• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.434-437
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• 2005

Chemical Mechanical Polishing (CMP) has become an essential step in the overall semiconductor wafer fabrication technology. In general, CMP is a surface planarization method in which a silicon wafer is rotated against a polishing pad in the presence of slurry under pressure. The polishing pad, generally a polyurethane-based material, consists of polymeric foam cell walls, which aid in removal of the reaction products at the wafer interface. It has been found that the material removal rate of any polishing pad decreases due to the so-called 'pad glazing' after several wafer lots have been processed. Therefore, the pad restoration and conditioning has become essential in CMP processes to keep the urethane polishing pad at the proper friction coefficient and to allow effective slurry transport to the wafer surface. Diamond pad conditioner employs a single layer of brazed bonded diamond crystals. Due to the corrosive nature of the polishing slurry required in low pH metal CMP such as copper, it is essential to minimize the possibility of chemical interaction between very low pH slurry (pH <2) and the bond alloy. In this paper, we report an exceptional protective coated conditioner for in-situ pad conditioning in low pH Cu CMP process. The protective Cr-coated conditioner has been tested in slurry with pH levels as low as 1.5 without bond degradation.

• 한국전자파학회논문지
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• 제21권1호
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• pp.76-82
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• 2010

본 논문에서는 이중 선택적 채널 OFDM 시스템을 위한 블록 선형 MMSE(Minimum Mean Square Error) 등화 방식의 성능을 컴퓨터 모의실험을 통하여 분석한다. 블록 선형 MMSE 등화 방식의 BER(Bit Error Rate) 성능은 SNR(Signal-to-Noise Ratio)이 증가함에 따라 BER이 처음에는 감소하다가 SNR이 일정 값을 넘어서면 BER이 오히려 증가하는 다소 특이한 현상을 나타낸다. 본 논문에서는 블록 선형 MMSE 등화 과정에 포함된 선형연립방정식 계수 행렬의 상태수(condition number) 분석을 통하여 이러한 블록 선형 MMSE 등화 방식의 BER 특성을 규명하고 높은 SNR 값에서의 BER 성능 저하를 개선하는 새로운 방안을 제시한다.

• 디지털산업정보학회논문지
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• 제8권4호
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• pp.115-120
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• 2012

In multi-user multi-input multi-output (MU-MIMO) system, zero forcing beamforming (ZFB) is regarded as a realistic solution for transmitting scheme due to its low complexity and simple structure. However, ZFB shows a significant performance degradation when channel matrix has large condition number. In this case, the largest singular value of the channel inversion matrix has a dominant effect on transmit power. In this paper, we propose a perturbation method for reducing an effect of the dominant singular value. In the proposed algorithm, channel inverse matrix is first decomposed by SVD for the transmit signal to be expressed as a combination of singular vectors. Then, the transmit signal is perturbed to reduce the coefficient of the singular vector corresponding to the largest singular value. When a number of transmit antennas is 4, the simulation results of this paper shows that the proposed method shows 8dB performance enhancement at 10-3 uncoded bit error rate (BER) compared with conventional ZFB. Also, the simulation results show that the proposed method provides a comparable performance to Tomlinson-Harashima Precoding (THP) with much lower complexity.

• 한국분말재료학회지
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• 제17권2호
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• pp.136-141
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• 2010

Bismuth-telluride based $(Bi_{0.2}Sb_{0.8})_2Te_3$ thermoelectric powders were fabricated by two-step planetary milling process which produces bimodal size distribution ranging $400\;nm\;{\sim}\;2\;{\mu}m$. The powders were reduced in hydrogen atmosphere to minimize oxygen contents which cause degradation of thermoelectric performance by decreasing electrical conductivity. Oxygen contents were decreased from 0.48% to 0.25% by the reduction process. In this study, both the as-synthesized and the reduced powders were consolidated by the spark plasma sintering process at $350^{\circ}C$ for 10 min at the heating rate of $100^{\circ}C/min$ and then their thermoelectric properties were investigated. The sintered samples using the reduced p-type thermoelectric powders show 15% lower specific electrical resistivity ($0.8\;m{\Omega}{\cdot}cm$) than those of the as-synthesized powders while Seebeck coefficient and thermal conductivity do not change a lot. The results confirmed that ZT value of thermoelectric performance at room temperature was improved by 15% due to high electric conductivity caused by the controlled oxygen contents present at bismuth telluride materials.

