• 제목/요약/키워드: Deposition Characteristics

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정전기 분무 증착법에 대한 최근 연구 동향 고찰 (Research Issues of Electrostatic Spray Deposition (ESD) Technique)

  • 류성욱;이상용
    • 한국분무공학회지
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    • 제11권1호
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    • pp.7-16
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    • 2006
  • Performance of thin films fabricated with the electrostatic spray deposition (ESD) technique is strongly governed by surface morphology, which depends on deposition parameters such as deposition time and temperature, solution properties, and surface characteristics of substrates. In this article, the state of the art on the relationships between the surface morphology and the deposition parameters is presented. Also studies on the electro-hydrodynamic atomization process and the motion of drops relevant to the ESD technique are briefly reviewed, and the future research works are suggested.

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AIP-TiN 코팅에서 증착시간이 SKH51과 SKD11 강의 표면특성에 미치는 영향에 관한 비교 연구 (Comparative Study on Effect of the Surface Characteristics of the SKH51 and SKD11 Steels with Deposition Times by AIP-TiN Coating)

  • 김해지;김남경
    • 한국기계가공학회지
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    • 제7권1호
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    • pp.67-74
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    • 2008
  • In this paper, the surface characteristics of the AIP-TiN coated of the SKH51 and SKD11 steels under various deposition times are presented with emphasis on the comparison of the two materials. The micro-particle, the surface roughness, the micro-hardness, the coated layer thickness, the atomic distribution of Ti, N and Fe elements and the adhesion are measured for various deposition times. It has been shown that the micro-particle, the surface roughness, the coated layer thickness and the atomic distribution of Ti, N and Fe elements are similar for the two cases regardless of the test deposition time from 10 to 180 minutes. However, it has been shown that the micro-hardness and the adhesion of the SKH51 steel are higher than the SKD11 steel, indicating that they are much affected by the hardness of the material to be coated.

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대향타겟식 스퍼터링 장치의 공정 조건에 따른 SiO2 가스 차단막의 특성 (Characteristics of SiO2 Gas Barrier Films as a Function of Process Conditions in Facing Target Sputtering (FTS) System)

  • 배강;왕태현;손선영;김화민;홍재석
    • 한국전기전자재료학회논문지
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    • 제22권7호
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    • pp.595-601
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    • 2009
  • For the silicon oxide $(SiO_x)$ films prepared by using the facing target sputtering (FTS) apparatus that was manufactured to enhance the preciseness of the fabricated thin-film and sputtering yield rate by forming a higher-density plasma in the electrical discharge space for using it as a thin-film passivation system for flexible organic light emitting devices (FOLEDs). The deposition characteristics were investigated under various process conditions, such as array of the cathode magnets, oxygen concentration$(O_2/Ar+O_2)$ introduced during deposition, and variations of distance between two targets and working pressure. We report that the optimum conditions for our FTS apparatus for the deposition of the $SiO_x$ films are as follows: $d_{TS}\;and\;d_{TT}$ are 90mm and 120mm, respectively and the maximum deposition rate is obtained under a gas pressure of 2 mTorr with an oxygen concentration of 3.3%. Under this optimum conditions, it was found that the $SiO_x$ film was grown with a very high deposition rate of $250{\AA}$/min by rf-power of $4.4W/cm^2$, which was significantly enhanced as compared with a deposition rate (${\sim}55{\AA})$/min) of the conventional sputtering system. We also reported that the FTS system is a suitable method for the high speed and the low temperature deposition, the plasma free deposition, and the mass-production.

유동학적 인자에 따른 토석류의 이동 및 퇴적 특성 (Movement and Deposition Characteristics of Debris Flow According to Rheological Factors)

  • 이미지;김윤태
    • 한국지반공학회논문집
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    • 제29권5호
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    • pp.19-27
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    • 2013
  • 여름철 강우로 인한 산사태는 대부분 토석류의 형태로 나타난다. 토석류는 빠른 이동속도와 체적 때문에 경제적 손실 뿐만 아니라 많은 인명피해를 일으킨다. 토석류 해석 프로그램인 FLO-2D를 사용하여 유동학적 인자인 점성과 항복응력에 따른 토석류의 이동과 퇴적 특성을 분석하였다. 수치해석을 수행한 결과, 점성이 증가할수록 토석류 입자간의 응집력이 증가하여 토석류의 퇴적거리와 속도가 감소한다. 그에 따라 유동심은 증가하고 충격력은 감소하였다. 항복응력은 토석류의 발생과 퇴적에 큰 영향을 미치는 요인이다. 항복응력이 증가할수록 충격력은 증가하였다. 수치 해석 결과에 의하면, 토석류의 이동속도는 주로 점성에 의존하나 토석류의 퇴적 특성(퇴적거리, 퇴적 폭, 퇴적면적)은 점성과 항복응력에 의존한다.

