• Journal of Sensor Science and Technology
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• v.24 no.1
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• pp.10-14
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• 2015

This paper reports the results of a study on the optimization of the etching profile, which is an important factor in deep-reactive-ion etching (DRIE), i.e., dry etching. Dry etching is the key processing step necessary for the development of the Internet of Things (IoT) and various microelectromechanical sensors (MEMS). Large-area etching (open area > 20%) under a high-frequency (HF) condition with nonoptimized processing parameters results in damage to the etched sidewall. Therefore, in this study, optimization was performed under a low-frequency (LF) condition. The HF method, which is typically used for through-silicon via (TSV) technology, applies a high etch rate and cannot be easily adapted to processes sensitive to sidewall damage. The optimal etching profile was determined by controlling various parameters for the DRIE of a large Si wafer area (open area > 20%). The optimal processing condition was derived after establishing the correlations of etch rate, uniformity, and sidewall damage on a 6-in Si wafer to the parameters of coil power, run pressure, platen power for passivation etching, and $SF_6$ gas flow rate. The processing-parameter-dependent results of the experiments performed for optimization of the etching profile in terms of etch rate, uniformity, and sidewall damage in the case of large Si area etching can be summarized as follows. When LF is applied, the platen power, coil power, and $SF_6$ should be low, whereas the run pressure has little effect on the etching performance. Under the optimal LF condition of 380 Hz, the platen power, coil power, and $SF_6$ were set at 115W, 3500W, and 700 sccm, respectively. In addition, the aforementioned standard recipe was applied as follows: run pressure of 4 Pa, $C_4F_8$ content of 400 sccm, and a gas exchange interval of $SF_6/C_4F_8=2s/3s$.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.35 no.10
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• pp.1229-1235
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• 2011

Fatigue tests were conducted on the aluminum alloy, A7075-T6 to determine the most reliable fretting fatigue damage parameter. Specimens with grooves were used, so that either fretting fatigue crack at the pad/specimen interface or plain fatigue crack at the groove could be nucleated, depending on the pad pressure. Both the crack nucleation location and initial crack orientation were examined using optical microscopy, and the results were used to assess the reliability of the various fretting fatigue damage parameters that have been most commonly used in the literature. Finite element analysis was employed to obtain the stress and strain data of the specimen, which were needed to estimate the parameter values and the orientation of the critical plane. It was revealed that both the Fatemi.Socie and McDiarmid parameters, which assume shear-mode fatigue cracking, are the most reliable.

• Korean Journal of Environmental Agriculture
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• v.34 no.3
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• pp.210-216
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• 2015

BACKGROUND: In korea, sweet persimmon(Diospyros kaki) cultivation is front to abiotic stresses such as frost damage at fruit maturing stage. The cold and rapid freezing stresses are most damaging to fruit production which is most actively progressed in late fall. This study was performed to evaluate the validity of chlorophyll fluorescence imaging(CFI) technology to determine the degree of frost damage in sweet persimmon fruits. METHODS AND RESULTS: The sweet persimmon fruits were measured separately for each treatment(15, 30, 60 minutes) at 24 hours after treatment(HAT) rapid freezing. A CFI FluorCam (FC 1000-H, PSI, Czech Republic) was used to measure the fluorescence images of the fruits. In rapid freezing for 15 minutes, photochemical parameters were not changed. However, in rapid freezing for 30 and 60 minutes, photochemical parameters were lowered. Especially, $F_m$, $F_v$, $F_v/F_m$ and ${\Phi}PSII$ values were declined under rapid freezing. CONCLUSION: In our study, it was clearly indicated that the rapid freezing could be a stress in sweet persimmon fruits. The CFI analysis and its related parameters are applicable as a rapid assessing technique for the determination of frost damage.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.32 no.1
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• pp.45-54
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• 2019

The damage detection method using the extended Kalman filter(EKF) technique has been continuously used since EKF can estimation the responses of the damaged building structure and the stiffness of the structure. However, in the use of EKF, the requirement of setting the initial paramters P, Q, and R has caused the divergence and instability of the state vector, and various researches have been conducted to determine theses parameters. In this paper, adaptive extended Kalman filter(AEKF) method is proposed to solve the problem of setting the values of P, Q, and R, which are important parameters determining the convergence performance of the EKF state vector. By using the AEKF method proposed in this study, the P, Q, and R parameters are updated every k steps. The proposed algorithm is applied for the estimation of stiffness and the damage detection of 3-DOF problem. Based of the verification, it can be found that the selection process for the values of P, Q, and R can improve the convergence performance of EKF.

