• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2002.10b
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• pp.159-160
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• 2002

To investigate the humidity effect on tribological behaviors of Si-DLC/DLC multi-layers, the samples were prepared using a system consisted of an ion-gun for deposition DLC films and a balanced magnetron sputter for introducing silicon atoms to Si-DLC films. The Si-DLC/DLC multi-layers were composed of pure DLC films and Si-incorporated DLC films alternatively and had different bilayer numbers. Hardness and residual stress were drastically decreased through the formation of Si-DLC/DLC multi-layers compared to those of the pure and Si-incorporated DLC films. Wear results obtained under the various humidity conditions (<10%, $40{\sim}50%$, and >85%) showed that the pure DLC film was largely depended on the humidity while the Si-DLC and the Si-DLC/DLC multi-layers were little affected by the environmental humidity. Although friction coefficients of all samples were increased with the relative humidity, the multi-layer films showed relatively lower friction coefficients that those of the single films.

• KSTLE International Journal
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• v.9 no.1_2
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• pp.31-35
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• 2008

DLC (Diamond Like Carbon) films have predominant tribological properties like a high hardness, low friction and high chemical resistance; therefore, DLC films are applied in a wide range of industrial fields. This paper evaluated the characteristics of DLC films deposited on bearing steel with different hardness by RF-PECVD (Radio Frequency - Plasma Enhanced Chemical Vapor Deposition) method. Si-interlayer was deposited on bearing steel to improve adhesion strength by RF-Sputtering method. The DLC film structures were analyzed with Raman spectra and Gaussian function. Adhesion strength of DLC films was measured with a scratch tester. Friction and wear test were carried out with a ball-on -disc type to investigate the tribological characteristics. Experimental results showed that DLC films deposited on bearing steel under same deposition condition have typical structure DLC films regardless of hardness of bearing steel. Adhesion strength of DLC film is increased with a hardness of bearing steel. Friction coefficient of DLC film showed lower at the high hardness of bearing steel.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.6
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• pp.212-216
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• 2007

Although DLC coatings have good tribological properties, these are dependent on the deposition method, property of contact surface, and test condition. Si-DLC/DLC coatings with various Si content were deposited on Si substrates and tested using a reciprocating friction tester against steel balls. The results revealed that the tribological behavior of Si-DLC/DLC coatings was dependent on the Si content. The formation of transfer film and wear particles on the contact surface was greatly influenced by the Si content in DLC coatings. In particular, silicon oxide transfer film formed by tribochemical reaction contributed to reduce wear and friction.

• Journal of the Korean institute of surface engineering
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• v.53 no.6
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• pp.306-311
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• 2020

In this work, diamond-like carbon (DLC) films are coated onto plasma nitrided AISI 4140 steel by DC-pulsed PECVD. One problem of DLC films is their very poor adhesion on steel substrates. The purpose of the nitriding was to enhance adhesion between the substrate and the DLC films. The white layer formation is avoided. Plasma nitriding increased adhesion from 8 N for DLC coating to 25 N for duplex coating. Duplex plasma nitriding/DLC coating was proven to be more effective in improving the adhesion. The purpose of the bond layer was to enhance adhesion between the substrate and the DLC films.

• Journal of the Microelectronics and Packaging Society
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• v.7 no.3
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• pp.27-29
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• 2000

For the DLC-coaled Si-tip FEA, the modified lift off-process, by which DLC coated on both gate electrode surface and gate insulator in the gate aperture could be removed, was proposed. In the process, the Al sacrificial layer was deposited on a tilted and rotated substrate by an e-beam evaporation, and DLC film was coated on the substrate by PA-CVD method. Afterward the DLC was perfectly removed except the DLC films coated on emitter tips by etch-out of Al sacrificial layer. Current-voltage curves and current fluctuation of the DLC-coated Si-tip FEA showed that the proposed lift-off process played an important role in decreasing gate leakage current and stabilizing omission current.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.434-434
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• 2011