지표면 Wetness에 따른 오존의 건성침적속도 특성 (The Characteristics of the Dry Deposition Velocity for O3 regarding Surface Wetness)

  • 이화운;김유근;문난경
    • 한국환경과학회지
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    • 제12권4호
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    • pp.393-397
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    • 2003
  • It has been researched the relationship between deposition velocity and factors which could affect the deposition phenomena and deposition velocity also has been estimated fer several land-use types. The typical deposition velocities are complex functions of surface types, atmospheric stabilities, friction velocities, air pollutants and so on. The canopy resistance is major contribution to the model's total resistance for O₃. Canopy wetness is also an important factor to calculate deposition velocity. We considered the canopy wetness as canopy water content(CWC) in our Model. But, it is not easy to observe CWC over each land-use types. In this study, we use CWC observed by EMEFS(CANADA Environment Service, 1988) to examine the influence of CWC in estimation of 03 dry deposition velocity(V/sub d/) in summertime. The value of O₃ V/sub d/ range 0.2 ∼ 0.7 cm s/sup -1/ on dry surface and 0.01 ∼ 0.35 cm s/sup -1/ on wet surface in daytime.

Characteristics of Bi-superconducting Thin Films Prepared by Co- and Layer-by-Layer Deposition

  • Yang, Sung-Ho;Park, Yong-Pil
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 제2회 학술대회 논문집 일렉트렛트 및 응용기술전문연구회
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    • pp.40-44
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    • 2000
  • $Bi_2Sr_2Ca_nCu_{n+1}O_y$($n{\geq}0$; BSCCO)thin film is fabricated via two different processes using an ion beam sputtering method i.e. co-deposition and layer-by-layer deposition. A single phase of Bi2212 can be fabricated via the co-deposition process. While it cannot be obtained by the layer-by-layer process. Ultra-low growth rate in our ion beam sputtering system brings out the difference in Bi element adsorption between the two processes and results in only 30% adsorption against total incident Bi amount by layer-by-layer deposition, in contrast to enough Bi adsorption by co-deposition.

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가을철 대기환경 중 수용성 이온성분의 침적특성 (Deposition Characteristics of Water-soluble Inorganic Ions in the Iksan Ambient Air during Fall, 2004)

  • 강공언;김남송;전선복
    • 한국환경보건학회지
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    • 제32권4호
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    • pp.359-372
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    • 2006
  • In order to investigate the daily deposition characteristics of water-soluble inorganic components in airborne deposit on the Iksan, deposition samples were collected using a deposition gauge from October 16 to November 1, 2004. Deposition samples were collected using two different sampling gauges, a dry gauge and a wet gauge, respectively. To get wet the bottom of wet gauge during the sampling period, the volume of $30{\sim}50ml$ distilled ionized water was added in a wet gauge before the beginning of each deposition sampling. Deposition samples were collected twice a day and analyzed for inorganic water-soluble anions ($Cl^-,\;{NO_3}^-,\;{SO_4}^{2-}$) and cations (${NH_4}^+,\;Na^+,\;K^+,\;Mg^{2+},\;Ca^{2+}$) using ion chromatography. Qualify control and quality assurance of analytical data were checked by the data obtained from reinjection of standard solution, Dionex cross check standard solutions, and random several deposition samples, and measured data was estimated to be reliable. Considering the deposition sample volume, the sampling time, the surface area of sampling container, and the ion concentration measured, the daily deposition amounts for measured ions were calculated in $mg/m^2$. The total daily deposition amounts of all measured ions for dry and wet gauge were $7.5{\pm}2.8$ and $17.7{\pm}4.2mg/m^2$, respectively. A significant increase in deposition amount during rainfall days was observed for both wet gauge and dry gauge, having no difference of deposition amount between in wet gauge and in dry gauge. The mean deposition of all ions measured in this study were higher in wet gauge than in dry gauge because of the surface difference of the sampling container, especially for ${NH_4}^+\;and\;{SO_4}^{2-}$. The mean deposition amounts of ${NH_4}^+\;and\;{SO_4}^{2-}$ in wet gauge were found to be about 10 times and 3 times higher than those in dry gauge, while the rest of the chemical species were equal or a little higher in wet gauge than in dry gauge. Dominant species in dry gauge were ${NO_3}^-\;and\;Ca^{2+}$, accounting for 21% and 28% of the total ion deposition, whereas those in wet gauge were ${SO_4}^{2-}\;and\;{NH_4}^+$, accounting for 19% and 41% of the total ion deposition, respectively.