• 상하수도학회지
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• 제23권6호
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• pp.743-752
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• 2009

One of the major problems associated with operation of domestic sewer lines involves hydraulic problems such as insufficient conveyance capacity, exceeding maximum velocity, and deficiency of minimum velocity. It has also been pointed out that influent concentration lower than design concentration of pollutants, which is mainly caused by unidentified inflow and infiltration, degrades the operational efficiency of many sewage treatment plants (STPs). A computer-added analysis method supporting a coupled simulation of sewage quality and quantity is essentially required to evaluate the status of existing STPs and to improve their efficiency by a proper sewer rehabilitation work. In this study, dynamic water quality simulations were conducted using MOUSE TRAP to investigate the principal parameters that governs the changes of BOD, ${NH_4}^+$, and ${PO_4}^{3-}$3- concentrations within the sewer networks based on data acquired through on-site and laboratory measurements. The BOD, ${NH_4}^+$ and ${PO_4}^{3-}$3- concentrations estimated by MOUSE TRAP was lower than theoretical pollution loads because of sedimentation and decomposition in the sewer. The results revealed that sedimentation is a most important factor than other biological reactions in decreasing pollutant load in the sewers of C-city. The sensitivity analysis of parameters pertaining to water quality changes indicated that the effect of the BOD decay rate, the initial DO concentration, the half-saturation coefficient of dissolved BOD, and the initial sediment depth is marginal. However, the influence of settling rate and temperature is relatively high because sedimentation and precipitation, rather than biological degradation, are dominant processes that affect water quality in the study sewer systems.

• Journal of Microbiology and Biotechnology
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• 제30권4호
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• pp.533-539
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• 2020

A quantitative real-time polymerase chain reaction (QPCR) was applied to estimate biokinetic coefficients of Clostridium cadaveris and Clostridium sporogenes, which utilize protein as carbon source. Experimental data on changes in peptone concentration and 16S rRNA gene copy numbers of C. cadaveris and C. sporogenes were fitted to model. The fourth-order Runge-Kutta approximation with non-linear least squares analysis was employed to solve the ordinary differential equations to estimate biokinetic coefficients. The maximum specific growth rate (μ_max), half-saturation concentration (K_s), growth yield (Y), and decay coefficient (K_d) of C. cadaveris and C.sporogenes were 0.73 ± 0.05 and 1.35 ± 0.32 h^-1, 6.07 ± 1.52 and 5.67 ± 1.53 g/l, 2.25 ± 0.75 × 10¹⁰ and 7.92 ± 3.71 × 10⁹ copies/g, 0.002 ± 0.003 and 0.002 ± 0.001 h^-1, respectively. The theoretical specific growth rate of C. sporogenes always exceeded that of C. cadaveris at peptone concentration higher than 3.62 g/l. When the influent peptone concentration was 5.0 g/l, the concentration of C.cadaveris gradually decreased to the steady value of 2.9 × 10¹⁰ copies/ml at 4 h Hydraulic retention time (HRT), which indicates a 67.1% reduction of the initial population, but the wash out occurred at HRTs of 1.9 and 3.2 h. The 16S rRNA gene copy numbers of C. sporogenes gradually decreased to steady values ranging from 1.1 × 10¹⁰ to 2.9 × 10¹⁰ copies/ml. C. sporogenes species was predicted to wash out at an HRT of 1.6 h.

• Nuclear Engineering and Technology
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• 제42권5호
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• pp.568-575
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• 2010

Flow Accelerated Corrosion is an active degradation mechanism of CANDU feeder. The tight bend downstream to Gray loc weld connection, close to reactor face, suffers significant wall thinning by FAC. Extensive in-service inspection of feeder wall thinning is very difficult because of the intense radiation field, complex geometry, and space restrictions. Development of a knowledge-based inspection program is important in order to guarantee that adequate wall thickness is maintained throughout the whole life of feeder. Research results and plant experiences are reviewed, and the plant inspection databases from Wolsong Units One to Four are analyzed in order to support developing such a knowledge-based inspection program. The initial thickness before wall thinning is highly non-uniform because of bending during manufacturing stage, and the thinning rate is non-uniform because of the mass transfer coefficient distributed non-uniformly depending on local hydraulics. It is obvious that the knowledge-based feeder inspection program should focus on both fastest thinning locations and thinnest locations. The feeder wall thinning rate is found to be correlated proportionately with QV of each channel. A statistical model is proposed to assess the remaining life of each feeder using the QV correlation and the measured thicknesses. W-1 feeder suffered significant thinning so that the shortest remaining life barely exceeded one year at the end of operation before replacement. W-2 feeder showed far slower thinning than W-1 feeder despite the faster coolant flow. It is believed that slower thinning in W-2 is because of higher chromium content in the carbon steel feeder material. The average Cr content of W-2 feeder is 0.051%, while that value is 0.02% for W-1 feeder. It is to be noted that FAC is reduced substantially even though the Cr content of W-2 feeder is still very low.

