• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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• pp.711-714
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• 2004

Chemical mechanical polishing (CMP) has been widely accepted for the global planarization of multi-layer structures in semiconductor manufacturing. However, it still has various problems to the CMP equipment, in particular, among the CMP components, process variables are very important parameters in determining the removal rate and non-uniformity. Using a design of experiment (DOE) approach, this study was performed investigating the interaction between the various parameters such as turntable and head speed, down force and back pressure during CMP. Using statistical analysis techniques, a better understanding of the interaction behavior between the various parameters and the effect on removal rate, no-uniformity and ETC (edge to center) is achieved.

• 한국전기전자재료학회논문지
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• 제15권11호
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• pp.939-945
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• 2002

The rise throughput and the stability in the device fabrication can be obtained by applying chemical mechanical polishing (CMP) process in 0.18 $\mu\textrm{m}$ semiconductor device. However, it still has various problems due to the CMP equipment. Especially, among the CMP components, process variables are very important parameters in determining the removal rate and non-uniformity. In this paper, we studied the DOE (design of experiment) method in order to get the optimized CMP equipment variables. Various process parameters, such as table and head speed, slurry flow rate and down force, have investigated in the viewpoint of removal rate and non-uniformity. Through the above DOE results, we could set-up the optimal CMP process parameters.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2005년도 추계학술대회 논문집
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• pp.423-426
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• 2005

The injection molding process has applied to a variety of fields by a development of various plastic resins. Recently, this process has been extending to a field of parts of shoes. In this study, the injection mold of shank which is a one of the parts of shoes has been designed. The position of gate and the injection procedure have been optimized by a simulation using the CAE software and an analysis using the DOE. As a result, the improved injection mold of shank has been manufactured in a short time. Appling the CAE and the DOE at the process of the injection mold design eventually lead an increase in the productivity and the quality of parts.

• 공업화학
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• 제31권2호
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• pp.138-146
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• 2020

통계학적 실험계획법(DOE)은 수십 년 동안 산업계에서 품질을 개선하기 위해 사용되어온 방법이다. 본 연구에서는 화학공학 분야에서 통계적 실험계획법이 적용된 사례 115건을 검토해 보았다. 모든 사례는 지난 10년간 주요 과학저널에 발표된 내용이다. 적용되는 설계 유형, 실험 규모, 반응 변수에 영향을 미치는 요인 및 수준의 수 및 적용 분야가 분석되었다. 무엇보다 통계학적 실험계획법에 관련된 연구논문이 점차 증가하는 것을 알 수 있었다.

• 한국정밀공학회지
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• 제25권8호
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• pp.72-79
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• 2008

To meet demand of big capacity and high speed rotation for washing machine, more stress from bending and twisting are complexly loaded onto the shaft supporting the horizontal drum, causing problems in fracture strength and fatigue life. Shafting system is mainly divided into flange and shaft. Shaft and flange connected by inserting shaft serration into flange on the process of die casting. When the system is operating, the gap is formed between serration and flange. But, Serration has various design factors and the optimal values can't be easily determined. Using a design of experiment (DOE) based on the FEM (Finite Element Method), this study was performed investigating the interaction effect between the various design factors as well as the main effect of the each design factor under bending, twist and vibration and proposed optimum design using box-behnken method among response surface derived from regression equation of simulation-based DOE.

• 한국지하수토양환경학회지:지하수토양환경
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• 제12권5호
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• pp.73-85
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• 2007

본 연구에서는 액상에서 EGBE, DGBE, DBM, TGME의 효율적인 분석을 위해 이용되던 액상추출법을 대신할 수 있는 방법으로 GC/FID를 이용한 SPME법 실험 연구를 진행하였다. 그리고 실험계획법(DOE)을 사용하여 EGBE를 포함한 디젤첨가제 미량분석의 최적조건을 설명하였다. 실험은 통계분석결과 뿐만 아니라 요인 수의 최적화에 따른 중심합성설계에 의한 완전요인 설계법을 사용하였다. 반응표면분석은 추출 효율이 주 영향인 염농도, 흡착 온도, 흡착 시간과 sonication 시간에 따른 2차 다항식에 의해 설명될 수 있음을 보여주었다. 실험계획법(DOE)을 사용하는 것은 액상 시료에서 디젤첨가제의 정량분석을 개선하는 자료분석법이 될 것이다.

