• 한국광학회지
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• 제18권5호
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• pp.362-366
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• 2007

본 연구에서는 3 메가픽셀, 2.5배 줌 카메라폰 모듈용 비구면 유리렌즈 개발을 목적으로 실험계획법(DOE)을 적용하여 성형용 초경 코어의 연삭가공조건을 구하고, 이를 활용하여 비구면 Glass렌즈 성형용 초경합금(WC) 코어를 초정밀 연삭가공을 수행하였다. 또한 가공된 성형용 코어의 가공면 위에 이온증착법으로 다이아몬드상 탄소(Diamond-Like Carbon; DLC) 코팅을 수행하여 DLC 코팅이 성형용 코어의 형상정도(PV)와 표면조도(Ra)에 미치는 영향을 평가하였으며, 비구면 Glass렌즈를 동일한 조건에서 성형하여 성형렌즈의 광학적 특성을 비교하여 성형용 코어면의 DLC 코팅 효과에 대하여 검토하였다.

• 마이크로전자및패키징학회지
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• 제7권3호
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• pp.27-29
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• 2000

Lift-off를 이용한 DLC-coated Si-tip FEA 제조에 있어서 gate 절연막의 측면에 DLC가 coating되는 것을 방지하기 위해 기판 상에 Al 희생층을 경사-회전 증착한 뒤 DLC를 coating하고, 다음으로 희생층을 식각하여 tip 이외의 DLC를 제거하는 방법을 제안하였다. 이러한 Al희생층을 이용한 lift-off공정에 의해 제조된 DLC-coated Si-tip FEA의 전류전압 특성과 전류 표동 특성을 조사하였으며, gate 누설 전류의 감소와 방출 전류의 안정성을 확인하였다.

• Tribology and Lubricants
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• 제18권2호
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• pp.138-143
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• 2002

Abstract - Tribofilms formed on won surface protect the DLC coating surface and decrease the fiction coefficient. However it is very difficult to evaluate their micromechanical properties due to their small thickness, inhomogeneity and discontinuity. The phase contrast images in tapping mode atomic farce microscopy allow an estimation of inhomogeneity in micromechanical properties of the sample surface. The purpose of this investigation is to demonstrate how the phase contrast images contribute to the characterization of thin tribofilms.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2001년도 제33회 춘계학술대회 개최
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• pp.299-304
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• 2001

Tribofilms formed on worn surface protect the DLC coating surface and decrease the friction coefficient. However it is very difficult to evaluate their micromechanical properties due to their small thickness, inhomogeneity and discontinuity. The phase contrast images in tapping mode atomic force microscopy allow an estimation of inhomogeneity in micromechanical properties of the sample surface. The purpose of this investigation is to demonstrate how the phase contrast images contribute to the characterization of thin tribofilms.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 하계학술대회 논문집 C
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• pp.1737-1739
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• 2004

Diamond-like carbon (DLC) films were prepared with RF-PECVD (Plasma Enhanced Chemical Vapor Deposition) method on coming glass and silicon substrates using methane ($CH_4$) and hydrogen ($H_2$) gases. We examined the effects of $CH_4$ to $H_2$ ratios on tribological and optical properties of the DLC films. The structure and surface morphology of the films were examined using Raman spectroscopy and atomic force microscopy (AFM). The hardness of the DLC film was measured with nano-indentor. The optical properties of DLC thin film were investigated by UV/VIS spectrometer and ellipsometry. And also, solar cells were fabricated using DLC as antireflection coating before and after coating DLC on silicon substrate and compared the efficiency.

• 한국해양공학회지
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• 제24권6호
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• pp.76-80
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• 2010

Oil hydraulic piston pumps are being extensively used around the world, because of their simple design, light weight, effective cost, etc. An oil hydraulic pump is likely to have the serious problems of high leakage, friction, and low energy efficiency after a long period of use. In an oil hydraulic piston pump, the clearance between the valve block and piston plays an important role for volumetric and overall efficiency. In this study, the wear property of the SACM645 material with DLC coating used for a hydraulic piston pump was determined by experimentation with variable heat treatment. To investigate the effect according to the piston surface condition, five different types of specimens were prepared. The maximum tensile strengths of the QT and QT Nitration specimens had similar values of about 800 MPa, but the strains indicated a big difference. In a wear test, the wear characteristic of the DLC coating specimen was shown to be excellent. The QT, QT + IH, QT + Nitration, and matirx specimen showed similar wear characteristics. In the case of a dry condition without oil, the DLC coating specimen had good wear resistance, with no wear shown.

