• Journal of the Korea Institute of Information and Communication Engineering
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• v.7 no.2
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• pp.255-262
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• 2003

In this paper, an investigation on the ZnO film deposition using radio-frequency magnetic sputtering techniques on aluminum bottom electrode for film bulk acoustic wave resonator (FBAR) filter applications and the temperature effects on the ZnO film growth is presented. The investigation on how much impact the actual process temperature may have on the crystal growth is more meaningful if it is considered that the piezoelectricity property of ZnO films plays a dominant role in determining the resonance characteristics of FBAR devices and the piezoelectricity is determined by the degree of the c-axis preferred orientation of the deposited ZnO films. In this experiment, it was found that the growth of ZnO crystals has a strong dependence on the deposition temperature ranged from room temperature to $350^{\circ}C$ regardless of the RF powers applied and there exist 3 temperature regions divided by 2 critical temperatures according to the degree of the c-axis preferred orientation. Overall, below $200^{\circ}C$, ZnO deposition results in columnar grains with a highly preferred c-axis orientation. With this ZnO film, a multilayered FBAR structure could be realized successfully.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.362-362
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• 2014

Atomic layer deposition (ALD) can be regarded as a special variation of the chemical vapor deposition method for reducing film thickness. ALD is based on sequential self-limiting reactions from the gas phase to produce thin films and over-layers in the nanometer scale with perfect conformality and process controllability. These characteristics make ALD an important film deposition technique for nanoelectronics. Tantalum pentoxide ($Ta_2O_5$) has a number of applications in optics and electronics due to its superior properties, such as thermal and chemical stability, high refractive index (>2.0), low absorption in near-UV to IR regions, and high-k. In particular, the dielectric constant of amorphous $Ta_2O_5$ is typically close to 25. Accordingly, $Ta_2O_5$ has been extensively studied in various electronics such as metal oxide semiconductor field-effect transistors (FET), organic FET, dynamic random access memories (RAM), resistance RAM, etc. In this experiment, the variations of chemical and interfacial state during the growth of $Ta_2O_5$ films on the Si substrate by ALD was investigated using in-situ synchrotron radiation photoemission spectroscopy. A newly synthesized liquid precursor $Ta(N^tBu)(dmamp)_2$ Me was used as the metal precursor, with Ar as a purging gas and $H_2O$ as the oxidant source. The core-level spectra of Si 2p, Ta 4f, and O 1s revealed that Ta suboxide and Si dioxide were formed at the initial stages of $Ta_2O_5$ growth. However, the Ta suboxide states almost disappeared as the ALD cycles progressed. Consequently, the $Ta^{5+}$ state, which corresponds with the stoichiometric $Ta_2O_5$, only appeared after 4.0 cycles. Additionally, tantalum silicide was not detected at the interfacial states between $Ta_2O_5$ and Si. The measured valence band offset value between $Ta_2O_5$ and the Si substrate was 3.08 eV after 2.5 cycles.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.434-435
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• 2012

Plasma enhanced chemical vapor deposition (PECVD) silicon dioxide thin films have many applications in semiconductor manufacturing such as inter-level dielectric and gate dielectric metal oxide semiconductor field effect transistors (MOSFETs). Fundamental chemical reaction for the formation of SiO2 includes SiH4 and O2, but mixture of SiH4 and N2O is preferable because of lower hydrogen concentration in the deposited film [1]. It is also known that binding energy of N-N is higher than that of N-O, so the particle generation by molecular reaction can be reduced by reducing reactive nitrogen during the deposition process. However, nitrous oxide (N2O) gives rise to nitric oxide (NO) on reaction with oxygen atoms, which in turn reacts with ozone. NO became a greenhouse gas which is naturally occurred regulating of stratospheric ozone. In fact, it takes global warming effect about 300 times higher than carbon dioxide (CO2). Industries regard that N2O is inevitable for their device fabrication; however, it is worthwhile to develop a marginable nitrous oxide free process for university lab classes considering educational and environmental purpose. In this paper, we developed environmental friendly and material cost efficient SiO2 deposition process by substituting N2O with O2 targeting university hands-on laboratory course. Experiment was performed by two level statistical design of experiment (DOE) with three process parameters including RF power, susceptor temperature, and oxygen gas flow. Responses of interests to optimize the process were deposition rate, film uniformity, surface roughness, and electrical dielectric property. We observed some power like particle formation on wafer in some experiment, and we postulate that the thermal and electrical energy to dissociate gas molecule was relatively lower than other runs. However, we were able to find a marginable process region with less than 3% uniformity requirement in our process optimization goal. Surface roughness measured by atomic force microscopy (AFM) presented some evidence of the agglomeration of silane related particles, and the result was still satisfactory for the purpose of this research. This newly developed SiO2 deposition process is currently under verification with repeated experimental run on 4 inches wafer, and it will be adopted to Semiconductor Material and Process course offered in the Department of Electronic Engineering at Myongji University from spring semester in 2012.

