• 제목/요약/키워드: Deformation Potential

검색결과 433건 처리시간 0.029초

나노임프린트 리소그래피에서의 폴리머 레지스트의 변형에 관한 분자 동역학 시뮬레이션 (Molecular Dynamics Simulation of Deformation of Polymer Resist in Nanoimpirnt Lithography)

  • 강지훈;김광섭;김경웅
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2004년도 추계학술대회
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    • pp.410-415
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    • 2004
  • Molecular dynamics simulations of nanoimprint lithography in which a stamp with patterns is pressed onto amorphous poly-(methylmethacrylate) (PMMA) surface are performed to study the deformation of polymer. Force fields including bond, angle, torsion, inversion, van der Waals and electrostatic potential are used to describe the intermolecular and intramolecular force of PMMA molecules and stamp. Periodic boundary condition is used in horizontal direction and $Nos\acute{e}$-Hoover thermostat is used to control the system temperature. As the simulation results, the adhesion forces between stamp and polymer are calculated and the mechanism of deformation are investigated. The effects of the adhesion force and friction force on the polymer deformation are also studied to analyze the pattern transfer in nanoimprint lithography. The mechanism of polymer deformation is investigated by means of inspecting the indentation process, molecular configurational properties, and molecular configurational energies.

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나노임프린트 리소그래피에서의 폴리머 레지스트의 변형에 관한 분자 동역학 시뮬레이션 (Molecular Dynamics Simulation of Deformation of Polymer Resist in Nanoimpirnt Lithography)

  • 김광섭;김경웅;강지훈
    • 대한기계학회논문집A
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    • 제29권6호
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    • pp.852-859
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    • 2005
  • Molecular dynamics simulations of nanoimprint lithography in which a stamp with patterns is pressed onto amorphous poly-(methylmethacrylate) (PMMA) surface are performed to study the deformation of polymer. Force fields including bond, angle, torsion, inversion, van der Waals and electrostatic potential are used to describe the intermolecular and intramolecular force of PMMA molecules and stamp. Periodic boundary condition is used in horizontal direction and Nose-Hoover thermostat is used to control the system temperature. As the simulation results, the adhesion forces between stamp and polymer are calculated and the mechanism of deformation are investigated. The effects of the adhesion and friction forces on the polymer deformation are also studied to analyze the pattern transfer in nanoimprint lithography. The mechanism of polymer deformation is investigated by means of inspecting the indentation process, molecular configurational properties, and molecular configurational energies.

균열을 가진 압전재료에 대한 면외 변형에서의 가중함수이론 (Weight Function Theory for Piezoelectric Materials with Crack in Anti-Plane Deformation)

  • 손인호;안득만
    • 한국해양공학회지
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    • 제24권3호
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    • pp.59-63
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    • 2010
  • In this paper, an electroelastic analysis is performed on a piezoelectric material with an open crack in anti-plane deformation. Bueckner’s weight function theory is extended to piezoelectric materials in anti-plane deformation. The stress intensity factors and electric displacement intensity factor are calculated by the weight function theory.

Application of shear deformation theory for two dimensional electro-elastic analysis of a FGP cylinder

  • Arefi, M.;Rahimi, G.H.
    • Smart Structures and Systems
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    • 제13권1호
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    • pp.1-24
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    • 2014
  • The present study deals with two dimensional electro-elastic analysis of a functionally graded piezoelectric (FGP) cylinder under internal pressure. Energy method and first order shear deformation theory (FSDT) are employed for this purpose. All mechanical and electrical properties except Poisson ratio are considered as a power function along the radial direction. The cylinder is subjected to uniform internal pressure. By supposing two dimensional displacement and electric potential fields along the radial and axial direction, the governing differential equations can be derived in terms of unknown electrical and mechanical functions. Homogeneous solution can be obtained by imposing the appropriate mechanical and electrical boundary conditions. This proposed solution has capability to solve the cylinder structure with arbitrary boundary conditions. The previous solutions have been proposed for the problem with simple boundary conditions (simply supported cylinder) by using the routine functions such as trigonometric functions. The axial distribution of the axial displacement, radial displacement and electric potential of the cylinder can be presented as the important results of this paper for various non homogeneous indexes. This paper evaluates the effect of a local support on the distribution of mechanical and electrical components. This investigation indicates that a support has important influence on the distribution of mechanical and electrical components rather than a cylinder with ignoring the effect of the supports. Obtained results using present method at regions that are adequate far from two ends of the cylinder can be compared with previous results (plane elasticity and one dimensional first order shear deformation theories).

MEMS 부품 제조를 위한 나노 리소그래피 공정의 3차원 분자동력학 해석 (Three Dimensional Molecular Dynamics Simulation of Nano-Lithography Process for Fabrication of Nanocomponents in Micro Electro Mechanical Systems (MEMS) Applications)

  • 김영석;이승섭;나경환;손현성;김진
    • 대한기계학회논문집A
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    • 제27권10호
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    • pp.1754-1761
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    • 2003
  • The atomic force microscopy (AFM) based lithographic technique has been used directly to machine material surface and fabricate nano components in MEMS (micro electro mechanical system). In this paper, three-dimensional molecular dynamics (MD) simulations have been conducted to evaluate the characteristic of deformation process at atomistic scale for nano-lithography process. Effects of specific combinations of crystal orientations and cutting directions on the nature of atomistic deformation were investigated. The interatomic force between diamond tool and workpiece of copper material was assumed to be derived from the Morse potential function. The variation of tool geometry and cutting depth was also evaluated and the effect on machinability was investigated. The result of the simulation shows that crystal plane and cutting direction significantly influenced the variation of the cutting forces and the nature of deformation ahead of the tool as well as the surface deformation of the machined surface.

