• JSTS:Journal of Semiconductor Technology and Science
• /
• v.1 no.2
• /
• pp.132-139
• /
• 2001

We considered the uniformity of fabricated micromirror arrays by characterizing the fabrication process and calculating the appropriate driving voltages of micromirrors used as virtual photomask in maskless photolithography. The uniformity of the micromirror array in terms of driving voltage and optical characteristics is adversely affected by factors, such as the air gap between the bottom electrode and the mirror plate, the spring shape and the deformation of the mirror plate or torsion spring. The thickness deviation of the photoresist sacrificial layer, the misalignment between mirror plate and bottom electrode, the aluminum deposition condition used to produce the spring and the mirror plate, and initial mirror deflection were identified as key factors. Their importance lies in the fact that they are related to air gap deviations under the mirror plate, asymmetric driving voltages in left and right mirror directions, and the deformation of the Al sring or mirror plate after removal of the sacrificial layer. The plasma ashing conditions used for removing the sacrificial layer also contributed to the deformation of the mirror plate and spring. Driving voltages were calculated for the pixel operation of the micromirror array, and the non-uniform characteristics of fabricated micromirrors were taken into consideration to improve driving performance reliability.

• Current Optics and Photonics
• /
• v.1 no.4
• /
• pp.364-371
• /
• 2017

Compared to one made of glass, an aluminum mirror features light weight, compact design, low cost, and quick manufacturing. Reflective mirrors and supporting structures can be made from the same material, to improve the athermal performance of the system. With the rapid development of ultraprecise machining technologies, the field of applications for aluminum mirrors has been developed rapidly. However, most of them are rotationally symmetric in shape, and are used for infrared applications. In this paper, the design and manufacture of an off-axis aluminum mirror used for a three-mirror-anastigmat (TMA) optical system at visible wavelengths is presented. An optimized, lightweight design provides a weight reduction of more than 40%, while the surface deformation caused by earth's gravity can meet the required tolerance. The two pieces of an off-axis mirror can be diamond-turned simultaneously in one setup. The centrifugal deformation of the off-axis mirror during single-point diamond turning (SPDT) is simulated through the finite-element method (FEM). The techniques used to overcome centrifugal deformation are thoroughly described in this paper, and the surface error is reduced to about 1% of the original value. After post-polishing, the form error is $1/30{\lambda}$ RMS and the surface roughness is better than 5 nm Ra, which can meet the requirements for visible-light imaging.

• Bulletin of the Korean Space Science Society
• /
• 2010.04a
• /
• pp.25.3-25.3
• /
• 2010

Our previous study used a bar-type reference mirror to measure the relative distance to the target surface. The target measurement accuracy was required to $1{\mu}m$ PV for aspheric optical surface up to 1m in diameter. Earlier system suffers from the reference surface deformation when the measuring part moves. In order to reduce the deformation, measuring part and the reference part separated from each order in the new design. This system utilizes a kinematic support assembly using invar flexure to minimize the reference surface deformation under gravity and vibration. The surface deformation requirement of reference mirror is defined as of $0.2{\mu}m$ under gravity and 40Hz vibration. The finite element results, shows reference mirror deformation of $0.164{\mu}m$. The first resonance mode was computed to analysis 46.05Hz for reference part and 43.44Hz for measuring part. Thesis satisfies the frequency requirement.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.06a
• /
• pp.448-451
• /
• 2005

An aspheric mirror, which requires less than $\lambda/2\;(\lambda=632.8nm)$ of form error for the $\phi$ 200mm reference curved surface, has been manufactured with an ultra-precision turning machine. We have known through several tests that the deformation patterns of the reflecting surface is related with bolting positions. In this paper the effect of main factors on deformation of a reflector is studied with a FE code. The considered factors are angular velocity, natural frequencies for a mirror, temperature increment during machining. The obtained test results are similar to the deformation shape due to the assumed temperature increment.