• Journal of the Microelectronics and Packaging Society
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• v.18 no.1
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• pp.49-53
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• 2011

Diamond-like carbon (DLC) films is a metastable form of amorphous carbon containing a significant fraction of Sp3 bond. DLC films have been characterized by a range of attractive mechanical, chemical, tribological, as well as optical and electrical properties. In this study DLC films were prepared by the RF magnetron sputter system on $SiO_2$ substrates using graphite target. The effects of the post annealing temperature on the Property variation of the DLC films were examined. The DLC films were annealed at temperatures ranging from 300 to $500^{\circ}C$ using rapid thermal process equipment in vacuum. The variation of electrical property and surface morphology as a function of annealing treatment was investigated by using a Hall Effect measurement and atomic force microscopy. Raman and X-ray photoelectron spectroscopy analyses revealed a structural change in the DLC films.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2018.06a
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• pp.101-101
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• 2018

Quantitative measurement of chloride ion concentration has an important role in various fields of electrochemistry, medical science, biology, metallurgy, architecture, etc. Among them, its importance of architecture is ever-growing due to unexpected degradations of building structure. These situations are caused by corrosion of reinforced concrete (RC) structure of buildings. And chloride ions are the most powerful factors of RC structure corrosion. Therefore, precise inspection of chloride ion concentration must be required to increase the accuracy of durability monitoring. Multi-walled Carbon nanotubes (MWCNTs) have high chemical resistivity, large surface area and superior electrical property. Thus, it is suitable for the channels of electrical signals made by the sensor. Silver nanoparticles were added to giving the sensing property. CuBTC, one of the metal organic frameworks (MOFs), was employed as a material to improve the sensing property because of its hydrophilicity and high surface area to volume ratio. In this study, sensing element was synthesized by various chemical reaction procedures. At first, MWCNTs were functionalized with a mixture of sulfuric acid and nitric acid because of enhancement of solubility in solution and surface activation. And functionalized MWCNTs, silver nanoparticles, and CuBTC were synthesized on PTFE membrane, one by one. Electroless deposition process was performed to deposit the silver nanoparticles. CuBTC was produced by room temperature synthesis. Surface morphology and composition analysis were characterized by scanning electron microscope (SEM), energy dispersive X-ray spectroscopy (EDS), respectively. X-ray photoelectron spectroscopy (XPS) was also performed to confirm the existence of sensing materials. The electrical properties of sensor were measured by semiconductor analyzer. The chloride ion sensing characteristics were confirmed with the variation of the resistance at 1 V.

• Journal of Radiation Industry
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• v.5 no.4
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• pp.371-376
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• 2011

The surface property of the materials used in tissue engineering application has been essential to regulate cellular behaviors by directing their adhesion on the materials. To modulate surface property of the synthetic biodegradable materials, a variety of surface modification techniques have used to introduced surface functional groups or bioactive molecules, recently polydopamine coating method have been introduce as a facile modification method which can be coated on various materials such as polymers, metals, and ceramics regardless of their surface property. However, there are no reports about the degree of polydopamine coating on the materials with different hydrophilicity. In the present study, we prepared acrylic acid grafted nanofibrous meshes using electron-beam irradiation, and then coated meshes with polydopamine. Polydopamine successfully coated on the all meshes, both properties of acrylic acid and polydopamine were detected on the meshes. In addition, the degree of polydopamine deposition on the materials has been altered according to surface hydrophilicity, which was approximately 8-times greater than those on the non-modified materials. In conclusion, dual effect from the acrylic acid grafting and polydopamine may give a chance as a alternative tool in tissue engineering application.

