• Title/Summary/Keyword: DLC layer

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Effect of Diamond-Like Carbon Passivation on Physical and Electrical Properties of Plasma Polymer (플라즈마 폴리머의 물리적, 전기적 특성에서 다이아몬드상 탄소 패시베시션이 미치는 영향)

  • Park, Y.S.;Cho, S.J.;Boo, J.H.
    • Journal of the Korean Vacuum Society
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    • v.21 no.4
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    • pp.193-198
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    • 2012
  • In this study, we have fabricated the polymer insulator and diamond-like carbon (DLC) thin films by using plasma enhanced chemical vapor deposition methods. we fabricated the DLC films with various thicknesses as the passivation layer on plasma polymer and investigated the structural, physical, and electrical properties of DLC/plasma polymer films. The plasma polymer synthesized in this work had the low leakage current and low dielectric constant. The values of hardness and elastic modulus in DLC/plasma polymer films are increased, and the value of rms surface roughness is decreased, and contact angle value is increased with increasing DLC film thickness. In the electrical properties of DLC/plasma polymer, the value of the dielectric constant is increased, however the leakage current property of the DLC/plasma polymer is improved than that of plasma polymer film with increasing DLC film thickness.

Optical Properties of DLC-coated ZnS Substrates in the Mid-infrared Region (중적외선 영역의 DLC 코팅된 ZnS 기판의 광학 특성)

  • Kwon, Tae-Hyeong;Yeo, Seo-Yeong;Kim, Chang-Il;Nahm, Sahn;Kwon, Min-Chul;Chu, Byoung-Uck;Paik, Jong-Hoo
    • Journal of Sensor Science and Technology
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    • v.28 no.2
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    • pp.101-105
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    • 2019
  • ZnS substrates with excellent transmittance in the mid-infrared region ($3-5{\mu}m$) were prepared using hot pressing instead of conventional chemical vapor deposition (CVD). Diamond-like carbon(DLC) was coated on either one or both sides of the ZnS substrates to improve their mechanical properties and transmittance. More specifically DLC was coated using CVD with an Ar and $C_2H_2$ mixed gas, and Ge was used as the bonding layer. During CVD, the bias voltage was fixed to 500 V and analyzed by Fourier transform infrared spectroscopy (FT-IR), nanoindenter, scanning electron microscope and energy dispersive spectrometry. Results of hardness analysis using the nanoindenter, showed that DLC coating increased from 5.9 to 17.7 GPa after deposition. The FT-IR spectroscopy results showed that, in the mid-infrared region ($3-5{\mu}m$), the average transmittance of the samples with DLC coating on one and both sides increased by approximately 6% and approximately 11.2% respectively. In conclusion, the DLC coating improved the durability and transmittance of the ZnS substrates.

Effects of plasma Immersion ion Implanted and deposited layer on Adhesion Strength of DLC film

  • Yi Jin-Woo;Kim Jong-KuK;Kim Seock-Sam
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2004.11a
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    • pp.301-305
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    • 2004
  • Effects of ion implantation on the adhesion strength of DLC film as a function of ion doses and implanted energies were investigated. Ti ions were implanted on the Si-wafer substrates followed by DLC coating using ion beam deposition method. Adhesion strength of DLC films were determined by scratch adhesion tester. Morphologies and compositional variations at the different ion energies and doses were observer by Laser Microscope and Auger Electron Spectroscopy, respectively. From results of scratch test, the adhesion strength of films was improved as increasing ion implanted energy, however there was no significant evidence with ion dose.

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Alignment property change in DLC alignment layer containing various hydrogen concentration

  • Kim, Jong-Bok;Kim, Kyung-Chan;Ahn, Han-Jin;Hwang, Byung-Har;Baik, Hong-Koo
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07a
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    • pp.378-380
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    • 2005
  • Diamond like carbon (DLC) films are known that they show homogeneous alignment property when they are irradiated by Ar ion beam. The DLC films in most of studies were deposited by CVD and contain large mount of hydrogen. In order to identity the hydrogen effect on alignment property, DLC films is deposited by RF magnetron sputter using various ratio of Ar and H2 as reactive gas. DLC films are characterized by FT-IR, Raman and contact angle. Alignment property is estimated by measuring pretilt angle.

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A Study on Liquid Crystal Alignment effects by UV Alignment Method on a Diamond-Like-Carbon Thin Film Surface (Diamond-Like-Carbon 박막표면에 UV 배향법을 이용한 액정 배향 효과에 관한 연구)

  • 황정연;조용민;서대식
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.16 no.3
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    • pp.214-218
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    • 2003
  • We studied the nematic liquid crystal (NLC) aligning capabilities by the UV alignment method on a diamond like carbon (DLC) thin film surface A good LC alignment by UV exposure on the DLC thin film surface at 200${\AA}$ of layer thickness was achieved. Also, a good LC alignment by the UV alignment method on the DLC thin film surface was observed at annealing temperature of 180$^{\circ}C$. However, the alignment defect of the NLC was observed above annealing temperature of 200$^{\circ}C$. Consequently, the good thermal stability of LC alignment by the UV alignment method o the DLC thin film surface can be achieved.

