• Korean Journal of Materials Research
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• v.19 no.2
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• pp.61-67
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• 2009

Electrolessly deposited Co (Re,P) was investigated as a possible capping layer for Cu wires. 50 nm Co (Re,P) films were deposited on Cu/Ti-coated silicon wafers which acted as a catalytic seed and an adhesion layer, respectively. To obtain the optimized bath composition, electroless deposition was studied through an electrochemical approach via a linear sweep voltammetry analysis. The results of using this method showed that the best deposition conditions were a $CoSO_4$ concentration of 0.082 mol/l, a solution pH of 9, a $KReO_4$ concentration of 0.0003 mol/l and sodium hypophosphite concentration of 0.1 mol/L at $80^{\circ}C$. The thermal stability of the Co (Re,P) layer as a barrier preventing Cu was evaluated using Auger electron spectroscopy and a Scanning calorimeter. The measurement results showed that Re impurities stabilized the h.c.p. phase up to $550^{\circ}C$ and that the Co (Re,P) film efficiently blocked Cu diffusion under an annealing temperature of $400^{\circ}C$ for 1hr. The good barrier properties that were observed can be explained by the nano-sized grains along with the blocking effect of the impurities at the fast diffusion path of the grain boundaries. The transformation temperature from the amorphous to crystal structure is increased by doping the Re.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.150.1-150.1
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• 2014

Showerhead is used as a main part in the semiconductor equipment. The face plate flatness should remain constant and the cleaning performance must be gained to keep the uniformity level of etching or deposition in chemical vapor deposition process. High operating temperature or long period of thermal loading could lead the showerhead to be deformed thermally. In some case, the thermal deformation appears very sensitive to showerhead performance. This paper describes the methods for robust design using computational fluid dynamics. To reveal the influence of the post distribution on flow pattern in the showerhead cavity, numerical simulation was performed for several post distributions. The flow structure appears similar to an impinging flow near a centered baffle in showerhead cavity. We took the structure as an index to estimate diffusion path. A robust design to reduce the thermal deformation of showerhead can be achieved using post number increase without ill effect on flow. To prevent the showerhead deformation by heat loading, its face plate thickness was determined additionally using numerical simulation. The face plate has thousands of impinging holes. The design key is to keep pressure drop distribution on the showerhead face plate with the holes. This study reads the methodology to apply to a showerhead hole design. A Hagen-Poiseuille equation gives the pressure drop in a fluid flowing through such hole. The assumptions of the equation are the fluid is viscous-incompressible and the flow is laminar fully developed in a through hole. An equation can be expressed with radius R and length L related to the volume flow rate Q from the Hagen-Poiseuille equation, $Q={\pi}R4{\Delta}p/8{\mu}L$, where ${\mu}$ is the viscosity and ${\Delta}p$ is the pressure drop. In present case, each hole has steps at both the inlet and the outlet, and the fluid appears compressible. So we simplify the equation as $Q=C(R,L){\Delta}p$. A series of performance curves for a through hole with geometric parameters were obtained using two-dimensional numerical simulation. We obtained a relation between the hole diameter and hole length from the test cases to determine hole diameter at fixed hole length. A numerical simulation has been performed as a tool for enhancing showerhead robust design from flow structure. Geometric parameters for the design were post distribution and face plate thickness. The reinforced showerhead has been installed and its effective deposition profile is being shown in factory.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.188.2-188.2
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• 2015

