• Title/Summary/Keyword: Defect trend

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A Study of the reduction of Microscratch using Filter in oxide chemical Mechanical Polishing(CMP) Process (Oxide CMP 공정에서 Slurry Filter을 사용한 Microscratch 감소에 관한 연구)

  • Kim, Sang-Yong;Seo, Yong-Jin;Kim, Tae-Hyung;Lee, Woo-Sun;Chung, Hun-Sang;Kim, Chang-Il;Chang, Eui-Goo
    • Proceedings of the KIEE Conference
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    • 1999.07d
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    • pp.1888-1890
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    • 1999
  • In this work, we have systematically studied the effects of filtration and the defect trend as a function of polished wafer count using various filters in Inter-Metal Dielectric(IMD) CMP. The filter Installation in CMP polisher makes defect reduced after IMD CMP. As a result of formation micro-scratches, it shows that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. We have acknowledged slurry filter lifetime is fixed by the degree of generating defects.

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The Evaluation of Surface Crack in Paramagnetic Material by FEF Technique (FEF 탐상법을 이용한 상자성체 표면결함 평가)

  • Kim, Hoon
    • Journal of the Korean Society for Nondestructive Testing
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    • v.24 no.5
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    • pp.532-537
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    • 2004
  • FEF(Focused Electromagnetic Field) technique was newly developed that is based on the induction principle exciting electromagnetic field. The technique consists of an induction wire and a sensor for detecting electromagnetic field, and is applied in a non-contact mode. In this study, the technique was applied to the evaluation of EDM slits in some conductive materials - aluminum alloy, stainless steel and Inconel alloy. The voltage in the non-defect region is depended upon the measurement lift-off. The voltage signals on defects are measured with peak values, and the peak values changed with the depth of defects. The voltage distributions for all conductive materials are the same trend.

Epigenetic Field for Cancerization

  • Ushijima, Toshikazu
    • BMB Reports
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    • v.40 no.2
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    • pp.142-150
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    • 2007
  • Epigenetic alterations, represented by aberrant DNA methylation, are deeply involved in human cancers. In gastric cancers, tumor-suppressor genes are inactivated more frequently by promoter methylation than by mutations. We recently showed that H. pylori infection, a potent gastric carcinogenic factor, induces methylation of specific genes in the gastric mucosae. When the methylation levels were analyzed in the gastric mucosae of healthy volunteers, cases with a single gastric cancer, and cases with multiple gastric cancers, who have increasing levels of risks for gastric cancers, there was a significant increasing trend in the methylation levels among the individuals without current H. pylori infection. This finding unequivocally showed the presence of an epigenetic field for cancerization. The degree of the field defect was measured more conveniently using methylation levels of marker genes than using those of tumor-suppressor genes. The presence of an epigenetic field for cancerization has been indicated for liver, colon, Barrett's esophageal, lung, breast, and renal cancers. Since decreased transcription is involved in the specificity of methylated genes, it is likely that specific genes are methylated according to carcinogenic factors. These findings emphasize the usefulness of DNA methylation as a marker for past exposure to carcinogens and future risk of cancer development.

Characteristics of Slurry Filter for Reduction of CMP Slurry-induced Micro-scratch (CMP 공정에서 마이크로 스크래치 감소를 위한 슬러리 필터의 특성)

  • 김철복;김상용;서용진
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.7
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    • pp.557-561
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    • 2001
  • Chemical mechanical polishing (CMP) process has been widely used to planarize dielectric layers, which can be applied to the integraded circuits for sub-micron technology. Despite the increased use of CMP process, it is difficult to accomplish the global planarization of in the defect-free inter-level dielectrics (ILD). Especially, defects such as micro-scratch lead to severe circuit failure which affect yield. CMP slurries can contain particles exceeding 1㎛ in size, which could cause micro-scratch on the wafer surface. The large particles in these slurries may be caused by particles agglomeration in slurry supply line. To reduce these defects, slurry filtration method has been recommended in oxide CMP. In this work, we have studied the effects of filtration and the defect trend as a function of polished wafer count using various filters in inter-metal dielectrics(IMD)-CMP process. The filter installation in CMP polisher could reduce defects after IMD-CMP process. As a result of micro-scratch formation, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. We have concluded that slurry filter lifetime is fixed by the degree of generating defects.