Development of Diamond-like Carbon Film as Passivation Layers for Power Transistors

  • Chang, Hoon;Lee, Hae-Wang;Chung, Suk-Koo;Shin, Jong-Han;Lim, Dae-Soon;Park, Jung-Ho
    • The Korean Journal of Ceramics
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    • v.3 no.2
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    • pp.92-95
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    • 1997
  • Because of the novel characteristics such as chemical stability, hardness, electrical resistivity and thermal conductivity, diamond-like carbon (DLC) film is a suitable material for the passivation layers. For this purpose, using the PECVD, DLC films were synthesized at room temperature. The adhesion and the hardness of the DLC films deposited on Si an SiO2 substrate were measured. The resistivity of 5.3$\times$$10^8$$\Omega$.cm was measured by automatic spreading resistance probe analysis method. The thermal conductivities of different DLC films were measured and compared with that of phospho silicate glass (PSG) film which is commonly used as passivation layers. The thermal conductivity of DLC film was improved by increasing hydrogen flow rate up to 90 sccm and was better than that of PSG film. The patterning techniques of the DLC film developed using the RIE and the lift-off method to form 5$\mu\textrm{m}$ line. Finally, the thermal characteristics of the power transistor with the DLC film as passiviation layer was analyzed.

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Tribological Properties of Carbon Layers Produced by High Temperature Chlorination in Comparison with DLC Coating (DLC 코팅과 비교된 고온 염소처리에 의한 탄소 막의 Tribological 특성)

  • Choi, Hyun-Ju;Bae, Heung-Taek;Na, Byung-Chul;Lee, Jeon-Kook;Lim, Dae-Soon
    • Journal of the Korean Ceramic Society
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    • v.44 no.7
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    • pp.375-380
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    • 2007
  • Tribological properties of carbon layers produced by high temperature chlorination of SiC ceramic and DLC (diamond-like carbon) coatings produced by ion plating method were investigated and compared. Carbon coatings were produced by exposure of ball and disc type SiC in chlorine and hydrogen gas mixtures at $1200^{\circ}C$. After treatment for 10 h, dense carbon films up to $180{\mu}m$ in thickness were formed. Tribological behavior of newly developed carbon films were compared with that of DLC films. Wear resistance and frictional coefficient of the surface modified ball and disc type SiC were significantly improved compared to an untreated SiC specimen, and also the modified carbon layer had better performance than DLC coatings. Therefore, in this study, the newly developed carbon films have several advantages over existing carbon coatings such as DLC coatings and showed superior tribological performances.

Hydrogen Effects on Diamond-like Carbon as the LC alignment Layer of FFS mode

  • You, Jae-Geon;Kim, Sung-Ju;Gwag, Jin-Seog;Lee, Hyun-Kyung;Lee, Dae-Kyu;Ahn, Jun-Yong;Jun, Jung-Mok;Lee, Jung-Yeal
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07a
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    • pp.349-352
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    • 2005
  • In this paper, we have investigated the hydrogen effects on Diamond-like Carbon (DLC) as an LC alignment layer of the FFS mode. By change of a Hydrogen content in the DLC sputtering process, the image sticking and electro-optic characteristics of Black-White panel with DLC / IB technology were examined.

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Analysis of Interfaces and Structures of DLC Films Deposited by FCVA Method (FCVA 방법으로 증착된 DLC 박막의 계면 및 구조분석)

  • Park, Chang-Kyun;Chang, Seok-Mo;Uhm, Hyun-Seok;Seo, Soo-Hyung;Park, Jin-Seok
    • Proceedings of the KIEE Conference
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    • 2001.11a
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    • pp.16-19
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    • 2001
  • DLC films are deposited using a modified FCVA system. Carbon amorphous networks, chemical bonding states, $sp^3$ fraction, interfaces, and structures are studied as a function of substrate voltage ($0{\sim}-250V$). The $sp^3$ content in the films is evaluated by analyzing the XPS spectra(C1s). The structural properties of the surface, bulk, and interfacial layers in DLC/Si systems are quantitatively analyzed by employing XRR method. As the substrate voltage is increased, the $sp^3$ fraction is decreased by means of XPS and Raman spectroscopy. In addition, the structural properties (interfacial layer, contamination layer, and sp3 fraction) derived from XPS depth profile are relatively correlated with the XRR results.

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Wear characteristics of boron nitride thin film for durability improvement of ultra- precision component (초정밀 부품의 내구성 향상을 위한 질화붕소 박막의 마멸 특성에 관한 연구)

  • Ku, Kyoung-Jin;Hwang, Byoung-Har;Lin, Li-Yu;Kim, Dae-Eun;Baik, Hong-Koo
    • Transactions of the Society of Information Storage Systems
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    • v.3 no.3
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    • pp.129-134
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    • 2007
  • Boron nitride (BN) is a highly attractive material for wear resistant applications of mechanical components. BN is super hard and it is the second hardest of all known materials. It also has a high thermal stability, high abrasive wear resistance, and in contrast to diamond, BN does not react with ferrous materials. The motivation of this work is to investigate the tribological properties of BN for potential applications in ultra-precision components for data storage, printing, and other precision devices. In this work, the wear characteristics of BN thin films deposited on DLC or Ti buffer layer with silicon substrate using RF-magnetron sputtering technique were analyzed. Wear tests were conducted by using a pin-on-disk type tester and the wear tracks were measured with a surface profiler. Experimental results showed that wear characteristics were dependent on the sputtering conditions and buffer layer. Particularly, BN coated on DLC layer showed better wear resistant behavior. The range of the wear rates for the BN films tested in this work was about 20 to $100{\mu}m^3$/cycle.

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