익산지역 대기에어로졸 중 수용성 이온성분의 계절별 침적 특성 (Seasonal Deposition Characteristics of Water-soluble Ion Species in Ambient Aerosol in Iksan City)

  • 강공언
    • 한국환경보건학회지
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    • 제39권1호
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    • pp.56-70
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    • 2013
  • Objectives: This paper aims to investigate the seasonal deposition characteristics of water-soluble ion species by comparing the deposition amount of two samples taken according to different sampling methods of deposition for ambient aerosol such as gases and particulate matters. Methods: Deposition samples were collected using two deposition gauges in the downtown area of Iksan City over approximately two weeks of each season in 2004. The type of deposition gauges consisted of two different sampling methods known as dry gauge and a wet gauge. The dry gauge was empty and used a dry PE bottle with an inlet diameter of 9.6 cm. Before the beginning of each deposition sampling, a volume of 30-50 ml distilled ionized water was added to the wet gauge to wet the bottom during the sampling period. Deposition samples were measured twice per day and analyzed for inorganic water-soluble ion species using ion chromatography. Results: The daily deposition amounts of all measured ions in the dry gauge and the wet gauge showed a significant increase when precipitation occurred, having no difference of deposition amount between in the wet gauge and in the dry gauge. By excluding two samples from rainy days during the sampling period, the mean daily deposition of all ions in dry gauge and wet gauge were $6.58mg/m^2/day$ and $18.16mg/m^2/day$, respectively. The mean deposition amounts of each ion species were higher in the wet gauge than in the dry gauge because of the surface difference of the sampling gauge, especially for $NH_4{^+}$ and ${SO_4}^{2-}$. The mean deposition amounts of $NH_4{^+}$ and ${SO_4}^{2-}$ in the wet gauge were found to be about 15.4 times and 5.2 times higher than that in dry gauge, with a pronounced difference between spring and summer, while the remaining ion species were 1.1-2.0 times higher in the wet gauge than in the dry gauge. Dominant species in the dry gauge were $Ca^{2+}$ and $NO_3{^-}$, accounting for 36.4% and 18.1% of the total ion deposition, whereas those in the wet gauge were $NH_4{^+}$ and ${SO_4}^{2-}$, accounting for 32.5% and 25.0% of the total ion deposition, respectively. Conclusion: The seasonal differences in deposition amounts of water-soluble ion species in ambient aerosol depending on the two types of different sampling methods were identified. This suggests that the removal of ambient aerosol is strongly influenced by the weather conditions of each season as well as the condition of earth's surface, such as dry ground and water.

사석방파제 toe부에서의 세굴특성에 관한 연구 (Scouring Characteristics at the Toe of the Rubble Mound Breakwater)

  • 윤한삼;남인식;류청로
    • 한국해양공학회지
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    • 제16권4호
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    • pp.7-12
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    • 2002
  • This study is aimed to find the scouring mechanism at the toe of rubble mound structures. To investigate the characteristics of scouring in front of the structure, experiments were performed with regular waves in a 2-D flume. The results of this study are as follows. 1) It can be said the characteristics of incident wave causes rolling and sliding of armour block. The difference of wave pressure on the slope, internal flow as well as settlement of armour block due to the weight cause scouring. 2) It is observed that scouring depth at the toe increased when wave height or period increased. The location of ultimate scouring and deposition depth moved seaward when wave period increased. 3) The failure of rubble mound structure was caused by waves or scouring. Failure by erosion increased with high waves and long waves. 4) Using surf-similarity parameter including characteristics of incident waves and structure, scouring and deposition pattern were found and their limit was formulated.

TiN피막의 경도 및 구조적 특성에 미치는 화학증착 조건의 영향 (Effects of Chemical Vapor Deposition Parameters on The Hardness and the Structural Characteristics of TiN Film)

  • 신종훈;이성래;백영현
    • 한국표면공학회지
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    • 제20권3호
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    • pp.106-117
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    • 1987
  • The microhardness and the structural characteristics of the chemically vapor deposited TiN film on the 430 stainless steel substrate have been investigated with various deposition parameters such as the deposition time, the total flow rate, the flow rate ratio $(H_2/N_2)$, and the deposition temperature. The most important factor to affect the microhardness of the TiN film in this study was the denseness of the structure in connection with the degree of the lattice strain. The relationship between the lattice parameter changes and the grain size variation under all deposition conditions generally followed the grain boundary relaxation model. The (111) preferred orientation prevailed in the early stage of the deposition conditions, however, the (200) preferred orientation was developed in the later stage. The surface morphology at optimum conditions displayed a dense diamond shaped structure and the microhardness of the films was high (1700-2400Hv) regardless of the type of the substrates used.

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