• 제목/요약/키워드: Design of Experiment(DOE)

검색결과 297건 처리시간 0.028초

실험 계획법을 이용한 점착방지막용 플라즈마 증착 공정변수의 최적화 연구 (Optimizing the Plasma Deposition Process Parameters of Antistiction Layers Using a DOE (Design of Experiment))

  • 차남구;박창화;조민수;박진구;정준호;이응숙
    • 한국재료학회지
    • /
    • 제15권11호
    • /
    • pp.705-710
    • /
    • 2005
  • NIL (nanoimprint lithography) technique has demonstrated a high potential for wafer size definition of nanometer as well as micrometer size patterns. During the replication process by NIL, the stiction between the stamp and the polymer is one of major problems. This stiction problem is moi·e important in small sized patterns. An antistiction layer prevents this stiction ana insures a clean demolding process. In this paper, we were using a TCP (transfer coupled plasma) equipment and $C_4F_8$ as a precursor to make a Teflon-like antistiction layer. This antistiction layer was deposited on a 6 inch silicon wafer to have nanometer scale thicknesses. The thickness of deposited antistiction layer was measured by ellipsometry. To optimize the process factor such as table height (TH), substrate temperature (ST), working pressure (WP) and plasma power (PP), we were using a design of experimental (DOE) method. The table of full factorial arrays was set by the 4 factors and 2 levels. Using this table, experiments were organized to achieve 2 responses such as deposition rate and non-uniformity. It was investigated that the main effects and interaction effects between parameters. Deposition rate was in proportion to table height, working pressure and plasma power. Non-uniformity was in proportion to substrate temperature and working pressure. Using a response optimization, we were able to get the optimized deposition condition at desired deposition rate and an experimental deposition rate showed similar results.

원심압축기 최적화를 위한 연구(II): 인공지능망과 유전자 알고리즘 (Optimization of a Centrifugal Compressor Impeller(II): Artificial Neural Network and Genetic Algorithm)

  • 최형준;박영하;김재실;조수용
    • 한국항공우주학회지
    • /
    • 제39권5호
    • /
    • pp.433-441
    • /
    • 2011
  • 원심압축기 임펠러의 최적화연구를 수행하였다. 최적화를 위한 알고리즘은 ANN를 기본으로 하였으며, 초기의 ANN 학습은 DOE를 사용하여 ANN을 효과적으로 형성하였다. DOE에서는 설계변수가 목적함수에 미치는 주효과와 상호 교호작용에 대한 예측을 할 수 있었다. 최적화과정에서 ANN의 향상을 위하여 GA를 사용하여 각 세대에서의 설계변수에 따른 목적함수가 일정값 이하가 되는 경우에는 수치해석을 통하여 ANN을 세대별로 향상시켰다. 6세대 이 후에는 ANN에 의한 예측값과 CFD의 예측값과의 차이가 1% 미만에 도달하였다. 총 21세대를 거쳐서 압축비와 효율과의 pareto를 형성할 수 있었다. 본 연구에서는 최적화를 위한 계산시간을 기울기 기반의 최적화시간 정도로 단축하면서도 다목적함수의 최적화의 결과를 얻을 수 있었다.

실험계획법을 이용한 스핀드럼의 시밍 최적조건 선정 (Selection of the Optimum Seaming Condition for Spin Drum Using Design of Experiment)

  • 김의수;이정민;김병민
    • 대한기계학회:학술대회논문집
    • /
    • 대한기계학회 2007년도 춘계학술대회A
    • /
    • pp.1511-1516
    • /
    • 2007
  • Because Seaming process of MPJ (Mechanical Press Joining) has various design factors such as thickness, bending radius, seaming width, caulking press width and the dynamic factor such as multistage plastic working, elastic recovery, residual stress, the optimum conditions can't be easily determined. Using a design of experiment based on the FEM, which has several advantages such as less computing, high accuracy performance and usefulness, this study was performed investigating the interaction effect between the various design factor as well as the main effect of the each design factor during drum MPJ and proposed optimum condition using center composition method among response surface derived from regression equation of simulation-based DOE.

