• 제목/요약/키워드: Deposition distance

검색결과 273건 처리시간 0.023초

온도 매개 변수의 컴퓨터 시뮬레이션을 통한 HF-CVD를 이용한 다이아몬드 증착 거동 분석 (Computer Simulation of Temperature Parameter for Diamond Formation by using Hot- Filament Chemical Vapor Deposition)

  • 송창원;이용희;최수석;황농문;김광호
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2018년도 춘계학술대회 논문집
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    • pp.54-54
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    • 2018
  • To optimize the deposition parameters of diamond films, the temperature, pressure, and distance between the filament and the susceptor need to be considered. However, it is difficult to precisely measure and predict the filament and susceptor temperature in relation to the applied power in the hot filament chemical vapor deposition (HFCVD) system. In this study the temperature distribution inside the system was numerically calculated for the applied powers of 12, 14, 16 and 18 kW. The applied power needed to achieve the appropriate temperature at a constant pressure and other conditions was deduced, and applied to actual experimental depositions. The numerical simulation was conducted using the commercial computational fluent dynamics software, ANSYS-FLUENT. To account for radiative heat-transfer in the HFCVD reactor, the discrete ordinate (DO) model was used. The temperatures of the filament surface and the susceptor at different power levels were predicted to be 2512 ~ 2802 K, and 1076 ~ 1198 K, respectively. Based on the numerical calculations, experiments were performed. The simulated temperatures for the filament surface were in good agreement with experimental temperatures measured using a 2-color pyrometer. The results showed that the highest deposition rate and the lowest deposition of non-diamond was obtained at a power of 16 kW.

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듀얼헤드 적층 기술을 이용한 나노섬유로 결합된 3D 인공지지체 제작 (Fabrication of Nanofiber-Combined 3D Scaffolds using Dual-Head Deposition Technology)

  • 사민우;이창희;김종영
    • 한국기계가공학회지
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    • 제17권1호
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    • pp.108-115
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    • 2018
  • In bone tissue engineering, polycaprolactone (PCL) is one of the most widely used biomaterials to manufacture scaffolds as a synthetic polymer with biodegradability and biocompatibility. The polymer deposition system (PDS) with four axis heads, which can dispense bio-polymers, has been used in scaffold fabrication for tissue engineering applications. A dual-head deposition technology of PDS is an effective technique to fabricate 3D scaffolds. The electrospinning technology has been widely used to fabricate porous and highly interconnected polymer fibers. Thus, PDS can fabricate nanofiber-combined hybrid scaffolds using fused deposition modeling (FDM) and electrospinning methods. This study aims to fabricate nanofiber-combined scaffolds with uniform nanofibers using PDS. The PCL nanofibers were fabricated and evaluated according to the fabrication process parameters. PCL nanofibers were successfully fabricated when the applied voltage, tip-to-collector distance, flow rate, and solution concentration were 5 kV, 1 cm, 0.1 ml/h, and 8 wt%, respectively. The cell proliferation was evaluated according to the electrospinning time. Scanning electron microscopy was used to acquire images of the cross-sectioned hybrid scaffolds. The cell proliferation test of the PCL and nanofiber-combined hybrid scaffolds was performed using a CCK-8 assay according to the electrospinning time. The result of in-vitro cell proliferation using osteosarcoma MG-63 cells shows that the hybrid scaffold has good potential for bone regeneration.

316H 스테인리스 강 위에 적층 제조된 순수 니켈층의 원소 확산거리 연구 (Study on the Elemental Diffusion Distance of a Pure Nickel Layer Additively Manufactured on 316H Stainless Steel)

  • 고의준;이원찬;신기승;윤지현;김정한
    • 한국분말재료학회지
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    • 제31권3호
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    • pp.220-225
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    • 2024
  • Molten salt reactors represent a promising advancement in nuclear technology due to their potential for enhanced safety, higher efficiency, and reduced nuclear waste. However, the development of structural materials that can survive under severe corrosion environments is crucial. In the present work, pure Ni was deposited on the surface of 316H stainless steel using a directed energy deposition (DED) process. This study aimed to fabricate pure Ni alloy layers on an STS316H alloy substrate. It was observed that low laser power during the deposition of pure Ni on the STS316H substrate could induce stacking defects such as surface irregularities and internal voids, which were confirmed through photographic and SEM analyses. Additionally, the diffusion of Fe and Cr elements from the STS316H substrate into the Ni layers was observed to decrease with increasing Ni deposition height. Analysis of the composition of Cr and Fe components within the Ni deposition structures allows for the prediction of properties such as the corrosion resistance of Ni.