• Journal of the Korean Society for Nondestructive Testing
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• v.21 no.4
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• pp.425-433
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• 2001

A correlation between fatigue damage and acousto-ultrasonic (AU) parameters has been obtained from signals acquired during fatigue loading of the single-lap joints of a carbon-fiber reinforced plastic (CFRP) laminates and A16061 plate. The correlation showed an analogy to those representing the stiffness reduction $(E/E_0)$ of polymer matrix composites by the accumulation of fatigue damage. This has been attributed to the transmission characteristics of acoustic wave energy through bonded joints with delamination-type defects and their influence on the change of spectral content of AU signals. Another correlation between fatigue cycles and the spectral magnitude of acoustic emission (AE) signals has also been found during the final stage of fatigue loading. Both AU and AE can be applied almost in real-time to monitor the evolution of damage during fatigue loading.

• Proceedings of the Materials Research Society of Korea Conference
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• 2002.05a
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• pp.109-109
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• 2002

• Proceedings of the Earthquake Engineering Society of Korea Conference
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• 2003.09a
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• pp.319-325
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• 2003

The fragility curves of seismic retrofitted bridges by steel jacketing of bridge columns and restrainers at expansion joints after the 1994 Northridge earthquake are developed. Fragility curves are represented by lognormal distribution functions with two parameters(fragility parameters consisting of median and log-standard deviation) and developed as a function of peak ground acceleration (PGA). Two parameters in the lognormal distribution are estimated by the maximum likelihood method. The sixty ground acceleration time histories for Los Angeles area developed for FEMA SAC project are used for the dynamic analysis of the bridges and a computer code is developed to calculate hysterestic parameters of bridge columns before and after steel jacketing. The effect of retrofit is expressed in terms of the increase of the median value of the fragility curve for the retrofitted bridge from that of the bridge before retrofit. The comparison of fragility curves of the bridges before and after column retrofit demonstrates that the improvement of the bridges with steel jacketing on the seismic performance is excellent for the damage states defined in this study. The comparison of fragility curves of the bridges before and after restrainers at expansion joints also shows the improvement in the seismic performance of restrained bridges for the severe damage states.

• Clinical and Experimental Reproductive Medicine
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• v.48 no.4
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• pp.316-321
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• 2021

Objective: Amino acids can protect sperm structure in cryopreservation due to their antioxidant properties. Therefore, the present study aimed to investigate the protective effect of L-carnitine (LC) and N-acetyl cysteine (NAC) on motility parameters, plasma membrane integrity (PMI), mitochondrial membrane potential (MMP), DNA damage, and human sperm intracellular reactive oxygen species (ROS) during vitrification. Methods: Twenty normal human sperm samples were examined. Each sample was divided into six equal groups: LC (1 and 10 mM), NAC (5 and 10 mM), and cryopreserved and fresh control groups. Results: The groups treated with LC and NAC showed favorable findings in terms of motility parameters, DNA damage, and MMP. Significantly higher levels of intracellular ROS were observed in all cryopreserved groups than in the fresh group (p≤0.05). The presence of LC and NAC at both concentrations caused an increase in PMI, MMP, and progressive motility parameters, as well as a significant reduction in intracellular ROS compared to the control group (p≤0.05). The concentrations of the amino acids did not show any significant effect. Conclusion: LC and NAC are promising as potential additives in sperm cryopreservation.

• 한국방재학회:학술대회논문집
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• 2007.02a
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• pp.315-318
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• 2007

In order to reduce the amount of damage from natural disasters, we needs prevention meteorological database classified into the cause of disaster, damage elements etc. For this, we have analyzed four data, such as Statistical yearbook of calamities issued by the National Emergency Management Agency and Annual Climatological Report issued by the Korea Meteorological Administration and Recently 10 years for natural disaster damage and Statistics Yearbook from the Ministry of Government Administration and Human affairs. Through the analysis of disaster data, we have selected input variables, such as causes and elements, occurrence frequencies, vulnerable areas of natural disaster, etc. In order to reduce damage from natural disaster, the prevention activities and forecasting based on meteorological parameters and damage datas are required. In addition, it is necessary to process meteorological information for disaster prevention activities. Through these procedure, we have established the foundation of database about natural disasters. This database will be used to assess the natural disasters and build risk model and natural disasters mitigation plan.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.6 s.99
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• pp.697-705
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• 2005

Vibration-based damage identification method using embedded sensitivity functions is discussed. The theory of embedded sensitivity functions is reviewed and applied to identify damage in a three degree-of-freedom system and a metallic panel. Embedded sensitivity functions are algebraic combinations of measured frequency response functions that reflect changes in the response of mechanical systems when mass, damping or stiffness parameters are changed. By comparing the embedded sensitivity functions with finite difference functions using undamaged and damaged frequency response functions, damage is shown to be properly detected, located and quantified in theory and practice assuming that structures of interest are only damaged in one location. Simulated and experimental results indicate that the technique is most effective when changes to frequency response functions are small to avoid distorsions in the estimated perturbations due to variations in the sensitivity functions.