• 한국정밀공학회지
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• 제26권1호
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• pp.51-56
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• 2009

Recently, with the increasing lightness and miniaturization of high resolution camera phones, the demand for aspheric glass lens has increased because plastic and spherical lens are unable to satisfy the required performance. An aspheric glass lens is fabricated by the high temperature and pressure molding using a tungsten carbide molding core, so precision grinding and coating technology for the molding core surface are required. This study investigates the effect of diamond-like carbon (DLC) and rhenium-iridium (Re-Ir) coating For aspheric molding core surface. The grinding conditions of the tungsten carbide molding core were obtained by design of experiments (DOE) for application in the ultra precision grinding process of the tungsten carbide molding core of the aspheric glass lens used in 5 megapixel, $4{\times}$ zoom camera phone modules. A tungsten carbide molding core was fabricated under this grinding condition and coated with the DLC and Re-Ir coating. By measurements, the effect of DLC and Re-Ir coating on the form accuracy and surface roughness of molding coer was evaluated.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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• pp.175-176
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• 2002

Our study is to search for tribological properties of diamond-like carbon (DLC) films as known as anti- wear hard thin film on various polymers. This report deals with the deposition of DLC films on various polymer substrates in vacuum by magnetron radio frequency (RF) sputtering method with using argon plasma and graphite, titanium target. The properties of friction and wear are measured using a ball-on-disk wear -testing machine. The properties of friction and wear have been remarkably improved by DLC coating. Moreover the composition of DLC films has been analyzed by using auger electron spectroscopy(AES). The wear rate of titanium-containing DLC film is lower than that of no-metal-containing DLC film.

• KSTLE International Journal
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• 제10권1_2호
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• pp.1-5
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• 2009

This paper reports an investigation on nanotribological properties of silicon nanochannels coated by a diamond-like carbon (DLC) film. The nanochannels were fabricated on Si (100) wafers by using photolithography and reactive ion etching (RIE) techniques. The channeled surfaces (Si channels) were then further modified by coating thin DLC film. Water contact angle of the modified and unmodified Si surfaces was examined by an anglemeter using the sessile-drop method. Nanotribological properties, namely friction and adhesion forces, of the Si channels coated with DLC (DLC-coated Si channels) were investigated in comparison with those of the flat Si, DLC-coated flat Si (flat DLC), and Si channels, using an atomic force microscope (AFM). Results showed that the DLC-coated Si channels greatly increased hydrophobicity of silicon surfaces. The DLC coating and Si channels themselves individually reduced adhesion and friction forces of the flat Si. Further, the DLC-coated Si channels exhibited the lowest values of these forces, owing to the combined effect of reduced contact area through the channeling and low surface energy of the DLC. This combined modification could prove a promising method for tribological applications at small scales.

• 동력기계공학회지
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• 제12권3호
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• pp.66-71
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• 2008

Diamond-like-carbon (DLC) coatings could be good candidates as solid lubricants for cutting tools in dry machining of aluminum alloy. In this work, DLC thin films were produced as a friction reduction coating for WC-Co insert tip using the plasma immersion ion beam deposition (PIIED) technique. DLC coatings were also coated on $Al_2O_3$ specimens and high temperature wear tested up to $400^{\circ}C$ in dry air to observe the survivability of the DLC coating in simulated severe cutting conditions using a pin-on-disc tribotester with Hertzian contact stress of 1.3GPa. It showed reduced friction coefficients of minimum 0.02 up to $400^{\circ}C$. And cutting performance of DLC coated WC-Co insert tips to Al 6061 alloy were conducted in a high speed machining center. The main problems of built-up edge formation in aluminum machining are drastically reduced with improved surface roughness. The improvements were mainly related to the low friction coefficient of DLC to Al alloy and the anti-adhesion of Al alloy to WE due to the inertness of DLC.