  • PDF

실험계획을 통한 자동차 촉매 소성 공정의 생산성 향상과 안정성 증대 연구 (A Study on the Improvement in Productivity and Safetiness for Calcination Process of Automotive Catalyst by Using Design of Experiment)

  • 정철규;이창호
    • 대한안전경영과학회지
    • /
    • 제21권1호
    • /
    • pp.17-23
    • /
    • 2019
  • The diesel engine generate many pollutants such as PM(Particulate matter) and NOx(Nitrogen oxide). So the SCR(Selective catalytic reduction) must be required to meet the emission standard. The SCR catalyst market is growing rapidly, and the automobile markets using alternative energy sources are growing rapidly. This study deals with optimization of the calcination process the manufacturing process of SCR catalyst to be competitive. The calcination process is a bottleneck and it is required to optimize productivity and accept to be safety, But we cannot trade off anything in terms of safety. We applied DOE(Design of experiments) among many research methods performed in various fields. In order to achieve quality and productivity optimization. The dependent variables in the DOE were selected as NO Conversion(%). The independent variables were selected as the calcination temperature, soaking time and fan speed RPM. the CCD(Central composite designs) constructs response surface using the data onto experience and finds optimum levels within the fitted response surfaces. Our tests are our stability guarantee and efficient together with operation.

Road Noise 개선을 위한 CAE 기반 DFSS Study (CAE-based DFSS Study for Road Noise Reduction)

  • 권우성;유봉준;김병훈;김인동
    • 한국소음진동공학회:학술대회논문집
    • /
    • 한국소음진동공학회 2011년도 춘계학술대회 논문집
    • /
    • pp.735-741
    • /
    • 2011
  • In the early phase of vehicle development, CAE is conducted as tool for vehicle performance assessment. To maintain acceptable road noise performance, solution for reduced vehicle sensitivity is required. Chassis interface dynamic stiffness characteristics are key component to isolating vibration and noise of road from the vehicle interior. This research provide how to set up the optimized dynamic characteristics under noise effect through DFSS study. CAE-based DOE is performed to build prediction math model, CMS process involves DOE to achieve very fast run times while giving results very comparable. Minimized $95^{th}$ percentile of performance distribution is applied to minimize vehicle sensitivity and road noise levels variation during the optimization process. Finally, the results of optimization were reviewed for performance and robustness.

  • PDF

로드 노이즈 개선을 위한 전산응용해석 기반 DFSS 연구 (CAE-based DFSS Study for Road Noise Reduction)

  • 권우성;유봉준;김병훈;김인동
    • 한국소음진동공학회논문집
    • /
    • 제21권7호
    • /
    • pp.674-681
    • /
    • 2011
  • In the early phase of vehicle development, CAE is conducted as tool for vehicle performance assessment. To maintain acceptable road noise performance, solution for reduced vehicle sensitivity is required. Chassis interface dynamic stiffness characteristics are key component to isolating vibration and noise of road from the vehicle interior. This research provide how to set up the optimized dynamic characteristics under noise effect through DFSS study. CAE-based DOE is performed to build prediction math model, CMS process involves DOE to achieve very fast run times while giving results very comparable. Minimized 95th percentile of performance distribution is applied to minimize vehicle sensitivity and road noise levels variation during the optimization process. Finally, the results of optimization were reviewed for performance and robustness.

실험계획법을 이용한 전륜 디스크 브레이크 시스템의 로터형상 스퀼소음 저감 최적화 (The Optimum Design of Rotor Shape in Front Disk Brake System for Squeal Noise Reduction using the DOE)

  • 이현영;조용구;아미누딘 빈 아부;이정윤;오재응
    • 한국소음진동공학회:학술대회논문집
    • /
    • 한국소음진동공학회 2005년도 춘계학술대회논문집
    • /
    • pp.236-240
    • /
    • 2005
  • This paper deals with friction-induced vibration of disc brake system under constact friction coefficient. A linear, finite element model to represent the floating caliper disc brake system is proposed. The complex eigenvalues are used to investigate the dynamic stability and in order to verify simulations which are based on the FEM model, The comparison of experimental and analytical results shows a good agreement and the analysis indicates that mode coupling due to friction force and geometric instability is responsible fur disc brake squeal. And the Front brake system reduced the squeal noise using design of experiment method(DOE). This helped to validate the FEM model and establish confidence in the simulation results. Also they may be useful during real disk brake model.

  • PDF