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Size and Crystal Structure Dependence of Photochromism of Nanocrystalline WO3 and MoO3 Prepared by Acid-Precipitation Method

  • Jun Young, Kwak;Young Hee, Jung;Yeong Il, Kim
    • Journal of the Korean Chemical Society
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    • v.67 no.1
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    • pp.33-41
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    • 2023
  • Nanocrystallne WO3 and MoO3 with several different sizes and crystal structures were prepared by simple acid precipitation and subsequent heat treatment. The photochromic (PC) properties of these samples were comparatively investigated in powder state by monitoring diffuse reflectance spectral changes after bandgap irradiation. The PC effect of hexagonal WO3 and monoclinic WO3 strongly depended upon crystallite size rather than crystal structure. The smaller the crystallite size, the better the PC effect. However, orthorhombic WO·H2O and MoO3 having hexagonal and orthorhombic structures did not follow this trend. One consistent result for all WO3 and MoO3 samples is that the heat treatment in air, which changes crystallinity, whether it changes the crystal structure or only the crystallite size, reduces the PC effect. Since the thermal treatment reduces the surface oxygen defect sites, we believe that the PC effect of WO3 and MoO3 depends critically on the surface oxygen defect sites that serve as deep trap sites for photogenerated electrons and oxygen radical holes. We also found that the proton insertion claimed by double charge injection model is not critical for the PC effect.

Welding Technical Trend of High Hardness Armour Steel for Combat Vehicle (장갑판재용 고경도 강판의 용접 기술동향)

  • Jeong, Youngcheol;Kim, Chankyu;Lee, Seungjun;Jung, Yongmun;Park, Choulsoo;Lee, Byungsuk;Park, Taewon;Kim, Hongkyu;Cho, Young Tae
    • Journal of the Korea Institute of Military Science and Technology
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    • v.22 no.3
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    • pp.299-310
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    • 2019
  • Increase of combat capability through the lightweighting of vehicles has been internationally issued. One of the methods for lightening is applying high hardness armor(HHA) steel which is outstanding ballistic performance and protection performance compared to weight. Development of HHA steel is currently completed in America, United Kingdom, Australia and Germany. It is used for not only combat vehicle, but also various combat device. Korea is developing new material of HHA steel according to this trend. When such HHA steel is applied to structure, welding process is used for connection of the structure. Cracks from hydrogen embrittlement and cold cracking are easily generated in welds of HHA steel and it greatly affects the strength of all structure. Decrease of strength from welding defect is critical to combat capability. Therefore, welding process optimization is important for performing the role of structure. In this study, international welding technology is reviewed through scientific research paper and patent.

The Study of Nondestructive Test about Impact Damage of Plate Composite Materials (판형 복합재료의 충격 손상에 대한 비파괴시험적 고찰)

  • 나성엽;김재훈;최용규;류백능
    • Journal of the Korean Society of Propulsion Engineers
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    • v.5 no.4
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    • pp.20-30
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    • 2001
  • This study represents the Nondestructive Test about impact damage of composite materials made by different lay-up patterns and degrees. For this study, they were examined by the drop test on composite materials of two type lap-up patterns with fabric and unidirectional prepreg and examined nondestructive test of those. Nondestructive methods were X-ray test with $ZnI_2$ penetrant and Ultrasonic C-scan. The defect detectability of X-ray and Ultrasonic test was compared according to defect species. And the amounts of damage on impacted zone wert compared according to impact energy on two type test specimens. At results, Ultrasonic test was more effective to detect delamination and Penetrant X-ray test was more effective to detect matrix crack and fiber fracture. There were some differences in defect shapes and grades according to lay-up patterns and degrees, and the trend appeared that matrix crack, delamination, fiber fracture occured and increasing defects sizes according to increasing impact energy.

