameter. The $2^{nd}$ DOE and RSM (Response Surface Model) were conducted to obtain optimum design. Multi-island genetic algorithm was used to optimum design. An approximate value of 6.65 mm in deflection was expected under optimum condition. Six sigma robust design was conducted to find out guideline for control range of design parameter. To acquire six sigma level reliability, the sigma level reliability, the standard deviation of design parameter should be controlled within 2.5 % of average design value.