• Title/Summary/Keyword: Defects Pattern

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A Micro-defect Detection of Cold Rolled Steel (냉연 강판의 미세 결함 검출 기술)

  • Yun, Jong Pil
    • Journal of Institute of Control, Robotics and Systems
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    • v.22 no.4
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    • pp.247-252
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    • 2016
  • In this paper, we propose a new defect detection technology for micro-defect on the surface of steel products. Due to depth and size of microscopic defect, slop of surface and vibration of strip, the conventional optical method cannot guarantee the detection performance. To solve the above-mentioned problems and increase signal to noise ratio, a novel retro-schlieren method that consists of retro reflector and knife edge is proposed. Moreover dual switching lighting method is also applied to distinguish uneven micro defects and surface noise. In proposed method, defective regions are represented by a black and white pattern. This pattern is detected by a defect detection algorithm with Gabor filter. Experimental results by simulator for sample defects of cold rolled steel show that the proposed method is effective.

Humidity Induced Defect Generation and Its Control during Organic Bottom Anti-reflective Coating in the Photo Lithography Process of Semiconductors

  • Mun, Seong-Yeol;Kang, Seong-Jun;Joung, Yang-Hee
    • Journal of information and communication convergence engineering
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    • v.10 no.3
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    • pp.295-299
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    • 2012
  • Defect generation during organic bottom anti-reflective coating (BARC) in the photo lithography process is closely related to humidity control in the BARC coating unit. Defects are related to the water component due to the humidity and act as a blocking material for the etching process, resulting in an extreme pattern bridging in the subsequent BARC etching process of the poly etch step. In this paper, the lower limit for the humidity that should be stringently controlled for to prevent defect generation during BARC coating is proposed. Various images of defects are inspected using various inspection tools utilizing optical and electron beams. The mechanism for defect generation only in the specific BARC coating step is analyzed and explained. The BARC defect-induced gate pattern bridging mechanism in the lithography process is also well explained in this paper.

3D-ESPI 시스템을 이용하여 결정된 응력집중계수가 피로수명에 미치는 영향에 관한 연구

  • Kim, Seong-Chan
    • Journal of Korea Ship Safrty Technology Authority
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    • v.12
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    • pp.36-43
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    • 2003
  • Fatigue life estimation by the theoretical stress concentration factors are, in general, considerably different from test results. And in calculating stress concentration factor, it is very difficult to consider actual geometry and material property which are the notch shapes, imperfections or defects of materials such as porosities inclusions and casting defects, etc. Therefore, the paper deals with the experimental method to find out the more exact stress concentration factors by measuring the strain distributions on each specimen by 3D-ESPI(Electronic Speckle Pattern Interferometry) System. Then the fatigue lives are compared between theoretical calculations using stress concentration factors determined by 3D-ESPI system and fatigue test results

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Automatic classify of failure patterns in semiconductor fabrication for yield improvement (수율 향상을 위한 반도체 공정에서의 불량 유형 자동 분류)

  • 한영신;최성윤;김상진;황미영;이칠기
    • Proceedings of the Korea Society for Simulation Conference
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    • 2003.11a
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    • pp.147-151
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    • 2003
  • Yield enhancement in semiconductor fabrication is important. Even though DRAM yield loss may be attributed to many problems, the existence of defects on the wafer is one of the main causes. When the defects on the wafer form patterns, it is usually an indication for the identification of equipment problems or process variations. In this paper describes the techniques to automatically classify a failure pattern using a fail bit map.

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Defect Analysis According to the Types and Spatial Type of Block Pavement in Apartment Complex (아파트 단지 내 블록포장의 종류와 공간유형에 따른 하자분석)

  • Park, Geun-Hye;Jung, Sung-Gwan;Jang, Cheol-Kyu
    • Journal of the Korean Society of Environmental Restoration Technology
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    • v.23 no.3
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    • pp.91-104
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    • 2020
  • This study was conducted to analyze the characteristics of defects according to the type of block and spatial type by quantitatively examining defects occurring in block pavement in apartment complex. According to the research results, depending on the type of block, defects have occurred 1,394.3ea/100㎡ in interlocking paver blocks, 464.8ea/100㎡ in clay brick paver blocks, and 235.1ea/100㎡ in shot blasted paver blocks. By space type, the defects were occurred 1,576.0ea/100㎡ on the access road paved by interlocking paver blocks and the defects were found 1,139.6ea/100㎡ in interlocking paver blocks, 235.1ea/100㎡ in shot blasted paver blocks, and 797.1ea/100㎡ in clay brick paver blocks, on the sidewalk. Also the defects are occurred 455.6ea/100㎡ on the resting space and 403.2ea/100㎡ on the gym space paved by clay brick paver blocks. Through the size analysis of the defects in the block paver, in the case 'peeling', the largest volume of 2,539.0㎣ on the sidewalk paved with shot blasted paver blocks, and 'Subsidence' occurred at the widest area of 2,096.0㎠ on the sidewalk where interlocking paver block was constructed. The difference in defect occurrence according to the type of block is considered to be influenced by the block production process, and the space type is considered to be caused the difference in the occurrence of defects according to the cause of construction and the usage pattern of residents. This study conducted a survey on defects in block and analyzed the defect characteristic according to paver material and space type. Base on this, it is judged that it can be used as an efficient basic data for material replacement, improvement, paver planning and construction in the future.