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The long-term study on the guided tissue regeneration with poly(${\alpha}-hydroxy\;acid$} membranes in beagle dogs (Poly(alpha-hydroxy acids) 제제 생분해성 차폐막의 치주조직 재생유도능력에 관한 조직학적 장기관찰)

  • Rhyu, In-Chul;Ku, Young;Chung, Chong-Pyoung;Han, Soo-Boo;Choi, Sang-Mook
    • Journal of Periodontal and Implant Science
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    • v.27 no.3
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    • pp.633-645
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    • 1997
  • The recent trend of research and development on guided tissue regeneration focuses on the biodegradable membranes, which eliminate the need for subsequent surgical removal. They have demonstrated significant and equivalent clinical improvements to the ePTFE membranes. This study evaluate guided tissue regeneration wound healing in surgically induced intrabony periodontal defects following surgical treatment with a synthetic biodegradable membranes, made from a copolymer of glycolide and lactide, in 8 beagle dogs. After full thickeness flap reflection, exposed buccal bone of maxillary and mandibular canine and premolar was removed surgically mesiodistally and occlusoapically at $6mm{\times}6mm$ in size for preparation of periodontal defects. In experimental sites a customized barrier was formed and fitted to cover the defect. Flap was replaced slightly coronal to CEJ and sutured. Plaque control program was initiated and maintained until completion of the study. In 4, 8, 16 and 24 weeks after surgery, the animals were sacrificed and then undecalcified specimens were prepared for histologic evaluation. Histologic examination indicated significant periodontal regeneration characterized by new connective tissue attachment, cementum formation and bone formation. These membranes showed good biocompatibility throughout experiodontal period. The barriers had been completely resorbed with no apparent adverse effect on periodontal wound healing at 24 weeks. These results implicated that present synthetic biodegradable membrane facilitated guided tissue regeneration in periodontal defect.

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Enhancing Freeze-Thaw Resilience in Adhered Mortar Tile Modules (떠붙임 모르타르 타일 모듈의 동결융해 저항성 평가)

  • Pyeon, Su-Jeong;Kim, Gyu-Yong;Kim, Moon-Kyu;Choi, Byung-Cheol;Ji, Sung-Jun;Nam, Jeong-Soo
    • Journal of the Korea Institute of Building Construction
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    • v.23 no.3
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    • pp.241-249
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    • 2023
  • The objective of this research was to engineer a tile module that could efficiently curtail the incidence of tile defects during the construction phase. To assess the potential diminution in defect manifestation, we executed experiments centered on surface condition, the variation in mass before and after the freeze-thaw test, and adhesive strength. Our findings demonstrated that thermal contraction and expansion induced a relatively escalated frequency of defects in the underwater setting for the aluminum mesh, while the steel mesh saw a higher defect incidence in the air environment. Additionally, it was noted that the adhesive strength exhibited a trend towards augmentation as the mesh size dwindled. Collectively, these results suggest that the employment of smaller mesh sizes can foster improved adhesive strength, consequently diminishing tile defects. Further exploration and development of the tile module, informed by these insights, can substantially enhance the efficacy of the construction process.

Studying the influences of mono-vacancy defect and strain rate on the unusual tensile behavior of phosphorene NTs

  • Hooman Esfandyari;AliReza Setoodeh;Hamed Farahmand;Hamed Badjian;Greg Wheatley
    • Advances in nano research
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    • v.15 no.1
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    • pp.59-65
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    • 2023
  • In this present article, the mechanical behavior of single-walled black phosphorene nanotubes (SW-αPNTs) is simulated using molecular dynamics (MD). The proposed model is subjected to the axial loading and the effects of morphological parameters, such as the mono-vacancy defect and strain rate on the tensile behavior of the zigzag and armchair SW-αPNTs are studied as a pioneering work. In order to assess the accuracy of the MD simulations, the stress-strain response of the current MD model is successfully verified with the efficient quantum mechanical approach of the density functional theory (DFT). Along with reproducing the DFT results, the accurate MD simulations successfully anticipate a significant variation in the stress-strain curve of the zigzag SW-αPNTs, namely the knick point. Predicting such mechanical behavior of SW-αPNTs may be an important design factor for lithium-ion batteries, supercapacitors, and energy storage devices. The simulations show that the ultimate stress is increased by increasing the diameter of the pristine SW-αPNTs. The trend is identical for the ultimate strain and stress-strain slope as the diameter of the pristine zigzag SW-αPNTs enlarges. The obtained results denote that by increasing the strain rate, the ultimate stress/ultimate strain are respectively increased/declined. The stress-strain slope keeps increasing as the strain rate grows. It is worth noting that the existence of mono-atomic vacancy defects in the (12,0) zigzag and (0,10) armchair SW-αPNT structures leads to a drop in the tensile strength by amounts of 11.1% and 12.5%, respectively. Also, the ultimate strain is considerably altered by mono-atomic vacancy defects.