미립액상법을 위한 PECVD 반응로설계 (Reactor design of PECVD system using a liquid aerosol feed method)

  • 정용선;오근호
    • 한국결정성장학회지
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    • 제7권2호
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    • pp.235-243
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    • 1997
  • $YBa_2Cu_3O_x$ 고온 초전도체 상을 MgO 단결정위에 증착시키기 위하여 액상의 에어로 졸 입자를 저온 플라즈마의 화학증기 증착로안에 유입하였다. 플라즈마의 분포를 조절하기 위한 반응로의 설계에 따라 초전도체상의 미세구조가 변화하는 양상을 관찰하였으며, 이때 증착 기판 위에서 관찰되는 입자들의 생성원인에 대하여 고찰하였다. 입자생성의 주된 원인으로는 불안정한 플라즈마의 분포와 출발원료의 낮은 기화속도에 기인하는 것으로 나타났다. 또한 증착속도는 출발원료가 기화되는 곳으로부터 멀어질수록 급격히 감소하는 것으로 밝혀졌다.

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초음파 분무 열분해 증착 제어 시스템 개발 (Development of Control System for Ultrasonic Spray Pyrolysis Deposition)

  • 김규언;김영흠;이치범
    • 한국생산제조학회지
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    • 제23권4호
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    • pp.385-391
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    • 2014
  • A control system for ultrasonic spray pyrolysis deposition was developed that can coat a large size glass panel with a transparent conductive oxide. It consists of several ultrasonic atomizer devices to cover a large area and a host computer for individually controlling the devices. The sub-controller in an ultrasonic atomizer device can adjust the flow rate of the atomized conductive oxide gas by setting the flow rate of the solution and regulating the level of the solution in the tank. To construct a feedback control loop for level regulation, a level sensor that utilized an infrared distance sensor and an electric circuit for adjusting the ultrasonic oscillator were developed. The host program was also developed, which can monitor and control the sub-controllers. A proportional-integral controller was developed for a simplified model, and its operation was verified through an experiment.

고품질 질화물 반도체 박막 성장을 위한 반응로 구조 및 열적 조건에 관한 연구 (A Study on the Reactor Configuration and Thermal Conditions for the Growth of High Quality Thin Film of GaN Layer)

  • 김진택;백병준;이철로;박복춘
    • 대한기계학회논문집B
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    • 제28권12호
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    • pp.1632-1639
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    • 2004
  • Numerical calculation has been performed to investigate the transport phenomena in the horizontal reactor which has two different gas inlets for MOCVD(metalorganic chemical vapor deposition). The full elliptic governing equations for continuity, momentum, energy and chemical species are solved by using the commercial code FLUENT. It is investigated how thermal characteristics, reactor geometry, and the operating parameters affect flow fields, mass fraction of each reactants. The numerical simulations demonstrate that flow rate of each species, inlet geometry of the reactor, and its distance from the susceptor as well as the inclination of upper wall of reactor can be used effectively to optimize reactor performance. The commonly used idealized boundary conditions are also investigated to predict flow phenomena in the actual deposition system.

Fabrication of EDM Electrodes by Localized Electrochemical Deposition

  • Habib, Mohammad Ahsan;Gan, Sze Wei;Lim, Han-Seok;Rahman, Mustafizur
    • International Journal of Precision Engineering and Manufacturing
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    • 제9권2호
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    • pp.75-80
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    • 2008
  • The fabrication of complex three-dimensional electrodes for micro electrical discharge machining (micro-EDM) is an important issue in the field of micromachining Localized electrochemical deposition (LECD) is a simple and inexpensive technique for fabricating micro-EDM electrodes. This study presents a new process for manufacturing electrodes with complex cross-sections using masks of different shapes, In this process, a non-conductive mask is placed between an anode and cathode that are immersed in a plating solution of acidified copper sulfate. The LECD is achieved by applying a pulsed voltage between the anode and cathode, which are separated by a small distance. In this setup, the cathode is placed above the anode and the mask, so that the deposited electrode can be used directly for EDM without changing the tool orientation. We found that the microstructure of the deposited electrode is influenced by the concentration of the plating solution and organic additives. Moreover, the values of the voltage, frequency, and duty cycle of the pulsed input have significant effects on the microstructure of the fabricated electrode. Finally, the optimum values of the voltage, frequency, and duty cycle were determined for the most effective fabrication of complex-shaped electrodes.