• Journal of Aerospace System Engineering
• /
• v.17 no.4
• /
• pp.18-27
• /
• 2023

In this paper, the structural-thermal-optical performance analysis of the mirror was performed by setting the laser heat source as the boundary condition of the thermal analysis. For the laser heat source model, the Beer-Lambert model considering semi-transparent optical material based on Gaussian beam was selected as the boundary condition, and the mechanical part was not considered, to analyze the performance of only the mirror. As a result of the thermal analysis, thermal stress and thermal deformation data due to temperature change on the surface of the mirror were obtained. The displacement data of the surface due to thermal deformation was fitted to a Zernike polynomial to calculate the optical performance, through which the performance of the mirror when a high-energy laser was incident on the mirror could be predicted.

• Journal of the Korean Mathematical Society
• /
• v.43 no.5
• /
• pp.951-965
• /
• 2006

In this paper, we study a topological mirror symmetry on noncommutative complex tori. We show that deformation quantization of an elliptic curve is mirror symmetric to an irrational rotation algebra. From this, we conclude that a mirror reflection of a noncommutative complex torus is an elliptic curve equipped with a Kronecker foliation.

• Current Optics and Photonics
• /
• v.1 no.4
• /
• pp.344-350
• /
• 2017

We present a new design approach and an example design for an image-space telecentric two-mirror system that has a fast f-number and a wide-field line image. The initial design of the telecentric mirror system is a conventional axially symmetric system, consisting of a flat primary mirror with fourth-order aspheric deformation and an oblate ellipsoidal secondary mirror to correct spherical aberration, coma, and field curvature. Even though in the optimized design the primary mirror is tilted, to avoid ray obstruction by the secondary mirror, the image-space telecentric two-mirror system shows quite good imaging performance, for a line imager.

• Korean Journal of Optics and Photonics
• /
• v.14 no.4
• /
• pp.443-448
• /
• 2003

A study on optimum design of the lightweight mirror of a satellite camera is presented. An optical surface deformation of the lightweight mirror, which is a principal component of the camera system, is an important factor affecting the optical performance of the whole camera system. In this study, optimum design of the lightweight mirror is presented. Total weight of the mirror to reduce the optical surface deformation and the launching cost is used as an objective function. Peak-to-valley value and natural frequency of the mirror are given as constraints to the optimization problem. The sensitivities of the objective function and constraint are calculated by a finite difference method. The optimization procedure is carried out by the commercial optimizer, DOT. As a verification of the optimum design of the mirror, two design examples are treated. In the real application example, the lightweight mirror with 600mm effective diameter is treated. The optimized results with various design variables, which are obtained by considering thickness limitations, are analyzed.

• Korean Journal of Optics and Photonics
• /
• v.24 no.3
• /
• pp.111-119
• /
• 2013

A large aspheric mirror is a key component for large astronomical telescopes and high resolution satellite cameras. Since it is large and has an aspheric form, it is much more difficult to fabricate it compared to the similar size of spherical mirror. Especially, the opto-mechanical design and analysis is critical to reduce the deformation of mirror surface due to the external forces such as gravity or temperature change, as the mirror size is larger and lightweighting ratio is increased. The design requirements for the mirror are different depending on the particular ground and space applications because the environmental conditions are changed. In this paper, we explain the opto-mechanical design and analysis for ground and space applications that are among the most difficult to achieve among several technologies related to development of the large aspheric mirror.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.26 no.6
• /
• pp.1194-1202
• /
• 2002

A study on the topology optimization of a multi-spectral camera for space-use is presented. The optimization is carried out under self-weight and polishing pressure loading. A multi-spectral camera for space-use experiences degradation of optical image in the space, which can not be detected on the optical test bench on the earth. An optical surface deformation of a primary mirror, which is a principal component of the camera system, is an important factor affecting the optical performance of the whole camera system. In this study, topology optimization of the primary mirror of the camera is presented. As an objective function, a measure of Strehl ratio is used. Total mass of the primary mirror is given as a constraint to the optimization problem. The sensitivities of the objective function and constraint are calculated by direct differentiation method. Optimization procedure is carried out by an optimality criteria method. For the light-weight primary mirror design, a three dimensional model is treated. As a preliminary example, topology optimization considering a self-weight loading is treated. In the second example, the polishing pressure is also included as a loading in the topology optimization of the mirror. Results of the optimized design topology for the mirror with various mass constraints are presented.