Optical-fiber Electronic Speckle Pattern Interferometry for Quantitative Measurement of Defects on Aluminum Liners in Composite Pressure Vessels

  • Kim, Seong Jong;Kang, Young June;Choi, Nak-Jung
    • Journal of the Optical Society of Korea
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    • v.17 no.1
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    • pp.50-56
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    • 2013
  • Optical-fiber electronic speckle pattern interferometry (ESPI) is a non-contact, non-destructive examination technique with the advantages of rapid measurement, high accuracy, and full-field measurement. The optical-fiber ESPI system used in this study was compact and portable with the advantages of easy set-up and signal acquisition. By suitably configuring the optical-fiber ESPI system, producing an image signal in a charge-coupled device camera, and periodically modulating beam phases, we obtained phase information from the speckle pattern using a four-step phase shifting algorithm. Moreover, we compared the actual defect size with that of interference fringes which appeared on a screen after calculating the pixel value according to the distance between the object and the CCD camera. Conventional methods of measuring defects are time-consuming and resource-intensive because the estimated values are relative. However, our simple method could quantitatively estimate the defect length by carrying out numerical analysis for obtaining values on the X-axis in a line profile. The results showed reliable values for average error rates and a decrease in the error rate with increasing defect length or pressure.

A Study for the Improvement of Torn Oxide Defect in STI(Shallow Trench Isolation)Process (STI(Shallow Trench Isolation) 공정에서 Torn Oxide Defect 해결에 관한 연구)

  • Kim, Sang-Yong;Seo, Yong-Jin;Kim, Tae-Hyung;Lee, Woo-Sun;Chung, Hun-Sang;Kim, Chang-Il;Chang, Eui-Goo
    • Proceedings of the KIEE Conference
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    • 1998.11c
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    • pp.723-725
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    • 1998
  • STI CMP process are substituting gradually for LOCOS(Local Oxidation of Silicon) process to be available below sub-0.5um technology and to get planarized. The other hand, STI CMP process(especially STI CMP with RIE etch back process) has some kinds of defect like Nitride residue, Torn Oxide defect, etc. In this paper, we studied how to reduce Torn Oxide defects after STI CMP with RIE etch back process. Although Torn Oxide defects which occur on Oxide on Trench area is not deep and not sever, Torn oxide defects on Moat area is sometimes very deep and makes the yield loss. We did test on pattern wafers witch go through Trench process, APCVD process, and RIE etch back process by using an REC 472 polisher, IC1000/SUV A4 PAD and KOH base slurry to reduce the number of torn defects and to study what is the root causes of torn oxide defects.

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Analysis on Characteristics of Defects before Inspection for Apartment Use (공동주택 사용검사 전 하자 특성 분석)

  • Lee, Sang-Hyo;Han, Man-Cheon;Kim, Jae-Jun;Lee, Jeong-Seok
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.21 no.5
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    • pp.167-178
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    • 2020
  • The purpose of this paper is to establish a defect classification system for defects before inspection and to derive the pattern and characteristics of defects before inspection by examining about 3,110 defect items for 133 apartment buildings. The study analysis revealed a relatively high rate of defects before inspection that occurred in finishing work. Second, defects occurred such as cracking of external wall, which is a very important defect. However, defects before inspection were relatively rare on the external wall. Finally, defects before inspection occurred during waterproofing in the common area or garage. It is necessary to establish a reasonable basis or countermeasure to resolve differences between stakeholders as various issues may arise in the course of a dispute, as a result of identifying the details of defects within the top 20 of the defectives.

The case study of wear and defects on the wheel tread for Metro (전동차 차륜 답면의 마모 및 결함에 대한 사례연구)

  • Lee Nam-Jin;Kim Jung-Ha;Kim Chul-Gun;Kim Jin-Tae
    • Proceedings of the KSR Conference
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    • 2004.06a
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    • pp.789-797
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    • 2004
  • The wear and defects on the wheel tread are caused by the interface between wheel and rail, the suspension system on bogie, the track condition and etc, which are interacted with complex mechanism. Because of the difficulty of analysis of wheel and rail interaction, the measuring data are necessary for improvement of wheel design and maintenance of train. On this case study, the pattern of wheel wears and defects are presented and lifetime of wheel and the reprofiling period are estimated on a basis of the measured results.

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Analysis of the upsetting type process for spur gear cold forging using 3D-FEM (3차원 유한요소법을 이용한 Upsetting Type Spur Gear 냉간 단조 공정 해석)

  • Chun S.H.;Lee Y.S.;Kwon Y.N.;Lee J.H.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2004.05a
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    • pp.135-138
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    • 2004
  • Since the upsetting type is superior to an extrusion type to get the dimensional accuracy of cold forged spur gear, the upsetting type process far spur gear cold forging has been studied. FE analysis of upsetting type process fur spur gear cold forging was performed to investigate about flow pattern of workpiece and die stress. To analyze the elastic characteristics of die, both rigid and elastic material model were used during loading stage. Under-filled defects were detected In lower portions of spur gear forged by upsetting type in experimental. When the elastic material model for die was used, the under-filled defects could be predicted. On the other hand, if the material model of die was rigid, the defects could not been presented because the die deflection was not considered.

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