Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2004.07c
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- Pages.1737-1739
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- 2004
Diamond-like Carbon Protective Anti-reflection Coating for Solar Cell Application
태양전지 응용을 위한 DLC(Diamond-like Carbon) 반사방지막의 특성 분석
- Choi, Won-Seok (School of Information and Communication Engineering, Sungkyunkwan University) ;
- Jeon, Young-Sook (School of Information and Communication Engineering, Sungkyunkwan University) ;
- Kim, Kyung-Hae (School of Information and Communication Engineering, Sungkyunkwan University) ;
- Yi, Jun-Sin (School of Information and Communication Engineering, Sungkyunkwan University) ;
- Heo, Jin-Hee (School of Information and Communication Engineering, Sungkyunkwan University) ;
- Chung, Il-Sub (School of Information and Communication Engineering, Sungkyunkwan University) ;
- Hong, Byung-You (School of Information and Communication Engineering, Sungkyunkwan University)
- 최원석 (성균관대학교 정보통신공학부) ;
- 전영숙 (성균관대학교 정보통신공학부) ;
- 김경해 (성균관대학교 정보통신공학부) ;
- 이준신 (성균관대학교 정보통신공학부) ;
- 허진희 (성균관대학교 정보통신공학부) ;
- 정일섭 (성균관대학교 정보통신공학부) ;
- 홍병유 (성균관대학교 정보통신공학부)
- Published : 2004.07.14
Abstract
Diamond-like carbon (DLC) films were prepared with RF-PECVD (Plasma Enhanced Chemical Vapor Deposition) method on coming glass and silicon substrates using methane (
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