The presence of the conduction interface in epitaxial $LaAlO_3/SrTiO_3$ thin films has opened up challenging applications which can be expanded to next-generation nano-electronics. The metallic conduction path is associated with two adjacent insulating materials. Such device structure is applicable to frequency-dependent impedance spectroscopy. Impedance spectroscopy allows for simultaneous measurement of resistivity and dielectric constants, systematic identification of the underlying electrical origins, and the estimation of the electrical homogeneity in the corresponding electrical origins. Such unique capability is combined with the intentional control on the interface composition composed of $SrTiO_3$ and $CaTiO_3$, which can be denoted by $SrxCa1-_xTiO_3$. The underlying $Sr_xCa1-_xTiO_3$ interface was deposited using pulsed-laser deposition, followed by the epitaxial $LaAlO_3$ thin films. The platinum electrodes were constructed using metal shadow masks, in order to accommodate 2-point electrode configuration. Impedance spectroscopy was performed as the function of the relative ratio of Sr to Ca. The respective impedance spectra were analyzed in terms of the equivalent circuit models. Furthermore, the impedance spectra were monitored as a function of temperature. The ac-based characterization in the 2-dimensional conduction path supplements the dc-based electrical analysis. The artificial manipulation of the interface composition will be discussed towards the electrical application of 2-dimensional materials to the semiconductor devices in replacement for the current Si-based devices.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.221-221
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• 2012

Small-molecule organic photovoltaic cells have recently attracted growing attention due to their potential for the low-cost fabrication of flexible and lightweight solar modules. The PVP/Ag nanoparticles were synthesized by the reaction of poly vinylpyrrolidone (PVP) and silver nitrate at $150^{\circ}C$. In the reaction, the size of the nanoparticles was controlled by relative mole fractions between PVP and Ag. The PVP/Ag nanoparticles with various sizes were then spin coated on the patterned ITO glass prior to the deposition of the PEDOT:PSS hole transport layer. The scattering of the incident light caused by these incorporated nanoparticles resulted in an increase in the path length of the light through the active layer and hence the enhancement of the light absorption. This scattering effect increased as the size of the nanoparticles increased, but it was offset by the decrease in total transmittance caused by the non-transparent nanoparticles. As a result, the maximum power conversion efficiency, 0.96% which was the value enhanced by 14% compared to the cell without incorporation of nanoparticles, was obtained when the mole fraction of PVP:Ag was 24:1 and the size of the nanoparticles was 20~40 nm.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.33 no.10
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• pp.820-826
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• 2009

The anisotropic phonon conductions with varying Joule heating rate of the silicon film in Silicon-on-Insulator devices are examined using the electron-phonon interaction model. It is found that the phonon heat transfer rate at each boundary of Si-layer has a strong dependence on the heating power rate. And the phonon flow decreases when the temperature gradient has a sharp change within extremely short length scales such as phonon mean free path. Thus the heat generated in the hot spot region is removed primarily by heat conduction through Si-layer at the higher Joule heating level and the phonon nonlocality is mainly attributed to lower group velocity phonons as remarkably dissimilar to the case of electrons in laser heated plasmas. To validate these observations the modified phonon nonlocal model considering complete phonon dispersion relations is introduced as a correct form of the conventional theory. We also reveal that the relation between the phonon heat deposition time from the hot spot region and the relaxation time in Si-layer can be used to estimate the intrinsic thermal resistance in the parallel heat flow direction as Joule heating level varies.

• Journal of the korean academy of Pediatric Dentistry
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• v.24 no.3
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• pp.590-596
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• 1997

Ankylosis is defined as a fusion of alveolar bone with dentin and/or cementum and may occur at any time during or following active eruption. Ankylosed teeth maintain existing occlusal levels while adjacent teeth continue to erupt via deposition of alveolar bone. This may result in the clinical appearance of depression or submergence of ankylosed teeth below the occlusal plane. It is found more frequently in children of late mixed dentition and in mandibular primary molars. The problems arising from ankylosed teeth, due to their submerged positions, are elongation of the antagonist, tipping of the adjacent teeth, loss of arch length, food impaction and subsequent destruction of periodontal tissue, disturbance of succedaneous tooth eruption. The author observed several cases of ankylosed primary molars and properly managed. Following results were obtained. 1. Severe infraoccluded ankylosis results in loss of arch length and undesirable effect on eruption path of succedaneous tooth, therefore early diagnosis and management are important. 2. The teeth without problems may be examined periodically and restored in order to maintain the normal occlusal function.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.351.1-351.1
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• 2014