• Journal of the Korean Society of Clothing and Textiles
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• v.45 no.1
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• pp.106-122
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• 2021

This study confirmed the mechanical properties of an auxetic re-entrant pattern prepared using 3D printing technology and its composite fabric with neoprene for the production of functional auxetic patterns/textiles for safety shoes. Samples were prepared by the tilt angle of a re-entrant pattern of 0°, 30°, 45°, 60° and 90°, and then analyzed using Poisson's ratio, bending, compression, and tensile properties. A 3D printed auxetic re-entrant pattern (3DP-RE) and its composite fabric (3DP-RE/NP) showed a negative Poisson's ratio in all tilting angles that indicated auxetic properties. The results of the bending property shown that strength of 3DP-RE/NP was 1.5 times lower than NP, but the strain improved 2.0 times. It was confirmed that the deformation of 3DP-RE/NP is possible with a low load. Each sample type of compression behavior indicated similar regardless of the tilting angles; in addition, the compression toughness of 3DP-RE/NP increased 1.2 times compared with NP. In the case of tensile properties, 3DP-RE and 3DP-RE/NP were affected by the tilting angle, samples with 90° (the opposite of load direction) showed best tensile property and toughness. 3DP-RE/NP indicated improved bending, compression, and tensile properties.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.35 no.3
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• pp.191-196
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• 2022

In this study, the anisotropic mechanical property of fused deposition modeling three-dimensional (3D) printing based on lamination direction was verified by a tensile test. Moreover, the property was applied to solid isotropic materials with penalization-based topology optimization. The case of the lower control arm, one of the automotive suspension components, was considered as a benchmark problem. The optimal topological results varied depending on the external load and anisotropic property. Based on these results, two test specimens were fabricated by varying the lamination direction of 3D printing; a tensile test utilizing 3D non-contact strain gauge was also conducted. The measured strain was compared with that obtained by computer-aided engineering response analysis. Quantitatively, the measurement and analysis results are found to have good agreement. The effectiveness of topology optimization considering the lamination direction of 3D printing was confirmed by the experimental result.

• Korean Chemical Engineering Research
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• v.61 no.1
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• pp.52-57
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• 2023

This study is a basic research for the development of high performance flexible electrode material. To enhance its electrochemical property, CuO nanoparticles (CuO NPs) were introduced and dispersed on surface of CNT fiber through electrochemical deposition method. The CNT fiber/CuO NPs electrode was fabricated and applied to electrochemical non-enzymatic glucose sensor. Surface morphology and elemental composition of the CNT fiber/CuO NPs electrode was characterized by scanning electron microscope (SEM) with energy dispersive X-ray spectrometry (EDS). And its electrochemical characteristics were investigated by cyclic voltammetry, electrochemical impedance spectroscopy and chronoamperometry. The CNT fiber/CuO NPs electrode exhibited the good sensing performance for glucose detection such as high sensitivity, wide linear range, low detection limit and good selectivity due to synergetic effect of CNT fiber and CuO NPs. Based on the unique property of CNT fiber, CuO NPs were provide large surface area, enhanced electrocatalytic activity, efficient electron transport property. Therefore, it is expected to develop high performance flexible electrode materials using various nanomaterials.

• Korean Journal of Materials Research
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• v.33 no.11
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• pp.497-501
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• 2023

ZnO/Cu/ZnO (ZCZ) thin films were deposited at room temperature on a glass substrate using direct current (DC) and radio frequency (RF, 13.56 MHz) magnetron sputtering and then the effect of post-deposition electron irradiation on the structural, optical, electrical and transparent heater properties of the films were considered. ZCZ films that were electron beam irradiated at 500 eV showed an increase in the grain sizes of their ZnO(102) and (201) planes to 15.17 nm and 11.51 nm, respectively, from grain sizes of 13.50 nm and 10.60 nm observed in the as deposited films. In addition, the film's optical and electrical properties also depended on the electron irradiation energies. The highest opto-electrical performance was observed in films electron irradiated at 500 eV. In a heat radiation test, when a bias voltage of 18 V was applied to the film that had been electron irradiated at 500 eV, its steady state temperature was about 90.5 ℃. In a repetition test, it reached the steady state temperature within 60 s at all bias voltages.