• Journal of the Semiconductor & Display Technology
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• v.22 no.3
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• pp.130-135
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• 2023

Plasma-resistant ceramic (PRC) is a material used to prevent internal damage in plasma processing equipment for semiconductors and displays. The challenge is to suppress particles falling off from damaged surfaces and increase retention time in order to improve productivity and introduce the latest miniaturization process. Here, we confirmed the effect of suppressing plasma deterioration and reducing the etch rate through surface treatment of existing PRC with an initial illumination level of 200 nm. In particular, quartz glass showed a decrease in etch rate of up to 10%. Furthermore, it is believed that micro-scale secondary particles formed on the microstructure of each material grow as crystals during the fluoridation process. This is a factor that can act as a killer defect when dropped, and is an essential consideration when analyzing plasma resistance. The plasma etching suppression effect of the initial illumination is thought to be due to partial over etching at the dihedral angle of the material due to the sputtering of re-emission of Ar+-based cations. This means that plasma damage due to densification can also be interpreted in existing PRC studies. The research results are significant in that they present surface treatment conditions that can be directly applied to existing PRC for mass production and a new perspective to analyze plasma resistance in addition to simple etching rates.

• Corrosion Science and Technology
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• v.23 no.2
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• pp.154-165
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• 2024

Acetic acid and acetonitrile produced in the chemical process of petrochemical plants are used at high temperatures and pressures. They are exposed to harsh corrosive environments. The present investigation aimed to evaluate corrosion characteristics of metals with excellent corrosion resistance by performing immersion and electrochemical experiments with different composition ratios of acetic acid and acetonitrile in a high-temperature and high-pressure environment. Results of immersion experiment revealed that as acetic acid concentration increased, surface damage and corrosion also increased. In immersion experiments under all conditions, super austenitic stainless steel (UNS N08367) had the best corrosion resistance among various metals. The maximum damage depth under the most severe immersion conditions was observed to be 4.19 ㎛, which was approximately 25.25 ㎛ smaller than that of highly damaged stainless steel (UNS S31804). As a result of electrochemical experiments, electrochemical characteristics of various metals presented some differences with different composition ratios of acetic acid and acetonitrile. However, super austenitic stainless steel (UNS N08367) had the best corrosion resistance at a high pressure condition with a high concentration of acetic acid.

• 한국균학회소식:학술대회논문집
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• 2015.05a
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• pp.42-42
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• 2015

Plasmodiophora brassicae, the causal agent of clubroot disease, does the most serious damage to the Brassica crops. The limited control approaches make that the identification of clubroot resistance (CR) is more important for developing CR cultivars of the Brassica crops. So far, 8 CR loci were mapped. However, the variation of P. brassicae leads to the rapid erosion of its resistance. To identify novel CR genes, we employed three mapping population, derived from crosses between Chinese cabbage and turnip inbred lines ($59-1{\times}ECD04$ and $BJN3-1{\times}Siloga$) or between Chinese cabbage inbred lines ($BJN3-1{\times}85-I-II$), to perform QTL analysis. Totally, 8 CR loci were indentified and showed race-specific resistance. Physical mapping of these 8 loci suggested that 4 were located previously mapped position, indicating they might be the same allele or different alleles of the same genes. Other 4 loci were found to be novel. Further, CR near isogenic line carrying each CR locus was developed based on the marker assisted selection. Verification of these CR loci was underway. Identification of these novel CR genes would facilitate to breed broad-spectrum and durable CR cultivars of B. rapa by pyramiding strategies.

• Transactions of Materials Processing
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• v.11 no.1
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• pp.61-68
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• 2002

The thermal shock and thermal fatigue test has been carried out to analyze the thermal characteristics of tool steels for hot forging and the effects of mechanical properties on this study have been investigated. The resistance to thermal shock is first of all a matter of good toughness and ductility. Therefore, a proper hot-work tool steel should be characterized by high fracture strength and high temperature toughness. Based on these results, some critical temperature($T_{fracture}$) at which fracture occur can be measured to characterize the thermal resistance of the materials. During thermal fatigue tests, the thermal fatigue cracks occur because of the repetitive heating and cooling of the die surface and the thermal fatigue damage was evaluated by analyzing different number of cycles to failure. The results showed that the resistance to thermal shock and thermal fatigue were found to be favoured by high hot tensile strength and high hot hardness, and thermal resistance of SKD61 was superior to that of ESC, SKT4 and this was caused by higher mechanical properties of SKD61.

• 한국정보디스플레이학회:학술대회논문집
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• 2004.08a
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• pp.95-97
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• 2004

We studied a low temperature ion doping process for poly-Si Thin Film Transistor (TFT) on plastic substrates. The ion doping process was performed using an ion shower system, and subsequently, excimer laser annealing (ELA) was done for the activation. We have studied the crystallinity of Si surface at each step using UV-reflectance spectroscopy and the sheet resistance using 4-point probe. We found that the temperature has increased during ion shower doping for a-Si film and the activation has not been fulfilled stably because of the thermal damage against the plastic substrate. By trying newly a pulsed ion shower doping, the ion was efficiently incorporated into the a-Si film on plastic substrate. The sheet resistance decreased with the increase of the pulsed doping time, which was corresponded to the incorporated dose. Also we confirmed a relationship between the crystallinity and the sheet resistance. A sheet resistance of 300 ${\Omega}$/sq for the Si film of 50nm thickness was obtained with a good reproducibility. The ion shower technique is a promising doping technique for ultra low temperature poly-Si TFTs on plastic substrates as well as those on glass substrates.