플라즈마 화학기상 증착법에 의한 B이 첨가된 ZnO 박막의 증착에 관한 연구 (Deposition of B-doped ZnO Thin Films by Plasma Enhanced Chemical Vapor Deposition)

  • 최준영;조해석;김영진;이용의;김현준
    • 한국재료학회지
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    • 제5권5호
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    • pp.568-574
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    • 1995
  • We investigated the effects of B-doping on the growth mechanism of ZnO films. The B-doped ZnO films, which were widely applied for transparent conducting electrode, were deposited by plasma enhanced chemcial vapor depostion(PECVD) using diethylzinc(DEZ), No.sub 2/. and B$_{2}$H$_{6}$. The deposition conditions were a sbustrate temperature of 30$0^{\circ}C$, an rf power of 200, and a chamber pressure of 1 torr. At the given depostion condition, the growth rate of B-doped ZnO thin films was higher than that of undoped ones, but didn't change even with further increasing B$_{2}$H$_{6}$ flow rate and the interplanar distance between(0002) planes was reduced as B atoms substituted Zn sites.s.

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원심분사주조법에 의한 $Cu-X(=Al_2O_3,W)_p$ 복합재료의 미세조직 및 복합화 (Compositing Modes and Microstructures of $Cu-X(=Al_2O_3,W)_p$ Composite by Centrifugal Spray-Cast Deposition)

  • 배차헌;정해용
    • 한국주조공학회지
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    • 제17권5호
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    • pp.480-487
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    • 1997
  • Particle reinforced metal matrix composites(MMCs) via a centrifugal spray-cast deposition(CSD) process were fabricated by injecting second phase particles($Al_2O_3$<40${\mu}m$, W<17.3${\mu}m$) into copper melt on the atomizing disc. Compositing modes were investigated by combining microstructures and mathematical modeling between Cu droplets and the reinforced particles injected. The $Cu/W_P$ powders were shown that the W particles penetrate and get embedded in the Cu droplets. It is considered that the W particles composite preferentially in Cu melt on the atomizing disc. On the other hand, the $Al_2O_3$, particles did not penetrate into the Cu droplets on the atomizing disc but get attached in surface of Cu droplets during the flight. It is considered that the compositing may be attained in the flight distance which the relative velocity between Cu droplet and $Al_2O_3$, particle is maximum. The microstructure of the $Cu/W_P$ and the $Cu/(Al_2O_3)_p$ composite preform was strongly influenced by compositing modes of droplets, and after subsequent deposition it was comprised as it is called the dispersed type and the cell type of microstructure, respectively.

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Deposition of Ferroelectric PB(Zr0.52Ti0.48)O3 Films on Platinized Silicon Using Nd:YAG Laser

  • Im, Hoong-Sun;Kim, Sang-Hyeob;Choi, Young-Ku;Lee, Kee-Hag;Jung, Kwang-Woo
    • Bulletin of the Korean Chemical Society
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    • 제18권1호
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    • pp.56-61
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    • 1997
  • Lead zirconate titanate (PZT) thin fills were deposited onto the Pt/Ti/SiO2/Si substrate by the pulsed laser deposition with the second harmonic wavelength (532 nm) of Nd:YAG laser. In order to determine the optimum conditions for the film deposition, the phase of the films were investigated as functions of ambient oxygen pressure, substrate temperature, and laser fluence. Also the chemical composition analysis was conducted for the PZT films deposited under various ambient oxygen pressure. When the distance between substrate and bulk PZT target is set to 20 mm, the optimum conditions have been determined to be 3 torr of oxygen pressure, 1.5 J/cm2 of laser fluence, and 823-848(±10) K range of substrate temperature. At these conditions, perovskite phase PZT films were obtained on platinized silicon. The chemical composition of the films is very similar to that of PZT bulk target. The physical structure of the deposited films analyzed by scanning electron microscopy shows a columnar morphology perpendicular to the substrate surface. Capacitance-Voltage hysteresis loop measurements show also a typical characteristics of ferroelectric thin film. The dielectric constant is found to be 528 for the 0.48 μm thickness of PZT thin film.