• Title/Summary/Keyword: Design of Experiment(DOE)

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Optimizing the Plasma Deposition Process Parameters of Antistiction Layers Using a DOE (Design of Experiment) (실험 계획법을 이용한 점착방지막용 플라즈마 증착 공정변수의 최적화 연구)

  • Cha Nam-Goo;Park Chang-Hwa;Cho Min-Soo;Park Jin-Goo;Jeong Jun-Ho;Lee Eung-Sug
    • Korean Journal of Materials Research
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    • v.15 no.11
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    • pp.705-710
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    • 2005
  • NIL (nanoimprint lithography) technique has demonstrated a high potential for wafer size definition of nanometer as well as micrometer size patterns. During the replication process by NIL, the stiction between the stamp and the polymer is one of major problems. This stiction problem is moi·e important in small sized patterns. An antistiction layer prevents this stiction ana insures a clean demolding process. In this paper, we were using a TCP (transfer coupled plasma) equipment and $C_4F_8$ as a precursor to make a Teflon-like antistiction layer. This antistiction layer was deposited on a 6 inch silicon wafer to have nanometer scale thicknesses. The thickness of deposited antistiction layer was measured by ellipsometry. To optimize the process factor such as table height (TH), substrate temperature (ST), working pressure (WP) and plasma power (PP), we were using a design of experimental (DOE) method. The table of full factorial arrays was set by the 4 factors and 2 levels. Using this table, experiments were organized to achieve 2 responses such as deposition rate and non-uniformity. It was investigated that the main effects and interaction effects between parameters. Deposition rate was in proportion to table height, working pressure and plasma power. Non-uniformity was in proportion to substrate temperature and working pressure. Using a response optimization, we were able to get the optimized deposition condition at desired deposition rate and an experimental deposition rate showed similar results.

Optimization of a Centrifugal Compressor Impeller(II): Artificial Neural Network and Genetic Algorithm (원심압축기 최적화를 위한 연구(II): 인공지능망과 유전자 알고리즘)

  • Choi, Hyoung-Jun;Park, Young-Ha;Kim, Chae-Sil;Cho, Soo-Yong
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.39 no.5
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    • pp.433-441
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    • 2011
  • The optimization of a centrifugal compressor was conducted. The ANN (Artificial Neural Network) was adopted as an optimization algorithm, and it was learned and trained with the DOE (Design of Experiment). In the DOE, it was predicted the main effect and the interaction effect of design variables to the objective function. The ANN was improved in the optimization process using the GA (Genetic Algorithm). When any output at each generation was reached a standard level, it was re-calculated by the CFD (Computational Fluid Dynamics) and it was applied to develop a new ANN. After 6th generation, the prediction difference between ANN and CFD was less than 1%. A pareto of the efficiency versus the pressure ratio was obtained through the 21th generation. Using this method, the computational time for the optimization was equivalent to the time consumed by the gradient method, and the optimized results of multi-objective function were obtained.

Selection of the Optimum Seaming Condition for Spin Drum Using Design of Experiment (실험계획법을 이용한 스핀드럼의 시밍 최적조건 선정)

  • Kim, Eui-Soo;Lee, Jung-Min;Kim, Byung-Min
    • Proceedings of the KSME Conference
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    • 2007.05a
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    • pp.1511-1516
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    • 2007
  • Because Seaming process of MPJ (Mechanical Press Joining) has various design factors such as thickness, bending radius, seaming width, caulking press width and the dynamic factor such as multistage plastic working, elastic recovery, residual stress, the optimum conditions can't be easily determined. Using a design of experiment based on the FEM, which has several advantages such as less computing, high accuracy performance and usefulness, this study was performed investigating the interaction effect between the various design factor as well as the main effect of the each design factor during drum MPJ and proposed optimum condition using center composition method among response surface derived from regression equation of simulation-based DOE.