Electrochemical method have been employed in this work to modify the chemical vapour deposited nitrogen doped hydrogen amorphous diamond-like carbon (N-DLC) film to fabricate nickel and copper nano particle modified N-DLC electrodes. The electrochemical behaviour of the metal nano particle modified N-DLC electrodes have been characterized at the presence of glucose in electrolyte. Meanwhile, the N-DLC film structure and the morphology of metal nano particles on the N-DLC surface have been investigated using micro-Raman spectroscopy, X-ray photoelectron spectroscopy and atomic force microscopy. The nickel nano particle modified N-DLC electrode exhibits a high catalytic activity and low background current, while the advantage of copper modified N-DLC electrode is drawn back by copper oxidizations at anodic potentials. The results show that metal nano particle modification of N-DLC surface could be a promising method for controlling the electrochemical properties of N-DLC electrodes.

• Corrosion Science and Technology
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• v.10 no.2
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• pp.65-70
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• 2011

DLC is considered as the candidate material for application of moving parts in automotive components relatively in high pressure and temperature operating conditions for its high hardness with self lubrication and chemical inertness. The properties of interlayer between the substrate and the DLC film were studied. Arc ion plating method have been employed to deposit onto substrate and sputtering method was used for synthesizing DLC onto interlayer. Among these six types of interlayer, deposited DLC film onto TiCN showed excellent value for characteristics. From the results of analysis for physical properties of DLC films, it seems that the adhesion forces were more important factors than intrinsic mechanical properties such as hardness, roughness and wear resistance of DLC films. AFM(Atomic Force Microscope) was used for understanding roughness of DLC films. Hardnesses of the coating layers were identified by nano-indentation method and adhesions were checked by scratch method.

• Journal of the Korean institute of surface engineering
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• v.54 no.6
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• pp.357-364
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• 2021

In this study, DLC films deposited by PECVD were evaluated to the properties of super-hydrophobic by CF₄ treatment. The structure of DLC films were confirmed by Raman Spectra whether or not mixed sp³ (like diamond) peak and sp² (like graphite) peak. And the hydrogen contents in the DLC films (F-DLC) were measured by RBS analysis. In addition, DLC films were analyzed by scratch test for adhesion, nano-indentation for hardness and tribo-meter of Ball-on-disc type for friction coefficient. In the result of analysis, DLC films had traditional structure regardless of variation of hardness at constant conditions. Also adhesion of DLC film was increased as higher material hardness. Otherwise, friction coefficient was increased as lower material hardness. The DLC films were treated by CF₄ plasma treatment to enhance the properties of super-hydrophobic. And the DLC films were measured by ESEM(Enviromental Scanning Electron Microscope) for water condensation.

• Journal of Korean Vacuum Science & Technology
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• v.3 no.1
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• pp.49-53
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• 1999

We have studied the field emission characteristics of diamond-like-carbon (DLC) films deposited by a layer-by-layer technique using plasma enhanced chemical vapor deposition, in which the deposition of a thin layer of DLC and a CH4 plasma exposure on its surface were carried out alternatively. The hydrogen-free DLC can be deposited by CH4 plasma exposure for 140 sec on a 5 nm DLC layer. N2 gas-phase doping in the CH4 plasma was also carried out to reduce the work function of the DLC. The optimum [N2]/[CH4] flow rate ratio was found to be 9% for the efficient electron emission, at which the onset-field was 7.2 V/$\mu\textrm{m}$. It was found that the hydrogen-free DLC has a stable electron emitting property.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.177-179
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• 2011

The purpose of this study is to enhance an adhesion between substrate and Diamond-like Carbon (DLC) film. DLC has many outstanding properties such as low friction, high wear resistance and corrosion resistance. However, it is difficult to achieve enough adhesion because of weak bonding between DLC film and the substrate. For improvement adhesion, a layer between DLC film and the substrate was prepared by dual post plasma. DLC film was deposited on nitrided layer by linear ion source. The composed compound layer between substrate and DLC film was investigated by Glow Discharge Spectrometer (GDS) and Scanning Electron Microscope (SEM). The synthesized bonding structure of DLC film was analyzed using a micro raman spectrometer. Mechanical properties were measured by nano-indentation. In order to clarify the mechanism for improvement in adhesive strength, it was observed by scratch test.