In this study, we prepared the solution-based In-Ga-Zn oxide thin film transistors (IGZO TFTs) of multistacked active layer and characterized the gate bias instability by measuring the change in threshold voltage caused by stacking. The solutions for IGZO active layer were prepared by In:Zn=1:1 mole ratio and the ratio of Ga was changed from 20% to 30%. The TFTs with multistacked active layer was fabricated by stacking single, double and triple layers from the prepared solutions. As the number of active layer increases, the saturation mobility shows the value of 1.2, 0.8 and 0.6 (). The electrical properties have the tendency such as decreasing. However when gate bias VG=10 V is forced to gate electrode for 3000 s, the threshold voltage shift was decreased from 4.74 V to 1.27 V. Because the interface is formed between the each layers and this affected the current path to reduce the electrical performances. But the uniformity of active layer was improved by stacking active layer with filling the hole formed during pre-baking so the stability of device was improved. These results suggest that the deposition of multistacked active layer improve the stability of the device.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.587-587
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• 2012

Supercapacitors, which can deliver significant energy with high power density, have attracted a lot of attention due to their potential application in energy storage. Among various oxide materials, sodium vanadate has been recognized as one of the most promising electrode materials because of high electrical conductivity. In addition, larger layer spacing of ${\beta}$-Na0.33V2O5 compared to V2O5 makes easier Li+ insertion. Moreover, ${\beta}$-Na0.33V2O5 has a tunnel like structure along b axis with 3 kinds of V site allowing it to enhance the ion intercalation by introducing three different intercalation sites along the tunnel. The tunnel can act as a fast diffusion path for ion diffusion, which can improve the overall charge storage kinetics. In this study, high quality single crystalline sodium vanadate (${\beta}$-Na0.33V2O5) nanowires were grown directly on Pt coated $SiO_2$ substrate by a facile chemical solution deposition method without employing catalyst, surfactant or carrier gas. The results show that great enhancement in capacitance was observed compared with previous reports.

• Nuclear Engineering and Technology
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• v.48 no.4
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• pp.870-880
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• 2016

A steam generator tube rupture (SGTR) event with a stuck-open safety relief valve constitutes one of the most serious accident sequences in pressurized water reactors (PWRs) because it may create an open path for radioactive aerosol release into the environment. The release may be mitigated by the deposition of fission product particles on a steam generator's (SG's) dry tubes and structures or by scrubbing in the secondary coolant. However, the absence of empirical data, the complexity of the geometry, and the controlling processes have, until recently, made any quantification of retention difficult to justify. As a result, past risk assessment studies typically took little or no credit for aerosol retention in SGTR sequences. To provide these missing data, the Paul Scherrer Institute (PSI) initiated the Aerosol Trapping In Steam GeneraTor (ARTIST) Project, which aimed to thoroughly investigate various aspects of aerosol removal in the secondary side of a breached steam generator. Between 2003 and 2011, the PSI has led the ARTIST Project, which involved intense collaboration between nearly 20 international partners. This summary paper presents key findings of experimental and analytical work conducted at the PSI within the ARTIST program.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.25 no.2
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• pp.112-117
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• 2016

In the construction industry, concrete polishing is used to grind and rub the surface of concrete grounds with polishing machines to increase the strength of the concrete after deposition. Polishing is performed manually in spite of the generation of dust and the requirement of frequent replacements of the polishing pad. The concrete polishing robot developed in this research is a novel polishing automation system for preventing the workers from being exposed to poor working environments. This robot is able to change multiple polishing tools automatically; however, the workers can conveniently replace the worn-out polishing pads with new ones. The mobile platform of the polishing robot employs omnidirectional wheels to enable a flexible motion even in small and complicated workspaces. To evaluate the performance of the developed concrete polishing robot, extensive experiments including square trajectory tracking, automatic tool changing, actual polishing, and path generation simulation were performed.