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A Study on the Improvement in Productivity and Safetiness for Calcination Process of Automotive Catalyst by Using Design of Experiment (실험계획을 통한 자동차 촉매 소성 공정의 생산성 향상과 안정성 증대 연구)

  • Jung, Chule-kyou;Lee, Chang-Ho
    • Journal of the Korea Safety Management & Science
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    • v.21 no.1
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    • pp.17-23
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    • 2019
  • The diesel engine generate many pollutants such as PM(Particulate matter) and NOx(Nitrogen oxide). So the SCR(Selective catalytic reduction) must be required to meet the emission standard. The SCR catalyst market is growing rapidly, and the automobile markets using alternative energy sources are growing rapidly. This study deals with optimization of the calcination process the manufacturing process of SCR catalyst to be competitive. The calcination process is a bottleneck and it is required to optimize productivity and accept to be safety, But we cannot trade off anything in terms of safety. We applied DOE(Design of experiments) among many research methods performed in various fields. In order to achieve quality and productivity optimization. The dependent variables in the DOE were selected as NO Conversion(%). The independent variables were selected as the calcination temperature, soaking time and fan speed RPM. the CCD(Central composite designs) constructs response surface using the data onto experience and finds optimum levels within the fitted response surfaces. Our tests are our stability guarantee and efficient together with operation.

CAE-based DFSS Study for Road Noise Reduction (Road Noise 개선을 위한 CAE 기반 DFSS Study)

  • Kwon, Woo-Sung;Yoo, Bong-Jun;Kim, Byoung-Hoon;Kim, In-Dong
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2011.04a
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    • pp.735-741
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    • 2011
  • In the early phase of vehicle development, CAE is conducted as tool for vehicle performance assessment. To maintain acceptable road noise performance, solution for reduced vehicle sensitivity is required. Chassis interface dynamic stiffness characteristics are key component to isolating vibration and noise of road from the vehicle interior. This research provide how to set up the optimized dynamic characteristics under noise effect through DFSS study. CAE-based DOE is performed to build prediction math model, CMS process involves DOE to achieve very fast run times while giving results very comparable. Minimized $95^{th}$ percentile of performance distribution is applied to minimize vehicle sensitivity and road noise levels variation during the optimization process. Finally, the results of optimization were reviewed for performance and robustness.

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CAE-based DFSS Study for Road Noise Reduction (로드 노이즈 개선을 위한 전산응용해석 기반 DFSS 연구)

  • Kwon, Woo-Sung;Yoo, Bong-Jun;Kim, Byoung-Hoon;Kim, In-Dong
    • Transactions of the Korean Society for Noise and Vibration Engineering
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    • v.21 no.7
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    • pp.674-681
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    • 2011
  • In the early phase of vehicle development, CAE is conducted as tool for vehicle performance assessment. To maintain acceptable road noise performance, solution for reduced vehicle sensitivity is required. Chassis interface dynamic stiffness characteristics are key component to isolating vibration and noise of road from the vehicle interior. This research provide how to set up the optimized dynamic characteristics under noise effect through DFSS study. CAE-based DOE is performed to build prediction math model, CMS process involves DOE to achieve very fast run times while giving results very comparable. Minimized 95th percentile of performance distribution is applied to minimize vehicle sensitivity and road noise levels variation during the optimization process. Finally, the results of optimization were reviewed for performance and robustness.

The Optimum Design of Rotor Shape in Front Disk Brake System for Squeal Noise Reduction using the DOE (실험계획법을 이용한 전륜 디스크 브레이크 시스템의 로터형상 스퀼소음 저감 최적화)

  • Lee, Hyun-Young;Joe, Yong-Goo;Abu, Aminudin Bin;Lee, Jung-Youn;Oh, Jae-Eung
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2005.05a
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    • pp.236-240
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    • 2005
  • This paper deals with friction-induced vibration of disc brake system under constact friction coefficient. A linear, finite element model to represent the floating caliper disc brake system is proposed. The complex eigenvalues are used to investigate the dynamic stability and in order to verify simulations which are based on the FEM model, The comparison of experimental and analytical results shows a good agreement and the analysis indicates that mode coupling due to friction force and geometric instability is responsible fur disc brake squeal. And the Front brake system reduced the squeal noise using design of experiment method(DOE). This helped to validate the FEM model and establish confidence in the simulation results. Also they may be useful during real disk brake model.

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