• 한국생산제조학회지
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• 제22권1호
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• pp.138-144
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• 2013

The automation technology for overlay welding is needed due to the occurrence of severe corrosion and abrasion on the surface of internal contact in different shape of fittings. In Korea, different shapes of fittings have been manufactured by using the imported equipment of overlay welding automation at some companies. Thus the research on the development of overlay welding automation system (in short, OWAS) for a large L-type tube is urgently needed. In this paper, the investigation is focused on the optimal design of a supporting base for the (currently developing) OWAS of large L-type tube. Specifically we assume that the base which supports the equipment during the process of overlay welding is loaded as self-weight in the direction of gravity through static analysis especially when it is rotated 180 degree on the OWAS. For optimal design of a supporting base for OWAS of large L-type tube, Solidworks(R) (for 3-dimensional modelling) and ANASYS Workbench(R) (for structural analysis) are incorporated so as to proceed an optimization routines based on Response Surface Method (RSM) and Design of Experiment (DOE). In more specific, DOE finds out major factors (or dimensions) of the supporting base by using MINITAB(R). Then the regression equations between design variables (the major factors of supporting base) and response variables (deformation, stress and safety factor for the supporting base), which will be resulted in by RSM, verify the major factors of DOE. In the next step, Central Composite Design (CCD) plans 20 simulations of ANASYS Workbench(R) and then figures out the optimal values of design variables which will be reflected on the manufacturing of supporting base. Finally welding experiment is conducted to figure out the influence of overlay welding quality in applying the optimized design values of supporting base to the actual OWAS.

• 한국전기전자재료학회논문지
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• 제18권1호
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• pp.24-29
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• 2005

Chemical mechanical polishing (CMP) has been widely accepted for the global planarization of multi-layer structures in semiconductor manufacturing. Copper has been the candidate metallization material for ultra-large scale integrated circuits (ULSIs), owing to its excellent electro-migration resistance and low electrical resistance. However, it still has various problems in copper CMP process. Thus, it is important to understand the effect of the process variables such as turntable speed, head speed, down force and back pressure are very important parameters that must be carefully formulated in order to achieve desired the removal rates and non-uniformity. Using a design of experiment (DOE) approach, this study was performed investigating the main effect of the variables and the interaction between the various parameters during CMP. A better understanding of the interaction behavior between the various parameters and the effect on removal rate, non-uniformity and ETC (edge to center) is achieved by using the statistical analysis techniques. In the experimental tests, the optimum parameters which were derived from the statistical analysis could be found for higher removal rate and lower non-uniformity through the above DOE results.

• 대한기계학회논문집A
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• 제31권5호
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• pp.601-608
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• 2007

To meet demand of big capacity and high speed rotation for washing machine, more stress from bending and twisting are complexly loaded onto the shaft supporting the horizontal drum, causing problems in fracture strength and fatigue life. Shafting system is mainly divided into flange and shaft. Flange is located between the drum and shaft, transferring power from the shaft to drum, and acting as a supporter of the back of the drum. Because section of flange has various design factors according to configuration of flange, the optimum conditions can’t be easily determined. Using a design of experiment (DOE), this study was performed investigating the interaction effect between factors as well as the main effect of the each design factor under bending and twist and proposed optimum condition using center composition method among response surface derived from regression equation of simulation-based DOE.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2005년도 추계학술발표대회 논문집
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• pp.211-214
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• 2005

This research studied robust design of composite structure under combined loading of bending and torsion. DOE (Design of Experiment) technique was used to find important design factors. The results show that the beam height, beam width, layer thickness and stack angle of outer-layer are important design parameter. The $2^{nd}$ DOE and RSM (Response Surface Model) were conducted to obtain optimum design. Multi-island genetic algorithm was used to optimum design. An approximate value of 6.65 mm in deflection was expected under optimum condition. Six sigma robust design was conducted to find out guideline for control range of design parameter. To acquire six sigma level reliability, the sigma level reliability, the standard deviation of design parameter should be controlled within 2.5 % of average design value.