비탄성 변형 이론을 바탕으로 한 Mg-Al 합금의 슬립기구 천이 현상 해석 (Effect of slip system transition on the deformation behavior of Mg-Al alloy: internal variable based approach)

  • 이현석;방원규;장영원
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2004년도 춘계학술대회 논문집
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    • pp.186-189
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    • 2004
  • Although magnesium has high potential for structural material due to the lightweight and high specific strength, the structural application has been limited by the low ductility at room temperature. The reason of the poor ductility is few activated slip systems of magnesium (HCP structure) during deformation. As temperature increases, however, additional non-basal slip systems are incorporated to exhibit higher ductility comparable to aluminum. In the present study, a series of tensile tests of Mg-Al alloy has been carried out to study deformation behavior with temperature variation. Analysis of load relaxation test results based on internal variable approach gave information about relationship between the micromechanical character and corresponding deformation behavior of magnesium. Especially, the material parameter, p representing dislocation permeability through barriers was altered from 0.1 to 0.15 as the non-basal slip systems were activated at high temperature.

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카테터의 거동을 시뮬레이션 하기 위한 고정된 길이를 유지하는 실 형상의 변형체 모델 (An Inextensible Wire-shaped Deformation Model for Catheter Simulation)

  • 한혜현;이두용
    • 제어로봇시스템학회논문지
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    • 제22권8호
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    • pp.610-614
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    • 2016
  • This paper proposes an inextensible wire-shaped deformation model to simulate catheter behavior. The wire-shaped model consists of serially-connected mass points and massless rigid links. Torsional springs and dampers are employed to accommodate bending. Deformation is computed by updating the rotation angles from the global coordinates while maintaining the fixed length condition. Equations of motion is derived from double pendulum motion. Spring constant is computed using strain energy and potential energy stored in a torsional spring to reflect material property. Simulation is conducted to show deformation of wire model while maintaining inextensibility condition and including material properties. The proposed method guarantees inextensible constraint in the catheter simulation.

비탄성 변형 이론을 바탕으로 한 Mg-Al 합금의 슬립기구 천이 현상 해석 (Effect of Slip System Transition on the Deformation Behavior of Mg-Al Alloy: Internal Variable Based Approach)

  • 이현석;장영원;방원규
    • 소성∙가공
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    • 제13권6호
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    • pp.535-539
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    • 2004
  • Although magnesium has high potential for structural material due to the lightweight and high specific strength, the structural application has been limited by the low ductility at room temperature. The reason of the poor ductility is few activated slip systems of magnesium (HCP structure) during deformation. As temperature increases, however, additional non-basal slip systems are incorporated to exhibit higher ductility comparable to aluminum. In the present study, a series of tensile tests of Mg-Al alloy has been carried out to study deformation behavior with temperature variation. Analysis of load relaxation test results based on internal variable approach gave information about relationship between the micromechanical character and corresponding deformation behavior of magnesium. Especially, the material parameter, p representing dislocation permeability through barriers was altered from 0.1 to 0.15 as the non-basal slip systems were activated at high temperature.

Bending response of functionally graded piezoelectric plates using a two-variable shear deformation theory

  • Zenkour, Ashraf M.;Hafed, Zahra S.
    • Advances in aircraft and spacecraft science
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    • 제7권2호
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    • pp.115-134
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    • 2020
  • This paper proposes a bending analysis for a functionally graded piezoelectric (FGP) plate through utilizing a two-variable shear deformation plate theory under simply-supported edge conditions. The number of unknown functions used in this theory is only four. The electric potential distribution is assumed to be a combination of a cosine function along the cartesian coordinate. Applying the analytical solutions of FGP plate by using Navier's approach and the principle of virtual work, the equilibrium equations are derived. The paper also discusses thoroughly the impact of applied electric voltage, plate's aspect ratio, thickness ratio and inhomogeneity parameter. Results are compared with the analytical solution obtained by classical plate theory, first-order-shear deformation theory, higher-order shear deformation plate theories and quasi-three-dimensional sinusoidal shear deformation plate theory.

초기계측치를 이용한 경암 지반내 터널의 최총변위량 예측 (Estimation of Final Deformation of Hard Rock Tunnel Using Early Measured Deformation)

  • 송승곤;양형식;임성식;정소걸
    • 터널과지하공간
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    • 제12권2호
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    • pp.99-106
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    • 2002
  • 터널의 초기 변형결과를 역해석에 적용하기 위하여 초기 값들과 최종변위의 상관관계를 연구하였다. Panet의 지수함수와 분수함수는 경암 터널의 내공변위 예측에 잘 맞았다. ID 지점의 초기 계측변위는 선형적으로 적합시 킬 수 있으나 계측 전 변형의 추정식으로는 부적합하였다. 초기 계측 결과들과 최종 변형결과는 선형적인 비례관계를 보였으며 이로써 초기 계측결과로부터 추정한 최종변형치를 이용한 역해석이 가능함을 보였다.