• 한국환경농학회지
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• 제20권3호
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• pp.162-168
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• 2001

Chloronicotinyl계 살충제인 acetamiprid의 토양중 분해, 흡${\cdot}$탈착양상 및 용탈정도를 토양의 유기물함량과 관련시켜 규명하였다. Acetamiprid의 토양 중 잔류양상은 포장실험에서 권장량 (0.08 kg a.i./10 a) 처리구의 경우 분해반감기가 1.7일, 배량처리구 (0.16 kg a.i./10 a)에서는 3.1일로 나타났으며 실험실 조건에서는 15.5 일이었다. Acetamiprid의 토양중 흡착량은 유기물함량이 높은 토양에서 높았으며 특히 humic acid보다는 fulvic acid를 처리한 토양에서 더 높았다. 탈착실험에서 토양내 유기물을 첨가한 실험구의 총 탈착률이 $48{\sim}61%$로 나타나 유기물 제거토양의 총 탈착률 81%보다 매우 낮게 나타났다. 특히 fulvic acid 첨가구의 총 탈착률은 44%로 나타나 humic acid 첨가구의 총 탈착률 62%보다 낮게 나타났다. 포장실험에서 얻은 분해반감기 실험결과와 흡착실험에서 얻은 결과를 GUS (Groundwater Ubiquity Score)에 대입한 결과 acetamiprid는 토양환경 중에서 non-leacher로 분류될 수 있었으며, 이러한 이론적 결과는 실제 토양 중 acetamiprid 용탈 실험의 결과와 일치하였다. Acetamiprid의 용탈실험 결과 soil column의 표층으로부터 15 cm까지 잔류량의 82%가 존재하였으며 그 이하 30 cm 까지에서도 아주 미량이 검출되었으나 30 cm 이상과 용출수에서는 검출되지 않았다.

• 한국음향학회지
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• 제16권4호
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• pp.57-63
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• 1997

본 논문에서는 다양한 전화선 채널에서 수집된 한국통신(KT)의 데이터베이스를 이용하여 인식 시스템의 성능을 향상시키기 위한 효율적인 특징벡터 및 전처리방법을 연구하였다. 먼저 잡음 및 주변 환경 변화에 강인한 갓으로 알려져 있는 특징벡터들을 이용한 인식 성능을 비교하고, 가중 켑스트랄 거리측정 방법을 이용하여 인식시스템의 성능 향상을 검증하였다. 실험 결과, KT의 인식 시스템에서 이용하는 LPC 켑스트럼의 경우에 비하여 PLP(Perceptual Linear Prediction)과 MFCC)Mel Frequency Cepstral Coefficient)등에 대하여 인식률이 향상되었다. 켑스트럼간의 거리측정에 있어서는 RPS(Root Power Sums)와 BPL(Band Pass Lifter)과 같은 가중 켑스트랄 거리측정 함수들이 인식성능 향상에 도움을 주었다. 스펙트럼 차감법(Spectral Subtraction)의 적용은 왜곡에 의한 효과가 커서 인식률이 저하되었지만, RASTA(RelAtive SpecTrAl) 처리방법, CMS(Cepstral Mean Subtraction), SBR(Signal Bias Removal)의 적용시에는 인식 성능 향상을 보였다. 특히, CMS 방법은 간편하면서도 높은 인식 성능 향상을 보였다. 마지막으로, CMS의 실시간 구현을 위한 방법들의 인식 성능을 비교하고, 인식 성능 저하를 막기 위한 개선책을 제시하였다.

• KIEAE Journal
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• 제16권4호
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• pp.71-77
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• 2016

Purpose : The energy saving in a residential building (apartment) sector is known as one of the effective solution of energy reduction. In South Korea, the government has recently reinforced regulations associated with the energy performance of buildings. However, there is a lack of research on the methods for the energy performance diagnosis that is used to analyze the wall thermal performance of the existing apartments. Because a reliable diagnosis is necessary to save the building energy, this study analyzed wall thermal performance of an existing apartment in Seoul. Method : This paper applied two methods for analysis of the thermal insulation performance; HFM(Heat Flow Meter) method and ASTR(Air-Surface Temperature Ratio) method. The HFM method is suggested by ISO9869-1 code to measure the thermal performance. The ASTR method is proposed by this study for the simplified In-situ measurement and it uses three temperature data (interior wall surface, interior and exterior air) and the overall heat transfer coefficient. This study conducted the experiment of an existing apartment in Seoul using these methods and analyzed the results. Furthermore, the energy simulation tool of the building was used to suggest retrofit of the building based on the results of measurements. Result : The error rate of HFM method and ASTR method was analyzed in about 17 to 20%. As the results of comparison between the initial design values of the wall and the measured values, the 26% degradation of insulation thermal performance was measured. Lastly, the energy simulation tool of the building shows 10.8% energy savings in accordance with the construction of suggested retrofit.