• Fire Science and Engineering
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• v.29 no.5
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• pp.23-28
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• 2015

Recently, structural materials have been developed to have high performance, and SM 520 has been developed and used for high-rise buildings. However, fires frequently occur in buildings, and the number of victims and amount of damage increase year by year. However, the evaluation of fire resistance performance for structural beams made of SM 520 is done with specimens made of ordinary structural steels with boundary conditions of a fixed beam, and the results are allowed for use in steel-framed buildings. This study analyzed the fire resistance performance of statistically indeterminate beams built with SM 520. The analysis used a fire engineering technique that includes mechanical and thermal data of SM 520 and heat transfer theory, and heat stress analysis was also conducted. The results from the analysis were compared with those from a statistically determinate beam made of ordinary structural steels.

• Journal of Mechanical Science and Technology
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• v.16 no.9
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• pp.1093-1101
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• 2002

Continuous fiber ceramic composites (CFCCs) have advantages over monolithic ceramics : Silicon Nitride composites are not well used for application because of their low fracture toughness and fracture strength, but CFCCs exhibit increased toughness for damage tolerance, and relatively high stiffness in spite of low specific weight. Thus it is important to characterize the fracture resistance and properties of new CFCCs materials. Tensile and flexural tests were carried out for mechanical properties and the fracture resistance behavior of a SCS6 fiber reinforced Si$_3$N$_4$ matrix CFCC was evaluated. The results indicated that CFCC composite exhibit a rising R curve behavior in flexural test. The fracture toughness was about 4.8 MPa$.$m$\^$1/2 , which resulted in a higher value of the fracture toughness because of fiber bridging. Mechanical properties as like the elastic modulus, proportional limit and the ultimate strength in a flexural test are greater than those in a tensile test. Also a numerical modeling of failure process was accomplished for a flexural test. This numerical results provided a good simulation of the cumulative fracture process of the fiber and matrix in CFCCs.

• International Journal of Naval Architecture and Ocean Engineering
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• v.8 no.6
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• pp.563-576
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• 2016

The flight deck of an aircraft carrier is relatively vulnerable compared to its hull, as the damage of some subsystems on the flight deck may cause the carrier losing its operational capability. Therefore, this work aims to represent a simulative method for evaluating the resistance of the flight deck's operational capability in the condition that the aircraft carrier is together with its strike group and the enemy uses the anti-ship missiles with the cluster warheads to attack. In the simulations, the susceptibility of the carrier and the vulnerability of the aircraft guarantee resources are gained. Then, with the help of the closed queuing network, the residual sortie generation rate can be solved, which reflects the flight deck's residual operational capability. The results have proven that the flight deck is of strong resistance to these attacks while it is very sensitive to the loss of some key aircraft guarantee resources.

• Journal of the Korean Society of Tobacco Science
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• v.19 no.2
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• pp.83-91
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• 1997

The vein-necrosis strain or potato virus Y (PVY-Vff) and black shank (Phytophlhora parasitica roar. nicotianae) causes severe damage on burley tobacco(Wicotiana tabacum L.) in Korea, A new burley tobacco resistance to PVY and black shank, KB 110, was developed by Korea Ginseng and Tobacco Research Institute. It was developed from the cross of Burley 21 with TC 591 in 1990, and was backrossed to Burley 21 in the following season. TC 591 has resistance to PVY and moderate resistance to race 0 of black shank, but it is susceptible to tobacco mosaic vim (TMV). KB 110 was evaluated for its resistance to PVY, TMV and black shank in the greenhouse and at fields for preliminary and performance trials. KB 110 which has secreting glandular trichomes was resistant to PVY-VN, TW and black shank. It had an erect growth habit and two more leaves per plant than that of Burley 21, and matures two to three days later. It yielded approximately 3 percent more cured leaf than the standard cultivar Burley 21, but other plant characteristics were very similar to those of Burley 21. It had acceptable standards for chemical and physical characteristics of lured leaf on regional farm test in 1995-1997. KB 110 produced average yields of good quality tobaccos and was appeared to be resistant to PVY inwhere occurrence of the virus are severe chronic at burley growing area.

• Proceedings of the Korean Institute of Building Construction Conference
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• 2014.05a
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• pp.102-103
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• 2014

Due to the nature of the existing load, the criteria of assessing the intensity of the lightweight wall's impact resistance has been though of as obscure. The current study, therefore, focuses on the standardized assessment of the impact resistance to the force of the large soft body applying to the lightweight wall. The gypsum board wall showed a low level of the maximum residual displacement. It is, however, required to be careful about the selection of the finishing process since the high level of the maximum displacement is likely to cause harm to finishing materials. Unlike the gypsum board, the ALC block wall displayed a considerable rigidity while showing almost no maximum residual displacement. Even with the low level of the maximum displacement due to the stiffness, the ALC block wall is still likely to be affected by the vibration derived from any impact on the surface, which demands a need for additional study. The future experimental study, accordingly, will focus on the impact of the vibration on finishing materials, consequently leading to the accurate prediction of the possibility of potential damage to the lightweight wall caused by the large soft body.